803 lines
49 KiB
C#
803 lines
49 KiB
C#
using System;
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namespace Adaptation.Shared.Metrology
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{
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public static class ColumnGet
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{
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public static string GetDiplayName(this Column column)
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{
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string results;
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switch (column)
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{
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//case Column._8in_Total_Warp_Verification: results = "8in Total Warp Verification"; break;
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//case Column.AFM_Monthly_Y: results = "AFM-Monthly Y"; break;
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//case Column.AFM_Monthly: results = "AFM_Monthly"; break;
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case Column.AFM_Pit_Count: results = "AFM Pit Count"; break;
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case Column.AFM_Roughness: results = "AFM Roughness"; break;
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//case Column.Adder_Bin_1: results = "Adder Bin 1"; break;
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//case Column.Adder_Bin_2: results = "Adder Bin 2"; break;
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//case Column.Adder_Bin_3: results = "Adder Bin 3"; break;
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//case Column.Adder_Bin_4: results = "Adder Bin 4"; break;
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//case Column.Adder_Bin_5: results = "Adder Bin 5"; break;
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//case Column.Adder_Bin_6: results = "Adder Bin 6"; break;
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//case Column.Adder_Bin_9: results = "Adder Bin 9"; break;
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case Column.Al_B_B_WTAVG: results = "Al% B.B. WTAVG"; break;
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case Column.Al_B_B_: results = "Al% B.B."; break;
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case Column.Al_Barrier_WTAVG: results = "Al% Barrier WTAVG"; break;
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case Column.Al_Barrier: results = "Al% Barrier"; break;
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case Column.Al_SLS_WTAVG: results = "Al% SLS WTAVG"; break;
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case Column.Al_SLS: results = "Al% SLS"; break;
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case Column.Al_TL1_WTAVG: results = "Al% TL1 WTAVG"; break;
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case Column.Al_TL1: results = "Al% TL1"; break;
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case Column.Al_TL2_WTAVG: results = "Al% TL2 WTAVG"; break;
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//case Column.BV_Resistance: results = "BV Resistance"; break; //BV Monthly Verification
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case Column.BandEdge_V: results = "BandEdge_V"; break;
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case Column.BandEdge_V_XY: results = "BandEdge_V_XY"; break;
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case Column.BandEdge_nm: results = "BandEdge_nm"; break;
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case Column.Barrier_Composition_RPM_XY: results = "Barrier_Composition_RPM_XY"; break;
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case Column.Bow_Calibration: results = "Bow Calibration"; break;
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case Column.Bow_Range: results = "Bow Range"; break;
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case Column.Bow: results = "Bow"; break;
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case Column.BowCenter: results = "BowCenter"; break;
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case Column.BowX: results = "BowX"; break;
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case Column.BowY: results = "BowY"; break;
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case Column.Breakdown_Voltage_Edge: results = "Breakdown Voltage - Edge"; break;
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case Column.Breakdown_VoltageMiddle: results = "Breakdown Voltage - Middle"; break;
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case Column.Breakdown_Voltage: results = "Breakdown Voltage"; break;
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case Column.CV_C_at_10V: results = "CV C at -10V"; break;
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case Column.CV_Nd_Min: results = "CV Nd Min"; break;
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//case Column.Candela_Large_LPD_Quarterly: results = "Candela Large LPD Quarterly"; break;
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//case Column.Candela_Medium_LPD_Quarterly: results = "Candela Medium LPD Quarterly"; break;
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//case Column.Candela_Small_LPD_Quarterly: results = "Candela Small LPD Quarterly"; break;
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//case Column.Candela_Total_Quarterly: results = "Candela Total Quarterly"; break;
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case Column.Candela_102_83nm: results = "102-83nm"; break;
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case Column.Candela_1_1um: results = "1.1um"; break;
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case Column.Candela_496nm: results = "496nm"; break;
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case Column.Candela_600nm: results = "600nm"; break;
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case Column.Candela_8620_Small: results = "Candela 8620 Small"; break;
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case Column.Candela_Crack_Verification: results = "Crack Verification"; break;
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case Column.Candela_Cracking: results = "Candela Cracking"; break;
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case Column.Candela_Cracking_Acceptable: results = "Candela Cracking Acceptable"; break;
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case Column.Candela_Crater: results = "Candela Crater"; break;
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case Column.Candela_Crater_Verification: results = "Crater verification"; break;
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case Column.Candela_Haze: results = "Candela Haze"; break;
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case Column.Candela_LPD_Large: results = "Candela LPD Large"; break;
