open-insight/LSL2/STPROC/ORG_OBJ_RDS2.txt
Infineon\StieberD 7762b129af pre cutover push
2024-09-04 20:33:41 -07:00

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COMPILE FUNCTION obj_RDS2(Method,Parms)
/*
Methods for RDS table ;Original object (obj_RDS) is full with methods for original data structures
05/12/2005 JCH - Initial Coding
Properties:
Methods:
Find() ;* Lookup RDS record
Delete(RdsNos) ;* Delete RDS records (@VM'd list of keys)
LockSet(RdsNos) ;* Returns TableVar if all records were locked
UnlockSet(RdsNos,TableVar) ;* Uses TableVar returned from LockSet call
ChangeWOStepProps(RSNos,CommitDts,HotLots,MUBoxes) ;* Changes RDS stuff 'en-mass' from WOStep window
*/
DECLARE FUNCTION Get_Status, Msg, Utility, obj_Tables, NextKey, obj_Prod_Spec, Dialog_Box, obj_RDS_Test
DECLARE SUBROUTINE Set_Status, Msg, obj_Tables, obj_WO_Step, obj_RDS_Layer, obj_RDS_Test
$INSERT MSG_EQUATES
$INSERT WO_VERIFY_EQU
$INSERT WO_LOG_EQU
$INSERT RDS_EQU
$INSERT RDS_MAKEUP_EQU
$INSERT RDS_LAYER_EQUATES
$INSERT RDS_TEST_EQUATES
$INSERT RDS_LAYER_INFO_EQU
$INSERT QUOTE_SPEC_EQU
$INSERT PROD_SPEC_EQU
$INSERT SCHEDULE_EQU
$INSERT WO_STEP_EQU
$INSERT PRS_LAYER_EQU ;* Used to return obj_Prod_Spec values
EQU SHEETRHO_SPEC_UNITS$ TO 'ê/Ü'
EQU RES_SPEC_UNITS$ TO \EA2D636D\
ErrTitle = 'Error in Stored Procedure "obj_RDS2"'
ErrorMsg = ''
IF NOT(ASSIGNED(Method)) THEN ErrorMsg = 'Unassigned parameter "Method" passed to subroutine'
IF NOT(ASSIGNED(Parms)) THEN Parms = ''
IF ErrorMsg NE '' THEN
Set_Status(-1,ErrTitle:@SVM:ErrorMsg)
RETURN ''
END
Result = ''
BEGIN CASE
CASE Method = 'Find' ; GOSUB Find
CASE Method = 'Delete' ; GOSUB Delete
CASE Method = 'LockSet' ; GOSUB LockSet
CASE Method = 'UnlockSet' ; GOSUB UnlockSet
CASE Method = 'ChangeWOStepProps' ; GOSUB ChangeWOStepProps
CASE Method = 'AdjStepWafersIn' ; GOSUB AdjStepWafersIn
CASE Method = 'GetMetKeys' ; GOSUB GetMetKeys
CASE Method = 'MetConversion' ; GOSUB MetConversion
CASE Method = 'LoadEpi' ; GOSUB LoadEpi
CASE Method = 'RemovePocketNCR' ; GOSUB RemovePocketNCR
CASE 1
END CASE
IF ErrorMsg NE '' THEN
Set_Status(-1,ErrTitle:@SVM:ErrorMsg)
END
RETURN Result
* * * * * * *
Find:
* * * * * * *
RDSKeys = Dialog_Box('DIALOG_RDS_QUERY',@WINDOW,'')
Result = RDSKeys
RETURN
* * * * * * *
Delete:
* * * * * * *
RdsNos = Parms[1,@RM]
TableVar = Parms[COL2()+1,@RM]
IF RdsNos = '' THEN RETURN
RdsDateIns = XLATE('RDS',RdsNos,35,'X') ;* Field 35 = RDS_DATE_IN$
CONVERT @FM TO @VM IN RdsDateIns
IF @USERNAME = 'BRYCE_BARB' THEN DEBUG
TestString = RdsDateIns
CONVERT @VM TO '' IN TestString
IF TestString NE '' THEN
FOR I = 1 TO COUNT(RdsDateIns,@VM) + (RdsDateIns NE '')
IF RdsDateIns<1,I> NE '' THEN
Result<1,-1> = RdsNos<1,I> ;* Return list of RdsNos that have started processing and cannot be deleted
END
NEXT I
ErrorMsg = 'Production started on one or more RDS No(s).'
RETURN
END
IF TableVar = '' THEN
* This section of code should be removed after all calls to obj_RDS('Delete'....) have been checked
Set_Status(0)
RTParms = 'RDS'
LockedRDSNos = ''
FOR I = 1 TO COUNT(RdsNos,@VM) + (RdsNos NE '')
RdsNo = RdsNos<1,I>
RTParms = FieldStore(RTParms, @RM, 2, 1, RdsNo)
obj_Tables('LockRec',RTParms)
IF Get_Status(errCode) THEN
FOR N = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNos<1,N>)
obj_Tables('UnlockRec',RTParms) ;* Unlock everything locked up to here
NEXT N
ErrorMsg = 'Unable to lock RDS ':QUOTE(RdsNo):' for delete.'
