{ "Id": -1, "Batch": "_24_19_41", "Cassette": "667283", "CellName": "BIORAD5", "Date": "4/24/2025 7:44:08 PM", "FilePath": "", "MeanThickness": "6.971", "Operator": "", "PSN": "5095", "RDS": "667283", "Reactor": "32", "Recipe": "6in_CENTERPOINT", "StdDev": "0.0115", "Title": "_24_19_41", "UniqueId": "BIORAD5_32-667283-5095_202504241944083711", "Details": [ { "HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711", "Mean": "6.963", "PassFail": "PASS", "Position": "1", "Recipe": "6in_CENTERPOINT", "Slot": "1", "StdDev": "0", "UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-1", "Thickness": "6.963", "Wafer": "Wafer 1", "Points": [ { "HeaderUniqueId": "HeaderUniqueId", "Position": "1", "Thickness": "6.963", "UniqueId": "UniqueId" } ] }, { "HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711", "Mean": "6.980", "PassFail": "PASS", "Position": "25", "Recipe": "6in_CENTERPOINT", "Slot": "25", "StdDev": "0", "UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-2", "Thickness": "6.980", "Wafer": "Wafer 25", "Points": [ { "HeaderUniqueId": "HeaderUniqueId", "Position": "25", "Thickness": "6.980", "UniqueId": "UniqueId" } ] } ] }