80 lines
2.4 KiB
JSON
80 lines
2.4 KiB
JSON
{
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"SentToMetrology": false,
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"SentToSPC": false,
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"Id": -1,
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"Batch": "667740",
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"Cassette": "",
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"CellName": "BIORAD2",
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"Date": "4/24/2025 6:11:07 PM",
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"FilePath": "",
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"Layer": "1",
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"MeanThickness": "117.645",
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"Op": "CL",
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"PSN": "5159",
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"PassFail": "FAIL",
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"RDS": "667740",
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"RVThickness": "2.520",
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"Reactor": "40",
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"Recipe": "6inTHICK",
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"StdDev": "1.279",
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"Title": "Bio-Rad QS400MEPI",
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"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
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"Wafer": "667740",
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"Zone": "1",
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"Details": [
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{
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{
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{
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{
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{
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{
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}
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]
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} |