open-insight/LSL2/STPROC/LOADPURCHSPEC.txt
Infineon\StieberD 7762b129af pre cutover push
2024-09-04 20:33:41 -07:00

376 lines
50 KiB
Plaintext

COMPILE ROUTINE LoadPurchSpec(Dummy)
ROWDEF(CHARSTR)
DECLARE SUBROUTINE Send_Dyn
$INSERT PURCH_SPEC_EQUATES
Data = ''
Data := 'EpiMSA PS-5002':@VM:'5':@VM:'5in':@VM:'Boron (100) 70.0-90.0 ohm-cm 625um (408O)':@VM:'5.1':@VM:'2/10/2010 12:03':@VM:'2/10/2010 12:03':@FM
Data := 'EpiMSA PS-5003':@VM:'3':@VM:'5in':@VM:'Boron (100) 140-180 ohm-cm 625um (408O)':@VM:'3.0':@VM:'1/18/2010 17:01':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5004':@VM:'2':@VM:'6in':@VM:'Boron (111) 0.008-0.020 ohm-um 625um':@VM:'2.0':@VM:'1/18/2010 17:10':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5006':@VM:'2':@VM:'6in':@VM:'Arsenic (100) 0-0.003 ohm-cm 375um':@VM:'2.0':@VM:'1/18/2010 17:27':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5007':@VM:'2':@VM:'5in':@VM:'Phosphorus (100) 1-100 ohm-cm 381um':@VM:'2.0':@VM:'1/18/2010 17:46':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5008':@VM:'7':@VM:'5in':@VM:'Phosphorus (100) 1-10 ohm-cm 381 um DSP (562O)':@VM:'7.0':@VM:'2/22/2010 14:05':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5009':@VM:'3':@VM:'4in':@VM:'Boron (100) 3.0-10.0 ohm-cm 381 DSP (562O)':@VM:'3.0':@VM:'1/18/2010 17:48':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5010':@VM:'2':@VM:'4in':@VM:'Boron 100 3.0-10.0 ohm-cm 381 um DSP Ultraflat':@VM:'2.0':@VM:'1/22/2010 10:32':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5011':@VM:'9':@VM:'5in':@VM:'Antimony (100) .010-.030 ohm-cm 375um (7085O) WWX':@VM:'1.0':@VM:'6/8/2010 23:34':@VM:'6/8/2010 23:34':@FM
Data := 'EpiMSA PS-5012':@VM:'4':@VM:'5in':@VM:'Boron 100_140-180 ohm-cm 625 um LTO Backside Lasermark_408O ':@VM:'4.0':@VM:'1/24/2010 1:31':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5013':@VM:'6':@VM:'5in':@VM:'Boron 100_60.0-80.0 ohm-cm 625 um LTO Backside Lasermark_408O':@VM:'6.0':@VM:'1/24/2010 1:32':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5014':@VM:'9':@VM:'5in':@VM:'Boron 100_36.0-48.0 ohm-cm 625 um LTO_408O ':@VM:'9.0':@VM:'1/24/2010 1:32':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5015':@VM:'2':@VM:'4in':@VM:'Boron 111_0.005-0.020 ohm-cm 525um_6855O ':@VM:'2.0':@VM:'1/24/2010 1:33':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5017':@VM:'5':@VM:'4in':@VM:'Boron 111_0.008-0.020 ohm-cm 525um_6859O ':@VM:'5.0':@VM:'1/24/2010 1:33':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5018':@VM:'4':@VM:'4in':@VM:'Boron 111_0.001-0.005 ohm-cm 525um with LTO ':@VM:'4.0':@VM:'1/24/2010 1:34':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5019':@VM:'1':@VM:'4in':@VM:'Antimony 111_0.005-0.020 ohm-cm 525um_6855O ':@VM:'1.0':@VM:'1/24/2010 1:34':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5020':@VM:'2':@VM:'5in':@VM:'Antimony 100_0.018-0.040 ohm-cm 625um ':@VM:'2.0':@VM:'1/24/2010 1:35':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5021':@VM:'3':@VM:'5in':@VM:'Boron 100_0-0.020 ohm-cm 625um ':@VM:'3.0':@VM:'1/24/2010 