Stratus own Qual

Common ResourceID and IsViewerFile

Test data and vba
This commit is contained in:
2025-05-27 15:29:14 -07:00
parent 18919090d8
commit 88816d9a74
24 changed files with 7961 additions and 787 deletions

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UniqueId 666765 4/24/2025 5:14:32 PM Lot LSL8IN \ 10PT_5mm 57 666765 4626 1 - CDE5 Operator Engineer DLRatio 18.55 AutoOptimizeGain AutoProbeHeightSet 3.00 915.190 0.0069647 SemiRadial 1 95.00 270.000 913.9620971680 1.3236315 2 71.00 270.000 923.2605590820 1.2676778 3 47.00 270.000 921.4100952148 1.3205365 4 23.00 270.000 913.6674194336 1.2704575 5 0.00 0.000 908.1397705078 1.3234487 6 11.00 90.000 908.0071411133 1.2582344 7 35.00 90.000 916.3591918945 1.5512319 8 59.00 90.000 920.1303100586 1.7320848 9 83.00 90.000 921.3920288086 1.6781629 10 95.00 90.000 905.5722656250 1.7448909
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 | 54 | 55 | 56 | 57 | 58 | 59 | 60 | 61 | 62 | 63 | 64 | 65 | 66 | 67 | 68 | 69 | 70 | 71 | 72 |
|----------|--------|----------------------|-----|-------------------|----|--------|------|---|----|------|----------|----------|---------|-------|------------------|--------------------|------|----|---------|-----------|------------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|------|-------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|
| UniqueId | 666765 | 4/24/2025 5:14:32 PM | Lot | LSL8IN \ 10PT_5mm | 57 | 666765 | 4626 | 1 | - | CDE5 | Operator | Engineer | DLRatio | 18.55 | AutoOptimizeGain | AutoProbeHeightSet | 3.00 | | 915.190 | 0.0069647 | SemiRadial | 1 | 95.00 | 270.000 | 913.9620971680 | 1.3236315 | 2 | 71.00 | 270.000 | 923.2605590820 | 1.2676778 | 3 | 47.00 | 270.000 | 921.4100952148 | 1.3205365 | 4 | 23.00 | 270.000 | 913.6674194336 | 1.2704575 | 5 | 0.00 | 0.000 | 908.1397705078 | 1.3234487 | 6 | 11.00 | 90.000 | 908.0071411133 | 1.2582344 | 7 | 35.00 | 90.000 | 916.3591918945 | 1.5512319 | 8 | 59.00 | 90.000 | 920.1303100586 | 1.7320848 | 9 | 83.00 | 90.000 | 921.3920288086 | 1.6781629 | 10 | 95.00 | 90.000 | 905.5722656250 | 1.7448909 |
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{
"SentToMetrology": false,
"SentToSPC": false,
"AutoOptimizeGain": "AutoOptimizeGain",
"AutoProbeHeightSet": "AutoProbeHeightSet",
"Avg": "915.190",
"CellName": "CDE5",
"DLRatio": "DLRatio",
"DataReject": "3.00",
"Date": "4/24/2025 5:14:32 PM",
"Engineer": "Engineer",
"EquipId": "CDE5",
"FileName": "",
"FilePath": "",
"Id": -1,
"Layer": "1",
"LotId": "Lot",
"Op": "Operator",
"PSN": "4626",
"RDS": "666765",
"Reactor": "57",
"Recipe": "LSL8IN \\ 10PT_5mm",
"ResistivitySpec": "ResistivitySpec",
"Run": "666765",
"SemiRadial": "SemiRadial",
"StDev": "0.0069647",
"Temp": "18.55",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Zone": "-",
"Details": [
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3236315",
"Pt": "1",
"R": "95.00",
"Rs": "913.9620971680",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-1"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2676778",
"Pt": "2",
"R": "71.00",
"Rs": "923.2605590820",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-2"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3205365",
"Pt": "3",
"R": "47.00",
"Rs": "921.4100952148",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-3"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2704575",
"Pt": "4",
"R": "23.00",
"Rs": "913.6674194336",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-4"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3234487",
"Pt": "5",
"R": "0.00",
"Rs": "908.1397705078",
"T": "0.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-5"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2582344",
"Pt": "6",
"R": "11.00",
"Rs": "908.0071411133",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-6"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.5512319",
"Pt": "7",
"R": "35.00",
"Rs": "916.3591918945",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-7"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.7320848",
"Pt": "8",
"R": "59.00",
"Rs": "920.1303100586",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-8"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.6781629",
"Pt": "9",
"R": "83.00",
"Rs": "921.3920288086",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-9"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.7448909",
"Pt": "10",
"R": "95.00",
"Rs": "905.5722656250",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-10"
}
]
}

