COMPILE INSERT Recipe_Parms_Equ * Equates for obj_Recipe return data structure EQU RP_DEPOSIT_TIME_MIN$ TO 1 EQU RP_DEPOSIT_TIME_MAX$ TO 2 EQU RP_DILUENT_FLOW_MIN$ TO 3 EQU RP_DILUENT_FLOW_MAX$ TO 4 EQU RP_DOPANT_FLOW_MIN$ TO 5 EQU RP_DOPANT_FLOW_MAX$ TO 6 EQU RP_HCL_FLOW_MIN$ TO 7 EQU RP_HCL_FLOW_MAX$ TO 8 EQU RP_BAKE_TIME_MIN$ TO 9 EQU RP_BAKE_TIME_MAX$ TO 10 EQU RP_H2_FLOW_MIN$ TO 11 EQU RP_H2_FLOW_MAX$ TO 12 EQU RP_TCS_FLOW_MIN$ TO 13 EQU RP_TCS_FLOW_MAX$ TO 14 EQU RP_DCS_FLOW_MIN$ TO 15 EQU RP_DCS_FLOW_MAX$ TO 16 EQU RP_AUX1_FLOW_MIN$ TO 17 EQU RP_AUX1_FLOW_MAX$ TO 18 EQU RP_AUX2_FLOW_MIN$ TO 19 EQU RP_AUX2_FLOW_MAX$ TO 20 EQU RP_FOFFSET_MIN$ TO 21 EQU RP_FOFFSET_MAX$ TO 22 EQU RP_SOFFSET_MIN$ TO 23 EQU RP_SOFFSET_MAX$ TO 24 EQU RP_ROFFSET_MIN$ TO 25 EQU RP_ROFFSET_MAX$ TO 26 EQU RP_ETCH1_MIN$ TO 27 EQU RP_ETCH1_MAX$ TO 28 EQU RP_ETCH2_MIN$ TO 29 EQU RP_ETCH2_MAX$ TO 30 EQU RP_DOPANT$ TO 31 EQU RP_EPI_DILUENT$ TO 32 EQU RP_SUSC_ETCH_MIN$ TO 33 EQU RP_SUSC_ETCH_MAX$ TO 34 EQU RP_UL_TEMP_MIN$ TO 35 EQU RP_UL_TEMP_MAX$ TO 36 EQU RP_ETCH3_MIN$ TO 37 EQU RP_ETCH3_MAX$ TO 38