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open-insight/.vscode/638811116720000000/CDE5_250424171432000.pdsf
Mike Phares 88816d9a74 Stratus own Qual 
Common ResourceID and IsViewerFile

Test data and vba
2025-05-27 15:29:14 -07:00

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HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "AutoOptimizeGain" "AutoProbeHeightSet" "Avg" "DataReject" "DLRatio" "Merit" "Pt" "R" "ResistivitySpec" "Rs" "SemiRadial" "StdDev" "T" "Temp" "Engineer" "EquipId" "FileName" "HeaderUniqueId" "Id" "Layer" "RDS" "Run" "UniqueId" "Zone" "SheetRhoVariation"
0.00 1 2 24 10 0 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3236315 1 95.00 ResistivitySpec 913.9620971680 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 1 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2676778 2 71.00 ResistivitySpec 923.2605590820 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 2 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3205365 3 47.00 ResistivitySpec 921.4100952148 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 3 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2704575 4 23.00 ResistivitySpec 913.6674194336 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 4 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3234487 5 0.00 ResistivitySpec 908.1397705078 SemiRadial 0.0069647 0.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 5 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2582344 6 11.00 ResistivitySpec 908.0071411133 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 6 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.5512319 7 35.00 ResistivitySpec 916.3591918945 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 7 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7320848 8 59.00 ResistivitySpec 920.1303100586 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 8 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.6781629 9 83.00 ResistivitySpec 921.3920288086 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 9 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7448909 10 95.00 ResistivitySpec 905.5722656250 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
NUM_DATA_ROWS 000000010
NUM_DATA_COLUMNS 000000038
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 17:14:32
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=309148;A_SubgroupId=1745540084;A_BASIC_TYPE=;A_INFO=5424R116.RsM.csv;A_INFO2=10;A_JOBID=CDE5;A_MES_ENTITY=CDE5;A_MID=57-666765-4626.1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811116720000000;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=309148;B_SubgroupId=1745540084;B_BASIC_TYPE=-;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666765;B_NULL_DATA=;B_PPID=10PT_5mm;B_PROCESS_JOBID=57;B_PRODUCT=4626;B_SEQUENCE=638811116720000000;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000007317
DATA_OFFSET|000000128
END_OFFSET|000007957
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Title|TheFileName|Project|RecipeName|LotID|WfrID|Is_TF_DataFile|Directory|Time|Date|Temp|TCRPercent|NOrP|Avg|Dev|Min|Max|Operator|Equipment|Engineer|AreaOrDiamScan|WaferShape|BNBand|TemplateFile|XSize|YSize|CalibrationFactor|MsmtMode|DataType|DataUnit|NumProbePoints|SingleOrDualProbeConfig|NumberActPrbPts|Rsens|IdrvMx|VinGain|DataRejectSigma|MeritThreshold|PrbChgNumber|PrbName|WaferSize|EdgeEx|Xll|Yll|Xur|Yur|X|Y|CutCorners|DiamThScan|DiamStart|DiamEnd|DiamStep|FlatOrNotch|FollowMajorFlat|AutoOrManualLoad|RangeOrIndividual|PauseAfterEveryRun|AutoPrint|Plot|BulkSampleThk|Unit|RangeFrom|RangeTo|CassetteSlotSelected|R|Th|Data|Rs|RsA|RsB|NumberSample|PointX|PointY|Irng|Vrng|ChiSq|MeritGOF|DataIntegrity|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|InferredPoint|StandardDeviationPercentage|SheetRhoVariation|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|10|638811116720000000|CDE5|0|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|95.00|270.000|913.9620971680|913.9620971680|914.08798462|731.11854485|1184|-95.00|-0.00|3051|1102|1.4E+02|1.3236315|0|666765|4626|57|1|-||57-666765-4626.1|1|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|1|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|71.00|270.000|923.2605590820|923.2605590820|923.56932267|738.79669064|1184|-71.00|-0.00|3051|1057|1.3E+02|1.2676778|0|666765|4626|57|1|-||57-666765-4626.1|2|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|2|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|47.00|270.000|921.4100952148|921.4100952148|909.70358100|721.40113210|1184|-47.00|-0.00|3054|1046|1.2E+02|1.3205365|0|666765|4626|57|1|-||57-666765-4626.1|3|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|3|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|23.00|270.000|913.6674194336|913.6674194336|896.28473107|707.65557259|1184|-23.00|-0.00|3055|1042|1.2E+02|1.2704575|0|666765|4626|57|1|-||57-666765-4626.1|4|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|4|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|0.00|0.000|908.1397705078|908.1397705078|898.61367587|713.68271830|1184|0.00|0.00|3052|1033|1.0E+02|1.3234487|0|666765|4626|57|1|-||57-666765-4626.1|5|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|5|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|11.00|90.000|908.0071411133|908.0071411133|900.37349147|716.08698414|1184|11.00|0.00|3052|1027|1.2E+02|1.2582344|0|666765|4626|57|1|-||57-666765-4626.1|6|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|6|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|35.00|90.000|916.3591918945|916.3591918945|903.86156023|716.31006062|1184|35.00|0.00|3052|1020|8.3E+01|1.5512319|0|666765|4626|57|1|-||57-666765-4626.1|7|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|7|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|59.00|90.000|920.1303100586|920.1303100586|914.46298514|728.38862138|1184|59.00|0.00|3050|1047|7.1E+01|1.7320848|0|666765|4626|57|1|-||57-666765-4626.1|8|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|8|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|83.00|90.000|921.3920288086|921.3920288086|913.59693033|726.57794711|1184|83.00|0.00|3051|1029|7.6E+01|1.6781629|0|666765|4626|57|1|-||57-666765-4626.1|9|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|9|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|95.00|90.000|905.5722656250|905.5722656250|917.53049853|739.99994302|1184|95.00|0.00|3052|1055|6.7E+01|1.7448909|0|666765|4626|57|1|-||57-666765-4626.1|10|0.0069647||24
NUM_DATA_ROWS|000000010
NUM_DATA_COLUMNS|000000097
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 17:14:32
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=5424R116.RsM.csv;A_INFO2=10;A_JOBID=CDE5;A_MES_ENTITY=CDE5;A_MID=57-666765-4626.1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811116720000000;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=-;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666765;B_NULL_DATA=;B_PPID=10PT_5mm;B_PROCESS_JOBID=57;B_PRODUCT=4626;B_SEQUENCE=638811116720000000;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER
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