1:35':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5022':@VM:'2':@VM:'6in':@VM:'Arsenic 100_0-0.003 ohm-cm 625um ':@VM:'2.0':@VM:'1/24/2010 1:36':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5023':@VM:'2':@VM:'6in':@VM:'Boron 100_0-0.005 ohm-cm 625um':@VM:'2.0':@VM:'1/24/2010 1:36':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5025':@VM:'3':@VM:'6in':@VM:'Boron 100_0.010-0.020 ohm-cm 625um':@VM:'3.0':@VM:'1/24/2010 1:36':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5026':@VM:'3':@VM:'6in':@VM:'Arsenic 100_0-0.003 ohm-cm 508um_6847O ':@VM:'3.0':@VM:'1/24/2010 1:37':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5027':@VM:'2':@VM:'4in':@VM:'Arsenic 111_0.001-0.003 ohm-cm 525um_6791O ':@VM:'2.0':@VM:'1/24/2010 1:37':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5028':@VM:'3':@VM:'8in':@VM:'Boron 100_0.013-0.020 ohm-cm 675 um (615O)':@VM:'3.0':@VM:'2/25/2010 15:34':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5029':@VM:'2':@VM:'8in':@VM:'Boron_100_60-90 ohm-cm 725um LTO Backside Lasermark (408O)':@VM:'2.0':@VM:'2/25/2010 15:35':@VM:'12/21/2009 18:21':@FM
Data := 'EpiMSA PS-5030':@VM:'2':@VM:'8in':@VM:'Boron 100_34-50 ohm-cm 725um LTO Backside Lasermark_408O ':@VM:'2.0':@VM:'1/24/2010 1:38':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5031':@VM:'2':@VM:'6in':@VM:'Arsenic 100_0.001-0.005 ohm-cm 625um_6872O ':@VM:'2.0':@VM:'1/24/2010 1:38':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5032':@VM:'2':@VM:'4in':@VM:'Boron 100_0.003-0.005 ohm-cm 525um_6541O':@VM:'2.0':@VM:'1/24/2010 1:39':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5033':@VM:'2':@VM:'4in':@VM:'Antimony 111_0.005-0.018 ohm-cm 525um_638O ':@VM:'2.0':@VM:'1/24/2010 1:39':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5034':@VM:'4':@VM:'6in':@VM:'Boron 100_0.002-0.005 ohm-cm 625um_6872O ':@VM:'4.0':@VM:'1/24/2010 1:40':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5035':@VM:'1':@VM:'5in':@VM:'Arsenic 111_0.001-0.003 ohm-cm 525um_6893O ':@VM:'1.0':@VM:'1/24/2010 1:40':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5039':@VM:'1':@VM:'5in':@VM:'P-100 LTO test wafer':@VM:'1.0':@VM:'2/25/2010 15:40':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5040':@VM:'2':@VM:'6in':@VM:'As_100 0.001-0.005 ohmcm 625um 57.5 umflat 6898O ':@VM:'2.0':@VM:'1/24/2010 1:40':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5041':@VM:'6':@VM:'6in':@VM:'Boron 0.01-0.02 ohmcm 375um_test wafer ':@VM:'6.0':@VM:'1/24/2010 1:41':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5044':@VM:'3':@VM:'5in':@VM:'Boron 100_ 0.002-0.004 ohm-cm 525um_6863O ':@VM:'3.0':@VM:'1/24/2010 1:41':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5045':@VM:'2':@VM:'6in':@VM:'Boron 100_ 0.01-0.02 ohm-cm _6841O ':@VM:'2.0':@VM:'1/24/2010 1:42':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5047':@VM:'1':@VM:@VM:'Test Wafer':@VM:'1.0':@VM:'1/24/2010 1:42':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5049':@VM:'3':@VM:'6in':@VM:'Boron_100_.0035 ohm-cm 625 um_6872O':@VM:'3.0':@VM:'1/24/2010 