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Match TFS Changeset 303331

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This commit is contained in:
Mike Phares
2022-02-01 16:17:10 -07:00
parent b8bc6a8443
commit 9c042d3871
118 changed files with 12361 additions and 13 deletions
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Adaptation/Shared/Metrology/Column.cs Normal file
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using System;
namespace Adaptation.Shared.Metrology
{
public static class ColumnGet
{
public static string GetDiplayName(this Column column)
{
string results;
switch (column)
{
//case Column._8in_Total_Warp_Verification: results = "8in Total Warp Verification"; break;
//case Column.AFM_Monthly_Y: results = "AFM-Monthly Y"; break;
//case Column.AFM_Monthly: results = "AFM_Monthly"; break;
case Column.AFM_Pit_Count: results = "AFM Pit Count"; break;
case Column.AFM_Roughness: results = "AFM Roughness"; break;
//case Column.Adder_Bin_1: results = "Adder Bin 1"; break;
//case Column.Adder_Bin_2: results = "Adder Bin 2"; break;
//case Column.Adder_Bin_3: results = "Adder Bin 3"; break;
//case Column.Adder_Bin_4: results = "Adder Bin 4"; break;
//case Column.Adder_Bin_5: results = "Adder Bin 5"; break;
//case Column.Adder_Bin_6: results = "Adder Bin 6"; break;
//case Column.Adder_Bin_9: results = "Adder Bin 9"; break;
case Column.Al_B_B_WTAVG: results = "Al% B.B. WTAVG"; break;
case Column.Al_B_B_: results = "Al% B.B."; break;
case Column.Al_Barrier_WTAVG: results = "Al% Barrier WTAVG"; break;
case Column.Al_Barrier: results = "Al% Barrier"; break;
case Column.Al_SLS_WTAVG: results = "Al% SLS WTAVG"; break;
case Column.Al_SLS: results = "Al% SLS"; break;
case Column.Al_TL1_WTAVG: results = "Al% TL1 WTAVG"; break;
case Column.Al_TL1: results = "Al% TL1"; break;
case Column.Al_TL2_WTAVG: results = "Al% TL2 WTAVG"; break;
//case Column.BV_Resistance: results = "BV Resistance"; break; //BV Monthly Verification
case Column.BandEdge_V: results = "BandEdge_V"; break;
case Column.BandEdge_V_XY: results = "BandEdge_V_XY"; break;
case Column.BandEdge_nm: results = "BandEdge_nm"; break;
case Column.Barrier_Composition_RPM_XY: results = "Barrier_Composition_RPM_XY"; break;
case Column.Bow_Calibration: results = "Bow Calibration"; break;
case Column.Bow_Range: results = "Bow Range"; break;
case Column.Bow: results = "Bow"; break;
case Column.BowCenter: results = "BowCenter"; break;
case Column.BowX: results = "BowX"; break;
case Column.BowY: results = "BowY"; break;
case Column.Breakdown_Voltage_Edge: results = "Breakdown Voltage - Edge"; break;
case Column.Breakdown_VoltageMiddle: results = "Breakdown Voltage - Middle"; break;
case Column.Breakdown_Voltage: results = "Breakdown Voltage"; break;
case Column.CV_C_at_10V: results = "CV C at -10V"; break;
case Column.CV_Nd_Min: results = "CV Nd Min"; break;
//case Column.Candela_Large_LPD_Quarterly: results = "Candela Large LPD Quarterly"; break;
//case Column.Candela_Medium_LPD_Quarterly: results = "Candela Medium LPD Quarterly"; break;
//case Column.Candela_Small_LPD_Quarterly: results = "Candela Small LPD Quarterly"; break;
//case Column.Candela_Total_Quarterly: results = "Candela Total Quarterly"; break;
case Column.Candela_102_83nm: results = "102-83nm"; break;
case Column.Candela_1_1um: results = "1.1um"; break;
case Column.Candela_496nm: results = "496nm"; break;
case Column.Candela_600nm: results = "600nm"; break;
case Column.Candela_8620_Small: results = "Candela 8620 Small"; break;
case Column.Candela_Crack_Verification: results = "Crack Verification"; break;
case Column.Candela_Cracking: results = "Candela Cracking"; break;
case Column.Candela_Cracking_Acceptable: results = "Candela Cracking Acceptable"; break;
case Column.Candela_Crater: results = "Candela Crater"; break;
case Column.Candela_Crater_Verification: results = "Crater verification"; break;
case Column.Candela_Haze: results = "Candela Haze"; break;
case Column.Candela_LPD_Large: results = "Candela LPD Large"; break;
case Column.Candela_LPD_Medium: results = "Candela LPD Medium"; break;
case Column.Candela_LPD_Small: results = "Candela LPD Small"; break;
case Column.Candela_Large_Verification: results = "Large Verification"; break;
case Column.Candela_Medium_Verification: results = "Medium Verification"; break;
case Column.Candela_Pits: results = "Candela Pits"; break;
case Column.Candela_Pits_Verification: results = "Pits verification"; break;
case Column.Candela_SPE: results = "Candela SPE"; break;
case Column.Candela_SPE_Verification: results = "SPE verification"; break;
case Column.Candela_Slip: results = "Candela Slip"; break;
case Column.Candela_Small_Verification: results = "Small Verification"; break;
case Column.Candela_Spirals: results = "Candela Spirals"; break;
case Column.Candela_Spirals_Verification: results = "Candela Spirals Verification"; break;
case Column.Candela_Total_Defects: results = "Candela Total Defects"; break;
case Column.Candela_Total_PSL: results = "Candela Total PSL"; break;
case Column.Candela__1_1um: results = ">1.1um"; break;
//case Column.Comment: results = "Comment"; break;
//case Column.Conductivity: results = "Conductivity"; break;
case Column.Contact_Symmetry: results = "Contact Symmetry"; break;
//case Column.Cracking_verification: results = "Cracking verification"; break;
//case Column.Crater_verification: results = "Crater verification"; break;
case Column.Date: results = "Date"; break;
case Column.Denton_Crystal_Life: results = "Denton_Crystal_Life"; break;
case Column.Denton_Current_AVG: results = "Denton_Current_AVG"; break;
case Column.Denton_Current_STDEV: results = "Denton_Current_STDEV"; break;
case Column.Denton_Deposition_Power_AVG: results = "Denton_Deposition_Power_AVG"; break;
case Column.Denton_Deposition_Power_STDEV: results = "Denton_Deposition_Power_STDEV"; break;
case Column.Denton_Deposition_Rate_AVG: results = "Denton_Deposition_Rate_AVG"; break;
case Column.Denton_Deposition_Rate_STDEV: results = "Denton_Deposition_Rate_STDEV"; break;
case Column.Denton_Gun_Pocket: results = "Denton_Gun_Pocket"; break;
case Column.Denton_Pumpdown_Time: results = "Denton_Pumpdown_Time"; break;
case Column.Denton_Voltage_AVG: results = "Denton_Voltage_AVG"; break;
case Column.Denton_Voltage_STDEV: results = "Denton_Voltage_STDEV"; break;
case Column.Employee: results = "Employee"; break;
case Column.Epi_Thickness_Mean: results = "Epi Thickness Mean"; break;
case Column.Epi_Thickness_Mean_XY: results = "Epi Thickness Mean_XY"; break;
case Column.Epi_Thickness_Std_Dev_: results = "Epi Thickness Std Dev %"; break;
case Column.FWHM_006_WTAVG: results = "FWHM 006 WTAVG"; break;
case Column.FWHM_006: results = "FWHM 006"; break;
case Column.FWHM_105_WTAVG: results = "FWHM 105 WTAVG"; break;
case Column.FWHM_105: results = "FWHM 105"; break;
case Column.Hall_Rs: results = "Hall Rs"; break;
case Column.Hall_Mobility_verif_sample: results = "Hall_Mobility_verif_sample"; break;
case Column.Hall_Ns_verif_sample: results = "Hall_Ns_verif_sample"; break;
case Column.Hall_Rs_verif_sample: results = "Hall_Rs_verif_sample"; break;
case Column.Job: results = "Job"; break;
case Column.LEI_RS_Average_value: results = "LEI RS Average value"; break;
case Column.LEI_RS_Maximum_value: results = "LEI RS Maximum value"; break;
case Column.LEI_RS_Minimum_value: results = "LEI RS Minimum value"; break;
case Column.LEI_RS_STDEV: results = "LEI RS STDEV"; break;
case Column.LEI_RS_STDEV_: results = "LEI RS STDEV%"; break;
//case Column.Large_Adder_Sum: results = "Large Adder Sum"; break;
case Column.Lot: results = "Lot"; break;
//case Column.Medium_Adder_Sum: results = "Medium Adder Sum"; break;
case Column.Microscope_Center_5x: results = "Microscope Center 5x"; break;
case Column.Microscope_Center_50x: results = "Microscope Center 50x"; break;
case Column.Microscope_Middle_5x: results = "Microscope Middle 5x"; break;
case Column.Microscope_Middle_50x: results = "Microscope Middle 50x"; break;
case Column.Microscope_Edge_5x: results = "Microscope Edge 5x"; break;
case Column.Microscope_Edge_50x: results = "Microscope Edge 50x"; break;
case Column.Mobility_Verification: results = "Mobility Verification"; break;
case Column.Mobility: results = "Mobility"; break;
case Column.Ns_Verification: results = "Ns Verification"; break;
case Column.PL_Edge_Wavelength: results = "PL Edge Wavelength"; break;
case Column.PL_Ratio: results = "PL Ratio"; break;
case Column.PR_Barrier_Composition: results = "PR Barrier Composition"; break;
case Column.PR_Peak: results = "PR Peak"; break;
case Column.Part: results = "Part"; break;
//case Column.Particles_verification: results = "Particles verification"; break;
//case Column.Pits_verification: results = "Pits verification"; break;
//case Column.Pocket: results = "Pocket"; break;
//case Column.Post_Bin_1: results = "Post Bin 1"; break;
//case Column.Post_Bin_2: results = "Post Bin 2"; break;
//case Column.Post_Bin_3: results = "Post Bin 3"; break;
//case Column.Post_Bin_4: results = "Post Bin 4"; break;
//case Column.Post_Bin_5: results = "Post Bin 5"; break;
//case Column.Post_Bin_6: results = "Post Bin 6"; break;
//case Column.Post_Bin_9: results = "Post Bin 9"; break;
//case Column.Pre_Bin_1: results = "Pre Bin 1"; break;
//case Column.Pre_Bin_2: results = "Pre Bin 2"; break;
//case Column.Pre_Bin_3: results = "Pre Bin 3"; break;
//case Column.Pre_Bin_4: results = "Pre Bin 4"; break;
//case Column.Pre_Bin_5: results = "Pre Bin 5"; break;
//case Column.Pre_Bin_6: results = "Pre Bin 6"; break;
//case Column.Pre_Bin_9: results = "Pre Bin 9"; break;
case Column.Process: results = "Process"; break;
//case Column.RPM_verif_Thickness_1: results = "RPM_verif_Thickness_1"; break;
//case Column.RPM_verif_Thickness_2: results = "RPM_verif_Thickness_2"; break;
//case Column.RPM_verif_Thickness_3: results = "RPM_verif_Thickness_3"; break;
//case Column.RPM_verif_Thickness_Average: results = "RPM_verif_Thickness_Average"; break;
//case Column.RTA_oxide_Thk_Change: results = "RTA oxide Thk Change"; break;
//case Column.RTA_oxide_post_anneal_Thk: results = "RTA oxide post-anneal Thk"; break;
//case Column.RTA_oxide_pre_anneal_Thk: results = "RTA oxide pre-anneal Thk"; break;
case Column.Recipe: results = "Recipe"; break;
//case Column.Resistivity_2_ohm_cm: results = "Resistivity 2 ohm cm"; break; //LEI Weekly Verification
//case Column.Resistivity_600_ohm_cm: results = "Resistivity 600 ohm cm"; break; //LEI Weekly Verification
case Column.Rs_verification: results = "Rs verification"; break;
case Column.Rs_verif_100kohm: results = "Rs_verif_100kohm"; break;
case Column.Rs_verif_10ohm: results = "Rs_verif_10ohm"; break;
case Column.Rs_verif_1kohm: results = "Rs_verif_1kohm"; break;
case Column.SID: results = "SID"; break;
case Column.SL_Period_WTAVG: results = "SL Period WTAVG"; break;
case Column.SL_Period: results = "SL Period"; break;
//case Column.SPE_verification: results = "SPE verification"; break;
//case Column.Sample_ID: results = "Sample ID"; break;
case Column.Sheet_Concentration: results = "Sheet Concentration"; break;
//case Column.Size: results = "Size"; break;
//case Column.Small_Adder_Sum: results = "Small Adder Sum"; break;
//case Column.Spirals_verification: results = "Spirals verification"; break;
case Column.Time: results = "Time"; break;
case Column.Tool_ID: results = "Tool ID"; break;
//case Column.Total_LPD_Adder: results = "Total LPD Adder"; break;
//case Column.Total_Verification: results = "Total Verification"; break;
case Column.Total_Warp_Calibration: results = "Total Warp Calibration"; break;
case Column.UV_Broken: results = "UV Broken"; break;
case Column.UV_Chipping: results = "UV Chipping"; break;
case Column.UV_Cracking_0_3mm_: results = "UV Cracking (0-3mm)"; break;
case Column.UV_Cracking_3_7mm_: results = "UV Cracking (3-7mm)"; break;
case Column.UV_Cracking_7mm_: results = "UV Cracking (>7mm)"; break;
case Column.UV_Crazing: results = "UV Crazing"; break;
case Column.UV_Crazing_Acceptable: results = "UV Crazing Acceptable"; break;
case Column.UV_FULL_Characterization_Wafer: results = "UV FULL Characterization Wafer"; break;
case Column.UV_Haze_count_: results = "UV Haze (count)"; break;
case Column.UV_LIGHT_Characterization_Wafer: results = "UV LIGHT Characterization Wafer"; break;
case Column.UV_Non_rotation: results = "UV Non-rotation"; break;
case Column.UV_Other: results = "UV Other"; break;
case Column.UV_Scratch_count_: results = "UV Scratch (count)"; break;
case Column.UV_Slip_count_: results = "UV Slip (count)"; break;
case Column.UV_True_Haze: results = "UV True Haze"; break;
case Column.UV_True_Haze_Acceptable: results = "UV True Haze Acceptable"; break;
case Column.UV_SPE_1mm_count: results = "UV-SPE (>1mm) count"; break;
case Column.UV_SPE_count_: results = "UV-SPE (count)"; break;
case Column.Verification_Contact_Symmetry: results = "Verification Contact Symmetry"; break;
case Column.Vp_Pinch_Off_Voltage: results = "Vp Pinch Off Voltage"; break;
case Column.Wafer_ID: results = "Wafer ID"; break;
//case Column.Wafer_Pocket: results = "Wafer Pocket"; break;
case Column.Wafer_Region: results = "Wafer Region"; break;
case Column.Wafer_Scribe: results = "Wafer Scribe"; break;
case Column.WaferPocket_Candela: results = "WaferPocket_Candela"; break;
