Stratus own Qual
Common ResourceID and IsViewerFile Test data and vba
This commit is contained in:
103
.vscode/638811672019538124/1745595622 HGCV2 667776 2025-04-25 08-40-01.txt
vendored
Normal file
103
.vscode/638811672019538124/1745595622 HGCV2 667776 2025-04-25 08-40-01.txt
vendored
Normal file
@ -0,0 +1,103 @@
|
||||
UniqueId HGCV2 46 667776 5159 - - ZONE2 667776 5PT MES 4/25/2025 8:40:01 AM 150.00 1.02 2.130E-002 N PARALLEL -5.00 -20.00 2500 2000.00 6IN5PT 6IN5PT SSMDATA 6_5PT10M.PAT ASTM: F723 - 82 7.599e+013 2.352e+000 2.799e+000 7.634e+013 2.352e+000 2.766e+000 3.342e-001 4.365e+001 4.605e+001 1.713e+001 2.053e+000 2.563e+000 5.632e+001 2.315e+000 2.779e+000 5.607e+001 2.321e+000 2.746e+000 9.000e+001 -1.000e+000 0.000e+000 2.251e+000 2.931e+001 3.713e+001 -1.000e+000 -1.000e+000 0.000e+000 1 7.854E+013 7.882E+013 0.294 17.109 54.482 54.286 90.000 2.193 2 7.447E+013 7.472E+013 0.216 17.428 57.431 57.247 90.000 1.898 3 7.426E+013 7.458E+013 0.250 17.496 57.596 57.352 90.000 2.414 4 7.695E+013 7.733E+013 0.327 16.621 55.595 55.324 90.000 1.493 5 7.571E+013 7.623E+013 0.584 17.015 56.500 56.121 90.000 3.257
|
||||
|
||||
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 | 54 | 55 | 56 | 57 | 58 | 59 | 60 | 61 | 62 | 63 | 64 | 65 | 66 | 67 | 68 | 69 | 70 | 71 | 72 | 73 | 74 | 75 | 76 | 77 | 78 | 79 | 80 | 81 | 82 | 83 | 84 | 85 | 86 | 87 | 88 | 89 | 90 | 91 | 92 | 93 | 94 | 95 | 96 | 97 |
|
||||
|----------|-------|----|--------|------|---|---|-------|--------|---------|----------------------|-----|------|----------|----|----------|----|-----|------|------|--------|--------|---------|--------------|-----------------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|-----------|----------|----------|----------|----------|-----------|-----------|----------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|------|--------|----|-------|
|
||||
| UniqueId | HGCV2 | 46 | 667776 | 5159 | - | - | ZONE2 | 667776 | 5PT MES | 4/25/2025 8:40:01 AM | 150 | 1.02 | 2.13E-02 | N | PARALLEL | -5 | -20 | 2500 | 2000 | 6IN5PT | 6IN5PT | SSMDATA | 6_5PT10M.PAT | ASTM: F723 - 82 | 7.60E+13 | 2.35E+00 | 2.80E+00 | 7.63E+13 | 2.35E+00 | 2.77E+00 | 3.34E-01 | 4.37E+01 | 4.61E+01 | 1.71E+01 | 2.05E+00 | 2.56E+00 | 5.63E+01 | 2.32E+00 | 2.78E+00 | 5.61E+01 | 2.32E+00 | 2.75E+00 | 9.00E+01 | -1.00E+00 | 0.00E+00 | 2.25E+00 | 2.93E+01 | 3.71E+01 | -1.00E+00 | -1.00E+00 | 0.00E+00 | 1 | 7.85E+13 | 7.88E+13 | 0.294 | 17.109 | 54.482 | 54.286 | 90 | 2.193 | 2 | 7.45E+13 | 7.47E+13 | 0.216 | 17.428 | 57.431 | 57.247 | 90 | 1.898 | 3 | 7.43E+13 | 7.46E+13 | 0.25 | 17.496 | 57.596 | 57.352 | 90 | 2.414 | 4 | 7.70E+13 | 7.73E+13 | 0.327 | 16.621 | 55.595 | 55.324 | 90 | 1.493 | 5 | 7.57E+13 | 7.62E+13 | 0.584 | 17.015 | 56.5 | 56.121 | 90 | 3.257 |
|
||||
|
||||
<1>:UniqueId
|
||||
<2>:HGCV2
|
||||
<3>:46
|
||||
<4>:667776
|
||||
<5>:5159
|
||||
<6>:-
|
||||
<7>:-
|
||||
<8>:ZONE2
|
||||
<9>:667776
|
||||
<10>:5PT MES
|
||||
<11>:4/25/2025 8:40:01 AM
|
||||
<12>:150
|
||||
<13>:1.02
|
||||
<14>:0.0213
|
||||
<15>:N
|
||||
<16>:PARALLEL
|
||||
<17>:-5
|
||||
<18>:-20
|
||||
<19>:2500