RETURN
END ELSE
LockedRDSNos<1,I> = RdsNo
END
NEXT I
TableVar = FIELD(RTParms,@RM,3,1)
END
FOR I = 1 TO COUNT(RdsNos,@VM) + (RdsNos NE '')
RdsNo = RdsNos<1,I>
LSKeys = XLATE('RDS',RdsNo,RDS_RDS_LAYER_KEYS$,'X')
MetKeys = XLATE('RDS_LAYER',LSKeys,RDS_LAYER_RDS_TEST_KEYS$,'X')
RTParms = 'RDS':@RM:RdsNo:@RM:TableVar:@RM
obj_Tables('UnlockRec',RTParms)
obj_RDS_Test('Delete',MetKeys)
obj_RDS_Layer('Delete',LSKeys)
obj_Tables('DeleteRec','RDS':RTParms) ;* Deletes and removes the lock
NEXT I
RETURN
* * * * * * *
LockSet:
* * * * * * *
RdsNos = Parms[1,@RM]
IF RdsNos = '' THEN RETURN
Set_Status(0)
RTParms = 'RDS'
LockedRDSNos = ''
FOR I = 1 TO COUNT(RdsNos,@VM) + (RdsNos NE '')
RdsNo = RdsNos<1,I>
RTParms = FieldStore(RTParms, @RM, 2, 1, RdsNo)
obj_Tables('LockRec',RTParms)
IF Get_Status(errCode) THEN
FOR N = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNos<1,N>)
obj_Tables('UnlockRec',RTParms) ;* Unlock everything locked up to here
NEXT N
ErrorMsg = 'Unable to lock RDS ':QUOTE(RdsNo):'.'
RETURN
END ELSE
LockedRDSNos<1,I> = RdsNo
END
NEXT I
TableVar = FIELD(RTParms,@RM,3,1)
Result = TableVar
RETURN
* * * * * * *
UnlockSet:
* * * * * * *
RdsNos = Parms[1,@RM]
TableVar = Parms[COL2()+1,@RM]
IF RdsNos = '' THEN RETURN
IF TableVar = '' THEN RETURN
Set_Status(0)
RTParms = 'RDS':@RM:@RM:TableVar
LockedRDSNos = ''
FOR I = 1 TO COUNT(RdsNos,@VM) + (RdsNos NE '')
RdsNo = RdsNos<1,I>
RTParms = FieldStore(RTParms, @RM, 2, 1, RdsNo)
obj_Tables('UnlockRec',RTParms)
NEXT I
RETURN
* * * * * * *
ChangeWOStepProps:
* * * * * * *
RDSNos = Parms[1,@RM]
CommitDts = Parms[COL2()+1,@RM]
HotLots = Parms[COL2()+1,@RM]
MUBoxes = Parms[COL2()+1,@RM]
IF NOT(ASSIGNED(RDSNos)) THEN ErrorMsg = 'Unassigned Parm "RDSNos" passed to routine. (':Method:')'
IF NOT(ASSIGNED(CommitDts)) THEN CommitDts = ''
IF NOT(ASSIGNED(HotLots)) THEN HotLots = ''
IF NOT(ASSIGNED(MUBoxes)) THEN MUBoxes = ''
IF ErrorMsg NE '' THEN RETURN
IF RDSNos = '' THEN RETURN
Set_Status(0)
RTParms = 'RDS'
LockedRDSNos = ''
FOR I = 1 TO COUNT(RdsNos,@VM) + (RdsNos NE '')
RdsNo = RdsNos<1,I>
RTParms = FieldStore(RTParms, @RM, 2, 1, RdsNo)
obj_Tables('LockRec',RTParms)
IF Get_Status(errCode) THEN
FOR N = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNos<1,N>)
obj_Tables('UnlockRec',RTParms) ;* Unlock everything locked up to here
NEXT N
ErrorMsg = 'Unable to lock RDS ':QUOTE(RdsNo):' for update.'
RETURN
END ELSE
LockedRDSNos<1,I> = RdsNo
END
NEXT I
CommitDts = ICONV(CommitDts,'D') ;* Move to internal format
HotLots = ICONV(HotLots,'B')
MUBoxes = ICONV(MUBoxes,'B')
RDSTableVar = FIELD(RTParms,@RM,3)
FOR I = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
LockedRDSNo = LockedRDSNos<1,I>
READ RDSRec FROM RDSTableVar,LockedRDSNo THEN
CommitDt = CommitDts<1,I>
HotLot = HotLots<1,I>
MUBox = MUBoxes<1,I>
IF CommitDt NE RDSRec<RDS_COMMIT_DATE_FINAL$> THEN RDSRec<RDS_COMMIT_DATE_FINAL$> = CommitDt
IF HotLot NE RDSRec<RDS_HOT_LOT$> THEN RDSRec<RDS_HOT_LOT$> = HotLot
IF MUBox NE RDSRec<RDS_MAKEUP_BOX$> THEN RDSRec<RDS_MAKEUP_BOX$> = MUBox
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNo)
RTParms = FieldStore(RTParms, @RM, 4, 1, RDSRec)
obj_Tables('WriteRec',RTParms) ;* Write and unlock RDS records
END
NEXT I
RETURN
* * * * * * *
AdjStepWafersIn:
* * * * * * *
RETURN
* Dead as of 11/5/2008 JCH
StepCompRdsNos = Parms[1,@RM]
AdjRdsNos = Parms[COL2()+1,@RM]
IF StepCompRdsNos = '' THEN ErrorMsg = 'Null parameter "StepCompRdsNos" passed to routine. (':Method:')'
IF AdjRdsNos = '' THEN ErrorMsg = 'Null parameter "AdjRdsNos" passed to routine. (':Method:')'
IF ErrorMsg NE '' THEN RETURN
Set_Status(0)
RTParms = 'RDS'
LockedRDSNos = ''
FOR I = 1 TO COUNT(AdjRdsNos,@VM) + (AdjRdsNos NE '')
AdjRdsNo = AdjRdsNos<1,I>
RTParms = FieldStore(RTParms, @RM, 2, 1, AdjRdsNo)
obj_Tables('LockRec',RTParms)
IF Get_Status(errCode) THEN
FOR N = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNos<1,N>)
obj_Tables('UnlockRec',RTParms) ;* Unlock everything locked up to here
NEXT N
ErrorMsg = 'Unable to lock RDS ':QUOTE(AdjRdsNo):' for update.'