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case Column.Candela_LPD_Medium: results = "Candela LPD Medium"; break;
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case Column.Candela_LPD_Small: results = "Candela LPD Small"; break;
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case Column.Candela_Large_Verification: results = "Large Verification"; break;
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case Column.Candela_Medium_Verification: results = "Medium Verification"; break;
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case Column.Candela_Pits: results = "Candela Pits"; break;
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case Column.Candela_Pits_Verification: results = "Pits verification"; break;
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case Column.Candela_SPE: results = "Candela SPE"; break;
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case Column.Candela_SPE_Verification: results = "SPE verification"; break;
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case Column.Candela_Slip: results = "Candela Slip"; break;
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case Column.Candela_Small_Verification: results = "Small Verification"; break;
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case Column.Candela_Spirals: results = "Candela Spirals"; break;
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case Column.Candela_Spirals_Verification: results = "Candela Spirals Verification"; break;
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case Column.Candela_Total_Defects: results = "Candela Total Defects"; break;
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case Column.Candela_Total_PSL: results = "Candela Total PSL"; break;
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case Column.Candela__1_1um: results = ">1.1um"; break;
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//case Column.Comment: results = "Comment"; break;
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//case Column.Conductivity: results = "Conductivity"; break;
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case Column.Contact_Symmetry: results = "Contact Symmetry"; break;
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//case Column.Cracking_verification: results = "Cracking verification"; break;
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//case Column.Crater_verification: results = "Crater verification"; break;
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case Column.Date: results = "Date"; break;
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case Column.Denton_Crystal_Life: results = "Denton_Crystal_Life"; break;
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case Column.Denton_Current_AVG: results = "Denton_Current_AVG"; break;
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case Column.Denton_Current_STDEV: results = "Denton_Current_STDEV"; break;
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case Column.Denton_Deposition_Power_AVG: results = "Denton_Deposition_Power_AVG"; break;
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case Column.Denton_Deposition_Power_STDEV: results = "Denton_Deposition_Power_STDEV"; break;
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case Column.Denton_Deposition_Rate_AVG: results = "Denton_Deposition_Rate_AVG"; break;
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case Column.Denton_Deposition_Rate_STDEV: results = "Denton_Deposition_Rate_STDEV"; break;
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case Column.Denton_Gun_Pocket: results = "Denton_Gun_Pocket"; break;
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case Column.Denton_Pumpdown_Time: results = "Denton_Pumpdown_Time"; break;
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case Column.Denton_Voltage_AVG: results = "Denton_Voltage_AVG"; break;
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case Column.Denton_Voltage_STDEV: results = "Denton_Voltage_STDEV"; break;
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case Column.Employee: results = "Employee"; break;
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case Column.Epi_Thickness_Mean: results = "Epi Thickness Mean"; break;
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case Column.Epi_Thickness_Mean_XY: results = "Epi Thickness Mean_XY"; break;
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case Column.Epi_Thickness_Std_Dev_: results = "Epi Thickness Std Dev %"; break;
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case Column.FWHM_006_WTAVG: results = "FWHM 006 WTAVG"; break;
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case Column.FWHM_006: results = "FWHM 006"; break;
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case Column.FWHM_105_WTAVG: results = "FWHM 105 WTAVG"; break;
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case Column.FWHM_105: results = "FWHM 105"; break;
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case Column.Hall_Rs: results = "Hall Rs"; break;
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case Column.Hall_Mobility_verif_sample: results = "Hall_Mobility_verif_sample"; break;
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case Column.Hall_Ns_verif_sample: results = "Hall_Ns_verif_sample"; break;
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case Column.Hall_Rs_verif_sample: results = "Hall_Rs_verif_sample"; break;
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case Column.Job: results = "Job"; break;
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case Column.LEI_RS_Average_value: results = "LEI RS Average value"; break;
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case Column.LEI_RS_Maximum_value: results = "LEI RS Maximum value"; break;
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case Column.LEI_RS_Minimum_value: results = "LEI RS Minimum value"; break;
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case Column.LEI_RS_STDEV: results = "LEI RS STDEV"; break;
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case Column.LEI_RS_STDEV_: results = "LEI RS STDEV%"; break;
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//case Column.Large_Adder_Sum: results = "Large Adder Sum"; break;
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case Column.Lot: results = "Lot"; break;
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//case Column.Medium_Adder_Sum: results = "Medium Adder Sum"; break;
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case Column.Microscope_Center_5x: results = "Microscope Center 5x"; break;
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case Column.Microscope_Center_50x: results = "Microscope Center 50x"; break;
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case Column.Microscope_Middle_5x: results = "Microscope Middle 5x"; break;
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case Column.Microscope_Middle_50x: results = "Microscope Middle 50x"; break;