|
||||
<20>:2000
|
||||
<21>:6IN5PT
|
||||
<22>:6IN5PT
|
||||
<23>:SSMDATA
|
||||
<24>:6_5PT10M.PAT
|
||||
<25>:ASTM: F723 - 82
|
||||
<26>:7.599E+13
|
||||
<27>:2.352
|
||||
<28>:2.799
|
||||
<29>:7.634E+13
|
||||
<30>:2.352
|
||||
<31>:2.766
|
||||
<32>:0.3342
|
||||
<33>:43.65
|
||||
<34>:46.05
|
||||
<35>:17.13
|
||||
<36>:2.053
|
||||
<37>:2.563
|
||||
<38>:56.32
|
||||
<39>:2.315
|
||||
<40>:2.779
|
||||
<41>:56.07
|
||||
<42>:2.321
|
||||
<43>:2.746
|
||||
<44>:90
|
||||
<45>:-1
|
||||
<46>:0
|
||||
<47>:2.251
|
||||
<48>:29.31
|
||||
<49>:37.13
|
||||
<50>:-1
|
||||
<51>:-1
|
||||
<52>:0
|
||||
<53>:1
|
||||
<54>:7.854E+13
|
||||
<55>:7.882E+13
|
||||
<56>:0.294
|
||||
<57>:17.109
|
||||
<58>:54.482
|
||||
<59>:54.286
|
||||
<60>:90
|
||||
<61>:2.193
|
||||
<62>:2
|
||||
<63>:7.447E+13
|
||||
<64>:7.472E+13
|
||||
<65>:0.216
|
||||
<66>:17.428
|
||||
<67>:57.431
|
||||
<68>:57.247
|
||||
<69>:90
|
||||
<70>:1.898
|
||||
<71>:3
|
||||
<72>:7.426E+13
|
||||
<73>:7.458E+13
|
||||
<74>:0.25
|
||||
<75>:17.496
|
||||
<76>:57.596
|
||||
<77>:57.352
|
||||
<78>:90
|
||||
<79>:2.414
|
||||
<80>:4
|
||||
<81>:7.695E+13
|
||||
<82>:7.733E+13
|
||||
<83>:0.327
|
||||
<84>:16.621
|
||||
<85>:55.595
|
||||
<86>:55.324
|
||||
<87>:90
|
||||
<88>:1.493
|
||||
<89>:5
|
||||
<90>:7.571E+13
|
||||
<91>:7.623E+13
|
||||
<92>:0.584
|
||||
<93>:17.015
|
||||
<94>:56.5
|
||||
<95>:56.121
|
||||
<96>:90
|
||||
<97>:3.257
|
||||
119
.vscode/638811672019538124/HGCV2_250425084001000.json
vendored
Normal file
119
.vscode/638811672019538124/HGCV2_250425084001000.json
vendored
Normal file
@ -0,0 +1,119 @@
|
||||
{
|
||||
"SentToMetrology": false,
|
||||
"SentToSPC": false,
|
||||
"Area": "2.130E-002",
|
||||
"Ccomp": "1.02",
|
||||
"CellName": "HGCV2",
|
||||
"CondType": "N",
|
||||
"Date": "4/25/2025 8:40:01 AM",
|
||||
"FlatZMean": "1.713e\u002B001",
|
||||
"FlatZRadialGradient": "2.563e\u002B000",
|
||||
"FlatZStdDev": "2.053e\u002B000",
|
||||
"Folder": "SSMDATA",
|
||||
"GLimit": "2000.00",
|
||||
"GradeMean": "2.251e\u002B000",
|
||||
"GradeRadialGradient": "3.713e\u002B001",
|
||||
"GradeStdDev": "2.931e\u002B001",
|
||||
"Id": -1,
|
||||
"Layer": "-",
|
||||
"Lot": "667776",
|
||||
"Model": "PARALLEL",
|
||||
"NAvgMean": "7.599e\u002B013",
|
||||
"NAvgRadialGradient": "2.799e\u002B000",
|
||||
"NAvgStdDev": "2.352e\u002B000",
|
||||
"NslMean": "7.634e\u002B013",
|
||||
"NslRadialGradient": "2.766e\u002B000",
|
||||
"NslStdDev": "2.352e\u002B000",
|
||||
"Operator": "HGCV2",
|
||||
"PSN": "5159",
|
||||
"Pattern": "6_5PT10M.PAT",
|
||||
"PhaseMean": "9.000e\u002B001",
|
||||
"PhaseRadialGradient": "0.000e\u002B000",
|
||||
"PhaseStdDev": "-1.000e\u002B000",
|
||||
"Plan": "5PT MES",
|
||||
"RDS": "667776",
|
||||
"RampRate": "2500",
|
||||
"Reactor": "46",
|
||||
"RhoAvgMean": "5.632e\u002B001",
|
||||
"RhoAvgRadialGradient": "2.779e\u002B000",
|
||||
"RhoAvgStdDev": "2.315e\u002B000",
|
||||
"RhoMethod": "ASTM: F723 - 82",
|
||||
"RhoslMean": "5.607e\u002B001",
|
||||
"RhoslRadialGradient": "2.746e\u002B000",
|
||||
"RhoslStdDev": "2.321e\u002B000",
|
||||
"RsMean": "-1.000e\u002B000",