1:43':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5050':@VM:'2':@VM:'5in':@VM:'Arsenic 111_0.002-0.003 ohm-cm 625 um_6903O':@VM:'2.0':@VM:'1/24/2010 1:44':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5051':@VM:'7':@VM:'6in':@VM:'Arsenic 100 max_0.0035 ohm-cm 625 um_6872O':@VM:'7.0':@VM:'2/25/2010 15:45':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5052':@VM:'4':@VM:'5in':@VM:'Boron (100) .004-.008 ohm-cm 625 um_6896O ':@VM:'4.0':@VM:'2/25/2010 16:23':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5053':@VM:'5':@VM:'5in':@VM:'Arsenic_100 .001-.005 ohm-cm 625 um_6896O':@VM:'5.0':@VM:'1/24/2010 1:46':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5054':@VM:'2':@VM:'4in':@VM:'Boron_111 .003-.005 ohm-cm 525 um_6901O ':@VM:'2.0':@VM:'1/24/2010 1:46':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5055':@VM:'2':@VM:'4in':@VM:'Arsenic_111 .005 ohm-cm 525 um_6901O':@VM:'2.0':@VM:'1/24/2010 1:46':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5056':@VM:'2':@VM:'5in':@VM:'Arsenic_111 .0010-.0022 ohm-cm 500 um_6903O ':@VM:'2.0':@VM:'1/24/2010 1:47':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5057':@VM:'2':@VM:'5in':@VM:'Arsenic_111 .002-.003 ohm-cm 500 um_6903O ':@VM:'1.0':@VM:'1/24/2010 1:47':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5058':@VM:'2':@VM:'5in':@VM:'Arsenic_111 .0028-.0040 ohm-cm 500 um_6903O ':@VM:'2.0':@VM:'1/25/2010 0:31':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5059':@VM:'2':@VM:'4in':@VM:'Boron_100_3-5 ohm-cm 390 um_590O':@VM:'2.0':@VM:'1/25/2010 0:31':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5060':@VM:'1':@VM:'5in':@VM:'Boron CZ_100_70.0-90.0 ohm-cm 625 um_408O ':@VM:'1.0':@VM:'2/25/2010 16:27':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5061':@VM:'1':@VM:'5in':@VM:'Boron_100_140-180 ohm-cm 625 um with um poly BS_408O':@VM:'1.0':@VM:'1/25/2010 0:32':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5062':@VM:'1':@VM:'5in':@VM:'Boron_100_140-180 ohm-cm 625 um with 1.2 um poly BS_408O':@VM:'1.0':@VM:'1/25/2010 0:32':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5063':@VM:'3':@VM:'6in':@VM:'Arsenic_100_0-0.0005 ohm-cm 375 um_Laser marked ':@VM:'3.0':@VM:'1/25/2010 0:33':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5064':@VM:'1':@VM:'4in':@VM:'Phos_100_4-6 ohm-cm 500 um_6859O ':@VM:'1.0':@VM:'1/25/2010 0:34':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5065':@VM:'1':@VM:'5in':@VM:'Boron_100_140-180 ohm-cm 381 um 0.8 Poly_408O ':@VM:'1.0':@VM:'1/25/2010 0:34':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5066':@VM:'1':@VM:'5in':@VM:'Boron_100_140-180 ohm-cm 381 um 408O ':@VM:'1.0':@VM:'1/25/2010 0:35':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5067':@VM:'2':@VM:'5in':@VM:'Boron_100_70-90 ohm-cm 625um .8 Poly_408O':@VM:'2.0':@VM:'1/25/2010 0:35':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5068':@VM:'2':@VM:@VM:'Test wafer Chartered P 111 ':@VM:'2.0':@VM:'1/25/2010 0:35':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5069':@VM:'2':@VM:'4in':@VM:'Arsenic_111_0.005 ohm-cm_6925O':@VM:'2.0':@VM:'1/25/2010 