RETURN
END ELSE
LockedRDSNos<1,I> = AdjRdsNo
END
NEXT I
RDSTableVar = FIELD(RTParms,@RM,3)
FOR I = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
LockedRDSNo = LockedRDSNos<1,I>
READ RDSRec FROM RDSTableVar,LockedRDSNo THEN
SCRdsNo = StepCompRdsNos<1,I>
SCWafersOut = XLATE('RDS',SCRdsNo,'WFRS_OUT','X') ;* Wafers out from previous step
RDSRec<RDS_CASS_WAFER_QTY$> = SCWafersOut
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNo)
RTParms = FieldStore(RTParms, @RM, 4, 1, RDSRec)
obj_Tables('WriteRec',RTParms) ;* Write and unlock RDS records
END ELSE
status = Set_FSError()
FOR N = 1 TO COUNT(LockedRDSNos,@VM) + (LockedRDSNos NE '')
RTParms = FieldStore(RTParms, @RM, 2, 1, LockedRDSNos<1,N>)
obj_Tables('UnlockRec',RTParms) ;* Unlock everything locked up to here
NEXT N
END
NEXT I
RETURN
* * * * * * *
GetMetKeys:
* * * * * * *
* Returns data structure of 'LSID*ZONE' - @VM in first column associated RDS_TEST numbers in 2nd Column.
RdsNo = Parms[1,@RM]
IF RdsNo = '' THEN RETURN
SortedLSKeys = XLATE('RDS',RdsNo,'RDS_LS_SORTED','X')
CONVERT @VM TO @FM IN SortedLSKeys
IF SortedLSKeys NE '' THEN
LSMetKeys = XLATE('RDS_LAYER',SortedLSKeys,RDS_LAYER_RDS_TEST_KEYS$,'X')
RDSMetZones = XLATE('RDS_TEST',LSMetKeys,RDS_TEST_ZONE$,'X')
ResultLine = 0
FOR I = 1 TO COUNT(SortedLSKeys,@FM) + (SortedLSKeys NE '')
SortedLSKey = SortedLSKeys<I>
LSMetKey = LSMetKeys<I>
FOR N = 1 TO COUNT(LSMetKey,@VM) + (LSMetKey NE '')
ResultLine += 1
Result<1,ResultLine> = FIELD(SortedLSKey,'*',2):'*':RDSMetZones<I,N>
Result<2,ResultLine> = LSMetKeys<I,N>
NEXT N
NEXT I
END
RETURN
* * * * * * *
LoadEpi:
* * * * * * *
RdsNo = Parms[1,@RM]
Pockets = Parms[COL2()+1,@RM]
PocketChars = Parms[COL2()+1,@RM]
Zones = Parms[COL2()+1,@RM]
InCassettes = Parms[COL2()+1,@RM]
InSlots = Parms[COL2()+1,@RM]
WaferChars = Parms[COL2()+1,@RM]
OutCassettes = Parms[COL2()+1,@RM]
OutSlots = Parms[COL2()+1,@RM]
OutNCRs = Parms[COL2()+1,@RM]
IF RdsNo = '' THEN RETURN
Set_Status(0)
RTParms = 'RDS':@RM:RdsNo
RDSRec = obj_Tables('ReadRec',RTParms)
IF Get_Status(errCode) THEN
ErrorMsg = 'Unable to read RDS ':QUOTE(RdsNo):' for LoadEpi update.'
RETURN
END
RDSRec<RDS_POCKET$> = Pockets
RDSRec<RDS_POCKET_CHAR$> = PocketChars
RDSRec<RDS_ZONE$> = Zones
RDSRec<RDS_IN_CASS_NO$> = InCassettes
RDSRec<RDS_IN_SLOT_NO$> = Inslots
RDSRec<RDS_OUT_CASS_NO$> = OutCassettes
RDSRec<RDS_OUT_CASS_SLOT$> = OutSlots
RDSRec<RDS_WAFER_CHAR$> = WaferChars
RDSRec<RDS_OUT_NCR$> = OutNCRs
LoadCnt = 0
FOR I = 1 TO COUNT(WaferChars,@VM) + (WaferChars NE '')
IF WaferChars<1,I> = 'PROD' THEN LoadCnt += 1
NEXT I
RDSRec<RDS_WAFERS_IN$> = LoadCnt
RDSRec<RDS_VERIFY_QTY$> = LoadCnt
RDSRec<RDS_CASS_WAFER_QTY$> = LoadCnt
RTParms = FieldStore(RTParms, @RM, 4, 1, RDSRec)
obj_Tables('WriteRec',RTParms)
RETURN
* * * * * * *
RemovePocketNCR:
* * * * * * *
RDSNo = Parms[1,@RM]
NCRNo = Parms[COL2()+1,@RM]
IF RDSNo = '' THEN RETURN
IF NCRNo = '' THEN RETURN
IF RDSNo = '' THEN ErrorMsg = 'Null parameter "RDSNo" passed to routine. (':Method:')'
IF NCRNo = '' THEN ErrorMsg = 'Null parameter "NCRNo" passed to routine. (':Method:')'
IF ErrorMsg NE '' THEN RETURN
Set_Status(0)
RTParms = 'RDS':@RM:RdsNo
RDSRec = obj_Tables('ReadRec',RTParms)
IF Get_Status(errCode) THEN
ErrorMsg = 'Unable to read RDS ':QUOTE(RdsNo):' for LoadEpi update.'
