44 lines
1.3 KiB
Plaintext
44 lines
1.3 KiB
Plaintext
COMPILE INSERT Recipe_Parms_Equ
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* Equates for obj_Recipe return data structure
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EQU RP_DEPOSIT_TIME_MIN$ TO 1
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EQU RP_DEPOSIT_TIME_MAX$ TO 2
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EQU RP_DILUENT_FLOW_MIN$ TO 3
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EQU RP_DILUENT_FLOW_MAX$ TO 4
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EQU RP_DOPANT_FLOW_MIN$ TO 5
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EQU RP_DOPANT_FLOW_MAX$ TO 6
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EQU RP_HCL_FLOW_MIN$ TO 7
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EQU RP_HCL_FLOW_MAX$ TO 8
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EQU RP_BAKE_TIME_MIN$ TO 9
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EQU RP_BAKE_TIME_MAX$ TO 10
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EQU RP_H2_FLOW_MIN$ TO 11
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EQU RP_H2_FLOW_MAX$ TO 12
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EQU RP_TCS_FLOW_MIN$ TO 13
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EQU RP_TCS_FLOW_MAX$ TO 14
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EQU RP_DCS_FLOW_MIN$ TO 15
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EQU RP_DCS_FLOW_MAX$ TO 16
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EQU RP_AUX1_FLOW_MIN$ TO 17
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EQU RP_AUX1_FLOW_MAX$ TO 18
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EQU RP_AUX2_FLOW_MIN$ TO 19
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EQU RP_AUX2_FLOW_MAX$ TO 20
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EQU RP_FOFFSET_MIN$ TO 21
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EQU RP_FOFFSET_MAX$ TO 22
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EQU RP_SOFFSET_MIN$ TO 23
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EQU RP_SOFFSET_MAX$ TO 24
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EQU RP_ROFFSET_MIN$ TO 25
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EQU RP_ROFFSET_MAX$ TO 26
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EQU RP_ETCH1_MIN$ TO 27
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EQU RP_ETCH1_MAX$ TO 28
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EQU RP_ETCH2_MIN$ TO 29
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EQU RP_ETCH2_MAX$ TO 30
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EQU RP_DOPANT$ TO 31
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EQU RP_EPI_DILUENT$ TO 32
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EQU RP_SUSC_ETCH_MIN$ TO 33
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EQU RP_SUSC_ETCH_MAX$ TO 34
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EQU RP_UL_TEMP_MIN$ TO 35
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EQU RP_UL_TEMP_MAX$ TO 36
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EQU RP_ETCH3_MIN$ TO 37
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EQU RP_ETCH3_MAX$ TO 38
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