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case Column.Microscope_Edge_5x: results = "Microscope Edge 5x"; break;
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case Column.Microscope_Edge_50x: results = "Microscope Edge 50x"; break;
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case Column.Mobility_Verification: results = "Mobility Verification"; break;
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case Column.Mobility: results = "Mobility"; break;
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case Column.Ns_Verification: results = "Ns Verification"; break;
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case Column.PL_Edge_Wavelength: results = "PL Edge Wavelength"; break;
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case Column.PL_Ratio: results = "PL Ratio"; break;
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case Column.PR_Barrier_Composition: results = "PR Barrier Composition"; break;
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case Column.PR_Peak: results = "PR Peak"; break;
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case Column.Part: results = "Part"; break;
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//case Column.Particles_verification: results = "Particles verification"; break;
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//case Column.Pits_verification: results = "Pits verification"; break;
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//case Column.Pocket: results = "Pocket"; break;
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//case Column.Post_Bin_1: results = "Post Bin 1"; break;
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//case Column.Post_Bin_2: results = "Post Bin 2"; break;
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//case Column.Post_Bin_3: results = "Post Bin 3"; break;
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//case Column.Post_Bin_4: results = "Post Bin 4"; break;
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//case Column.Post_Bin_5: results = "Post Bin 5"; break;
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//case Column.Post_Bin_6: results = "Post Bin 6"; break;
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//case Column.Post_Bin_9: results = "Post Bin 9"; break;
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//case Column.Pre_Bin_1: results = "Pre Bin 1"; break;
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//case Column.Pre_Bin_2: results = "Pre Bin 2"; break;
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//case Column.Pre_Bin_3: results = "Pre Bin 3"; break;
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//case Column.Pre_Bin_4: results = "Pre Bin 4"; break;
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//case Column.Pre_Bin_5: results = "Pre Bin 5"; break;
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//case Column.Pre_Bin_6: results = "Pre Bin 6"; break;
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//case Column.Pre_Bin_9: results = "Pre Bin 9"; break;
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case Column.Process: results = "Process"; break;
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//case Column.RPM_verif_Thickness_1: results = "RPM_verif_Thickness_1"; break;
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//case Column.RPM_verif_Thickness_2: results = "RPM_verif_Thickness_2"; break;
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//case Column.RPM_verif_Thickness_3: results = "RPM_verif_Thickness_3"; break;
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//case Column.RPM_verif_Thickness_Average: results = "RPM_verif_Thickness_Average"; break;
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//case Column.RTA_oxide_Thk_Change: results = "RTA oxide Thk Change"; break;
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//case Column.RTA_oxide_post_anneal_Thk: results = "RTA oxide post-anneal Thk"; break;
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//case Column.RTA_oxide_pre_anneal_Thk: results = "RTA oxide pre-anneal Thk"; break;
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case Column.Recipe: results = "Recipe"; break;
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//case Column.Resistivity_2_ohm_cm: results = "Resistivity 2 ohm cm"; break; //LEI Weekly Verification
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//case Column.Resistivity_600_ohm_cm: results = "Resistivity 600 ohm cm"; break; //LEI Weekly Verification
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case Column.Rs_verification: results = "Rs verification"; break;
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case Column.Rs_verif_100kohm: results = "Rs_verif_100kohm"; break;
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case Column.Rs_verif_10ohm: results = "Rs_verif_10ohm"; break;
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case Column.Rs_verif_1kohm: results = "Rs_verif_1kohm"; break;
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case Column.SID: results = "SID"; break;
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case Column.SL_Period_WTAVG: results = "SL Period WTAVG"; break;
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case Column.SL_Period: results = "SL Period"; break;
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//case Column.SPE_verification: results = "SPE verification"; break;
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//case Column.Sample_ID: results = "Sample ID"; break;
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case Column.Sheet_Concentration: results = "Sheet Concentration"; break;
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//case Column.Size: results = "Size"; break;
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//case Column.Small_Adder_Sum: results = "Small Adder Sum"; break;
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//case Column.Spirals_verification: results = "Spirals verification"; break;
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case Column.Time: results = "Time"; break;
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case Column.Tool_ID: results = "Tool ID"; break;
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//case Column.Total_LPD_Adder: results = "Total LPD Adder"; break;
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//case Column.Total_Verification: results = "Total Verification"; break;
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case Column.Total_Warp_Calibration: results = "Total Warp Calibration"; break;
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case Column.UV_Broken: results = "UV Broken"; break;
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case Column.UV_Chipping: results = "UV Chipping"; break;
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case Column.UV_Cracking_0_3mm_: results = "UV Cracking (0-3mm)"; break;