RETURN
END
OutNCRs = RDSRec<RDS_OUT_NCR$>
Done = 0
LOOP
LOCATE NCRNo IN RDSRec<RDS_OUT_NCR$> USING @VM SETTING Pos THEN
RDSRec<RDS_OUT_NCR$,Pos> = ''
END ELSE
Done = 1
END
UNTIL Done
REPEAT
RTParms = FieldStore(RTParms, @RM, 4, 1, RDSRec)
obj_Tables('WriteRec',RTParms)
RETURN
* * * * * * *
MetConversion:
* * * * * * *
* Updates entered data into RDS_LAYER and RDS_TEST records from RDS record
RETURN ;* Dead 4/16/2006 with installation of metrology and NCR updates
RDSNo = Parms[1,@RM]
IF RDSNo = '' THEN RETURN
SortedLSKeys = XLATE('RDS',RDSNo,'RDS_LS_SORTED','X')
RDSRec = XLATE('RDS',RDSNo,'','X')
PSNId = RDSRec<RDS_PROD_SPEC_ID$>
ResUnits = RDSRec<RDS_RES_UNITS$>
LayerMess = RDSRec<RDS_LAYER_INFO$>
CONVERT CHAR(248) TO @FM IN LayerMess
LayerCnt = COUNT(LayerMess,@FM) + (LayerMess NE '')
IF SortedLSKeys = '' THEN
SortedLSKeys = 'L1'
FOR N = 1 TO COUNT(LayerMess,@FM) + (LayerMess NE '')
IF N = LayerCnt THEN
LS_ID = N
END ELSE
LS_ID = 'L':N
END
SortedLSKeys<1,-1> = LS_ID
NEXT N
END
FOR I = 1 TO COUNT(SortedLSKeys,@VM) + (SortedLSKeys NE '')
LSKey = SortedLSKeys<1,I>
LS_ID = FIELD(LSKey,'*',2)
RLParms = 'RDS_LAYER':@RM:LSKey
RDSLayerRec = obj_Tables('ReadRec',RLParms) ;* Try reading record
IF RDSLayerRec = '' THEN
obj_RDS_Layer('Create',RDSNo:@RM:LS_ID:@RM:PSNId) ;* Wasn't there - create it
RDSLayerRec = obj_Tables('ReadRec',RLParms) ;* Read it again
END
WaferSize = XLATE( 'PROD_SPEC', PSNId, 'SUB_WAFER_SIZE', 'X' )
SubOrientation = XLATE('PROD_SPEC',PSNId,'SUB_ORIENTATION','X')
ResUnits = RDSRec<RDS_RES_UNITS$>
IF I = 1 THEN
RDSLayerRec<RDS_LAYER_RECIPE_NO$> = RDSRec<RDS_RECIPE_NO$>
RDSLayerRec<RDS_LAYER_EPI_TIME$> = RDSRec<RDS_BAKE_TIME$>
RDSLayerRec<RDS_LAYER_DILUENT_ADJ_PARAM$> = RDSRec<RDS_DILUENT_ADJ_PARAM$>
RDSLayerRec<RDS_LAYER_DOPANT_FLOW$> = RDSRec<RDS_DOPANT_FLOW$>
RDSLayerRec<RDS_LAYER_HCL_FLOW$> = RDSRec<RDS_HCL_FLOW$>
RDSLayerRec<RDS_LAYER_BAKE_TIME$> = RDSRec<RDS_BAKE_TIME$>
RDSLayerRec<RDS_LAYER_EPI_H2_FLOW$> = RDSRec<RDS_EPI_H2_FLOW$>
RDSLayerRec<RDS_LAYER_TCS_FLOW$> = RDSRec<RDS_TCS_FLOW$>
RDSLayerRec<RDS_LAYER_DCS_FLOW$> = RDSRec<RDS_DCS_FLOW$>
RDSLayerRec<RDS_LAYER_AUX1$> = RDSRec<RDS_AUX1$>
RDSLayerRec<RDS_LAYER_AUX2$> = RDSRec<RDS_AUX2$>
RDSLayerRec<RDS_LAYER_F_OFFSET$> = RDSRec<RDS_F_OFFSET$>
RDSLayerRec<RDS_LAYER_S_OFFSET$> = RDSRec<RDS_S_OFFSET$>
RDSLayerRec<RDS_LAYER_R_OFFSET$> = RDSRec<RDS_R_OFFSET$>
RDSLayerRec<RDS_LAYER_ETCH1$> = RDSRec<RDS_ETCH1$>
RDSLayerRec<RDS_LAYER_ETCH2$> = RDSRec<RDS_ETCH2$>
IF RDSLayerRec<RDS_LAYER_RDS_TEST_KEYS$> = '' THEN
RDSTestRec = ''
RDSTestRec<RDS_TEST_RDS_NO$> = RDSNo
RDSTestRec<RDS_TEST_LS_ID$> = 'L1'
RDSTestRec<RDS_TEST_WAFER_SIZE$> = WaferSize
RDSTestRec<RDS_TEST_SUB_ORIENTATION$> = SubOrientation
RDSTestRec<RDS_TEST_SPEC_THICK_MIN$> = RDSRec<RDS_THICK_MIN$>
RDSTestRec<RDS_TEST_SPEC_THICK_TARGET$> = RDSRec<RDS_THICK_TARGET$>
RDSTestRec<RDS_TEST_SPEC_THICK_MAX$> = RDSRec<RDS_THICK_MAX$>
RDSTestRec<RDS_TEST_SPEC_THICK_UNITS$> = RDSRec<RDS_THICK_UNITS$>