case Column.WaferPocket_Warp: results = "WaferPocket_Warp"; break;
case Column.WaferPosition_CV: results = "WaferPosition_CV"; break;
case Column.WaferPosition_BV: results = "WaferPosition_BV"; break;
case Column.WaferPosition_Hall: results = "WaferPosition_Hall"; break;
case Column.WaferPosition_PR: results = "WaferPosition_PR"; break;
case Column.Warp: results = "Warp"; break;
case Column.X_Coord: results = "X-Coord"; break;
case Column.XRD_2_Theta_Peak_002: results = "XRD 2 Theta Peak 002"; break;
case Column.XRD_2_Theta_Peak_101: results = "XRD 2 Theta Peak 101"; break;
case Column.XRD_2_Theta_Position: results = "XRD 2-Theta Position"; break;
case Column.XRD_2_Theta_Position_Si_1: results = "XRD 2-Theta Position Si 1"; break;
case Column.XRD_2_Theta_Position_Si_2: results = "XRD 2-Theta Position Si 2"; break;
case Column.XRD_2_Theta_Position_Si_3: results = "XRD 2-Theta Position Si 3"; break;
case Column.XRD_Peak_002_Intensity: results = "XRD Peak 002 Intensity"; break;
case Column.XRD_Peak_101_Intensity: results = "XRD Peak 101 Intensity"; break;
case Column.XRD_Weekly_AL_Center: results = "XRD Weekly AL% Center"; break;
case Column.XRD_Weekly_Back_Barrier_Al_: results = "Back Barrier Al%"; break;
case Column.XRD_Weekly_Barrier_Al_: results = "Barrier Al%"; break;
case Column.XRD_Weekly_FWHM_002: results = "XRD Weekly FWHM 002"; break;
case Column.XRD_Weekly_FWHM_101: results = "XRD Weekly FWHM 101"; break;
case Column.XRD_Weekly_FWHM_105: results = "XRD Weekly FWHM 105"; break;
case Column.XRD_Weekly_Fringe_thick_0_0_: results = "XRD Weekly Fringe thick (0,0)"; break;
case Column.XRD_Weekly_Fringe_thick_48_48_: results = "XRD Weekly Fringe thick (48,48)"; break;
case Column.XRD_Weekly_Intensity: results = "XRD Weekly Intensity"; break;
case Column.XRD_Weekly_Super_Lattice_Al_: results = "Super Lattice Al%"; break;
case Column.XRD_Weekly_Super_Lattice_period: results = "Super Lattice period"; break;
case Column.XRD_Weekly_Super_Lattice_tks: results = "Super Lattice tks"; break;
case Column.XRR_Thickness_nm_WTAVG: results = "XRR Thickness (nm) WTAVG"; break;
case Column.XRR_Thickness_nm_: results = "XRR Thickness (nm)"; break;
case Column.Y_Coord: results = "Y-Coord"; break;
case Column.YellowBand_Power_mW_: results = "YellowBand_Power (mW)"; break;
case Column.YellowBand_V: results = "YellowBand_V"; break;
case Column.YellowBand_V_XY: results = "YellowBand_V_XY"; break;
case Column.YellowBand_nm: results = "YellowBand_nm"; break;
//case Column.pH: results = "pH"; break;
case Column.Ag: results = "Ag"; break;
case Column.Al: results = "Al"; break;
case Column.As: results = "As"; break;
case Column.Au: results = "Au"; break;
case Column.B: results = "B"; break;
case Column.Ba: results = "Ba"; break;
case Column.Ca: results = "Ca"; break;
case Column.Ce: results = "Ce"; break;
case Column.Co: results = "Co"; break;
case Column.Cr: results = "Cr"; break;
case Column.Cu: results = "Cu"; break;
case Column.Fe: results = "Fe"; break;
case Column.Ga: results = "Ga"; break;
case Column.Ge: results = "Ge"; break;
case Column.Hf: results = "Hf"; break;
case Column.K: results = "K"; break;
case Column.Li: results = "Li"; break;
case Column.Mg: results = "Mg"; break;
case Column.Mn: results = "Mn"; break;
case Column.Mo: results = "Mo"; break;
case Column.Na: results = "Na"; break;
case Column.Ni: results = "Ni"; break;
case Column.P: results = "P"; break;
case Column.Pb: results = "Pb"; break;
case Column.Sn: results = "Sn"; break;
case Column.Ta: results = "Ta"; break;
case Column.Ti: results = "Ti"; break;
case Column.W: results = "W"; break;
case Column.Y: results = "Y"; break;
case Column.Zn: results = "Zn"; break;
default: throw new Exception();
}
return results;
}
public static Description.Param GetParam(this Column column)
{
Description.Param results;
switch (column)
{
//case Column._8in_Total_Warp_Verification: results = Description.Param.String; break;
//case Column.AFM_Monthly_Y: results = Description.Param.String; break;
//case Column.AFM_Monthly: results = Description.Param.String; break;
case Column.AFM_Pit_Count: results = Description.Param.String; break;
case Column.AFM_Roughness: results = Description.Param.String; break;
//case Column.Adder_Bin_1: results = Description.Param.String; break;
//case Column.Adder_Bin_2: results = Description.Param.String; break;
//case Column.Adder_Bin_3: results = Description.Param.String; break;
//case Column.Adder_Bin_4: results = Description.Param.String; break;
//case Column.Adder_Bin_5: results = Description.Param.String; break;
//case Column.Adder_Bin_6: results = Description.Param.String; break;
//case Column.Adder_Bin_9: results = Description.Param.String; break;
case Column.Al_B_B_WTAVG: results = Description.Param.String; break;
case Column.Al_B_B_: results = Description.Param.String; break;
case Column.Al_Barrier_WTAVG: results = Description.Param.String; break;
case Column.Al_Barrier: results = Description.Param.String; break;
case Column.Al_SLS_WTAVG: results = Description.Param.String; break;
case Column.Al_SLS: results = Description.Param.String; break;
case Column.Al_TL1_WTAVG: results = Description.Param.String; break;
case Column.Al_TL1: results = Description.Param.String; break;
case Column.Al_TL2_WTAVG: results = Description.Param.String; break;
//case Column.BV_Resistance: results = Description.Param.String; break;
case Column.BandEdge_V: results = Description.Param.String; break;
case Column.BandEdge_V_XY: results = Description.Param.String; break;
case Column.BandEdge_nm: results = Description.Param.String; break;
case Column.Barrier_Composition_RPM_XY: results = Description.Param.String; break;
case Column.Bow_Calibration: results = Description.Param.String; break;
case Column.Bow_Range: results = Description.Param.String; break;
case Column.Bow: results = Description.Param.String; break;
case Column.BowCenter: results = Description.Param.String; break;
case Column.BowX: results = Description.Param.String; break;
case Column.BowY: results = Description.Param.String; break;
case Column.Breakdown_Voltage_Edge: results = Description.Param.String; break;
case Column.Breakdown_VoltageMiddle: results = Description.Param.String; break;
case Column.Breakdown_Voltage: results = Description.Param.String; break;
case Column.CV_C_at_10V: results = Description.Param.String; break;
case Column.CV_Nd_Min: results = Description.Param.String; break;
//case Column.Candela_Large_LPD_Quarterly: results = Description.Param.String; break;
//case Column.Candela_Medium_LPD_Quarterly: results = Description.Param.String; break;
//case Column.Candela_Small_LPD_Quarterly: results = Description.Param.String; break;
//case Column.Candela_Total_Quarterly: results = Description.Param.String; break;
case Column.Candela_102_83nm: results = Description.Param.String; break;
case Column.Candela_1_1um: results = Description.Param.String; break;
case Column.Candela_496nm: results = Description.Param.String; break;
case Column.Candela_600nm: results = Description.Param.String; break;
case Column.Candela_8620_Small: results = Description.Param.String; break;
case Column.Candela_Crack_Verification: results = Description.Param.String; break;
case Column.Candela_Cracking: results = Description.Param.String; break;
case Column.Candela_Cracking_Acceptable: results = Description.Param.String; break;
case Column.Candela_Crater: results = Description.Param.String; break;
case Column.Candela_Crater_Verification: results = Description.Param.String; break;
case Column.Candela_Haze: results = Description.Param.String; break;
case Column.Candela_LPD_Large: results = Description.Param.String; break;
case Column.Candela_LPD_Medium: results = Description.Param.String; break;
case Column.Candela_LPD_Small: results = Description.Param.String; break;
case Column.Candela_Large_Verification: results = Description.Param.String; break;
case Column.Candela_Medium_Verification: results = Description.Param.String; break;
case Column.Candela_Pits: results = Description.Param.String; break;
case Column.Candela_Pits_Verification: results = Description.Param.String; break;
case Column.Candela_SPE: results = Description.Param.String; break;
case Column.Candela_SPE_Verification: results = Description.Param.String; break;
case Column.Candela_Slip: results = Description.Param.String; break;
case Column.Candela_Small_Verification: results = Description.Param.String; break;
case Column.Candela_Spirals: results = Description.Param.String; break;
case Column.Candela_Spirals_Verification: results = Description.Param.String; break;
case Column.Candela_Total_Defects: results = Description.Param.String; break;
case Column.Candela_Total_PSL: results = Description.Param.String; break;
case Column.Candela__1_1um: results = Description.Param.String; break;
//case Column.Comment: results = Description.Param.String; break;
//case Column.Conductivity: results = Description.Param.String; break;
case Column.Contact_Symmetry: results = Description.Param.String; break;
//case Column.Cracking_verification: results = Description.Param.String; break;
//case Column.Crater_verification: results = Description.Param.String; break;
case Column.Date: results = Description.Param.String; break;
case Column.Denton_Crystal_Life: results = Description.Param.String; break;
case Column.Denton_Current_AVG: results = Description.Param.String; break;
case Column.Denton_Current_STDEV: results = Description.Param.String; break;
case Column.Denton_Deposition_Power_AVG: results = Description.Param.String; break;
case Column.Denton_Deposition_Power_STDEV: results = Description.Param.String; break;
case Column.Denton_Deposition_Rate_AVG: results = Description.Param.String; break;
case Column.Denton_Deposition_Rate_STDEV: results = Description.Param.String; break;
case Column.Denton_Gun_Pocket: results = Description.Param.String; break;
case Column.Denton_Pumpdown_Time: results = Description.Param.String; break;
case Column.Denton_Voltage_AVG: results = Description.Param.String; break;
case Column.Denton_Voltage_STDEV: results = Description.Param.String; break;
case Column.Employee: results = Description.Param.String; break;
case Column.Epi_Thickness_Mean: results = Description.Param.String; break;
case Column.Epi_Thickness_Mean_XY: results = Description.Param.String; break;
case Column.Epi_Thickness_Std_Dev_: results = Description.Param.String; break;
case Column.FWHM_006_WTAVG: results = Description.Param.String; break;
case Column.FWHM_006: results = Description.Param.String; break;
case Column.FWHM_105_WTAVG: results = Description.Param.String; break;
case Column.FWHM_105: results = Description.Param.String; break;
case Column.Hall_Rs: results = Description.Param.String; break;
case Column.Hall_Mobility_verif_sample: results = Description.Param.String; break;
case Column.Hall_Ns_verif_sample: results = Description.Param.String; break;
case Column.Hall_Rs_verif_sample: results = Description.Param.String; break;
case Column.Job: results = Description.Param.String; break;
case Column.LEI_RS_Average_value: results = Description.Param.String; break;
case Column.LEI_RS_Maximum_value: results = Description.Param.String; break;
case Column.LEI_RS_Minimum_value: results = Description.Param.String; break;
case Column.LEI_RS_STDEV: results = Description.Param.String; break;
case Column.LEI_RS_STDEV_: results = Description.Param.String; break;
//case Column.Large_Adder_Sum: results = Description.Param.String; break;
case Column.Lot: results = Description.Param.String; break;
//case Column.Medium_Adder_Sum: results = Description.Param.String; break;
case Column.Microscope_Center_5x: results = Description.Param.String; break;
case Column.Microscope_Center_50x: results = Description.Param.String; break;
case Column.Microscope_Middle_5x: results = Description.Param.String; break;
case Column.Microscope_Middle_50x: results = Description.Param.String; break;
case Column.Microscope_Edge_5x: results = Description.Param.String; break;
case Column.Microscope_Edge_50x: results = Description.Param.String; break;
case Column.Mobility_Verification: results = Description.Param.String; break;
case Column.Mobility: results = Description.Param.String; break;
case Column.Ns_Verification: results = Description.Param.String; break;
case Column.PL_Edge_Wavelength: results = Description.Param.String; break;
case Column.PL_Ratio: results = Description.Param.String; break;
case Column.PR_Barrier_Composition: results = Description.Param.String; break;
case Column.PR_Peak: results = Description.Param.String; break;
case Column.Part: results = Description.Param.String; break;
//case Column.Particles_verification: results = Description.Param.String; break;
//case Column.Pits_verification: results = Description.Param.String; break;
//case Column.Pocket: results = Description.Param.String; break;
//case Column.Post_Bin_1: results = Description.Param.String; break;
//case Column.Post_Bin_2: results = Description.Param.String; break;
//case Column.Post_Bin_3: results = Description.Param.String; break;
//case Column.Post_Bin_4: results = Description.Param.String; break;
//case Column.Post_Bin_5: results = Description.Param.String; break;
//case Column.Post_Bin_6: results = Description.Param.String; break;