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case Column.UV_Cracking_3_7mm_: results = "UV Cracking (3-7mm)"; break;
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case Column.UV_Cracking_7mm_: results = "UV Cracking (>7mm)"; break;
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case Column.UV_Crazing: results = "UV Crazing"; break;
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case Column.UV_Crazing_Acceptable: results = "UV Crazing Acceptable"; break;
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case Column.UV_FULL_Characterization_Wafer: results = "UV FULL Characterization Wafer"; break;
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case Column.UV_Haze_count_: results = "UV Haze (count)"; break;
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case Column.UV_LIGHT_Characterization_Wafer: results = "UV LIGHT Characterization Wafer"; break;
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case Column.UV_Non_rotation: results = "UV Non-rotation"; break;
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case Column.UV_Other: results = "UV Other"; break;
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case Column.UV_Scratch_count_: results = "UV Scratch (count)"; break;
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case Column.UV_Slip_count_: results = "UV Slip (count)"; break;
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case Column.UV_True_Haze: results = "UV True Haze"; break;
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case Column.UV_True_Haze_Acceptable: results = "UV True Haze Acceptable"; break;
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case Column.UV_SPE_1mm_count: results = "UV-SPE (>1mm) count"; break;
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case Column.UV_SPE_count_: results = "UV-SPE (count)"; break;
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case Column.Verification_Contact_Symmetry: results = "Verification Contact Symmetry"; break;
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case Column.Vp_Pinch_Off_Voltage: results = "Vp Pinch Off Voltage"; break;
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case Column.Wafer_ID: results = "Wafer ID"; break;
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//case Column.Wafer_Pocket: results = "Wafer Pocket"; break;
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case Column.Wafer_Region: results = "Wafer Region"; break;
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case Column.Wafer_Scribe: results = "Wafer Scribe"; break;
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case Column.WaferPocket_Candela: results = "WaferPocket_Candela"; break;
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case Column.WaferPocket_Warp: results = "WaferPocket_Warp"; break;
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case Column.WaferPosition_CV: results = "WaferPosition_CV"; break;
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case Column.WaferPosition_BV: results = "WaferPosition_BV"; break;
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case Column.WaferPosition_Hall: results = "WaferPosition_Hall"; break;
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case Column.WaferPosition_PR: results = "WaferPosition_PR"; break;
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case Column.Warp: results = "Warp"; break;
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case Column.X_Coord: results = "X-Coord"; break;
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case Column.XRD_2_Theta_Peak_002: results = "XRD 2 Theta Peak 002"; break;
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case Column.XRD_2_Theta_Peak_101: results = "XRD 2 Theta Peak 101"; break;
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case Column.XRD_2_Theta_Position: results = "XRD 2-Theta Position"; break;
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case Column.XRD_2_Theta_Position_Si_1: results = "XRD 2-Theta Position Si 1"; break;
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case Column.XRD_2_Theta_Position_Si_2: results = "XRD 2-Theta Position Si 2"; break;
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case Column.XRD_2_Theta_Position_Si_3: results = "XRD 2-Theta Position Si 3"; break;
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case Column.XRD_Peak_002_Intensity: results = "XRD Peak 002 Intensity"; break;
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case Column.XRD_Peak_101_Intensity: results = "XRD Peak 101 Intensity"; break;
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case Column.XRD_Weekly_AL_Center: results = "XRD Weekly AL% Center"; break;
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case Column.XRD_Weekly_Back_Barrier_Al_: results = "Back Barrier Al%"; break;
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case Column.XRD_Weekly_Barrier_Al_: results = "Barrier Al%"; break;
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case Column.XRD_Weekly_FWHM_002: results = "XRD Weekly FWHM 002"; break;
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case Column.XRD_Weekly_FWHM_101: results = "XRD Weekly FWHM 101"; break;
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case Column.XRD_Weekly_FWHM_105: results = "XRD Weekly FWHM 105"; break;
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case Column.XRD_Weekly_Fringe_thick_0_0_: results = "XRD Weekly Fringe thick (0,0)"; break;
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case Column.XRD_Weekly_Fringe_thick_48_48_: results = "XRD Weekly Fringe thick (48,48)"; break;
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case Column.XRD_Weekly_Intensity: results = "XRD Weekly Intensity"; break;
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case Column.XRD_Weekly_Super_Lattice_Al_: results = "Super Lattice Al%"; break;
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case Column.XRD_Weekly_Super_Lattice_period: results = "Super Lattice period"; break;
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case Column.XRD_Weekly_Super_Lattice_tks: results = "Super Lattice tks"; break;
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case Column.XRR_Thickness_nm_WTAVG: results = "XRR Thickness (nm) WTAVG"; break;
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case Column.XRR_Thickness_nm_: results = "XRR Thickness (nm)"; break;
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case Column.Y_Coord: results = "Y-Coord"; break;
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case Column.YellowBand_Power_mW_: results = "YellowBand_Power (mW)"; break;
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case Column.YellowBand_V: results = "YellowBand_V"; break;
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case Column.YellowBand_V_XY: results = "YellowBand_V_XY"; break;