RDSTestRec<RDS_TEST_SPEC_RES_MIN$> = RDSRec<RDS_RES_MIN$>
RDSTestRec<RDS_TEST_SPEC_RES_TARGET$> = RDSRec<RDS_RES_TARGET$>
RDSTestRec<RDS_TEST_SPEC_RES_MAX$> = RDSRec<RDS_RES_MAX$>
RDSTestRec<RDS_TEST_SPEC_RES_UNITS$> = RDSRec<RDS_RES_UNITS$>
RDSTestRec<RDS_TEST_SPEC_CON_MIN$> = RDSRec<RDS_CON_MIN$>
RDSTestRec<RDS_TEST_SPEC_CON_TARGET$> = RDSRec<RDS_CON_TARGET$>
RDSTestRec<RDS_TEST_SPEC_CON_MAX$> = RDSRec<RDS_CON_MAX$>
RDSTestRec<RDS_TEST_SPEC_CON_UNITS$> = RDSRec<RDS_CON_UNITS$>
* Now load the specification stuff that was not copied in the org system
SpecLayerData = obj_Prod_Spec('GetLayerProp',PSNId:@RM:LS_ID:@RM:1) ;* Gets 1st layer WO/Conversiion
SpecLayerID = SpecLayerData[1,@FM]
SpecLayerData = FIELD(SpecLayerData,@FM,2,999)
RDSTestRec<RDS_TEST_SPEC_DOPANT$> = SpecLayerData<PRS_LAYER_DOPANT$>
RDSTestRec<RDS_TEST_SPEC_RECIPE$> = SpecLayerData<PRS_LAYER_RECIPE$>
RDSTestRec<RDS_TEST_SPEC_RECIPE_NAME$> = SpecLayerData<PRS_LAYER_RECIPE_NAME$>
FOR A = 11 TO 19
RDSTestRec<A> = SpecLayerData<PRS_LAYER_THICK_MEASUREMENT$,A-10>
NEXT A
FOR A = 24 TO 32
RDSTestRec<A> = SpecLayerData<PRS_LAYER_RES_MEASUREMENT$,A-23>
NEXT A
FOR A = 37 TO 45
RDSTestRec<A> = SpecLayerData<PRS_LAYER_CONC_MEASUREMENT$,A-36>
NEXT A
FOR A = 50 to 58
RDSTestRec<A> = SpecLayerData<PRS_LAYER_STRESS_MEASUREMENT$,A-49>
NEXT A
RDSTestRec<RDS_TEST_SPEC_TRANS$> = SpecLayerData<PRS_LAYER_TRANS_SPEC$>
RDSTestRec<RDS_TEST_SPEC_TRANS_MEASUREMENT$> = SpecLayerData<PRS_LAYER_TRANS_MEASUREMENT$>
RTKey = NextKey('RDS_TEST')
RTParms = 'RDS_TEST':@RM:RTKey
END ELSE
RTKey = RDSLayerRec<RDS_LAYER_RDS_TEST_KEYS$,1>
RTParms = 'RDS_TEST':@RM:RTKey
RDSTestRec = obj_Tables('ReadRec',RTParms) ;* Try reading record
END
RDSTestRec<RDS_TEST_READ_SHEET_RHO$> = ICONV(OCONV(RDSRec<RDS_SHEETRHO_READ$>,'MD2'),'MD3')
RDSTestRec<RDS_TEST_READ_THICK$> = RDSRec<RDS_THICK_READ$>
RDSTestRec<RDS_TEST_THICK_AVG$> = RDSRec<RDS_TTHICK_AVG$>
RDSTestRec<RDS_TEST_THICK_STDV$> = RDSRec<RDS_TTHICK_STDEV$>
RDSTestRec<RDS_TEST_THICK_UNIF$> = RDSRec<RDS_TTHICK_UNIF$>
RDSTestRec<RDS_TEST_THICK_MIN$> = RDSRec<RDS_TTHICK_MIN$>
RDSTestRec<RDS_TEST_THICK_MAX$> = RDSRec<RDS_TTHICK_MAX$>
IF ResUnits = SHEETRHO_SPEC_UNITS$ THEN
RDSTestRec<RDS_TEST_SHEETRHO_AVG$> = RDSRec<RDS_TRES_AVG$>
RDSTestRec<RDS_TEST_SHEETRHO_STDV$> = RDSRec<RDS_TRES_STDEV$>
RDSTestRec<RDS_TEST_SHEETRHO_UNIF$> = RDSRec<RDS_TRES_UNIF$>
RDSTestRec<RDS_TEST_SHEETRHO_MIN$> = RDSRec<RDS_TRES_MIN$>
RDSTestRec<RDS_TEST_SHEETRHO_MAX$> = RDSRec<RDS_TRES_MAX$>
RDSTestRec<RDS_TEST_RES_AVG$> = ''
RDSTestRec<RDS_TEST_RES_STDV$> = ''
RDSTestRec<RDS_TEST_RES_UNIF$> = ''
RDSTestRec<RDS_TEST_RES_MIN$> = ''
RDSTestRec<RDS_TEST_RES_MAX$> = ''
END ELSE
RDSTestRec<RDS_TEST_SHEETRHO_AVG$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_STDV$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_UNIF$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_MIN$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_MAX$> = ''