//case Column.Post_Bin_9: results = Description.Param.String; break;
//case Column.Pre_Bin_1: results = Description.Param.String; break;
//case Column.Pre_Bin_2: results = Description.Param.String; break;
//case Column.Pre_Bin_3: results = Description.Param.String; break;
//case Column.Pre_Bin_4: results = Description.Param.String; break;
//case Column.Pre_Bin_5: results = Description.Param.String; break;
//case Column.Pre_Bin_6: results = Description.Param.String; break;
//case Column.Pre_Bin_9: results = Description.Param.String; break;
case Column.Process: results = Description.Param.String; break;
//case Column.RPM_verif_Thickness_1: results = Description.Param.String; break;
//case Column.RPM_verif_Thickness_2: results = Description.Param.String; break;
//case Column.RPM_verif_Thickness_3: results = Description.Param.String; break;
//case Column.RPM_verif_Thickness_Average: results = Description.Param.String; break;
//case Column.RTA_oxide_Thk_Change: results = Description.Param.String; break;
//case Column.RTA_oxide_post_anneal_Thk: results = Description.Param.String; break;
//case Column.RTA_oxide_pre_anneal_Thk: results = Description.Param.String; break;
case Column.Recipe: results = Description.Param.String; break;
//case Column.Resistivity_2_ohm_cm: results = Description.Param.String; break;
//case Column.Resistivity_600_ohm_cm: results = Description.Param.String; break;
case Column.Rs_verification: results = Description.Param.String; break;
case Column.Rs_verif_100kohm: results = Description.Param.String; break;
case Column.Rs_verif_10ohm: results = Description.Param.String; break;
case Column.Rs_verif_1kohm: results = Description.Param.String; break;
case Column.SID: results = Description.Param.String; break;
case Column.SL_Period_WTAVG: results = Description.Param.String; break;
case Column.SL_Period: results = Description.Param.String; break;
//case Column.SPE_verification: results = Description.Param.String; break;
//case Column.Sample_ID: results = Description.Param.String; break;
case Column.Sheet_Concentration: results = Description.Param.String; break;
//case Column.Size: results = Description.Param.String; break;
//case Column.Small_Adder_Sum: results = Description.Param.String; break;
//case Column.Spirals_verification: results = Description.Param.String; break;
case Column.Time: results = Description.Param.String; break;
case Column.Tool_ID: results = Description.Param.String; break;
//case Column.Total_LPD_Adder: results = Description.Param.String; break;
//case Column.Total_Verification: results = Description.Param.String; break;
case Column.Total_Warp_Calibration: results = Description.Param.String; break;
case Column.UV_Broken: results = Description.Param.String; break;
case Column.UV_Chipping: results = Description.Param.String; break;
case Column.UV_Cracking_0_3mm_: results = Description.Param.String; break;
case Column.UV_Cracking_3_7mm_: results = Description.Param.String; break;
case Column.UV_Cracking_7mm_: results = Description.Param.String; break;
case Column.UV_Crazing: results = Description.Param.String; break;
case Column.UV_Crazing_Acceptable: results = Description.Param.String; break;
case Column.UV_FULL_Characterization_Wafer: results = Description.Param.String; break;
case Column.UV_Haze_count_: results = Description.Param.String; break;
case Column.UV_LIGHT_Characterization_Wafer: results = Description.Param.String; break;
case Column.UV_Non_rotation: results = Description.Param.String; break;
case Column.UV_Other: results = Description.Param.String; break;
case Column.UV_Scratch_count_: results = Description.Param.String; break;
case Column.UV_Slip_count_: results = Description.Param.String; break;
case Column.UV_True_Haze: results = Description.Param.String; break;
case Column.UV_True_Haze_Acceptable: results = Description.Param.String; break;
case Column.UV_SPE_1mm_count: results = Description.Param.String; break;
case Column.UV_SPE_count_: results = Description.Param.String; break;
case Column.Verification_Contact_Symmetry: results = Description.Param.String; break;
case Column.Vp_Pinch_Off_Voltage: results = Description.Param.String; break;
case Column.Wafer_ID: results = Description.Param.String; break;
//case Column.Wafer_Pocket: results = Description.Param.String; break;
case Column.Wafer_Region: results = Description.Param.String; break;
case Column.Wafer_Scribe: results = Description.Param.String; break;
case Column.WaferPocket_Candela: results = Description.Param.String; break;
case Column.WaferPocket_Warp: results = Description.Param.String; break;
case Column.WaferPosition_CV: results = Description.Param.String; break;
case Column.WaferPosition_BV: results = Description.Param.String; break;
case Column.WaferPosition_Hall: results = Description.Param.String; break;
case Column.WaferPosition_PR: results = Description.Param.String; break;
case Column.Warp: results = Description.Param.String; break;
case Column.X_Coord: results = Description.Param.String; break;
case Column.XRD_2_Theta_Peak_002: results = Description.Param.String; break;
case Column.XRD_2_Theta_Peak_101: results = Description.Param.String; break;
case Column.XRD_2_Theta_Position: results = Description.Param.String; break;
case Column.XRD_2_Theta_Position_Si_1: results = Description.Param.String; break;
case Column.XRD_2_Theta_Position_Si_2: results = Description.Param.String; break;
case Column.XRD_2_Theta_Position_Si_3: results = Description.Param.String; break;
case Column.XRD_Peak_002_Intensity: results = Description.Param.String; break;
case Column.XRD_Peak_101_Intensity: results = Description.Param.String; break;
case Column.XRD_Weekly_AL_Center: results = Description.Param.String; break;
case Column.XRD_Weekly_Back_Barrier_Al_: results = Description.Param.String; break;
case Column.XRD_Weekly_Barrier_Al_: results = Description.Param.String; break;
case Column.XRD_Weekly_FWHM_002: results = Description.Param.String; break;
case Column.XRD_Weekly_FWHM_101: results = Description.Param.String; break;
case Column.XRD_Weekly_FWHM_105: results = Description.Param.String; break;
case Column.XRD_Weekly_Fringe_thick_0_0_: results = Description.Param.String; break;
case Column.XRD_Weekly_Fringe_thick_48_48_: results = Description.Param.String; break;
case Column.XRD_Weekly_Intensity: results = Description.Param.String; break;
case Column.XRD_Weekly_Super_Lattice_Al_: results = Description.Param.String; break;
case Column.XRD_Weekly_Super_Lattice_period: results = Description.Param.String; break;
case Column.XRD_Weekly_Super_Lattice_tks: results = Description.Param.String; break;
case Column.XRR_Thickness_nm_WTAVG: results = Description.Param.String; break;
case Column.XRR_Thickness_nm_: results = Description.Param.String; break;
case Column.Y_Coord: results = Description.Param.String; break;
case Column.YellowBand_Power_mW_: results = Description.Param.String; break;
case Column.YellowBand_V: results = Description.Param.String; break;
case Column.YellowBand_V_XY: results = Description.Param.String; break;
case Column.YellowBand_nm: results = Description.Param.String; break;
//case Column.pH: results = Description.Param.String; break;
case Column.Ag: results = Description.Param.String; break;
case Column.Al: results = Description.Param.String; break;
case Column.As: results = Description.Param.String; break;
case Column.Au: results = Description.Param.String; break;
case Column.B: results = Description.Param.String; break;
case Column.Ba: results = Description.Param.String; break;
case Column.Ca: results = Description.Param.String; break;
case Column.Ce: results = Description.Param.String; break;
case Column.Co: results = Description.Param.String; break;
case Column.Cr: results = Description.Param.String; break;
case Column.Cu: results = Description.Param.String; break;
case Column.Fe: results = Description.Param.String; break;
case Column.Ga: results = Description.Param.String; break;
case Column.Ge: results = Description.Param.String; break;
case Column.Hf: results = Description.Param.String; break;
case Column.K: results = Description.Param.String; break;
case Column.Li: results = Description.Param.String; break;
case Column.Mg: results = Description.Param.String; break;
case Column.Mn: results = Description.Param.String; break;
case Column.Mo: results = Description.Param.String; break;
case Column.Na: results = Description.Param.String; break;
case Column.Ni: results = Description.Param.String; break;
case Column.P: results = Description.Param.String; break;
case Column.Pb: results = Description.Param.String; break;
case Column.Sn: results = Description.Param.String; break;
case Column.Ta: results = Description.Param.String; break;
case Column.Ti: results = Description.Param.String; break;
case Column.W: results = Description.Param.String; break;
case Column.Y: results = Description.Param.String; break;
case Column.Zn: results = Description.Param.String; break;
default: throw new Exception();
}
return results;
}
}
public enum Column
{
//_8in_Total_Warp_Verification,
//AFM_Monthly_Y,
//AFM_Monthly,
AFM_Pit_Count,
AFM_Roughness,
//Adder_Bin_1,
//Adder_Bin_2,
//Adder_Bin_3,
//Adder_Bin_4,
//Adder_Bin_5,
//Adder_Bin_6,
//Adder_Bin_9,
Al_B_B_WTAVG,
Al_B_B_,
Al_Barrier_WTAVG,
Al_Barrier,
Al_SLS_WTAVG,
Al_SLS,
Al_TL1_WTAVG,
Al_TL1,
Al_TL2_WTAVG,
//BV_Resistance,
BandEdge_V,
BandEdge_V_XY,
BandEdge_nm,
Barrier_Composition_RPM_XY,
Bow_Calibration,
Bow_Range,
Bow,
BowCenter,
BowX,
BowY,
Breakdown_Voltage_Edge,
Breakdown_VoltageMiddle,
Breakdown_Voltage,
CV_C_at_10V,
CV_Nd_Min,
//Candela_Large_LPD_Quarterly,
//Candela_Medium_LPD_Quarterly,
//Candela_Small_LPD_Quarterly,
//Candela_Total_Quarterly,
Candela_102_83nm,
Candela_1_1um,
Candela_496nm,
Candela_600nm,
Candela_8620_Small,
Candela_Crack_Verification,
Candela_Cracking,
Candela_Cracking_Acceptable,
Candela_Crater,
Candela_Crater_Verification,
Candela_Haze,
Candela_LPD_Large,
Candela_LPD_Medium,
Candela_LPD_Small,
Candela_Large_Verification,
Candela_Medium_Verification,
Candela_Pits,
Candela_Pits_Verification,
Candela_SPE,
Candela_SPE_Verification,
Candela_Slip,
Candela_Small_Verification,
Candela_Spirals,
Candela_Spirals_Verification,
Candela_Total_Defects,
Candela_Total_PSL,
Candela__1_1um,
//Comment,
//Conductivity,
Contact_Symmetry,
//Cracking_verification,
//Crater_verification,
Date,
Denton_Crystal_Life,
Denton_Current_AVG,
Denton_Current_STDEV,
Denton_Deposition_Power_AVG,
Denton_Deposition_Power_STDEV,
Denton_Deposition_Rate_AVG,
Denton_Deposition_Rate_STDEV,
Denton_Gun_Pocket,
Denton_Pumpdown_Time,
Denton_Voltage_AVG,
Denton_Voltage_STDEV,
Employee,
Epi_Thickness_Mean,
Epi_Thickness_Mean_XY,
Epi_Thickness_Std_Dev_,
FWHM_006_WTAVG,
FWHM_006,
FWHM_105_WTAVG,
FWHM_105,
Hall_Rs,
Hall_Mobility_verif_sample,
Hall_Ns_verif_sample,
Hall_Rs_verif_sample,
Job,
LEI_RS_Average_value,
LEI_RS_Maximum_value,
LEI_RS_Minimum_value,
LEI_RS_STDEV,
LEI_RS_STDEV_,
//Large_Adder_Sum,
Lot,
//Medium_Adder_Sum,
Microscope_Center_50x,
Microscope_Center_5x,
Microscope_Edge_50x,
Microscope_Edge_5x,
Microscope_Middle_50x,
Microscope_Middle_5x,
Mobility_Verification,
Mobility,
Ns_Verification,
PL_Edge_Wavelength,
PL_Ratio,
PR_Barrier_Composition,
PR_Peak,
Part,
//Particles_verification,
//Pits_verification,
//Pocket,
//Post_Bin_1,
//Post_Bin_2,
//Post_Bin_3,
//Post_Bin_4,
//Post_Bin_5,
//Post_Bin_6,
//Post_Bin_9,
//Pre_Bin_1,
//Pre_Bin_2,
//Pre_Bin_3,
//Pre_Bin_4,
//Pre_Bin_5,
//Pre_Bin_6,
//Pre_Bin_9,
Process,
//RPM_verif_Thickness_1,
//RPM_verif_Thickness_2,
//RPM_verif_Thickness_3,
//RPM_verif_Thickness_Average,
//RTA_oxide_Thk_Change,
//RTA_oxide_post_anneal_Thk,
//RTA_oxide_pre_anneal_Thk,
Recipe,
//Resistivity_2_ohm_cm,
//Resistivity_600_ohm_cm,
Rs_verification,
Rs_verif_100kohm,
Rs_verif_10ohm,
Rs_verif_1kohm,
SID,
SL_Period_WTAVG,
SL_Period,
//SPE_verification,
//Sample_ID,
Sheet_Concentration,
//Size,
//Small_Adder_Sum,
//Spirals_verification,
Time,
Tool_ID,
//Total_LPD_Adder,
//Total_Verification,
Total_Warp_Calibration,
UV_Broken,
UV_Chipping,
UV_Cracking_0_3mm_,
UV_Cracking_3_7mm_,
UV_Cracking_7mm_,
UV_Crazing,
UV_Crazing_Acceptable,
UV_FULL_Characterization_Wafer,
UV_Haze_count_,
UV_LIGHT_Characterization_Wafer,
UV_Non_rotation,
UV_Other,
UV_Scratch_count_,
UV_Slip_count_,
UV_True_Haze,
UV_True_Haze_Acceptable,
UV_SPE_1mm_count,
UV_SPE_count_,
Verification_Contact_Symmetry,
Vp_Pinch_Off_Voltage,
Wafer_ID,
//Wafer_Pocket,
Wafer_Region,
Wafer_Scribe,
WaferPocket_Candela,
WaferPocket_Warp,
WaferPosition_CV,
WaferPosition_BV,
WaferPosition_Hall,
WaferPosition_PR,
Warp,
X_Coord,
XRD_2_Theta_Peak_002,
XRD_2_Theta_Peak_101,
XRD_2_Theta_Position,
XRD_2_Theta_Position_Si_1,
XRD_2_Theta_Position_Si_2,
XRD_2_Theta_Position_Si_3,
XRD_Peak_002_Intensity,
XRD_Peak_101_Intensity,
XRD_Weekly_AL_Center,
XRD_Weekly_Back_Barrier_Al_,
XRD_Weekly_Barrier_Al_,
XRD_Weekly_FWHM_002,
XRD_Weekly_FWHM_101,
XRD_Weekly_FWHM_105,
XRD_Weekly_Fringe_thick_0_0_,
XRD_Weekly_Fringe_thick_48_48_,
XRD_Weekly_Intensity,
XRD_Weekly_Super_Lattice_Al_,
XRD_Weekly_Super_Lattice_period,
XRD_Weekly_Super_Lattice_tks,
XRR_Thickness_nm_,
XRR_Thickness_nm_WTAVG,
Y_Coord,
YellowBand_Power_mW_,
YellowBand_V,
YellowBand_V_XY,
YellowBand_nm,
//pH,
Ag,
Al,
As,
Au,
B,
Ba,
Ca,
Ce,
Co,
Cr,
Cu,
Fe,
Ga,
Ge,
Hf,
K,
Li,
Mg,
Mn,
Mo,
Na,
Ni,
P,
Pb,
Sn,
Ta,
Ti,
W,
Y,
Zn
}
}