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case Column.YellowBand_nm: results = "YellowBand_nm"; break;
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//case Column.pH: results = "pH"; break;
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case Column.Ag: results = "Ag"; break;
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case Column.Al: results = "Al"; break;
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case Column.As: results = "As"; break;
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case Column.Au: results = "Au"; break;
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case Column.B: results = "B"; break;
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case Column.Ba: results = "Ba"; break;
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case Column.Ca: results = "Ca"; break;
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case Column.Ce: results = "Ce"; break;
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case Column.Co: results = "Co"; break;
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case Column.Cr: results = "Cr"; break;
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case Column.Cu: results = "Cu"; break;
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case Column.Fe: results = "Fe"; break;
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case Column.Ga: results = "Ga"; break;
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case Column.Ge: results = "Ge"; break;
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case Column.Hf: results = "Hf"; break;
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case Column.K: results = "K"; break;
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case Column.Li: results = "Li"; break;
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case Column.Mg: results = "Mg"; break;
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case Column.Mn: results = "Mn"; break;
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case Column.Mo: results = "Mo"; break;
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case Column.Na: results = "Na"; break;
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case Column.Ni: results = "Ni"; break;
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case Column.P: results = "P"; break;
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case Column.Pb: results = "Pb"; break;
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case Column.Sn: results = "Sn"; break;
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case Column.Ta: results = "Ta"; break;
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case Column.Ti: results = "Ti"; break;
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case Column.W: results = "W"; break;
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case Column.Y: results = "Y"; break;
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case Column.Zn: results = "Zn"; break;
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default: throw new Exception();
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}
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return results;
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}
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public static Description.Param GetParam(this Column column)
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{
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Description.Param results;
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switch (column)
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{
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//case Column._8in_Total_Warp_Verification: results = Description.Param.String; break;
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//case Column.AFM_Monthly_Y: results = Description.Param.String; break;
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//case Column.AFM_Monthly: results = Description.Param.String; break;
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case Column.AFM_Pit_Count: results = Description.Param.String; break;
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case Column.AFM_Roughness: results = Description.Param.String; break;
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//case Column.Adder_Bin_1: results = Description.Param.String; break;
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//case Column.Adder_Bin_2: results = Description.Param.String; break;
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//case Column.Adder_Bin_3: results = Description.Param.String; break;
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//case Column.Adder_Bin_4: results = Description.Param.String; break;
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//case Column.Adder_Bin_5: results = Description.Param.String; break;
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//case Column.Adder_Bin_6: results = Description.Param.String; break;
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//case Column.Adder_Bin_9: results = Description.Param.String; break;
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case Column.Al_B_B_WTAVG: results = Description.Param.String; break;
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case Column.Al_B_B_: results = Description.Param.String; break;
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case Column.Al_Barrier_WTAVG: results = Description.Param.String; break;
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case Column.Al_Barrier: results = Description.Param.String; break;
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case Column.Al_SLS_WTAVG: results = Description.Param.String; break;
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case Column.Al_SLS: results = Description.Param.String; break;
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case Column.Al_TL1_WTAVG: results = Description.Param.String; break;
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case Column.Al_TL1: results = Description.Param.String; break;
|
|
case Column.Al_TL2_WTAVG: results = Description.Param.String; break;
|
|
//case Column.BV_Resistance: results = Description.Param.String; break;
|
|
case Column.BandEdge_V: results = Description.Param.String; break;
|
|
case Column.BandEdge_V_XY: results = Description.Param.String; break;
|
|
case Column.BandEdge_nm: results = Description.Param.String; break;
|
|
case Column.Barrier_Composition_RPM_XY: results = Description.Param.String; break;
|
|
case Column.Bow_Calibration: results = Description.Param.String; break;
|
|
case Column.Bow_Range: results = Description.Param.String; break;
|
|
case Column.Bow: results = Description.Param.String; break;
|
|
case Column.BowCenter: results = Description.Param.String; break;
|
|
case Column.BowX: results = Description.Param.String; break;
|
|
case Column.BowY: results = Description.Param.String; break;
|
|
case Column.Breakdown_Voltage_Edge: results = Description.Param.String; break;