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HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "AutoOptimizeGain" "AutoProbeHeightSet" "Avg" "DataReject" "DLRatio" "Merit" "Pt" "R" "ResistivitySpec" "Rs" "SemiRadial" "StdDev" "T" "Temp" "Engineer" "EquipId" "FileName" "HeaderUniqueId" "Id" "Layer" "RDS" "Run" "UniqueId" "Zone" "SheetRhoVariation"
0.00 1 2 24 10 0 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3236315 1 95.00 ResistivitySpec 913.9620971680 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 1 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2676778 2 71.00 ResistivitySpec 923.2605590820 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 2 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3205365 3 47.00 ResistivitySpec 921.4100952148 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 3 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2704575 4 23.00 ResistivitySpec 913.6674194336 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 4 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3234487 5 0.00 ResistivitySpec 908.1397705078 SemiRadial 0.0069647 0.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 5 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2582344 6 11.00 ResistivitySpec 908.0071411133 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 6 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.5512319 7 35.00 ResistivitySpec 916.3591918945 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 7 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7320848 8 59.00 ResistivitySpec 920.1303100586 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 8 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.6781629 9 83.00 ResistivitySpec 921.3920288086 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 9 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7448909 10 95.00 ResistivitySpec 905.5722656250 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
NUM_DATA_ROWS 000000010
NUM_DATA_COLUMNS 000000038
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 17:14:32
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=309148;A_SubgroupId=1745540084;A_BASIC_TYPE=;A_INFO=5424R116.RsM.csv;A_INFO2=10;A_JOBID=CDE5;A_MES_ENTITY=CDE5;A_MID=57-666765-4626.1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811116720000000;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=309148;B_SubgroupId=1745540084;B_BASIC_TYPE=-;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666765;B_NULL_DATA=;B_PPID=10PT_5mm;B_PROCESS_JOBID=57;B_PRODUCT=4626;B_SEQUENCE=638811116720000000;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000007317
DATA_OFFSET|000000128
END_OFFSET|000007957
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Title|TheFileName|Project|RecipeName|LotID|WfrID|Is_TF_DataFile|Directory|Time|Date|Temp|TCRPercent|NOrP|Avg|Dev|Min|Max|Operator|Equipment|Engineer|AreaOrDiamScan|WaferShape|BNBand|TemplateFile|XSize|YSize|CalibrationFactor|MsmtMode|DataType|DataUnit|NumProbePoints|SingleOrDualProbeConfig|NumberActPrbPts|Rsens|IdrvMx|VinGain|DataRejectSigma|MeritThreshold|PrbChgNumber|PrbName|WaferSize|EdgeEx|Xll|Yll|Xur|Yur|X|Y|CutCorners|DiamThScan|DiamStart|DiamEnd|DiamStep|FlatOrNotch|FollowMajorFlat|AutoOrManualLoad|RangeOrIndividual|PauseAfterEveryRun|AutoPrint|Plot|BulkSampleThk|Unit|RangeFrom|RangeTo|CassetteSlotSelected|R|Th|Data|Rs|RsA|RsB|NumberSample|PointX|PointY|Irng|Vrng|ChiSq|MeritGOF|DataIntegrity|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|InferredPoint|StandardDeviationPercentage|SheetRhoVariation|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
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NUM_DATA_ROWS|000000010
NUM_DATA_COLUMNS|000000097
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 17:14:32
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
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END_HEADER