Stratus own Qual

Common ResourceID and IsViewerFile Test data and vba
2025-05-27 15:29:14 -07:00
parent 18919090d8
commit 88816d9a74
24 changed files with 7961 additions and 787 deletions
--- a/.vscode/638811672019538124/HGCV2_250425084001000.json
+++ b/.vscode/638811672019538124/HGCV2_250425084001000.json
@ -0,0 +1,119 @@
+{
+  "SentToMetrology": false,
+  "SentToSPC": false,
+  "Area": "2.130E-002",
+  "Ccomp": "1.02",
+  "CellName": "HGCV2",
+  "CondType": "N",
+  "Date": "4/25/2025 8:40:01 AM",
+  "FlatZMean": "1.713e\u002B001",
+  "FlatZRadialGradient": "2.563e\u002B000",
+  "FlatZStdDev": "2.053e\u002B000",
+  "Folder": "SSMDATA",
+  "GLimit": "2000.00",
+  "GradeMean": "2.251e\u002B000",
+  "GradeRadialGradient": "3.713e\u002B001",
+  "GradeStdDev": "2.931e\u002B001",
+  "Id": -1,
+  "Layer": "-",
+  "Lot": "667776",
+  "Model": "PARALLEL",
+  "NAvgMean": "7.599e\u002B013",
+  "NAvgRadialGradient": "2.799e\u002B000",
+  "NAvgStdDev": "2.352e\u002B000",
+  "NslMean": "7.634e\u002B013",
+  "NslRadialGradient": "2.766e\u002B000",
+  "NslStdDev": "2.352e\u002B000",
+  "Operator": "HGCV2",
+  "PSN": "5159",
+  "Pattern": "6_5PT10M.PAT",
+  "PhaseMean": "9.000e\u002B001",
+  "PhaseRadialGradient": "0.000e\u002B000",
+  "PhaseStdDev": "-1.000e\u002B000",
+  "Plan": "5PT MES",
+  "RDS": "667776",
+  "RampRate": "2500",
+  "Reactor": "46",
+  "RhoAvgMean": "5.632e\u002B001",
+  "RhoAvgRadialGradient": "2.779e\u002B000",
+  "RhoAvgStdDev": "2.315e\u002B000",
+  "RhoMethod": "ASTM: F723 - 82",
+  "RhoslMean": "5.607e\u002B001",
+  "RhoslRadialGradient": "2.746e\u002B000",
+  "RhoslStdDev": "2.321e\u002B000",
+  "RsMean": "-1.000e\u002B000",
+  "RsRadialGradient": "0.000e\u002B000",
+  "RsStdDev": "-1.000e\u002B000",
+  "SetupFile": "6IN5PT",
+  "StartVoltage": "-5.00",
+  "StopVoltage": "-20.00",
+  "UniqueId": "HGCV2_46-667776-5159_202504250840019538",
+  "VdMean": "3.342e-001",
+  "VdRadialGradient": "4.605e\u002B001",
+  "VdStdDev": "4.365e\u002B001",
+  "Wafer": "ZONE2",
+  "WaferSize": "150.00",
+  "Zone": "-",
+  "Details": [
+    {
+      "FlatZ": "17.109",
+      "Grade": "2.193",
+      "HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
+      "NAvg": "7.854E\u002B013",
+      "Nsl": "7.882E\u002B013",
+      "Phase": "90.000",
+      "RhoAvg": "54.482",
+      "Rhosl": "54.286",
+      "UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-1",
+      "Vd": "0.294"
+    },
+    {
+      "FlatZ": "17.428",
+      "Grade": "1.898",
+      "HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
+      "NAvg": "7.447E\u002B013",
+      "Nsl": "7.472E\u002B013",
+      "Phase": "90.000",
+      "RhoAvg": "57.431",
+      "Rhosl": "57.247",
+      "UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-2",
+      "Vd": "0.216"
+    },
+    {
+      "FlatZ": "17.496",
+      "Grade": "2.414",
+      "HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
+      "NAvg": "7.426E\u002B013",
+      "Nsl": "7.458E\u002B013",
+      "Phase": "90.000",
+      "RhoAvg": "57.596",
+      "Rhosl": "57.352",
+      "UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-3",
+      "Vd": "0.250"
+    },
+    {
+      "FlatZ": "16.621",
+      "Grade": "1.493",
+      "HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
+      "NAvg": "7.695E\u002B013",
+      "Nsl": "7.733E\u002B013",
+      "Phase": "90.000",
+      "RhoAvg": "55.595",
+      "Rhosl": "55.324",
+      "UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-4",
+      "Vd": "0.327"
+    },
+    {
+      "FlatZ": "17.015",
+      "Grade": "3.257",
+      "HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
+      "NAvg": "7.571E\u002B013",
+      "Nsl": "7.623E\u002B013",
+      "Phase": "90.000",
+      "RhoAvg": "56.500",
+      "Rhosl": "56.121",
+      "UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-5",
+      "Vd": "0.584"
+    }
+  ]
+}