398
Adaptation/Shared/Metrology/ConfigDataBase.cs Normal file
View File

@ -0,0 +1,398 @@
using Adaptation.Ifx.Eaf.EquipmentConnector.File.Configuration;
using System;
using System.Collections.Generic;
using System.IO;
using System.Linq;
using System.Text;
using System.Text.Json;
using System.Text.Json.Serialization;
namespace Adaptation.Shared.Metrology
{
public class ConfigDataBase
{
public bool UseCyclicalForDescription { get; protected set; }
public Dictionary<string, string> CellNames { get; protected set; }
public Dictionary<string, string> MesEntities { get; protected set; }
public IProcessDataDescription ProcessDataDescription { get; protected set; }
public bool IsEvent { get; private set; }
public bool EafHosted { get; private set; }
public string CellName { get; private set; }
public bool IsSourceTimer { get; private set; }
public EquipmentType EquipmentType => _EquipmentType;
public string EquipmentElementName { get; private set; }
public bool IsDatabaseExportToIPDSF { get; private set; }
public EquipmentType? EquipmentConnection => _EquipmentConnection;
public FileConnectorConfiguration FileConnectorConfiguration { get; private set; }
protected readonly EventName _EventName;
protected readonly EquipmentType _EquipmentType;
protected readonly EquipmentType? _EquipmentConnection;
protected readonly Dictionary<string, string> _Reactors;
public ConfigDataBase(string cellName, string cellInstanceConnectionName, FileConnectorConfiguration fileConnectorConfiguration, string equipmentTypeName, string parameterizedModelObjectDefinitionType, bool isEAFHosted)
{
CellName = cellName;
EafHosted = isEAFHosted;
EquipmentType equipmentTypeValue;
_Reactors = new Dictionary<string, string>();
CellNames = new Dictionary<string, string>();
MesEntities = new Dictionary<string, string>();
EquipmentElementName = cellInstanceConnectionName;
FileConnectorConfiguration = fileConnectorConfiguration;
string[] segments = parameterizedModelObjectDefinitionType.Split('.');
IsSourceTimer = (fileConnectorConfiguration.SourceFileFilter.StartsWith("*Timer.txt"));
string cellInstanceConnectionNameBase = cellInstanceConnectionName.Replace("-", string.Empty);
IsDatabaseExportToIPDSF = (fileConnectorConfiguration.SourceFileLocation.Contains("DatabaseExport"));
if (!Enum.TryParse(segments[segments.Length - 1], out EventName eventNameValue))
throw new Exception(cellInstanceConnectionName);
if (!Enum.TryParse(cellInstanceConnectionNameBase, out equipmentTypeValue))
_EquipmentConnection = null;
else
_EquipmentConnection = equipmentTypeValue;
string suffix;
switch (eventNameValue)
{
case EventName.FileRead: suffix = string.Empty; break;
case EventName.FileReadDaily: suffix = "_Daily"; break;
case EventName.FileReadWeekly: suffix = "_Weekly"; break;
case EventName.FileReadMonthly: suffix = "_Monthly"; break;
case EventName.FileReadVerification: suffix = "_Verification"; break;
default: throw new Exception(cellInstanceConnectionName);
}
string parameterizedModelObjectDefinitionTypeAppended = string.Concat(segments[0], suffix);
IsEvent = cellInstanceConnectionNameBase != parameterizedModelObjectDefinitionTypeAppended;
_EventName = eventNameValue;
if (!Enum.TryParse(parameterizedModelObjectDefinitionTypeAppended, out equipmentTypeValue))
throw new Exception(cellInstanceConnectionName);
_EquipmentType = equipmentTypeValue;
if (!isEAFHosted && equipmentTypeName != parameterizedModelObjectDefinitionTypeAppended)
throw new Exception(cellInstanceConnectionName);
}
public string GetEventName()
{
string result = _EventName.ToString();
return result;
}
public EventName GetEventNameValue()
{
EventName result = _EventName;
return result;
}
public string GetEquipmentType()
{
string result;
if (_EquipmentConnection is null)
result = _EquipmentType.ToString();
else
result = _EquipmentConnection.Value.ToString();
return result;
}
public string GetEventDescription()
{
string result = ProcessDataDescription.GetEventDescription();
return result;
}
public IProcessDataDescription GetDefault(ILogic logic)
{
IProcessDataDescription result = ProcessDataDescription.GetDefault(logic, this);
return result;
}
public IProcessDataDescription GetDisplayNames(ILogic logic)
{
IProcessDataDescription result = ProcessDataDescription.GetDisplayNames(logic, this);
return result;
}
public List<string> GetDetailNames(ILogic logic)
{
List<string> results = ProcessDataDescription.GetDetailNames(logic, this);
return results;
}
public List<string> GetHeaderNames(ILogic logic)
{
List<string> results = ProcessDataDescription.GetHeaderNames(logic, this);
return results;
}
public List<string> GetNames(ILogic logic)
{
List<string> results = ProcessDataDescription.GetNames(logic, this);
return results;
}
public List<string> GetPairedParameterNames(ILogic logic)
{
List<string> results = ProcessDataDescription.GetPairedParameterNames(logic, this);
return results;
}
public List<string> GetParameterNames(ILogic logic)
{
List<string> results = ProcessDataDescription.GetParameterNames(logic, this);
return results;
}
public List<IProcessDataDescription> GetDescription(ILogic logic, List<Test> tests, IProcessData iProcessData)
{
List<IProcessDataDescription> results = ProcessDataDescription.GetDescription(logic, this, tests, iProcessData);
return results;
}
public string GetCurrentReactor(ILogic logic)
{
string result = string.Empty;
foreach (KeyValuePair<string, string> keyValuePair in _Reactors)
{
foreach (string filePrefix in keyValuePair.Value.Split('|'))
{
if (logic.Logistics.MID.StartsWith(filePrefix) || (_EventName != EventName.FileRead && MesEntities.ContainsKey(logic.Logistics.JobID) && keyValuePair.Value == MesEntities[logic.Logistics.JobID]))
{
result = keyValuePair.Key;
break;
}
}
}
if (string.IsNullOrEmpty(result) && _Reactors.Count == 1)
result = _Reactors.ElementAt(0).Key;
return result;
}
protected JsonElement GetDefaultJsonElement(ILogic logic)
{
JsonElement result;
IProcessDataDescription processDataDescription = ProcessDataDescription.GetDefault(logic, this);
string json = JsonSerializer.Serialize(processDataDescription, processDataDescription.GetType());
object @object = JsonSerializer.Deserialize<object>(json);
result = (JsonElement)@object;
return result;
}
public Dictionary<string, List<Tuple<Enum, string, string, object>>> GetParameterInfo(ILogic logic, bool allowNull)
{
Dictionary<string, List<Tuple<Enum, string, string, object>>> results = new Dictionary<string, List<Tuple<Enum, string, string, object>>>();
string description;
Enum param;
Tuple<Enum, string, string, object> tuple;
JsonElement defaultJsonElement = GetDefaultJsonElement(logic);
Dictionary<string, string> keyValuePairs = GetDisplayNamesJsonElement(logic);
foreach (JsonProperty jsonProperty in defaultJsonElement.EnumerateObject())
{
if (jsonProperty.Value.ValueKind == JsonValueKind.Null && !allowNull)
throw new Exception();
if (jsonProperty.Value.ValueKind == JsonValueKind.Object || jsonProperty.Value.ValueKind == JsonValueKind.Array)
{
description = string.Empty;
param = Description.Param.StructuredType;
//jValue = jObject.Value<JValue>("Item1");
throw new NotImplementedException("Item1");
}
else
{
switch (jsonProperty.Value.ValueKind)
{
case JsonValueKind.String: param = Description.Param.String; break;
case JsonValueKind.Number: param = Description.Param.Double; break;
case JsonValueKind.True:
case JsonValueKind.False: param = Description.Param.Boolean; break;
case JsonValueKind.Null: param = Description.Param.String; break;
default: param = Description.Param.StructuredType; break;
}
}
if (!keyValuePairs.ContainsKey(jsonProperty.Name))
description = string.Empty;
else
description = keyValuePairs[jsonProperty.Name];
tuple = new Tuple<Enum, string, string, object>(param, jsonProperty.Name, description, jsonProperty.Value.ToString());
if (!results.ContainsKey(jsonProperty.Name))
results.Add(jsonProperty.Name, new List<Tuple<Enum, string, string, object>>());
results[jsonProperty.Name].Add(tuple);
}
return results;
}
protected void WriteExportAliases(ILogic logic, string cellName, string equipmentElementName)
{
int i = 0;
Enum param;
object value;
Enum[] @params;
string description;
StringBuilder stringBuilder = new StringBuilder();
string shareRoot = @"\\messv02ecc1.ec.local\EC_EDA";
string shareDirectory = string.Concat(shareRoot, @"\Staging\Pdsf\", cellName, @"\ExportAliases\", equipmentElementName);
Dictionary<string, List<Tuple<Enum, string, string, object>>> keyValuePairs;
if (!(logic is null))
keyValuePairs = GetParameterInfo(logic, allowNull: false);
else
keyValuePairs = new Dictionary<string, List<Tuple<Enum, string, string, object>>>();
stringBuilder.AppendLine("\"AliasName\";\"Condition\";\"EventId\";\"ExceptionId\";\"Formula\";\"HardwareId\";\"OrderId\";\"ParameterName\";\"Remark\";\"ReportName\";\"SourceId\";\"Use\"");
if (!Directory.Exists(shareRoot))
return;
if (!Directory.Exists(shareDirectory))
Directory.CreateDirectory(shareDirectory);
string shareFile = string.Concat(shareDirectory, @"\", DateTime.Now.Ticks, ".csv");
foreach (KeyValuePair<string, List<Tuple<Enum, string, string, object>>> keyValuePair in keyValuePairs)
{
i += 1;
@params = (from l in keyValuePair.Value select l.Item1).Distinct().ToArray();
if (@params.Length != 1)
throw new Exception();
if (keyValuePair.Value[0].Item2 != keyValuePair.Key)
throw new Exception();
param = @params[0];
if (!(param is Description.Param.String))
stringBuilder.AppendLine($"\"{keyValuePair.Key}\";\"\";\"\";\"\";\"\";\"\";\"{i}\";\"{cellName}/{EquipmentElementName}/{keyValuePair.Key}\";\"\";\"{cellName}/{EquipmentElementName}/{_EventName}\";\"\";\"True\"");
else
{
description = keyValuePair.Value[0].Item3.Split('|')[0];
if (string.IsNullOrEmpty(description))
continue;
value = keyValuePair.Value[0].Item4;
stringBuilder.AppendLine($"\"'{description}'\";\"\";\"\";\"\";\"\";\"\";\"{i}\";\"{cellName}/{EquipmentElementName}/{value}\";\"\";\"{cellName}/{EquipmentElementName}/{_EventName}\";\"\";\"True\"");
}
}
if (keyValuePairs.Any())
File.WriteAllText(shareFile, stringBuilder.ToString());
}
public Dictionary<string, string> GetDisplayNamesJsonElement(ILogic logic)
{
Dictionary<string, string> results = new Dictionary<string, string>();
IProcessDataDescription processDataDescription = ProcessDataDescription.GetDisplayNames(logic, this);
string json = JsonSerializer.Serialize(processDataDescription, processDataDescription.GetType());
JsonElement jsonElement = JsonSerializer.Deserialize<JsonElement>(json);
foreach (JsonProperty jsonProperty in jsonElement.EnumerateObject())
{
if (!results.ContainsKey(jsonProperty.Name))
results.Add(jsonProperty.Name, string.Empty);
if (jsonProperty.Value is JsonElement jsonPropertyValue)
results[jsonProperty.Name] = jsonPropertyValue.ToString();
}
return results;
}
public List<string> GetIgnoreParameterNames(ILogic logic, Test test, bool includePairedParameterNames)
{
List<string> results = ProcessDataDescription.GetIgnoreParameterNames(logic, this, test);
if (includePairedParameterNames)
{
string value;
List<string> pairedParameterNames = ProcessDataDescription.GetPairedParameterNames(logic, this);
IProcessDataDescription processDataDescription = ProcessDataDescription.GetDisplayNames(logic, this);
string json = JsonSerializer.Serialize(processDataDescription, processDataDescription.GetType());
object @object = JsonSerializer.Deserialize<object>(json);
if (!(@object is JsonElement jsonElement))
throw new Exception();
foreach (JsonProperty jsonProperty in jsonElement.EnumerateObject())
{
if (jsonProperty.Value.ValueKind == JsonValueKind.Object || jsonProperty.Value.ValueKind == JsonValueKind.Array)
throw new Exception();
value = jsonProperty.Value.ToString();
if (!results.Contains(jsonProperty.Name) && pairedParameterNames.Contains(jsonProperty.Name) && (string.IsNullOrEmpty(value) || value[0] == '|'))
results.Add(jsonProperty.Name);
}
}
return results;
}
public List<Duplicator.Description> GetProcessDataDescriptions(JsonElement jsonElement)
{
List<Duplicator.Description> results;
if (jsonElement.ValueKind != JsonValueKind.Array)
throw new Exception();
JsonSerializerOptions jsonSerializerOptions = new JsonSerializerOptions { NumberHandling = JsonNumberHandling.AllowReadingFromString | JsonNumberHandling.WriteAsString };
results = JsonSerializer.Deserialize<List<Duplicator.Description>>(jsonElement.ToString(), jsonSerializerOptions);
return results;
}
public Dictionary<Test, List<Duplicator.Description>> GetKeyValuePairs(List<Duplicator.Description> processDataDescriptions)
{
Dictionary<Test, List<Duplicator.Description>> results = new Dictionary<Test, List<Duplicator.Description>>();
Test testKey;
for (int i = 0; i < processDataDescriptions.Count; i++)
{
testKey = (Test)processDataDescriptions[i].Test;
if (!results.ContainsKey(testKey))
results.Add(testKey, new List<Duplicator.Description>());
results[testKey].Add(processDataDescriptions[i]);
}
return results;
}
public Dictionary<string, List<string>> GetKeyValuePairs(JsonElement jsonElement, List<Duplicator.Description> processDataDescriptions, Test test)
{
Dictionary<string, List<string>> results = new Dictionary<string, List<string>>();
Test testKey;
if (jsonElement.ValueKind != JsonValueKind.Array)
throw new Exception();
JsonElement[] jsonElements = jsonElement.EnumerateArray().ToArray();
if (processDataDescriptions.Count != jsonElements.Length)
throw new Exception();
for (int i = 0; i < processDataDescriptions.Count; i++)
{
testKey = (Test)processDataDescriptions[i].Test;
if (testKey != test)
continue;
foreach (JsonProperty jsonProperty in jsonElements[i].EnumerateObject())
{
if (jsonProperty.Value.ValueKind == JsonValueKind.Object || jsonProperty.Value.ValueKind == JsonValueKind.Array)
throw new Exception();
if (!results.ContainsKey(jsonProperty.Name))
results.Add(jsonProperty.Name, new List<string>());
results[jsonProperty.Name].Add(jsonProperty.Value.ToString());
}
}
return results;
}
protected void VerifyProcessDataDescription(ILogic logic)
{
string description;
bool allowNull = false;
JsonElement defaultJsonElement = GetDefaultJsonElement(logic);
Dictionary<string, string> keyValuePairs = GetDisplayNamesJsonElement(logic);
JsonProperty[] jsonProperties = defaultJsonElement.EnumerateObject().ToArray();
foreach (JsonProperty jsonProperty in jsonProperties)
{
if (jsonProperty.Value.ValueKind == JsonValueKind.Null && !allowNull)
throw new Exception();
if (!(jsonProperty.Value.ValueKind is JsonValueKind.String) || !keyValuePairs.ContainsKey(jsonProperty.Name))
description = string.Empty;
else
description = keyValuePairs[jsonProperty.Name].Split('|')[0];
}
}
public List<IProcessDataDescription> GetIProcessDataDescriptions(JsonElement jsonElement)
{
List<IProcessDataDescription> results = new List<IProcessDataDescription>();
if (jsonElement.ValueKind != JsonValueKind.Array)
throw new Exception();
object @object;
Type type = ProcessDataDescription.GetType();
JsonElement[] jsonElements = jsonElement.EnumerateArray().ToArray();
JsonSerializerOptions jsonSerializerOptions = new JsonSerializerOptions { NumberHandling = JsonNumberHandling.AllowReadingFromString | JsonNumberHandling.WriteAsString };
for (int i = 0; i < jsonElements.Length; i++)
{
@object = JsonSerializer.Deserialize(jsonElements[i].ToString(), type, jsonSerializerOptions);
if (!(@object is IProcessDataDescription processDataDescription))
continue;
results.Add(processDataDescription);
}
return results;
}
}
}