|
||||
"RsRadialGradient": "0.000e\u002B000",
|
||||
"RsStdDev": "-1.000e\u002B000",
|
||||
"SetupFile": "6IN5PT",
|
||||
"StartVoltage": "-5.00",
|
||||
"StopVoltage": "-20.00",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"VdMean": "3.342e-001",
|
||||
"VdRadialGradient": "4.605e\u002B001",
|
||||
"VdStdDev": "4.365e\u002B001",
|
||||
"Wafer": "ZONE2",
|
||||
"WaferSize": "150.00",
|
||||
"Zone": "-",
|
||||
"Details": [
|
||||
{
|
||||
"FlatZ": "17.109",
|
||||
"Grade": "2.193",
|
||||
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"NAvg": "7.854E\u002B013",
|
||||
"Nsl": "7.882E\u002B013",
|
||||
"Phase": "90.000",
|
||||
"RhoAvg": "54.482",
|
||||
"Rhosl": "54.286",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-1",
|
||||
"Vd": "0.294"
|
||||
},
|
||||
{
|
||||
"FlatZ": "17.428",
|
||||
"Grade": "1.898",
|
||||
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"NAvg": "7.447E\u002B013",
|
||||
"Nsl": "7.472E\u002B013",
|
||||
"Phase": "90.000",
|
||||
"RhoAvg": "57.431",
|
||||
"Rhosl": "57.247",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-2",
|
||||
"Vd": "0.216"
|
||||
},
|
||||
{
|
||||
"FlatZ": "17.496",
|
||||
"Grade": "2.414",
|
||||
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"NAvg": "7.426E\u002B013",
|
||||
"Nsl": "7.458E\u002B013",
|
||||
"Phase": "90.000",
|
||||
"RhoAvg": "57.596",
|
||||
"Rhosl": "57.352",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-3",
|
||||
"Vd": "0.250"
|
||||
},
|
||||
{
|
||||
"FlatZ": "16.621",
|
||||
"Grade": "1.493",
|
||||
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"NAvg": "7.695E\u002B013",
|
||||
"Nsl": "7.733E\u002B013",
|
||||
"Phase": "90.000",
|
||||
"RhoAvg": "55.595",
|
||||
"Rhosl": "55.324",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-4",
|
||||
"Vd": "0.327"
|
||||
},
|
||||
{
|
||||
"FlatZ": "17.015",
|
||||
"Grade": "3.257",
|
||||
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
|
||||
"NAvg": "7.571E\u002B013",
|
||||
"Nsl": "7.623E\u002B013",
|
||||
"Phase": "90.000",
|
||||
"RhoAvg": "56.500",
|
||||
"Rhosl": "56.121",
|
||||
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-5",
|
||||
"Vd": "0.584"
|
||||
}
|
||||
]
|
||||
}
|
||||
47
.vscode/638811672019538124/HGCV2_250425084001000.pdsf
vendored
Normal file
47
.vscode/638811672019538124/HGCV2_250425084001000.pdsf
vendored
Normal file
@ -0,0 +1,47 @@
|
||||
HEADER_TAG HEADER_VALUE
|
||||
FORMAT 2.00
|
||||
NUMBER_PASSES 0001
|
||||
HEADER_OFFSET H#######T
|
||||
DATA_OFFSET D#######T
|
||||
END_OFFSET E#######T
|
||||
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Area" "Folder" "HeaderUniqueId" "Id" "Layer" "Model" "Pattern" "Phase" "Plan" "RampRate" "RDS" "SetupFile" "StartVoltage" "StopVoltage" "UniqueId" "Wafer" "WaferSize" "Zone" "Ccomp" "CondType" "FlatZ" "FlatZMean" "FlatZRadialGradient" "FlatZStdDev" "GLimit" "Grade" "GradeMean" "GradeRadialGradient" "GradeStdDev" "NAvg" "NAvgMean" "NAvgRadialGradient" "NAvgStdDev" "Nsl" "NslMean" "NslRadialGradient" "NslStdDev" "PhaseMean" "PhaseRadialGradient" "PhaseStdDev" "RhoAvg" "RhoAvgMean" "RhoAvgRadialGradient