119 lines
3.4 KiB
JSON
119 lines
3.4 KiB
JSON
{
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"SentToMetrology": false,
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"SentToSPC": false,
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"Area": "2.130E-002",
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"Ccomp": "1.02",
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"CellName": "HGCV2",
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"CondType": "N",
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"Date": "4/25/2025 8:40:01 AM",
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"FlatZMean": "1.713e\u002B001",
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"FlatZRadialGradient": "2.563e\u002B000",
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"FlatZStdDev": "2.053e\u002B000",
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"Folder": "SSMDATA",
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"GLimit": "2000.00",
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"GradeMean": "2.251e\u002B000",
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"GradeRadialGradient": "3.713e\u002B001",
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"GradeStdDev": "2.931e\u002B001",
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"Id": -1,
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"Layer": "-",
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"Lot": "667776",
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"Model": "PARALLEL",
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"NAvgMean": "7.599e\u002B013",
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"NAvgRadialGradient": "2.799e\u002B000",
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"NAvgStdDev": "2.352e\u002B000",
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"NslMean": "7.634e\u002B013",
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"NslRadialGradient": "2.766e\u002B000",
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"NslStdDev": "2.352e\u002B000",
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"Operator": "HGCV2",
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"PSN": "5159",
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"Pattern": "6_5PT10M.PAT",
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"PhaseMean": "9.000e\u002B001",
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"PhaseRadialGradient": "0.000e\u002B000",
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"PhaseStdDev": "-1.000e\u002B000",
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"Plan": "5PT MES",
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"RDS": "667776",
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"RampRate": "2500",
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"Reactor": "46",
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"RhoAvgMean": "5.632e\u002B001",
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"RhoAvgRadialGradient": "2.779e\u002B000",
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"RhoAvgStdDev": "2.315e\u002B000",
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"RhoMethod": "ASTM: F723 - 82",
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"RhoslMean": "5.607e\u002B001",
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"RhoslRadialGradient": "2.746e\u002B000",
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"RhoslStdDev": "2.321e\u002B000",
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"RsMean": "-1.000e\u002B000",
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"RsRadialGradient": "0.000e\u002B000",
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"RsStdDev": "-1.000e\u002B000",
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"SetupFile": "6IN5PT",
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"StartVoltage": "-5.00",
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"StopVoltage": "-20.00",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"VdMean": "3.342e-001",
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"VdRadialGradient": "4.605e\u002B001",
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"VdStdDev": "4.365e\u002B001",
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"Wafer": "ZONE2",
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"WaferSize": "150.00",
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"Zone": "-",
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"Details": [
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{
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"FlatZ": "17.109",
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"Grade": "2.193",
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"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"NAvg": "7.854E\u002B013",
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"Nsl": "7.882E\u002B013",
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"Phase": "90.000",
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"RhoAvg": "54.482",
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"Rhosl": "54.286",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-1",
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"Vd": "0.294"
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},
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{
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"FlatZ": "17.428",
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"Grade": "1.898",
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"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"NAvg": "7.447E\u002B013",
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"Nsl": "7.472E\u002B013",
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"Phase": "90.000",
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"RhoAvg": "57.431",
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"Rhosl": "57.247",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-2",
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"Vd": "0.216"
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},
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{
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"FlatZ": "17.496",
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"Grade": "2.414",
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"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"NAvg": "7.426E\u002B013",
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"Nsl": "7.458E\u002B013",
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"Phase": "90.000",
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"RhoAvg": "57.596",
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"Rhosl": "57.352",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-3",
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"Vd": "0.250"
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},
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{
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"FlatZ": "16.621",
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"Grade": "1.493",
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"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"NAvg": "7.695E\u002B013",
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"Nsl": "7.733E\u002B013",
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"Phase": "90.000",
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"RhoAvg": "55.595",
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"Rhosl": "55.324",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-4",
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"Vd": "0.327"
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},
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{
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"FlatZ": "17.015",
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"Grade": "3.257",
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"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
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"NAvg": "7.571E\u002B013",
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"Nsl": "7.623E\u002B013",
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"Phase": "90.000",
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"RhoAvg": "56.500",
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"Rhosl": "56.121",
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"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-5",
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"Vd": "0.584"
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}
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]
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} |