|
|
case Column.Breakdown_VoltageMiddle: results = Description.Param.String; break;
|
|
case Column.Breakdown_Voltage: results = Description.Param.String; break;
|
|
case Column.CV_C_at_10V: results = Description.Param.String; break;
|
|
case Column.CV_Nd_Min: results = Description.Param.String; break;
|
|
//case Column.Candela_Large_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Medium_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Small_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Total_Quarterly: results = Description.Param.String; break;
|
|
case Column.Candela_102_83nm: results = Description.Param.String; break;
|
|
case Column.Candela_1_1um: results = Description.Param.String; break;
|
|
case Column.Candela_496nm: results = Description.Param.String; break;
|
|
case Column.Candela_600nm: results = Description.Param.String; break;
|
|
case Column.Candela_8620_Small: results = Description.Param.String; break;
|
|
case Column.Candela_Crack_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Cracking: results = Description.Param.String; break;
|
|
case Column.Candela_Cracking_Acceptable: results = Description.Param.String; break;
|
|
case Column.Candela_Crater: results = Description.Param.String; break;
|
|
case Column.Candela_Crater_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Haze: results = Description.Param.String; break;
|
|
case Column.Candela_LPD_Large: results = Description.Param.String; break;
|
|
case Column.Candela_LPD_Medium: results = Description.Param.String; break;
|
|
case Column.Candela_LPD_Small: results = Description.Param.String; break;
|
|
case Column.Candela_Large_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Medium_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Pits: results = Description.Param.String; break;
|
|
case Column.Candela_Pits_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_SPE: results = Description.Param.String; break;
|
|
case Column.Candela_SPE_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Slip: results = Description.Param.String; break;
|
|
case Column.Candela_Small_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Spirals: results = Description.Param.String; break;
|
|
case Column.Candela_Spirals_Verification: results = Description.Param.String; break;
|
|
case Column.Candela_Total_Defects: results = Description.Param.String; break;
|
|
case Column.Candela_Total_PSL: results = Description.Param.String; break;
|
|
case Column.Candela__1_1um: results = Description.Param.String; break;
|
|
//case Column.Comment: results = Description.Param.String; break;
|
|
//case Column.Conductivity: results = Description.Param.String; break;
|
|
case Column.Contact_Symmetry: results = Description.Param.String; break;
|
|
//case Column.Cracking_verification: results = Description.Param.String; break;
|
|
//case Column.Crater_verification: results = Description.Param.String; break;
|
|
case Column.Date: results = Description.Param.String; break;
|
|
case Column.Denton_Crystal_Life: results = Description.Param.String; break;
|
|
case Column.Denton_Current_AVG: results = Description.Param.String; break;
|
|
case Column.Denton_Current_STDEV: results = Description.Param.String; break;
|
|
case Column.Denton_Deposition_Power_AVG: results = Description.Param.String; break;
|
|
case Column.Denton_Deposition_Power_STDEV: results = Description.Param.String; break;
|
|
case Column.Denton_Deposition_Rate_AVG: results = Description.Param.String; break;
|
|
case Column.Denton_Deposition_Rate_STDEV: results = Description.Param.String; break;
|
|
case Column.Denton_Gun_Pocket: results = Description.Param.String; break;
|
|
case Column.Denton_Pumpdown_Time: results = Description.Param.String; break;
|
|
case Column.Denton_Voltage_AVG: results = Description.Param.String; break;
|
|
case Column.Denton_Voltage_STDEV: results = Description.Param.String; break;
|
|
case Column.Employee: results = Description.Param.String; break;
|
|
case Column.Epi_Thickness_Mean: results = Description.Param.String; break;
|
|
case Column.Epi_Thickness_Mean_XY: results = Description.Param.String; break;
|
|
case Column.Epi_Thickness_Std_Dev_: results = Description.Param.String; break;
|
|
case Column.FWHM_006_WTAVG: results = Description.Param.String; break;
|
|
case Column.FWHM_006: results = Description.Param.String; break;
|
|
case Column.FWHM_105_WTAVG: results = Description.Param.String; break;
|
|
case Column.FWHM_105: results = Description.Param.String; break;
|
|
case Column.Hall_Rs: results = Description.Param.String; break;
|
|
case Column.Hall_Mobility_verif_sample: results = Description.Param.String; break;
|
|
case Column.Hall_Ns_verif_sample: results = Description.Param.String; break;
|
|
case Column.Hall_Rs_verif_sample: results = Description.Param.String; break;
|
|
case Column.Job: results = Description.Param.String; break;
|
|
case Column.LEI_RS_Average_value: results = Description.Param.String; break;
|
|
case Column.LEI_RS_Maximum_value: results = Description.Param.String; break;
|
|
case Column.LEI_RS_Minimum_value: results = Description.Param.String; break;
|
|
case Column.LEI_RS_STDEV: results = Description.Param.String; break;
|
|
case Column.LEI_RS_STDEV_: results = Description.Param.String; break;
|
|
//case Column.Large_Adder_Sum: results = Description.Param.String; break;
|
|
case Column.Lot: results = Description.Param.String; break;
|
|
//case Column.Medium_Adder_Sum: results = Description.Param.String; break;
|
|
case Column.Microscope_Center_5x: results = Description.Param.String; break;
|
|
case Column.Microscope_Center_50x: results = Description.Param.String; break;
|
|
case Column.Microscope_Middle_5x: results = Description.Param.String; break;
|
|
case Column.Microscope_Middle_50x: results = Description.Param.String; break;
|
|
case Column.Microscope_Edge_5x: results = Description.Param.String; break;
|
|
case Column.Microscope_Edge_50x: results = Description.Param.String; break;
|
|
case Column.Mobility_Verification: results = Description.Param.String; break;
|
|
case Column.Mobility: results = Description.Param.String; break;
|
|
case Column.Ns_Verification: results = Description.Param.String; break;
|
|
case Column.PL_Edge_Wavelength: results = Description.Param.String; break;
|
|
case Column.PL_Ratio: results = Description.Param.String; break;
|
|
case Column.PR_Barrier_Composition: results = Description.Param.String; break;
|
|
case Column.PR_Peak: results = Description.Param.String; break;
|
|
case Column.Part: results = Description.Param.String; break;
|
|
//case Column.Particles_verification: results = Description.Param.String; break;
|
|
//case Column.Pits_verification: results = Description.Param.String; break;
|
|
//case Column.Pocket: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_9: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_9: results = Description.Param.String; break;
|
|