RDSTestRec<RDS_TEST_RES_AVG$> = RDSRec<RDS_TRES_AVG$>
RDSTestRec<RDS_TEST_RES_STDV$> = RDSRec<RDS_TRES_STDEV$>
RDSTestRec<RDS_TEST_RES_UNIF$> = RDSRec<RDS_TRES_UNIF$>
RDSTestRec<RDS_TEST_RES_MIN$> = RDSRec<RDS_TRES_MIN$>
RDSTestRec<RDS_TEST_RES_MAX$> = RDSRec<RDS_TRES_MAX$>
END
RDSTestRec<RDS_TEST_THICK_OVERGROW_AVG$> = RDSRec<RDS_THICK_OVR_GROWTH_AVG$>
RDSTestRec<RDS_TEST_SRP_PROFILE_PATH$> = RDSRec<RDS_SRP_PROFILE_PATH$>
GOSUB LoadTestWafers
RDSTestRec = obj_RDS_Test('CalcMissing',RDSTestRec)
END ELSE
RecipeNo = LayerMess<I-1,RLRecipeNo$>
IF INDEX(LS_ID,'L',1) THEN
RDSLayerRec<RDS_LAYER_RECIPE_NO$> = RecipeNo
RDSLayerRec<RDS_LAYER_EPI_TIME$> = LayerMess<I-1,RLEpiTime$>
RDSLayerRec<RDS_LAYER_DOPANT_FLOW$> = LayerMess<I-1,RLDopantFlow$>
END
IF RDSLayerRec<RDS_LAYER_RDS_TEST_KEYS$> = '' THEN
PSNLayerData = obj_Prod_Spec('GetLayerProp',PSNId:@RM:LS_ID)
PSNLayerData = FIELD(PSNLayerData,@FM,2,999) ;* Layer ID is returned in the 1st field position
RDSTestRec = ''
RDSTestRec<RDS_TEST_RDS_NO$> = RDSNo
RDSTestRec<RDS_TEST_LS_ID$> = LS_ID
RDSTestRec<RDS_TEST_SPEC_THICK_MIN$> = LayerMess<I-1,RLThickMin$>
RDSTestRec<RDS_TEST_SPEC_THICK_TARGET$> = LayerMess<I-1,RLThickTarget$>
RDSTestRec<RDS_TEST_SPEC_THICK_MAX$> = LayerMess<I-1,RLThickMax$>
RDSTestRec<RDS_TEST_SPEC_THICK_UNITS$> = LayerMess<I-1,RLThickUnits$>
RDSTestRec<RDS_TEST_SPEC_RES_MIN$> = LayerMess<I-1,RLResMin$>
RDSTestRec<RDS_TEST_SPEC_RES_TARGET$> = LayerMess<I-1,RLResTarget$>
RDSTestRec<RDS_TEST_SPEC_RES_MAX$> = LayerMess<I-1,RLResMax$>
RDSTestRec<RDS_TEST_SPEC_RES_UNITS$> = LayerMess<I-1,RLResUnits$>
RDSTestRec<RDS_TEST_SPEC_CON_MIN$> = LayerMess<I-1,RLConMin$>
RDSTestRec<RDS_TEST_SPEC_CON_TARGET$> = LayerMess<I-1,RLConTarget$>
RDSTestRec<RDS_TEST_SPEC_CON_MAX$> = LayerMess<I-1,RLConMax$>
RDSTestRec<RDS_TEST_SPEC_CON_UNITS$> = LayerMess<I-1,RLConUnits$>
RDSTestRec<RDS_TEST_SPEC_STRESS_MIN$> = PSNLayerData<PRS_LAYER_STRESS_MIN$>
RDSTestRec<RDS_TEST_SPEC_STRESS_MAX$> = PSNLayerData<PRS_LAYER_STRESS_MAX$>
RDSTestRec<RDS_TEST_SPEC_TRANS$> = PSNLayerData<PRS_LAYER_TRANS_SPEC$>
RDSTestRec<RDS_TEST_SPEC_TRANS_MEASUREMENT$> = PSNLayerData<PRS_LAYER_TRANS_MEASUREMENT$>
RDSTestRec<RDS_TEST_WAFER_SIZE$> = WaferSize
RDSTestRec<RDS_TEST_SUB_ORIENTATION$> = SubOrientation
FOR A = 11 TO 19
RDSTestRec<A> = SpecLayerData<PRS_LAYER_THICK_MEASUREMENT$,A-10>
NEXT A
FOR A = 24 TO 32
RDSTestRec<A> = SpecLayerData<PRS_LAYER_RES_MEASUREMENT$,A-23>
NEXT A
FOR A = 37 TO 45
RDSTestRec<A> = SpecLayerData<PRS_LAYER_CONC_MEASUREMENT$,A-36>
NEXT A
FOR A = 50 to 58
RDSTestRec<A> = SpecLayerData<PRS_LAYER_STRESS_MEASUREMENT$,A-49>
NEXT A
RTKey = NextKey('RDS_TEST')
RTParms = 'RDS_TEST':@RM:RTKey
END ELSE
RTKey = RDSLayerRec<RDS_LAYER_RDS_TEST_KEYS$>
RTParms = 'RDS_TEST':@RM:RTKey
RDSTestRec = obj_Tables('ReadRec',RTParms) ;* Try reading record
END
* Update results data in Metrology record
SheetRHOReads = LayerMess<I-1,RLSheetRHORead$>