13
Adaptation/Shared/Metrology/EventName.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public enum EventName
{
FileRead,
FileReadDaily,
FileReadMonthly,
FileReadVerification,
FileReadWeekly
}
}

45
Adaptation/Shared/Metrology/ILogic.cs Normal file
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using Adaptation.Eaf.Management.ConfigurationData.CellAutomation;
using Adaptation.Ifx.Eaf.EquipmentConnector.File.Configuration;
using System;
using System.Collections.Generic;
using System.IO;
using System.Reflection;
using System.Text.Json;
namespace Adaptation.Shared.Metrology
{
public interface ILogic
{
ILogic ShallowCopy();
Logistics Logistics { get; }
void ConfigurationRestore();
string GetConfigurationErrorTargetFileLocation();
string GetConfigurationSourceFileLocation();
string GetConfigurationTarget2FileLocation();
string GetConfigurationTargetFileLocation();
string GetConfigurationTargetFileName();
Tuple<string, JsonElement?, List<FileInfo>> GetExtractResult(string reportFullPath, string eventName);
object GetFilePathGeneratorInfo(string reportFullPath, bool isErrorFile);
string GetReportFullPath(Dictionary<string, object> keyValuePairs);
string GetTarget2FileLocation();
void Move(string reportFullPath, Tuple<string, JsonElement?, List<FileInfo>> extractResults, Exception exception = null);
Tuple<string, JsonElement?, List<FileInfo>> ReExtract(string searchDirectory, string sourceFileFilter);
void ReflectionCreateSelfDescription(string equipmentElementName, int? input, string cellName, string debugConfig, string[] strings, bool[] booleans, long[] numbers, string[] enums);
ConfigDataBase ReflectionCreateSelfDescriptionV2(string json);
string ResolveErrorTargetPlaceHolders(string reportFullPath, bool createDirectory = true, string fileFoundPath = "");
string ResolveSourcePlaceHolders(string reportFullPath, bool createDirectory = true);
string ResolveTarget2PlaceHolders(string reportFullPath, bool createDirectory = true, string fileFoundPath = "");
string ResolveTargetPlaceHolders(string reportFullPath, bool createDirectory = true, string fileFoundPath = "");
void SetFileParameter(string key, string value);
void SetFileParameterLotID(string value, bool includeLogisticsSequence = false);
void SetFileParameterLotIDToLogisticsMID(bool includeLogisticsSequence = true);
void SetFileParameterSystemDateTimeToLogisticsSequence();
void SetPlaceHolder(string reportFullPath, string key, string value);
void SetTarget2FileLocation(string value);
}
}

14
Adaptation/Shared/Metrology/MET08AFMD3100.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08AFMD3100
{
public enum Test
{
AFMRoughness = Metrology.Test.AFMRoughness
}
}
}

14
Adaptation/Shared/Metrology/MET08ANLYSDIFAAST230.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08ANLYSDIFAAST230
{
public enum Test
{
DiffusionLength = Metrology.Test.DiffusionLength
}
}
}

16
Adaptation/Shared/Metrology/MET08BVHGPROBE.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08BVHGPROBE
{
public enum Test
{
BreakdownVoltageCenter = Metrology.Test.BreakdownVoltageCenter,
BreakdownVoltageEdge = Metrology.Test.BreakdownVoltageEdge,
BreakdownVoltageMiddle8in = Metrology.Test.BreakdownVoltageMiddle8in
}
}
}

16
Adaptation/Shared/Metrology/MET08CVHGPROBE802B150.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08CVHGPROBE802B150
{
public enum Test
{
CV = Metrology.Test.CV,
MonthlyCV = Metrology.Test.MonthlyCV,
WeeklyCV = Metrology.Test.WeeklyCV
}
}
}

18
Adaptation/Shared/Metrology/MET08DDINCAN8620.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08DDINCAN8620
{
public enum Test
{
CandelaKlarfDC = Metrology.Test.CandelaKlarfDC,
CandelaLaser = Metrology.Test.CandelaLaser,
CandelaVerify = Metrology.Test.CandelaVerify,
CandelaPSL = Metrology.Test.CandelaPSL,
CandelaProdU = Metrology.Test.CandelaProdU
}
}
}

14
Adaptation/Shared/Metrology/MET08DDUPSFS6420.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08DDUPSFS6420
{
public enum Test
{
Tencor = Metrology.Test.Tencor
}
}
}

14
Adaptation/Shared/Metrology/MET08DDUPSP1TBI.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08DDUPSP1TBI
{
public enum Test
{
SP1 = Metrology.Test.SP1
}
}
}

14
Adaptation/Shared/Metrology/MET08EBEAMINTEGRITY26.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08EBEAMINTEGRITY26
{
public enum Test
{
Denton = Metrology.Test.Denton
}
}
}

16
Adaptation/Shared/Metrology/MET08HALLHL5580.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08HALLHL5580
{
public enum Test
{
Hall = Metrology.Test.Hall,
MonthlyHall = Metrology.Test.MonthlyHall,
WeeklyHall = Metrology.Test.WeeklyHall
}
}
}

14
Adaptation/Shared/Metrology/MET08MESMICROSCOPE.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08MESMICROSCOPE
{
public enum Test
{
Microscope = Metrology.Test.Microscope
}
}
}

15
Adaptation/Shared/Metrology/MET08NDFRESIMAP151C.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08NDFRESIMAP151C
{
public enum Test
{
Lehighton = Metrology.Test.Lehighton,
VerificationLehighton = Metrology.Test.VerificationLehighton
}
}
}

20
Adaptation/Shared/Metrology/MET08PLMAPRPM.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08PLMAPRPM
{
public enum Test
{
RPMXY = Metrology.Test.RPMXY,
RPMAverage = Metrology.Test.RPMAverage,
RPMPLRatio = Metrology.Test.RPMPLRatio,
DailyRPMXY = Metrology.Test.DailyRPMXY,
DailyRPMAverage = Metrology.Test.DailyRPMAverage,
DailyRPMPLRatio = Metrology.Test.DailyRPMPLRatio,
VerificationRPM = Metrology.Test.VerificationRPM
}
}
}

14
Adaptation/Shared/Metrology/MET08PRFUSB4000.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08PRFUSB4000
{
public enum Test
{
Photoreflectance = Metrology.Test.Photoreflectance
}
}
}

14
Adaptation/Shared/Metrology/MET08RESIHGCV.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08RESIHGCV
{
public enum Test
{
HgCV = Metrology.Test.HgCV
}
}
}

14
Adaptation/Shared/Metrology/MET08RESIMAPCDE.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08RESIMAPCDE
{
public enum Test
{
CDE = Metrology.Test.CDE
}
}
}

14
Adaptation/Shared/Metrology/MET08THFTIRQS408M.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08THFTIRQS408M
{
public enum Test
{
BioRadQS408M = Metrology.Test.BioRadQS408M
}
}
}

14
Adaptation/Shared/Metrology/MET08THFTIRSTRATUS.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08THFTIRSTRATUS
{
public enum Test
{
BioRadStratus = Metrology.Test.BioRadStratus
}
}
}

14
Adaptation/Shared/Metrology/MET08UVH44GS100M.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08UVH44GS100M
{
public enum Test
{
UV = Metrology.Test.UV
}
}
}

14
Adaptation/Shared/Metrology/MET08VPDSUBCON.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08VPDSUBCON
{
public enum Test
{
VpdIcpmsAnalyte = Metrology.Test.VpdIcpmsAnalyte
}
}
}