" "RhoAvgStdDev" "RhoMethod" "Rhosl" "RhoslMean" "RhoslRadialGradient" "RhoslStdDev" "RsMean" "RsRadialGradient" "RsStdDev" "Vd" "VdMean" "VdRadialGradient" "VdStdDev" "Variation" "AreaDeltaFromLastRun" "Nine10mmEdgeMean" "Nine4mmEdgeMean" "NineCriticalPointsAverage" "NineCriticalPointsPhaseAngleAverage" "NineCriticalPointsStdDev" "NineEdgeMeanDelta" "NineMean" "NineResRangePercent" "RhoAvg01" "RhoAvg02" "RhoAvg03" "RhoAvg04" "RhoAvg05" "RhoAvg06" "RhoAvg07" "RhoAvg08" "RhoAvg09"
|
||||
0.00 1 2 23 5 0 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.109 1.713e+001 2.563e+000 2.053e+000 2000.00 2.193 2.251e+000 3.713e+001 2.931e+001 7.854E+013 7.599e+013 2.799e+000 2.352e+000 7.882E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 54.482 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 54.286 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.294 3.342e-001 4.605e+001 4.365e+001 54.482
|
||||
0.00 1 2 23 5 1 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.428 1.713e+001 2.563e+000 2.053e+000 2000.00 1.898 2.251e+000 3.713e+001 2.931e+001 7.447E+013 7.599e+013 2.799e+000 2.352e+000 7.472E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.431 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.247 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.216 3.342e-001 4.605e+001 4.365e+001 57.431
|
||||
0.00 1 2 23 5 2 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.496 1.713e+001 2.563e+000 2.053e+000 2000.00 2.414 2.251e+000 3.713e+001 2.931e+001 7.426E+013 7.599e+013 2.799e+000 2.352e+000 7.458E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.596 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.352 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.250 3.342e-001 4.605e+001 4.365e+001 57.596
|
||||
0.00 1 2 23 5 3 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 16.621 1.713e+001 2.563e+000 2.053e+000 2000.00 1.493 2.251e+000 3.713e+001 2.931e+001 7.695E+013 7.599e+013 2.799e+000 2.352e+000 7.733E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 55.595 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 55.324 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.327 3.342e-001 4.605e+001 4.365e+001 55.595
|
||||
0.00 1 2 23 5 4 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.015 1.713e+001 2.563e+000 2.053e+000 2000.00 3.257 2.251e+000 3.713e+001 2.931e+001 7.571E+013 7.599e+013 2.799e+000 2.352e+000 7.623E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 56.500 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 56.121 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.584 3.342e-001 4.605e+001 4.365e+001 56.500
|
||||
NUM_DATA_ROWS 000000005
|
||||
NUM_DATA_COLUMNS 000000088
|
||||
DELIMITER ;
|
||||
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
|
||||
START_TIME 04/25/2025 08:40:01
|
||||
LOGISTICS_COLUMN A_LOGISTICS
|
||||
LOGISTICS_COLUMN B_LOGISTICS
|
||||
LOGISTICS_1 A_HeaderId=241989;A_SubgroupId=1745595622;A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
|
||||
LOGISTICS_2 B_HeaderId=241989;B_SubgroupId=1745595622;B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