ThicknessReads = LayerMess<I-1,RLThickRead$>
CONVERT @SVM TO @VM IN SheetRHOReads
CONVERT @SVM TO @VM IN ThicknessReads
A1 = SheetRHOReads
RDSTestRec<RDS_TEST_READ_SHEET_RHO$> = ICONV(OCONV(SheetRHOReads,'MD2'),'MD3')
RDSTestRec<RDS_TEST_READ_THICK$> = ThicknessReads
RDSTestRec<RDS_TEST_THICK_AVG$> = LayerMess<I-1,RLTThickAvg$>
RDSTestRec<RDS_TEST_THICK_STDV$> = LayerMess<I-1,RLTThickStdev$>
RDSTestRec<RDS_TEST_THICK_UNIF$> = LayerMess<I-1,RLTThickUnif$>
RDSTestRec<RDS_TEST_THICK_MIN$> = LayerMess<I-1,RLTThickMin$>
RDSTestRec<RDS_TEST_THICK_MAX$> = LayerMess<I-1,RLTThickMax$>
IF ResUnits = SHEETRHO_SPEC_UNITS$ THEN
RDSTestRec<RDS_TEST_SHEETRHO_AVG$> = LayerMess<I-1,RLTResAvg$>
RDSTestRec<RDS_TEST_SHEETRHO_STDV$> = LayerMess<I-1,RLTResStdev$>
RDSTestRec<RDS_TEST_SHEETRHO_UNIF$> = LayerMess<I-1,RLTResUnif$>
RDSTestRec<RDS_TEST_SHEETRHO_MIN$> = LayerMess<I-1,RLTResMin$>
RDSTestRec<RDS_TEST_SHEETRHO_MAX$> = LayerMess<I-1,RLTResMax$>
RDSTestRec<RDS_TEST_RES_AVG$> = ''
RDSTestRec<RDS_TEST_RES_STDV$> = ''
RDSTestRec<RDS_TEST_RES_UNIF$> = ''
RDSTestRec<RDS_TEST_RES_MIN$> = ''
RDSTestRec<RDS_TEST_RES_MAX$> = ''
END ELSE
RDSTestRec<RDS_TEST_SHEETRHO_AVG$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_STDV$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_UNIF$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_MIN$> = ''
RDSTestRec<RDS_TEST_SHEETRHO_MAX$> = ''
RDSTestRec<RDS_TEST_RES_AVG$> = LayerMess<I-1,RLTResAvg$>
RDSTestRec<RDS_TEST_RES_STDV$> = LayerMess<I-1,RLTResStdev$>
RDSTestRec<RDS_TEST_RES_UNIF$> = LayerMess<I-1,RLTResUnif$>
RDSTestRec<RDS_TEST_RES_MIN$> = LayerMess<I-1,RLTResMin$>
RDSTestRec<RDS_TEST_RES_MAX$> = LayerMess<I-1,RLTResMax$>
END
* GOSUB LoadTestWafers
RDSTestRec = obj_RDS_Test('CalcMissing',RDSTestRec)
END
* Write and unlock the RDS_Layer Record
RLParms = FieldStore(RLParms, @RM, 4, 1, RDSLayerRec)
obj_Tables('WriteRec',RLParms)
* Write and unlock the RDS_Test Record
RTParms = FieldStore(RTParms, @RM, 4, 1, RDSTestRec)
obj_Tables('WriteRec',RTParms)
NEXT I
RETURN
* * * * * * *
LoadTestWafers:
* * * * * * *
TWLine = 0
IF RDSRec<RDS_TW_NMINUS_CNT$> NE '' THEN
TWType = 'N-'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_NMINUS_CODE$>,@VM) + (RDSRec<RDS_TW_NMINUS_CODE$> NE '')
TWTool = RDSRec<RDS_TW_NMINUS_TOOL$,T>
TWCode = RDSRec<RDS_TW_NMINUS_CODE$,T>
TWTrans = RDSRec<RDS_TW_NMINUS_TRANS$,T>
TWCnt = RDSRec<RDS_TW_NMINUS_CNT$,T>
TWCon = RDSRec<RDS_TW_NMINUS_CON$,T>
TWRes = RDSRec<RDS_TW_NMINUS_RES$,T>
TWRho = RDSRec<RDS_TW_NMINUS_RHO$,T>
TWStress = RDSRec<RDS_TW_NMINUS_STRESS$,T>
TWThick = RDSRec<RDS_TW_NMINUS_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
IF RDSRec<RDS_TW_NPLUS_CNT$> NE '' THEN
TWType = 'N+'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_NPLUS_CODE$>,@VM) + (RDSRec<RDS_TW_NPLUS_CODE$> NE '')
TWTool = RDSRec<RDS_TW_NPLUS_TOOL$,T>
TWCode = RDSRec<RDS_TW_NPLUS_CODE$,T>
TWTrans = RDSRec<RDS_TW_NPLUS_TRANS$,T>
TWCnt = RDSRec<RDS_TW_NPLUS_CNT$,T>
