59 lines
1.4 KiB
JSON
59 lines
1.4 KiB
JSON
{
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"Id": -1,
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"Batch": "_24_19_41",
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"Cassette": "667283",
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"CellName": "BIORAD5",
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"Date": "4/24/2025 7:44:08 PM",
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"FilePath": "",
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"MeanThickness": "6.971",
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"Operator": "",
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"PSN": "5095",
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"RDS": "667283",
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"Reactor": "32",
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"Recipe": "6in_CENTERPOINT",
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"StdDev": "0.0115",
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"Title": "_24_19_41",
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"UniqueId": "BIORAD5_32-667283-5095_202504241944083711",
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"Details": [
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{
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"HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711",
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"Mean": "6.963",
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"PassFail": "PASS",
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"Position": "1",
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"Recipe": "6in_CENTERPOINT",
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"Slot": "1",
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"StdDev": "0",
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"UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-1",
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"Thickness": "6.963",
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"Wafer": "Wafer 1",
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"Points": [
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{
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"HeaderUniqueId": "HeaderUniqueId",
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"Position": "1",
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"Thickness": "6.963",
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"UniqueId": "UniqueId"
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}
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]
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},
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{
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"HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711",
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"Mean": "6.980",
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"PassFail": "PASS",
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"Position": "25",
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"Recipe": "6in_CENTERPOINT",
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"Slot": "25",
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"StdDev": "0",
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"UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-2",
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"Thickness": "6.980",
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"Wafer": "Wafer 25",
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"Points": [
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{
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"HeaderUniqueId": "HeaderUniqueId",
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"Position": "25",
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"Thickness": "6.980",
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"UniqueId": "UniqueId"
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}
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]
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}
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]
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} |