|
||||
EOF
|
||||
HEADER_TAG|HEADER_VALUE
|
||||
FORMAT|2.00
|
||||
NUMBER_PASSES|0001
|
||||
HEADER_OFFSET|000004856
|
||||
DATA_OFFSET|000000128
|
||||
END_OFFSET|000005521
|
||||
|
||||
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Operator|StartVoltage|Wafer|StopVoltage|Lot|RampRate|Plan|GLimit|Date|Time|SetupFile|WaferSize|Folder|Ccomp|Pattern|Area|CondType|RhoMethod|Model|MeanNAvg|MeanNsl|MeanVd|MeanFlatZ|MeanRhoAvg|MeanRhosl|MeanPhase|MeanGrade|MeanRs|StandardDeviationPercentageNAvg|StandardDeviationPercentageNsl|StandardDeviationPercentageVd|StandardDeviationPercentageFlatZ|StandardDeviationPercentageRhoAvg|StandardDeviationPercentageRhosl|StandardDeviationPercentagePhase|StandardDeviationPercentageGrade|StandardDeviationPercentageRs|RadialGradientNAvg|RadialGradientNsl|RadialGradientVd|RadialGradientFlatZ|RadialGradientRhoAvg|RadialGradientRhosl|RadialGradientPhase|RadialGradientGrade|RadialGradientRs|Site|X|Y|NAvg|RhoAvg|Nsl|Rhosl|Vd|Phase|FlatZ|Grade|XLeft|XRight|BottomY|TopY|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Nine10mmEdgeMean|Nine4mmEdgeMean|NineCriticalPointsAverage|NineCriticalPointsPhaseAngleAverage|NineCriticalPointsStdDev|NineEdgeMeanDelta|NineMean|NineResRangePercent|AreaDeltaFromLastRun|Variation|Percentage HgCV 4PP Delta|RhoAvg01|RhoAvg02|RhoAvg03|RhoAvg04|RhoAvg05|RhoAvg06|RhoAvg07|RhoAvg08|RhoAvg09|EventId|
|
||||
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
|
||||
0.00|1|2|5|638811672019538124|HGCV2|0|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|1|0.0|0.0|7.854E+013|54.482|7.882E+013|54.286|0.294|90.000|17.109|2.193|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||54.482|||||||||23
|
||||
0.00|1|2|5|638811672019538124|HGCV2|1|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|2|56.3|32.5|7.447E+013|57.431|7.472E+013|57.247|0.216|90.000|17.428|1.898|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||57.431||||||||23
|
||||
0.00|1|2|5|638811672019538124|HGCV2|2|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|3|-32.5|56.3|7.426E+013|57.596|7.458E+013|57.352|0.250|90.000|17.496|2.414|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||57.596|||||||23
|
||||
0.00|1|2|5|638811672019538124|HGCV2|3|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|4|-56.3|-32.5|7.695E+013|55.595|7.733E+013|55.324|0.327|90.000|16.621|1.493|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||||55.595||||||23
|
||||
0.00|1|2|5|638811672019538124|HGCV2|4|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|5|32.5|-56.3|7.571E+013|56.500|7.623E+013|56.121|0.584|90.000|17.015|3.257|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||||56.500|||||23
|
||||
|
||||
NUM_DATA_ROWS|000000005
|
||||
NUM_DATA_COLUMNS|000000096
|
||||
DELIMITER|;
|
||||
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
|
||||
START_TIME|04/25/2025 08:40:01
|
||||
LOGISTICS_COLUMN|A_LOGISTICS
|
||||
LOGISTICS_COLUMN|B_LOGISTICS
|
||||
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
|
||||
LOGISTICS_2|B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
|
||||
END_HEADER
|
||||
Reference in New Issue
Block a user