TWCon = RDSRec<RDS_TW_NPLUS_CON$,T>
TWRes = RDSRec<RDS_TW_NPLUS_RES$,T>
TWRho = RDSRec<RDS_TW_NPLUS_RHO$,T>
TWStress = RDSRec<RDS_TW_NPLUS_STRESS$,T>
TWThick = RDSRec<RDS_TW_NPLUS_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
IF RDSRec<RDS_TW_PMINUS_CNT$> NE '' THEN
TWType = 'P-'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_PMINUS_CODE$>,@VM) + (RDSRec<RDS_TW_PMINUS_CODE$> NE '')
TWTool = RDSRec<RDS_TW_PMINUS_TOOL$,T>
TWCode = RDSRec<RDS_TW_PMINUS_CODE$,T>
TWTrans = RDSRec<RDS_TW_PMINUS_TRANS$,T>
TWCnt = RDSRec<RDS_TW_PMINUS_CNT$,T>
TWCon = RDSRec<RDS_TW_PMINUS_CON$,T>
TWRes = RDSRec<RDS_TW_PMINUS_RES$,T>
TWRho = RDSRec<RDS_TW_PMINUS_RHO$,T>
TWStress = RDSRec<RDS_TW_PMINUS_STRESS$,T>
TWThick = RDSRec<RDS_TW_PMINUS_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
IF RDSRec<RDS_TW_PPLUS_CNT$> NE '' THEN
TWType = 'P+'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_PPLUS_CODE$>,@VM) + (RDSRec<RDS_TW_PPLUS_CODE$> NE '')
TWTool = RDSRec<RDS_TW_PPLUS_TOOL$,T>
TWCode = RDSRec<RDS_TW_PPLUS_CODE$,T>
TWTrans = RDSRec<RDS_TW_PPLUS_TRANS$,T>
TWCnt = RDSRec<RDS_TW_PPLUS_CNT$,T>
TWCon = RDSRec<RDS_TW_PPLUS_CON$,T>
TWRes = RDSRec<RDS_TW_PPLUS_RES$,T>
TWRho = RDSRec<RDS_TW_PPLUS_RHO$,T>
TWStress = RDSRec<RDS_TW_PPLUS_STRESS$,T>
TWThick = RDSRec<RDS_TW_PPLUS_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
IF RDSRec<RDS_TW_PROD_CNT$> NE '' THEN
TWType = 'Prod'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_PROD_CODE$>,@VM) + (RDSRec<RDS_TW_PROD_CODE$> NE '')
TWTool = RDSRec<RDS_TW_PROD_TOOL$,T>
TWCode = RDSRec<RDS_TW_PROD_CODE$,T>
TWTrans = RDSRec<RDS_TW_PROD_TRANS$,T>
TWCnt = RDSRec<RDS_TW_PROD_CNT$,T>
TWCon = RDSRec<RDS_TW_PROD_CON$,T>
TWRes = RDSRec<RDS_TW_PROD_RES$,T>
TWRho = RDSRec<RDS_TW_PROD_RHO$,T>
TWStress = RDSRec<RDS_TW_PROD_STRESS$,T>
TWThick = RDSRec<RDS_TW_PROD_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
IF RDSRec<RDS_TW_RECLAIM_CNT$> NE '' THEN
TWType = 'Reclaim'
FOR T = 1 TO COUNT(RDSRec<RDS_TW_RECLAIM_CODE$>,@VM) + (RDSRec<RDS_TW_RECLAIM_CODE$> NE '')
TWTool = RDSRec<RDS_TW_RECLAIM_TOOL$,T>
TWCode = RDSRec<RDS_TW_RECLAIM_CODE$,T>
TWTrans = RDSRec<RDS_TW_RECLAIM_TRANS$,T>
TWCnt = RDSRec<RDS_TW_RECLAIM_CNT$,T>
TWCon = RDSRec<RDS_TW_RECLAIM_CON$,T>
TWRes = RDSRec<RDS_TW_RECLAIM_RES$,T>
TWRho = RDSRec<RDS_TW_RECLAIM_RHO$,T>
TWStress = RDSRec<RDS_TW_RECLAIM_STRESS$,T>
TWThick = RDSRec<RDS_TW_RECLAIM_THICK$,T>
GOSUB LoadTWLine
NEXT T
END
RETURN
* * * * * * *
LoadTWLine:
* * * * * * *
TWLine += 1
RDSTestRec<RDS_TEST_TW_TYPE$,TWLine> = TWType
RDSTestRec<RDS_TEST_TW_TOOL$,TWLine> = TWTool
RDSTestRec<RDS_TEST_TW_CODE$,TWLine> = TWCode
RDSTestRec<RDS_TEST_TW_TRANS$,TWLine> = TWTrans
RDSTestRec<RDS_TEST_TW_CNT$,TWLine> = TWCnt
RDSTestRec<RDS_TEST_TW_CON$,TWLine> = TWCon
RDSTestRec<RDS_TEST_TW_RES$,TWLine> = TWRes
RDSTestRec<RDS_TEST_TW_RHO$,TWLine> = TWRho
RDSTestRec<RDS_TEST_TW_STRESS$,TWLine> = TWStress
RDSTestRec<RDS_TEST_TW_THICK$,TWLine> = TWThick
RETURN