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open-insight/.vscode/638811672019538124/HGCV2_250425084001000.pdsf
Mike Phares 88816d9a74 Stratus own Qual 
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Test data and vba
2025-05-27 15:29:14 -07:00

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HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Area" "Folder" "HeaderUniqueId" "Id" "Layer" "Model" "Pattern" "Phase" "Plan" "RampRate" "RDS" "SetupFile" "StartVoltage" "StopVoltage" "UniqueId" "Wafer" "WaferSize" "Zone" "Ccomp" "CondType" "FlatZ" "FlatZMean" "FlatZRadialGradient" "FlatZStdDev" "GLimit" "Grade" "GradeMean" "GradeRadialGradient" "GradeStdDev" "NAvg" "NAvgMean" "NAvgRadialGradient" "NAvgStdDev" "Nsl" "NslMean" "NslRadialGradient" "NslStdDev" "PhaseMean" "PhaseRadialGradient" "PhaseStdDev" "RhoAvg" "RhoAvgMean" "RhoAvgRadialGradient" "RhoAvgStdDev" "RhoMethod" "Rhosl" "RhoslMean" "RhoslRadialGradient" "RhoslStdDev" "RsMean" "RsRadialGradient" "RsStdDev" "Vd" "VdMean" "VdRadialGradient" "VdStdDev" "Variation" "AreaDeltaFromLastRun" "Nine10mmEdgeMean" "Nine4mmEdgeMean" "NineCriticalPointsAverage" "NineCriticalPointsPhaseAngleAverage" "NineCriticalPointsStdDev" "NineEdgeMeanDelta" "NineMean" "NineResRangePercent" "RhoAvg01" "RhoAvg02" "RhoAvg03" "RhoAvg04" "RhoAvg05" "RhoAvg06" "RhoAvg07" "RhoAvg08" "RhoAvg09"
0.00 1 2 23 5 0 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.109 1.713e+001 2.563e+000 2.053e+000 2000.00 2.193 2.251e+000 3.713e+001 2.931e+001 7.854E+013 7.599e+013 2.799e+000 2.352e+000 7.882E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 54.482 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 54.286 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.294 3.342e-001 4.605e+001 4.365e+001 54.482
0.00 1 2 23 5 1 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.428 1.713e+001 2.563e+000 2.053e+000 2000.00 1.898 2.251e+000 3.713e+001 2.931e+001 7.447E+013 7.599e+013 2.799e+000 2.352e+000 7.472E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.431 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.247 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.216 3.342e-001 4.605e+001 4.365e+001 57.431
0.00 1 2 23 5 2 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.496 1.713e+001 2.563e+000 2.053e+000 2000.00 2.414 2.251e+000 3.713e+001 2.931e+001 7.426E+013 7.599e+013 2.799e+000 2.352e+000 7.458E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.596 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.352 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.250 3.342e-001 4.605e+001 4.365e+001 57.596
0.00 1 2 23 5 3 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 16.621 1.713e+001 2.563e+000 2.053e+000 2000.00 1.493 2.251e+000 3.713e+001 2.931e+001 7.695E+013 7.599e+013 2.799e+000 2.352e+000 7.733E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 55.595 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 55.324 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.327 3.342e-001 4.605e+001 4.365e+001 55.595
0.00 1 2 23 5 4 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.015 1.713e+001 2.563e+000 2.053e+000 2000.00 3.257 2.251e+000 3.713e+001 2.931e+001 7.571E+013 7.599e+013 2.799e+000 2.352e+000 7.623E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 56.500 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 56.121 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.584 3.342e-001 4.605e+001 4.365e+001 56.500
NUM_DATA_ROWS 000000005
NUM_DATA_COLUMNS 000000088
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/25/2025 08:40:01
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=241989;A_SubgroupId=1745595622;A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=241989;B_SubgroupId=1745595622;B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000004856
DATA_OFFSET|000000128
END_OFFSET|000005521
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Operator|StartVoltage|Wafer|StopVoltage|Lot|RampRate|Plan|GLimit|Date|Time|SetupFile|WaferSize|Folder|Ccomp|Pattern|Area|CondType|RhoMethod|Model|MeanNAvg|MeanNsl|MeanVd|MeanFlatZ|MeanRhoAvg|MeanRhosl|MeanPhase|MeanGrade|MeanRs|StandardDeviationPercentageNAvg|StandardDeviationPercentageNsl|StandardDeviationPercentageVd|StandardDeviationPercentageFlatZ|StandardDeviationPercentageRhoAvg|StandardDeviationPercentageRhosl|StandardDeviationPercentagePhase|StandardDeviationPercentageGrade|StandardDeviationPercentageRs|RadialGradientNAvg|RadialGradientNsl|RadialGradientVd|RadialGradientFlatZ|RadialGradientRhoAvg|RadialGradientRhosl|RadialGradientPhase|RadialGradientGrade|RadialGradientRs|Site|X|Y|NAvg|RhoAvg|Nsl|Rhosl|Vd|Phase|FlatZ|Grade|XLeft|XRight|BottomY|TopY|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Nine10mmEdgeMean|Nine4mmEdgeMean|NineCriticalPointsAverage|NineCriticalPointsPhaseAngleAverage|NineCriticalPointsStdDev|NineEdgeMeanDelta|NineMean|NineResRangePercent|AreaDeltaFromLastRun|Variation|Percentage HgCV 4PP Delta|RhoAvg01|RhoAvg02|RhoAvg03|RhoAvg04|RhoAvg05|RhoAvg06|RhoAvg07|RhoAvg08|RhoAvg09|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|5|638811672019538124|HGCV2|0|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|1|0.0|0.0|7.854E+013|54.482|7.882E+013|54.286|0.294|90.000|17.109|2.193|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||54.482|||||||||23
0.00|1|2|5|638811672019538124|HGCV2|1|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|2|56.3|32.5|7.447E+013|57.431|7.472E+013|57.247|0.216|90.000|17.428|1.898|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||57.431||||||||23
0.00|1|2|5|638811672019538124|HGCV2|2|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|3|-32.5|56.3|7.426E+013|57.596|7.458E+013|57.352|0.250|90.000|17.496|2.414|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||57.596|||||||23
0.00|1|2|5|638811672019538124|HGCV2|3|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|4|-56.3|-32.5|7.695E+013|55.595|7.733E+013|55.324|0.327|90.000|16.621|1.493|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||||55.595||||||23
0.00|1|2|5|638811672019538124|HGCV2|4|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|5|32.5|-56.3|7.571E+013|56.500|7.623E+013|56.121|0.584|90.000|17.015|3.257|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||||56.500|||||23
NUM_DATA_ROWS|000000005
NUM_DATA_COLUMNS|000000096
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/25/2025 08:40:01
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER
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