15
Adaptation/Shared/Metrology/MET08WGEOMX203641Q.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08WGEOMX203641Q
{
public enum Test
{
WarpAndBow = Metrology.Test.WarpAndBow,
VerificationWarpAndBow = Metrology.Test.VerificationWarpAndBow
}
}
}

23
Adaptation/Shared/Metrology/MET08XRDXPERTPROMRDXL.cs Normal file
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namespace Adaptation.Shared.Metrology
{
public class MET08XRDXPERTPROMRDXL
{
public enum Test
{
XRDXY = Metrology.Test.XRDXY,
XRDWeightedAverage = Metrology.Test.XRDWeightedAverage,
MonthlyXRD = Metrology.Test.MonthlyXRD,
WeeklyXRD = Metrology.Test.WeeklyXRD,
WeeklyXRDAIcomp = Metrology.Test.WeeklyXRDAIcomp,
WeeklyXRDFWHM002 = Metrology.Test.WeeklyXRDFWHM002,
WeeklyXRDFWHM105 = Metrology.Test.WeeklyXRDFWHM105,
WeeklyXRDSLStks = Metrology.Test.WeeklyXRDSLStks,
WeeklyXRDXRR = Metrology.Test.WeeklyXRDXRR,
XRDXRAY = Metrology.Test.XRDXRAY
}
}
}

36
Adaptation/Shared/Metrology/OIGaNViewer.cs Normal file
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using System;
namespace Adaptation.Shared.Metrology
{
internal class OIGaNViewer
{
private static System.Net.WebClient _WebClient;
internal static string WebClientDownloadString(string baseAddress, ConfigDataBase configDataBase, string reportFullPath, bool isErrorFile, string target)
{
string result = string.Empty;
if (System.Diagnostics.Debugger.IsAttached)
result = DateTime.Now.ToString();
else
{
if (string.IsNullOrEmpty(baseAddress) || !baseAddress.Contains(":") || !baseAddress.Contains("."))
throw new Exception("Invalid URL");
try
{
if (_WebClient is null)
_WebClient = new System.Net.WebClient();
string address = string.Concat(baseAddress, "/Home/ExtractMove/?equipment_connection=", configDataBase.GetEquipmentType(), "&is_error_file=", isErrorFile);
_WebClient.OpenRead(address);
result = _WebClient.ResponseHeaders["Date"];
_WebClient.CancelAsync();
}
catch (Exception) { }
}
return result;
}
}
}

110
Adaptation/Shared/Metrology/ProcessData.Duplicator.cs Normal file
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using System;
using System.Collections.Generic;
using System.Text.Json;
namespace Adaptation.Shared.Metrology
{
public class Duplicator
{
public class Description : IProcessDataDescription
{
public int Test { get; set; }
public int Count { get; set; }
public int Index { get; set; }
//
public string EventName { get; set; }
public string NullData { get; set; }
public string JobID { get; set; }
public string Sequence { get; set; }
public string MesEntity { get; set; }
public string ReportFullPath { get; set; }
public string ProcessJobID { get; set; }
public string MID { get; set; }
public string Date { get; set; } //2021-02-22
public string GetEventDescription() { return "File Has been read and parsed"; }
public List<string> GetHeaderNames(ILogic logic, ConfigDataBase configDataBase)
{
List<string> results = new List<string>();
return results;
}
public List<string> GetDetailNames(ILogic logic, ConfigDataBase configDataBase)
{
List<string> results = new List<string>();
return results;
}
public List<string> GetParameterNames(ILogic logic, ConfigDataBase configDataBase)
{
List<string> results = new List<string>();
return results;
}
public List<string> GetPairedParameterNames(ILogic logic, ConfigDataBase configDataBase)
{
List<string> results = new List<string>();
return results;
}
public List<string> GetIgnoreParameterNames(ILogic logic, ConfigDataBase configDataBase, Test test)
{
List<string> results = new List<string>();
return results;
}
public List<string> GetNames(ILogic logic, ConfigDataBase configDataBase)
{
List<string> results = new List<string>();
IProcessDataDescription processDataDescription = GetDefault(logic, configDataBase);
string json = JsonSerializer.Serialize(processDataDescription, processDataDescription.GetType());
object @object = JsonSerializer.Deserialize<object>(json);
if (!(@object is JsonElement jsonElement))
throw new Exception();
foreach (JsonProperty jsonProperty in jsonElement.EnumerateObject())
results.Add(jsonProperty.Name);
return results;
}
public IProcessDataDescription GetDisplayNames(ILogic logic, ConfigDataBase configDataBase)
{
Description result = new Description();
return result;
}
public IProcessDataDescription GetDefault(ILogic logic, ConfigDataBase configDataBase)
{
Description result = new Description
{
Test = -1,
Count = 0,
Index = -1,
//
EventName = configDataBase.GetEventName(),
NullData = string.Empty,
JobID = logic.Logistics.JobID,
Sequence = logic.Logistics.Sequence.ToString(),
MesEntity = logic.Logistics.MesEntity,
ReportFullPath = logic.Logistics.ReportFullPath,
ProcessJobID = logic.Logistics.ProcessJobID,
MID = logic.Logistics.MID,
Date = logic.Logistics.DateTimeFromSequence.ToUniversalTime().ToString("MM/dd/yyyy HH:mm:ss"),
};
return result;
}
public List<IProcessDataDescription> GetDescription(ILogic logic, ConfigDataBase configDataBase, List<Test> tests, IProcessData iProcessData)
{
List<IProcessDataDescription> results = new List<IProcessDataDescription>();
return results;
}
}
}
}