case Column.Process: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_1: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_2: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_3: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_Average: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_Thk_Change: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_post_anneal_Thk: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_pre_anneal_Thk: results = Description.Param.String; break;
|
|
case Column.Recipe: results = Description.Param.String; break;
|
|
//case Column.Resistivity_2_ohm_cm: results = Description.Param.String; break;
|
|
//case Column.Resistivity_600_ohm_cm: results = Description.Param.String; break;
|
|
case Column.Rs_verification: results = Description.Param.String; break;
|
|
case Column.Rs_verif_100kohm: results = Description.Param.String; break;
|
|
case Column.Rs_verif_10ohm: results = Description.Param.String; break;
|
|
case Column.Rs_verif_1kohm: results = Description.Param.String; break;
|
|
case Column.SID: results = Description.Param.String; break;
|
|
case Column.SL_Period_WTAVG: results = Description.Param.String; break;
|
|
case Column.SL_Period: results = Description.Param.String; break;
|
|
//case Column.SPE_verification: results = Description.Param.String; break;
|
|
//case Column.Sample_ID: results = Description.Param.String; break;
|
|
case Column.Sheet_Concentration: results = Description.Param.String; break;
|
|
//case Column.Size: results = Description.Param.String; break;
|
|
//case Column.Small_Adder_Sum: results = Description.Param.String; break;
|
|
//case Column.Spirals_verification: results = Description.Param.String; break;
|
|
case Column.Time: results = Description.Param.String; break;
|
|
case Column.Tool_ID: results = Description.Param.String; break;
|
|
//case Column.Total_LPD_Adder: results = Description.Param.String; break;
|
|
//case Column.Total_Verification: results = Description.Param.String; break;
|
|
case Column.Total_Warp_Calibration: results = Description.Param.String; break;
|
|
case Column.UV_Broken: results = Description.Param.String; break;
|
|
case Column.UV_Chipping: results = Description.Param.String; break;
|
|
case Column.UV_Cracking_0_3mm_: results = Description.Param.String; break;
|
|
case Column.UV_Cracking_3_7mm_: results = Description.Param.String; break;
|
|
case Column.UV_Cracking_7mm_: results = Description.Param.String; break;
|
|
case Column.UV_Crazing: results = Description.Param.String; break;
|
|
case Column.UV_Crazing_Acceptable: results = Description.Param.String; break;
|
|
case Column.UV_FULL_Characterization_Wafer: results = Description.Param.String; break;
|
|
case Column.UV_Haze_count_: results = Description.Param.String; break;
|
|
case Column.UV_LIGHT_Characterization_Wafer: results = Description.Param.String; break;
|
|
case Column.UV_Non_rotation: results = Description.Param.String; break;
|
|
case Column.UV_Other: results = Description.Param.String; break;
|
|
case Column.UV_Scratch_count_: results = Description.Param.String; break;
|
|
case Column.UV_Slip_count_: results = Description.Param.String; break;
|
|
case Column.UV_True_Haze: results = Description.Param.String; break;
|
|
case Column.UV_True_Haze_Acceptable: results = Description.Param.String; break;
|
|
case Column.UV_SPE_1mm_count: results = Description.Param.String; break;
|
|
case Column.UV_SPE_count_: results = Description.Param.String; break;
|
|
case Column.Verification_Contact_Symmetry: results = Description.Param.String; break;
|
|
case Column.Vp_Pinch_Off_Voltage: results = Description.Param.String; break;
|
|
case Column.Wafer_ID: results = Description.Param.String; break;
|
|
//case Column.Wafer_Pocket: results = Description.Param.String; break;
|
|
case Column.Wafer_Region: results = Description.Param.String; break;
|
|
case Column.Wafer_Scribe: results = Description.Param.String; break;
|
|
case Column.WaferPocket_Candela: results = Description.Param.String; break;
|
|
case Column.WaferPocket_Warp: results = Description.Param.String; break;
|
|
case Column.WaferPosition_CV: results = Description.Param.String; break;
|
|
case Column.WaferPosition_BV: results = Description.Param.String; break;
|
|
case Column.WaferPosition_Hall: results = Description.Param.String; break;
|
|
case Column.WaferPosition_PR: results = Description.Param.String; break;
|
|
case Column.Warp: results = Description.Param.String; break;
|
|
case Column.X_Coord: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Peak_002: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Peak_101: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Position: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Position_Si_1: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Position_Si_2: results = Description.Param.String; break;
|
|
case Column.XRD_2_Theta_Position_Si_3: results = Description.Param.String; break;
|
|
case Column.XRD_Peak_002_Intensity: results = Description.Param.String; break;
|
|
case Column.XRD_Peak_101_Intensity: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_AL_Center: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Back_Barrier_Al_: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Barrier_Al_: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_FWHM_002: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_FWHM_101: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_FWHM_105: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Fringe_thick_0_0_: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Fringe_thick_48_48_: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Intensity: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Super_Lattice_Al_: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Super_Lattice_period: results = Description.Param.String; break;
|
|
case Column.XRD_Weekly_Super_Lattice_tks: results = Description.Param.String; break;
|
|
case Column.XRR_Thickness_nm_WTAVG: results = Description.Param.String; break;
|
|
case Column.XRR_Thickness_nm_: results = Description.Param.String; break;
|
|
case Column.Y_Coord: results = Description.Param.String; break;
|
|
case Column.YellowBand_Power_mW_: results = Description.Param.String; break;
|
|
case Column.YellowBand_V: results = Description.Param.String; break;
|
|
case Column.YellowBand_V_XY: results = Description.Param.String; break;
|
|
case Column.YellowBand_nm: results = Description.Param.String; break;
|
|
//case Column.pH: results = Description.Param.String; break;
|
|
case Column.Ag: results = Description.Param.String; break;
|
|
case Column.Al: results = Description.Param.String; break;
|
|
case Column.As: results = Description.Param.String; break;
|
|
case Column.Au: results = Description.Param.String; break;
|
|
case Column.B: results = Description.Param.String; break;
|
|
case Column.Ba: results = Description.Param.String; break;
|
|