527
Adaptation/Shared/Metrology/ProcessDataStandardFormat.cs Normal file
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using System;
using System.Collections.Generic;
using System.Globalization;
using System.IO;
using System.Linq;
using System.Text;
using System.Text.Json;
namespace Adaptation.Shared.Metrology
{
public class ProcessDataStandardFormat
{
public const string RecordStart = "RECORD_START";
public enum SearchFor
{
EquipmentIntegration = 1,
BusinessIntegration = 2,
SystemExport = 3,
Archive = 4
}
public static string GetPDSFText(ILogic logic, string eventName, string equipmentType, JsonElement jsonElement, string logisticsText)
{
string result;
if (jsonElement.ValueKind != JsonValueKind.Array)
result = string.Empty;
else
{
int columns = 0;
List<string> lines;
string endOffset = "E#######T";
string dataOffset = "D#######T";
string headerOffset = "H#######T";
string format = "MM/dd/yyyy HH:mm:ss";
StringBuilder stringBuilder = new StringBuilder();
lines = new string[] { "HEADER_TAG\tHEADER_VALUE", "FORMAT\t2.00", "NUMBER_PASSES\t0001", string.Concat("HEADER_OFFSET\t", headerOffset), string.Concat("DATA_OFFSET\t", dataOffset), string.Concat("END_OFFSET\t", endOffset) }.ToList();
stringBuilder.Append("\"Time\"").Append('\t');
stringBuilder.Append("\"A_LOGISTICS\"").Append('\t');
stringBuilder.Append("\"B_LOGISTICS\"").Append('\t');
JsonElement[] jsonElements = jsonElement.EnumerateArray().ToArray();
for (int i = 0; i < jsonElements.Length;)
{
foreach (JsonProperty jsonProperty in jsonElements[0].EnumerateObject())
{
columns += 1;
stringBuilder.Append("\"").Append(jsonProperty.Name).Append("\"").Append('\t');
}
break;
}
stringBuilder.Remove(stringBuilder.Length - 1, 1);
lines.Add(stringBuilder.ToString());
for (int i = 0; i < jsonElements.Length; i++)
{
stringBuilder.Clear();
stringBuilder.Append("0.1").Append('\t');
stringBuilder.Append("1").Append('\t');
stringBuilder.Append("2").Append('\t');
foreach (JsonProperty jsonProperty in jsonElements[i].EnumerateObject())
stringBuilder.Append(jsonProperty.Value).Append('\t');
stringBuilder.Remove(stringBuilder.Length - 1, 1);
lines.Add(stringBuilder.ToString());
}
lines.Add(string.Concat("NUM_DATA_ROWS ", jsonElements.Length.ToString().PadLeft(9, '0')));
lines.Add(string.Concat("NUM_DATA_COLUMNS ", (columns + 3).ToString().PadLeft(9, '0')));
lines.Add("DELIMITER ;");
lines.Add(string.Concat("START_TIME_FORMAT ", format));
lines.Add(string.Concat("START_TIME ", logic.Logistics.DateTimeFromSequence.ToString(format))); //12/26/2019 15:22:44
lines.Add(string.Concat("LOGISTICS_COLUMN", '\t', "A_LOGISTICS"));
lines.Add(string.Concat("LOGISTICS_COLUMN", '\t', "B_LOGISTICS"));
if (!string.IsNullOrEmpty(logisticsText))
lines.Add(logisticsText);
else
{
lines.Add(string.Concat("LOGISTICS_1", '\t', "A_CHAMBER=;A_INFO=", eventName, ";A_INFO2=", equipmentType, ";A_JOBID=", logic.Logistics.JobID, ";A_MES_ENTITY=", logic.Logistics.MesEntity, ";A_MID=", logic.Logistics.MID, ";A_NULL_DATA=", logic.Logistics.NullData, ";A_PPID=NO_PPID;A_PROCESS_JOBID=", logic.Logistics.ProcessJobID, ";A_PRODUCT=;A_SEQUENCE=", logic.Logistics.Sequence, ";A_WAFER_ID=;"));
lines.Add(string.Concat("LOGISTICS_2", '\t', "B_CHAMBER=;B_INFO=", eventName, ";B_INFO2=", equipmentType, ";B_JOBID=", logic.Logistics.JobID, ";B_MES_ENTITY=", logic.Logistics.MesEntity, ";B_MID=", logic.Logistics.MID, ";B_NULL_DATA=", logic.Logistics.NullData, ";B_PPID=NO_PPID;B_PROCESS_JOBID=", logic.Logistics.ProcessJobID, ";B_PRODUCT=;B_SEQUENCE=", logic.Logistics.Sequence, ";B_WAFER_ID=;"));
lines.Add("END_HEADER");
}
stringBuilder.Clear();
foreach (string line in lines)
stringBuilder.AppendLine(line);
result = stringBuilder.ToString();
result = result.Replace(headerOffset, result.IndexOf("NUM_DATA_ROWS").ToString().PadLeft(9, '0')).
Replace(dataOffset, result.IndexOf('"').ToString().PadLeft(9, '0')).
Replace(endOffset, result.Length.ToString().PadLeft(9, '0'));
}
return result;
}
public static Tuple<string, string[], string[]> GetLogisticsColumnsAndBody(string reportFullPath, string[] lines = null)
{
string segment;
List<string> body = new List<string>();
StringBuilder logistics = new StringBuilder();
if (lines is null)
lines = File.ReadAllLines(reportFullPath);
string[] segments;
if (lines.Length < 7)
segments = new string[] { };
else
segments = lines[6].Trim().Split('\t');
List<string> columns = new List<string>();
for (int c = 0; c < segments.Length; c++)
{
segment = segments[c].Substring(1, segments[c].Length - 2);
if (!columns.Contains(segment))
columns.Add(segment);
else
{
for (short i = 1; i < short.MaxValue; i++)
{
segment = string.Concat(segment, "_", i);
if (!columns.Contains(segment))
{
columns.Add(segment);
break;
}
}
}
}
bool lookForLogistics = false;
for (int r = 7; r < lines.Count(); r++)
{
if (lines[r].StartsWith("NUM_DATA_ROWS"))
lookForLogistics = true;
if (!lookForLogistics)
{
body.Add(lines[r]);
continue;
}
if (lines[r].StartsWith("LOGISTICS_1"))
{
for (int i = r; i < lines.Count(); i++)
{
if (lines[r].StartsWith("END_HEADER"))
break;
logistics.AppendLine(lines[i]);
}
break;
}
}
return new Tuple<string, string[], string[]>(logistics.ToString(), columns.ToArray(), body.ToArray());
}
public static JsonElement GetArray(Tuple<string, string[], string[]> pdsf, bool lookForNumbers = false)
{
JsonElement result;
string logistics = pdsf.Item1;
string[] columns = pdsf.Item2;
string[] bodyLines = pdsf.Item3;
if (!bodyLines.Any() || !bodyLines[0].Contains('\t'))
result = JsonSerializer.Deserialize<JsonElement>("[]");
else
{
string value;
string[] segments;
StringBuilder stringBuilder = new StringBuilder();
foreach (string bodyLine in bodyLines)
{
stringBuilder.Append('{');
segments = bodyLine.Trim().Split('\t');
if (!lookForNumbers)
{
for (int c = 1; c < segments.Length; c++)
{
value = segments[c].Replace("\"", "\\\"").Replace("\\", "\\\\");
stringBuilder.Append('"').Append(columns[c]).Append("\":\"").Append(value).Append("\",");
}
}
else
{
for (int c = 1; c < segments.Length; c++)
{
value = segments[c].Replace("\"", "\\\"").Replace("\\", "\\\\");
if (string.IsNullOrEmpty(value))
stringBuilder.Append('"').Append(columns[c]).Append("\":").Append(value).Append("null,");
else if (value.All(char.IsDigit))
stringBuilder.Append('"').Append(columns[c]).Append("\":").Append(value).Append(",");
else
stringBuilder.Append('"').Append(columns[c]).Append("\":\"").Append(value).Append("\",");
}
}
stringBuilder.Remove(stringBuilder.Length - 1, 1);
stringBuilder.AppendLine("},");
}
stringBuilder.Remove(stringBuilder.Length - 3, 3);
result = JsonSerializer.Deserialize<JsonElement>(string.Concat("[", stringBuilder, "]"));
}
return result;
}
public static Dictionary<string, List<string>> GetDictionary(Tuple<string, string[], string[]> pdsf)
{
Dictionary<string, List<string>> results = new Dictionary<string, List<string>>();
string[] segments;
string[] columns = pdsf.Item2;
string[] bodyLines = pdsf.Item3;
foreach (string column in columns)
results.Add(column, new List<string>());
foreach (string bodyLine in bodyLines)
{
segments = bodyLine.Split('\t');
for (int c = 1; c < segments.Length; c++)
{
if (c >= columns.Length)
continue;
results[columns[c]].Add(segments[c]);
}
}
return results;
}
public static Tuple<string, Dictionary<Test, Dictionary<string, List<string>>>> GetTestDictionary(Tuple<string, string[], string[]> pdsf)
{
Dictionary<Test, Dictionary<string, List<string>>> results = new Dictionary<Test, Dictionary<string, List<string>>>();
string testColumn = Description.RowColumn.Test.ToString();
Dictionary<string, List<string>> keyValuePairs = GetDictionary(pdsf);
if (!keyValuePairs.ContainsKey(testColumn))
throw new Exception();
int min;
int max;
Test testKey;
List<string> vs;
string columnKey;
Dictionary<Test, List<int>> tests = new Dictionary<Test, List<int>>();
for (int i = 0; i < keyValuePairs[testColumn].Count; i++)
{
if (Enum.TryParse(keyValuePairs[testColumn][i], out Test test))
{
if (!results.ContainsKey(test))
{
tests.Add(test, new List<int>());
results.Add(test, new Dictionary<string, List<string>>());
}
tests[test].Add(i);
}
}
foreach (KeyValuePair<Test, List<int>> testKeyValuePair in tests)
{
testKey = testKeyValuePair.Key;
min = testKeyValuePair.Value.Min();
max = testKeyValuePair.Value.Max() + 1;
foreach (KeyValuePair<string, List<string>> keyValuePair in keyValuePairs)
results[testKey].Add(keyValuePair.Key, new List<string>());
foreach (KeyValuePair<string, List<string>> keyValuePair in keyValuePairs)
{
vs = keyValuePair.Value;
columnKey = keyValuePair.Key;
for (int i = min; i < max; i++)
{
if (vs.Count > i)
results[testKey][columnKey].Add(vs[i]);
else
results[testKey][columnKey].Add(string.Empty);
}
}
}
return new Tuple<string, Dictionary<Test, Dictionary<string, List<string>>>>(pdsf.Item1, results);
}
private static string GetString(SearchFor searchFor, bool addSpaces, char separator = ' ')
{
if (!addSpaces)
return string.Concat(((int)searchFor).ToString().PadLeft(2, '0'), searchFor);
else
return string.Concat(((int)searchFor).ToString().PadLeft(2, '0'), separator, searchFor.ToString().Replace("In", string.Concat(separator, "In")).Replace("Ex", string.Concat(separator, "Ex")));
}
public static string EquipmentIntegration(bool addSpaces = true, char separator = ' ')
{
return GetString(SearchFor.EquipmentIntegration, addSpaces, separator);
}
public static string BusinessIntegration(bool addSpaces = true, char separator = ' ')
{
return GetString(SearchFor.BusinessIntegration, addSpaces, separator);
}
public static string SystemExport(bool addSpaces = true, char separator = ' ')
{
return GetString(SearchFor.SystemExport, addSpaces, separator);
}
public static string Archive(bool addSpaces = true, char separator = ' ')
{
return GetString(SearchFor.Archive, addSpaces, separator);
}
public static string GetLines(Logistics logistics, IScopeInfo scopeInfo, Dictionary<string, List<string>> keyValuePairs, Enum[] enumColumns, string dateFormat, string timeFormat, Column[] pairedColumns, bool useDateTimeFromSequence = true, string format = "", Dictionary<Column, string> alternateDisplayName = null, Enum[] ignoreColumns = null)
{
StringBuilder result = new StringBuilder();
if (useDateTimeFromSequence && !string.IsNullOrEmpty(format))
throw new Exception();
else if (!useDateTimeFromSequence && string.IsNullOrEmpty(format))
throw new Exception();
int start;
string ckey;
string pKey;
int pairedColumnsCount;
string firstDuplicate = "_1";
if (ignoreColumns is null)
ignoreColumns = new Enum[] { };
if (alternateDisplayName is null)
alternateDisplayName = new Dictionary<Column, string>();
string columnDate = Column.Date.ToString();
string columnTime = Column.Time.ToString();
List<string> columnKeys = new List<string>();
foreach (Enum item in enumColumns)
{
if (ignoreColumns.Contains(item))
continue;
columnKeys.Add(item.ToString());
}
result.AppendLine(scopeInfo.Header);
StringBuilder line = new StringBuilder();
int count = keyValuePairs[Description.RowColumn.Count.ToString()].Count();
string nullData;
if (logistics.NullData is null)
nullData = string.Empty;
else
nullData = logistics.NullData.ToString();
if (pairedColumns is null)
{
start = -1;
pairedColumnsCount = 0;
}
else
{
start = 0;
pairedColumnsCount = pairedColumns.Length;
}
for (int r = 0; r < count; r++)
{
for (int p = start; p < pairedColumnsCount; p++)
{
if (pairedColumnsCount == 0)
pKey = string.Empty;
else if (!(ignoreColumns is null) && ignoreColumns.Contains(pairedColumns[p]))
continue;
else
{
pKey = pairedColumns[p].ToString();
if (!keyValuePairs.ContainsKey(pKey))
continue;
else if (keyValuePairs[pKey][r] == nullData)
continue;
}
if (pairedColumnsCount == 0 || !string.IsNullOrEmpty(pKey))
{
line.Clear();
line.Append("!");
for (int i = 0; i < columnKeys.Count; i++)
{
ckey = columnKeys[i];
if (!keyValuePairs.ContainsKey(ckey))
line.Append(string.Empty);
else
{
if (useDateTimeFromSequence && ckey == columnDate)
line.Append(logistics.DateTimeFromSequence.ToString(dateFormat));
else if (useDateTimeFromSequence && ckey == columnTime)
line.Append(logistics.DateTimeFromSequence.ToString(timeFormat));
else if (!useDateTimeFromSequence && ckey == columnDate && keyValuePairs[ckey][r].Length == format.Length)
line.Append(DateTime.ParseExact(keyValuePairs[ckey][r], format, CultureInfo.InvariantCulture).ToString(dateFormat));
else if (!useDateTimeFromSequence && ckey == columnTime && keyValuePairs.ContainsKey(string.Concat(ckey, firstDuplicate)) && keyValuePairs[string.Concat(ckey, firstDuplicate)][r].Length == format.Length)
line.Append(DateTime.ParseExact(keyValuePairs[string.Concat(ckey, firstDuplicate)][r], format, CultureInfo.InvariantCulture).ToString(timeFormat));
else
line.Append(keyValuePairs[ckey][r]);
}
line.Append(';');
}
if (pairedColumnsCount > 0)
{
if (!alternateDisplayName.ContainsKey(pairedColumns[p]))
line.Append(pairedColumns[p].GetDiplayName());
else
line.Append(alternateDisplayName[pairedColumns[p]]);
line.Append(';');
line.Append(keyValuePairs[pKey][r]);
line.Append(';');
}
line.Remove(line.Length - 1, 1);
result.AppendLine(line.ToString());
}
}
}
return result.ToString();
}
public static string GetLines(Logistics logistics, IScopeInfo scopeInfo, List<string> names, Dictionary<string, List<string>> keyValuePairs, string dateFormat, string timeFormat, List<string> pairedParameterNames, bool useDateTimeFromSequence = true, string format = "", List<string> ignoreParameterNames = null)
{
StringBuilder result = new StringBuilder();
if (ignoreParameterNames is null)
ignoreParameterNames = new List<string>();
if (useDateTimeFromSequence && !string.IsNullOrEmpty(format))
throw new Exception();
else if (!useDateTimeFromSequence && string.IsNullOrEmpty(format))
throw new Exception();
string nullData;
const string columnDate = "Date";
const string columnTime = "Time";
const string firstDuplicate = "_1";
result.AppendLine(scopeInfo.Header);
StringBuilder line = new StringBuilder();
if (logistics.NullData is null)
nullData = string.Empty;
else
nullData = logistics.NullData.ToString();
int count = (from l in keyValuePairs select l.Value.Count).Min();
for (int r = 0; r < count; r++)
{
line.Clear();
line.Append("!");
foreach (KeyValuePair<string, List<string>> keyValuePair in keyValuePairs)
{
if (!names.Contains(keyValuePair.Key))
continue;
if (ignoreParameterNames.Contains(keyValuePair.Key))
continue;
if (pairedParameterNames.Contains(keyValuePair.Key))
{
if (string.IsNullOrEmpty(keyValuePair.Value[r]) || keyValuePair.Value[r] == nullData)
continue;
else
result.Append(line).Append(keyValuePair.Key).Append(';').AppendLine(keyValuePair.Value[r]);
}
else
{
if (useDateTimeFromSequence && keyValuePair.Key == columnDate)
line.Append(logistics.DateTimeFromSequence.ToString(dateFormat));
else if (useDateTimeFromSequence && keyValuePair.Key == columnTime)
line.Append(logistics.DateTimeFromSequence.ToString(timeFormat));
else if (!useDateTimeFromSequence && keyValuePair.Key == columnDate && keyValuePair.Value[r].Length == format.Length)
line.Append(DateTime.ParseExact(keyValuePair.Value[r], format, CultureInfo.InvariantCulture).ToString(dateFormat));
else if (!useDateTimeFromSequence && keyValuePair.Key == columnTime && keyValuePairs.ContainsKey(string.Concat(keyValuePair.Key, firstDuplicate)) && keyValuePairs[string.Concat(keyValuePair.Key, firstDuplicate)][r].Length == format.Length)
line.Append(DateTime.ParseExact(keyValuePairs[string.Concat(keyValuePair.Key, firstDuplicate)][r], format, CultureInfo.InvariantCulture).ToString(timeFormat));
else if (string.IsNullOrEmpty(keyValuePair.Value[r]) || keyValuePair.Value[r] == nullData)
line.Append(nullData);
else
line.Append(keyValuePair.Value[r]);
line.Append(';');
}
}
if (!pairedParameterNames.Any())
{
line.Remove(line.Length - 1, 1);
result.AppendLine(line.ToString());
}
}
return result.ToString();
}
public static List<string> PDSFToFixedWidth(string reportFullPath)
{
List<string> results = new List<string>();
if (!File.Exists(reportFullPath))
throw new Exception();
int[] group;
string line;
int startsAt = 0;
string[] segments;
int? currentGroup = null;
char inputSeperator = '\t';
char outputSeperator = '\t';
List<int> vs = new List<int>();
List<int[]> groups = new List<int[]>();
string[] lines = File.ReadAllLines(reportFullPath);
StringBuilder stringBuilder = new StringBuilder();
for (int i = 0; i < lines.Length; i++)
{
if (string.IsNullOrEmpty(lines[i]))
continue;
segments = lines[i].Split(inputSeperator);
if (currentGroup is null)
currentGroup = segments.Length;
if (segments.Length != currentGroup)
{
currentGroup = segments.Length;
groups.Add(new int[] { startsAt, i - 1 });
startsAt = i;
}
}
if (startsAt == lines.Length - 1 && lines[0].Split(inputSeperator).Length != currentGroup)
groups.Add(new int[] { lines.Length - 1, lines.Length - 1 });
for (int g = 0; g < groups.Count; g++)
{
vs.Clear();
group = groups[g];
line = lines[group[0]];
segments = line.Split(inputSeperator);
for (int s = 0; s < segments.Length; s++)
vs.Add(segments[s].Length);
for (int i = group[0]; i <= group[1]; i++)
{
line = lines[i];
segments = line.Split(inputSeperator);
for (int s = 0; s < segments.Length; s++)
{
if (vs[s] < segments[s].Length)
vs[s] = segments[s].Length;
}
}
stringBuilder.Clear();
for (int s = 0; s < segments.Length; s++)
stringBuilder.Append((s + 1).ToString().PadLeft(vs[s], ' ')).Append(outputSeperator);
stringBuilder.Remove(stringBuilder.Length - 1, 1);
results.Add(stringBuilder.ToString());
for (int i = group[0]; i <= group[1]; i++)
{
line = lines[i];
stringBuilder.Clear();
segments = line.Split(inputSeperator);
for (int s = 0; s < segments.Length; s++)
stringBuilder.Append(segments[s].PadLeft(vs[s], ' ')).Append(outputSeperator);
stringBuilder.Remove(stringBuilder.Length - 1, 1);
results.Add(stringBuilder.ToString());
}
results.Add(string.Empty);
}
return results;
}
}
}

409
Adaptation/Shared/Metrology/ScopeInfo.cs Normal file
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@ -0,0 +1,409 @@
using System;
using System.IO;
namespace Adaptation.Shared.Metrology
{
public class ScopeInfo : IScopeInfo
{
public Test Test { get; private set; }
public Enum Enum { get; private set; }
public string HTML { get; private set; }
public string Title { get; private set; }
public string FileName { get; private set; }
public int TestValue { get; private set; }
public string Header { get; private set; }
public string QueryFilter { get; private set; }
public string FileNameWithoutExtension { get; private set; }
public EquipmentType EquipmentType { get; private set; }
public ScopeInfo(ILogic logic, ConfigDataBase configDataBase, Test test)
{
Enum = test;
Test = test;
TestValue = (int)test;
if (configDataBase.EquipmentConnection is null)
EquipmentType = configDataBase.EquipmentType;
else
EquipmentType = configDataBase.EquipmentConnection.Value;
string eventName = GetEventNameAndSetRemaining();
if (eventName != configDataBase.GetEventName())
{
File.Move(logic.Logistics.ReportFullPath, Path.ChangeExtension(logic.Logistics.ReportFullPath, eventName));
throw new Exception();
}
else if (EquipmentType != configDataBase.EquipmentType && EquipmentType != configDataBase.EquipmentConnection)
{
File.Move(logic.Logistics.ReportFullPath, Path.ChangeExtension(logic.Logistics.ReportFullPath, EquipmentType.ToString()));
throw new Exception();
}
}
public ScopeInfo(ILogic logic, ConfigDataBase configDataBase, Test test, string fileName, string queryFilter, string title = "", string html = "")
{
Enum = test;
Test = test;
TestValue = (int)test;
if (configDataBase.EquipmentConnection is null)
EquipmentType = configDataBase.EquipmentType;
else
EquipmentType = configDataBase.EquipmentConnection.Value;
FileNameWithoutExtension = Path.GetFileNameWithoutExtension(fileName);
Header = string.Empty;
QueryFilter = queryFilter;
Title = title;
HTML = html;
FileName = fileName;
}
public ScopeInfo ShallowCopy()
{
return (ScopeInfo)MemberwiseClone();
}
private string GetEventNameAndSetRemaining()
{
EventName eventName;
switch (Test)
{
case Test.AFMRoughness:
EquipmentType = EquipmentType.MET08AFMD3100;
eventName = EventName.FileRead;
FileNameWithoutExtension = "afm_iqs_01";
Header = string.Empty;
QueryFilter = "AFM Roughness";
Title = "AFM";
HTML = @"GaN Epi Data\10 - afm.html";
break;
case Test.BreakdownVoltageCenter:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage";
Title = "Breakdown Voltage-Center";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.BreakdownVoltageEdge:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01_Edge";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage - Edge";
Title = "Breakdown Voltage-Edge";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.BreakdownVoltageMiddle8in:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01_Middle";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage - Middle";
Title = "Breakdown Voltage-Middle (8 in)";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.CV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150;
eventName = EventName.FileRead;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV";
HTML = @"GaN Epi Data\05 - cv.html";
break;
case Test.MonthlyCV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV Monthly Verification";
HTML = @"Metrology\07 - cv_verif_monthly.html";
break;
case Test.WeeklyCV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV Weekly Verification";
HTML = @"Metrology\16 - cv_verif_weekly.html";
break;
case Test.CandelaKlarfDC:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = "LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;Epi;SlipLines;Cracks;EpiDef;HazeSpot;SmallLpd;MediumLpd;LargeLpd;Cracks_A;Spirals;Craters;8620 Small;Pits;Tool ID;Defect Count";
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaLaser:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = "LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;Epi;SlipLines;Cracks;EpiDef;HazeSpot;SmallLpd;MediumLpd;LargeLpd;Cracks_A;Spirals;Craters;Pits;Tool ID;Defect Count";
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaVerify:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Concat("LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;RunID;Reactor;", "Slip Lines;Cracks;Epi Def;Haze Spot;Small LPD;Medium LPD;Large LPD;Cracks_A;Spirals;Craters;8620 Small;Pits;Tool ID;Defect Count");
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaPSL:
EquipmentType = EquipmentType.MET08DDINCAN8620_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Empty;
QueryFilter = "102-83nm";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaProdU:
EquipmentType = EquipmentType.MET08DDINCAN8620_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Empty;
QueryFilter = "SPE verification";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.Denton:
EquipmentType = EquipmentType.MET08EBEAMINTEGRITY26;
eventName = EventName.FileRead;
FileNameWithoutExtension = "denton_iqs_01";
Header = "Tool;fDate;Run;Recipe;Operator;Name;Value";
QueryFilter = "Denton_Voltage_AVG";
Title = "Denton Data";
HTML = @"Support Process\03 - ebeam02_denton_v1.html";
break;
case Test.Hall:
EquipmentType = EquipmentType.MET08HALLHL5580;
eventName = EventName.FileRead;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Data";
HTML = @"GaN Epi Data\04 - hall.html";
break;
case Test.MonthlyHall:
EquipmentType = EquipmentType.MET08HALLHL5580_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Monthly Verification";
HTML = @"Metrology\06 - hall_verif_monthly.html";
break;
case Test.WeeklyHall:
EquipmentType = EquipmentType.MET08HALLHL5580_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Weekly Verification";
HTML = @"Metrology\15 - hall_verif_weekly.html";
break;
case Test.Lehighton:
EquipmentType = EquipmentType.MET08NDFRESIMAP151C;
eventName = EventName.FileRead;
FileNameWithoutExtension = "lei_iqs_01";
Header = "Reactor;Date;Recipe;Lot;Pocket;Scribe;Tool;Name;Value";
QueryFilter = "LEI RS Average value";
Title = "Lehighton";
HTML = @"GaN Epi Data\13 - lehighton.html";
break;
case Test.VerificationLehighton:
EquipmentType = EquipmentType.MET08NDFRESIMAP151C_Verification;
eventName = EventName.FileRead;
FileNameWithoutExtension = "___";
Header = "Reactor;Date;Recipe;Lot;Pocket;Scribe;Tool;Name;Value";
QueryFilter = "___";
Title = "LEI Weekly Verification 2 Ohm cm";
HTML = @"Metrology\14 - lei_verif_weekly.html.html";
break;
case Test.Microscope:
EquipmentType = EquipmentType.MET08MESMICROSCOPE;
eventName = EventName.FileRead;
FileNameWithoutExtension = string.Empty;
Header = string.Empty;
QueryFilter = "Microscope Center 5x";
Title = "Total Microscope Defects";
HTML = string.Empty;
break;
case Test.RPMXY:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "RPM_Data";
Header = "Lot;Date;Recipe;Reactor;Scribe;Pocket;Tool;Name;Value";
QueryFilter = "Barrier_Composition_RPM_XY";
Title = "RPM XY Data ***&*** View Data";
HTML = @"GaN Epi Data\09 - rpm --- 08 - photoluminescence.html";
break;
case Test.RPMAverage:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "RPMdata-short";
Header = "fProductId;fDate;average;stdDev;fRecipeName;Reactor;g4Scribe;Pocket Number;Tool ID;Recipe From Rpm File";
QueryFilter = "Epi Thickness Mean";
Title = "RPM Average Data";
HTML = @"GaN Epi Data\09 - rpm.html";
break;
case Test.RPMPLRatio:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "PHOTOLUMINESCENCE_data-short";
Header = "fProductId;fDate;g4Scribe;fRecipeName;bandEdge_nm;bandEdge_V;yellowBand_Pmw;yellowBand_nm;yellowBand_V;Reactor;Pocket Number;Tool ID";
QueryFilter = "PL Ratio";
Title = "Photoluminescence: PL Ratio";
HTML = @"GaN Epi Data\08 - photoluminescence.html";
break;
case Test.DailyRPMXY:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "RPM_Data";
Header = "Lot;Date;Recipe;Reactor;Scribe;Pocket;Tool;Name;Value";
QueryFilter = "Barrier_Composition_RPM_XY";
Title = "";
HTML = @"Metrology\?";
break;
case Test.DailyRPMAverage:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "RPMdata-short";
Header = "fProductId;fDate;average;stdDev;fRecipeName;Reactor;g4Scribe;Pocket Number;Tool ID;Recipe From Rpm File";
QueryFilter = "Epi Thickness Mean";
Title = "";
HTML = @"Metrology\?";
break;
case Test.DailyRPMPLRatio:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "PHOTOLUMINESCENCE_data-short";
Header = "fProductId;fDate;g4Scribe;fRecipeName;bandEdge_nm;bandEdge_V;yellowBand_Pmw;yellowBand_nm;yellowBand_V;Reactor;Pocket Number;Tool ID";
QueryFilter = "PL Ratio";
Title = "RPM Daily Verification";
HTML = @"Metrology\17 - rpm_verif_daily.html";
break;
case Test.VerificationRPM:
EquipmentType = EquipmentType.MET08PLMAPRPM_Verification;
eventName = EventName.FileReadVerification;
FileNameWithoutExtension = "PhotoLuminescence_Ver";
Header = "Part;Process;Date;Test;Value";
QueryFilter = "PL Edge Wavelength";
Title = "PL Daily Verification - [PL Edge Wavelength]";
HTML = @"Metrology\18 - photoluminescence_verif_daily.html";
break;
case Test.Photoreflectance:
EquipmentType = EquipmentType.MET08PRFUSB4000;
eventName = EventName.FileRead;
FileNameWithoutExtension = "photoreflect_iqs_01";
Header = "Lot;Date;Part;Reactor;Scribe;Pocket;Tool;Point;WaferPosition_PR;PR_Peak";
QueryFilter = "PR Barrier Composition";
Title = "Photoreflectance 6 in, Photoreflectance 8 in";
HTML = @"GaN Epi Data\07 - photoreflectance.html";
break;
case Test.UV:
EquipmentType = EquipmentType.MET08UVH44GS100M;
eventName = EventName.FileRead;
FileNameWithoutExtension = "uv_iqs_01";
Header = string.Empty;
QueryFilter = "UV Broken";
Title = "UV";
HTML = @"GaN Epi Data\15 - uv 2.1.html";
break;
case Test.VpdIcpmsAnalyte:
EquipmentType = EquipmentType.MET08VPDSUBCON;
eventName = EventName.FileRead;
FileNameWithoutExtension = "VPD_iqs_01";
Header = "Reactor;RunID;RunDate;PartNumber;PocketNumber;WaferScribe;Analyte;Value";
QueryFilter = "Mg";
Title = "VpdIcpmsAnalyteData";
HTML = @"";
break;
case Test.WarpAndBow:
EquipmentType = EquipmentType.MET08WGEOMX203641Q;
eventName = EventName.FileRead;
FileNameWithoutExtension = "warp_iqs_01";
Header = "fDate;fRecipeName;fProductId;g4Scribe;warp;bow;tool;Reactor;Pocket ID;bow_range;BowX;BowY;CenterBow";
QueryFilter = "BowCenter";
Title = "Warp and Bow";
HTML = @"GaN Epi Data\14 - warp.html";
break;
case Test.VerificationWarpAndBow:
EquipmentType = EquipmentType.MET08WGEOMX203641Q_Verification;
eventName = EventName.FileReadVerification;
FileNameWithoutExtension = "warp_ver_iqs_01";
Header = "Part;Process;Date;WaferScribe;totWarp;bow";
QueryFilter = "Bow Calibration";
Title = "6 Inch Warp/Bow Daily Verification, 8 Inch Warp/Bow Daily Verification";
HTML = @"Metrology\19 - warp_cal_daily.html";
break;
case Test.XRDXY:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;ToolID;Name;Value;Group";
QueryFilter = "SL Period";
Title = "XRD XY Raw Data Viewer";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
case Test.XRDWeightedAverage:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01_WtAVG";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;Name;Value;Group";
//QueryFilter = "Al% Barrier WTAVG";
QueryFilter = "SL Period WTAVG";
Title = "XRD Weighted Average Data";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
case Test.MonthlyXRD:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "xrd_monthly_ver_iqs_01";
Header = "Part;Process;Date;TestName;Value";
QueryFilter = "XRD 2-Theta Position";
Title = "XRD Monthly Verification";
HTML = @"Metrology\03 - xrd_verif_monthly.html";
break;
case Test.WeeklyXRD:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "xrd_weekly_ver_iqs_01";
Header = "Part;Process;Lot;Date;TestName;Value";
QueryFilter = "XRD Weekly AL% Center";
Title = "XRD Weekly Verification";
HTML = @"Metrology\12 - xrd_verif_weekly.html";
break;
case Test.XRDXRAY:
EquipmentType = EquipmentType.METBRXRAYJV7300L;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;ToolID;Name;Value;Group";
QueryFilter = "SL Period";
Title = "XRD XY Raw Data Viewer";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
default:
throw new Exception();
}
FileName = string.Concat(FileNameWithoutExtension, ".txt");
return eventName.ToString();
}
public override string ToString()
{
return string.Concat(EquipmentType, " - (", Enum, "");
}
}
}

57
Adaptation/Shared/Metrology/Test.cs Normal file
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@ -0,0 +1,57 @@
namespace Adaptation.Shared.Metrology
{
public enum Test
{
AFMRoughness = 34,
BioRadQS408M = 25,
BioRadStratus = 26,
BreakdownVoltageCenter = 0,
BreakdownVoltageEdge = 1,
BreakdownVoltageMiddle8in = 2,
CandelaKlarfDC = 6,
CandelaLaser = 36,
CandelaProdU = 39,
CandelaPSL = 38,
CandelaVerify = 37,
CDE = 24,
CV = 3,
DailyRPMAverage = 19,
DailyRPMPLRatio = 20,
DailyRPMXY = 18,
Denton = 9,
DiffusionLength = 45,
Hall = 10,
HgCV = 23,
Lehighton = 13,
Microscope = 46,
MonthlyCV = 4,
MonthlyHall = 11,
MonthlyXRD = 32,
Photoreflectance = 22,
PlatoA = 48, //Largest
RPMAverage = 16,
RPMPLRatio = 17,
RPMXY = 15,
SP1 = 8,
Tencor = 7,
UV = 35,
VerificationLehighton = 14,
VerificationRPM = 21,
VerificationWarpAndBow = 29,
VpdIcpmsAnalyte = 27,
WarpAndBow = 28,
WeeklyCV = 5,
WeeklyHall = 12,
WeeklyXRD = 33,
WeeklyXRDAIcomp = 40,
WeeklyXRDFWHM002 = 41,
WeeklyXRDFWHM105 = 42,
WeeklyXRDSLStks = 43,
WeeklyXRDXRR = 44,
XRDWeightedAverage = 31,
JVXRD = 47,
XRDXY = 30
}
}