case Column.Ca: results = Description.Param.String; break;
|
|
case Column.Ce: results = Description.Param.String; break;
|
|
case Column.Co: results = Description.Param.String; break;
|
|
case Column.Cr: results = Description.Param.String; break;
|
|
case Column.Cu: results = Description.Param.String; break;
|
|
case Column.Fe: results = Description.Param.String; break;
|
|
case Column.Ga: results = Description.Param.String; break;
|
|
case Column.Ge: results = Description.Param.String; break;
|
|
case Column.Hf: results = Description.Param.String; break;
|
|
case Column.K: results = Description.Param.String; break;
|
|
case Column.Li: results = Description.Param.String; break;
|
|
case Column.Mg: results = Description.Param.String; break;
|
|
case Column.Mn: results = Description.Param.String; break;
|
|
case Column.Mo: results = Description.Param.String; break;
|
|
case Column.Na: results = Description.Param.String; break;
|
|
case Column.Ni: results = Description.Param.String; break;
|
|
case Column.P: results = Description.Param.String; break;
|
|
case Column.Pb: results = Description.Param.String; break;
|
|
case Column.Sn: results = Description.Param.String; break;
|
|
case Column.Ta: results = Description.Param.String; break;
|
|
case Column.Ti: results = Description.Param.String; break;
|
|
case Column.W: results = Description.Param.String; break;
|
|
case Column.Y: results = Description.Param.String; break;
|
|
case Column.Zn: results = Description.Param.String; break;
|
|
default: throw new Exception();
|
|
}
|
|
return results;
|
|
}
|
|
|
|
}
|
|
|
|
public enum Column
|
|
{
|
|
//_8in_Total_Warp_Verification,
|
|
//AFM_Monthly_Y,
|
|
//AFM_Monthly,
|
|
AFM_Pit_Count,
|
|
AFM_Roughness,
|
|
//Adder_Bin_1,
|
|
//Adder_Bin_2,
|
|
//Adder_Bin_3,
|
|
//Adder_Bin_4,
|
|
//Adder_Bin_5,
|
|
//Adder_Bin_6,
|
|
//Adder_Bin_9,
|
|
Al_B_B_WTAVG,
|
|
Al_B_B_,
|
|
Al_Barrier_WTAVG,
|
|
Al_Barrier,
|
|
Al_SLS_WTAVG,
|
|
Al_SLS,
|
|
Al_TL1_WTAVG,
|
|
Al_TL1,
|
|
Al_TL2_WTAVG,
|
|
//BV_Resistance,
|
|
BandEdge_V,
|
|
BandEdge_V_XY,
|
|
BandEdge_nm,
|
|
Barrier_Composition_RPM_XY,
|
|
Bow_Calibration,
|
|
Bow_Range,
|
|
Bow,
|
|
BowCenter,
|
|
BowX,
|
|
BowY,
|
|
Breakdown_Voltage_Edge,
|
|
Breakdown_VoltageMiddle,
|
|
Breakdown_Voltage,
|
|
CV_C_at_10V,
|
|
CV_Nd_Min,
|
|
//Candela_Large_LPD_Quarterly,
|
|
//Candela_Medium_LPD_Quarterly,
|
|
//Candela_Small_LPD_Quarterly,
|
|
//Candela_Total_Quarterly,
|
|
Candela_102_83nm,
|
|
Candela_1_1um,
|
|
Candela_496nm,
|
|
Candela_600nm,
|
|
Candela_8620_Small,
|
|
Candela_Crack_Verification,
|
|
Candela_Cracking,
|
|
Candela_Cracking_Acceptable,
|
|
Candela_Crater,
|
|
Candela_Crater_Verification,
|
|
Candela_Haze,
|
|
Candela_LPD_Large,
|
|
Candela_LPD_Medium,
|
|
Candela_LPD_Small,
|
|
Candela_Large_Verification,
|
|
Candela_Medium_Verification,
|
|
Candela_Pits,
|
|
Candela_Pits_Verification,
|
|
Candela_SPE,
|
|
Candela_SPE_Verification,
|
|
Candela_Slip,
|
|
Candela_Small_Verification,
|
|
Candela_Spirals,
|
|
Candela_Spirals_Verification,
|
|
Candela_Total_Defects,
|
|
Candela_Total_PSL,
|
|
Candela__1_1um,
|
|
//Comment,
|
|
//Conductivity,
|
|
Contact_Symmetry,
|
|
//Cracking_verification,
|
|
//Crater_verification,
|
|
Date,
|
|
Denton_Crystal_Life,
|
|
Denton_Current_AVG,
|
|
Denton_Current_STDEV,
|
|
Denton_Deposition_Power_AVG,
|
|
Denton_Deposition_Power_STDEV,
|
|
Denton_Deposition_Rate_AVG,
|
|
Denton_Deposition_Rate_STDEV,
|
|
Denton_Gun_Pocket,
|
|
Denton_Pumpdown_Time,
|
|
Denton_Voltage_AVG,
|
|
Denton_Voltage_STDEV,
|
|
Employee,
|
|
Epi_Thickness_Mean,
|
|
Epi_Thickness_Mean_XY,
|
|
Epi_Thickness_Std_Dev_,
|
|
FWHM_006_WTAVG,
|
|
FWHM_006,
|
|
FWHM_105_WTAVG,
|
|
FWHM_105,
|
|
Hall_Rs,
|
|
Hall_Mobility_verif_sample,
|
|
Hall_Ns_verif_sample,
|
|
Hall_Rs_verif_sample,
|
|
Job,
|
|
LEI_RS_Average_value,
|
|
LEI_RS_Maximum_value,
|
|
LEI_RS_Minimum_value,
|
|
LEI_RS_STDEV,
|
|
LEI_RS_STDEV_,
|
|
//Large_Adder_Sum,
|
|
Lot,
|
|
//Medium_Adder_Sum,
|
|
Microscope_Center_50x,
|
|
Microscope_Center_5x,
|
|
Microscope_Edge_50x,
|
|
Microscope_Edge_5x,
|
|
Microscope_Middle_50x,
|
|
Microscope_Middle_5x,
|
|
Mobility_Verification,
|
|
Mobility,
|
|
Ns_Verification,
|
|
PL_Edge_Wavelength,
|
|
PL_Ratio,
|
|
PR_Barrier_Composition,
|
|
PR_Peak,
|
|
Part,
|
|
//Particles_verification,
|
|
//Pits_verification,
|
|
//Pocket,
|
|
//Post_Bin_1,
|
|
//Post_Bin_2,
|
|
//Post_Bin_3,
|
|
//Post_Bin_4,
|
|
//Post_Bin_5,
|
|
//Post_Bin_6,
|
|
//Post_Bin_9,
|
|
//Pre_Bin_1,
|
|
//Pre_Bin_2,
|
|
//Pre_Bin_3,
|
|
//Pre_Bin_4,
|
|
//Pre_Bin_5,
|
|
//Pre_Bin_6,
|
|
//Pre_Bin_9,
|
|
Process,
|
|
//RPM_verif_Thickness_1,
|
|
//RPM_verif_Thickness_2,
|
|
//RPM_verif_Thickness_3,
|
|
//RPM_verif_Thickness_Average,
|
|
//RTA_oxide_Thk_Change,
|
|
//RTA_oxide_post_anneal_Thk,
|
|
//RTA_oxide_pre_anneal_Thk,
|
|
Recipe,
|
|
//Resistivity_2_ohm_cm,
|
|
//Resistivity_600_ohm_cm,
|
|
Rs_verification,
|
|
Rs_verif_100kohm,
|
|
Rs_verif_10ohm,
|
|
Rs_verif_1kohm,
|
|
SID,
|
|
SL_Period_WTAVG,
|
|
SL_Period,
|
|
//SPE_verification,
|
|
//Sample_ID,
|
|
Sheet_Concentration,
|
|
//Size,
|
|
//Small_Adder_Sum,
|
|
//Spirals_verification,
|
|
Time,
|
|
Tool_ID,
|
|
//Total_LPD_Adder,
|
|
//Total_Verification,
|
|
Total_Warp_Calibration,
|
|
UV_Broken,
|
|
UV_Chipping,
|
|
UV_Cracking_0_3mm_,
|
|
UV_Cracking_3_7mm_,
|
|
UV_Cracking_7mm_,
|
|
UV_Crazing,
|
|
UV_Crazing_Acceptable,
|
|
UV_FULL_Characterization_Wafer,
|
|
UV_Haze_count_,
|
|
UV_LIGHT_Characterization_Wafer,
|
|
UV_Non_rotation,
|
|
UV_Other,
|
|
UV_Scratch_count_,
|
|
UV_Slip_count_,
|
|
UV_True_Haze,
|
|
UV_True_Haze_Acceptable,
|
|
UV_SPE_1mm_count,
|
|
UV_SPE_count_,
|
|
Verification_Contact_Symmetry,
|
|
Vp_Pinch_Off_Voltage,
|
|
Wafer_ID,
|
|
//Wafer_Pocket,
|
|
Wafer_Region,
|
|
Wafer_Scribe,
|
|
WaferPocket_Candela,
|
|
WaferPocket_Warp,
|
|
WaferPosition_CV,
|
|
WaferPosition_BV,
|
|
WaferPosition_Hall,
|
|
WaferPosition_PR,
|
|
Warp,
|
|
X_Coord,
|
|
XRD_2_Theta_Peak_002,
|
|
XRD_2_Theta_Peak_101,
|
|
XRD_2_Theta_Position,
|
|
XRD_2_Theta_Position_Si_1,
|
|
XRD_2_Theta_Position_Si_2,
|
|
XRD_2_Theta_Position_Si_3,
|
|
XRD_Peak_002_Intensity,
|
|
XRD_Peak_101_Intensity,
|
|
XRD_Weekly_AL_Center,
|
|
XRD_Weekly_Back_Barrier_Al_,
|
|
XRD_Weekly_Barrier_Al_,
|
|
XRD_Weekly_FWHM_002,
|
|
XRD_Weekly_FWHM_101,
|
|
XRD_Weekly_FWHM_105,
|
|
XRD_Weekly_Fringe_thick_0_0_,
|
|
XRD_Weekly_Fringe_thick_48_48_,
|
|
XRD_Weekly_Intensity,
|
|
XRD_Weekly_Super_Lattice_Al_,
|
|
XRD_Weekly_Super_Lattice_period,
|
|
XRD_Weekly_Super_Lattice_tks,
|
|
XRR_Thickness_nm_,
|
|
XRR_Thickness_nm_WTAVG,
|
|
Y_Coord,
|
|
YellowBand_Power_mW_,
|
|
YellowBand_V,
|
|
YellowBand_V_XY,
|
|
YellowBand_nm,
|
|
//pH,
|
|
Ag,
|
|
Al,
|
|
As,
|
|
Au,
|
|
B,
|
|
Ba,
|
|
Ca,
|
|
Ce,
|
|
Co,
|
|
Cr,
|
|
Cu,
|
|
Fe,
|
|
Ga,
|
|
Ge,
|
|
Hf,
|
|
K,
|
|
Li,
|
|
Mg,
|
|
Mn,
|
|
Mo,
|
|
Na,
|
|
Ni,
|
|
P,
|
|
Pb,
|
|
Sn,
|
|
Ta,
|
|
Ti,
|
|
W,
|
|
Y,
|
|
Zn
|
|
}
|
|
|
|
} |