0:36':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5070':@VM:'1':@VM:'4in':@VM:'Antimony_100_0.005-.02 ohm-cm_500 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 0:37':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5071':@VM:'2':@VM:'4in':@VM:'Antimony_111_0.005-.02 ohm-cm_500 um Test Wafer ':@VM:'2.0':@VM:'1/25/2010 2:15':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5072':@VM:'1':@VM:'4in':@VM:'Phos_100_5-25 ohm-cm_500 um Test Wafer':@VM:'1.0':@VM:'1/25/2010 2:15':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5073':@VM:'1':@VM:'4in':@VM:'Phos_111_5-25 ohm-cm_500 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:15':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5074':@VM:'1':@VM:'4in':@VM:'Boron_100_.005-.02 ohm-cm_500 um Test Wafer with Oxide ':@VM:'1.0':@VM:'1/25/2010 2:16':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5075':@VM:'1':@VM:'4in':@VM:'Boron_111_.005-.02 ohm-cm_500 um Test Wafer with Oxide ':@VM:'1.0':@VM:'1/25/2010 2:17':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5076':@VM:'1':@VM:'4in':@VM:'Boron_100_5-25 ohm-cm_500 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:17':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5077':@VM:'1':@VM:'4in':@VM:'Boron_111_5-25 ohm-cm_500 um Test Wafer':@VM:'1.0':@VM:'1/25/2010 2:17':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5078':@VM:'2':@VM:'5in':@VM:'Antimony_100_.005-.02 ohm-cm_600 um Test Wafer ':@VM:'2.0':@VM:'1/25/2010 2:18':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5079':@VM:'2':@VM:'5in':@VM:'Antimony_111_.05-.020 ohm-cm_600 um Test Wafer':@VM:'2.0':@VM:'1/25/2010 2:18':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5080':@VM:'1':@VM:'5in':@VM:'Phos_100_5-25 oh-cm_600 um Test Wafer':@VM:'1.0':@VM:'1/25/2010 2:19':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5081':@VM:'2':@VM:'5in':@VM:'Phos_111_5-25 ohm-cm_600 um Test Wafer ':@VM:'2.0':@VM:'1/25/2010 2:20':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5082':@VM:'2':@VM:'5in':@VM:'Boron_100_.005-.02 ohm-cm_625 um Test Wafer ':@VM:'2.0':@VM:'1/25/2010 2:20':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5083':@VM:'1':@VM:'5in':@VM:'Boron_111_.005-.02 ohm-cm_600 um Test Wafer with Oxide ':@VM:'1.0':@VM:'1/25/2010 2:21':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5084':@VM:'2':@VM:'5in':@VM:'Boron_100_5-25 ohm-cm_625 um Test Wafer ':@VM:'2.0':@VM:'1/25/2010 2:21':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5085':@VM:'1':@VM:'5in':@VM:'Boron_111_5-25ohm-cm_600 um Test Wafer':@VM:'1.0':@VM:'1/25/2010 2:22':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5086':@VM:'1':@VM:'5in':@VM:'Arsenic_100_.001-.005 ohm-cm_515 um Prime Wafer with Oxide':@VM:'1.0':@VM:'2/25/2010 15:07':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5087':@VM:'2':@VM:'6in':@VM:'Antimony_100_.005-.02 ohm-cm_635 um Test Wafer ':@VM:'2.0':@VM:'2/25/2010 15:09':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5088':@VM:'1':@VM:'6in':@VM:'Antimony_111_.005-.02 ohm-cm_635 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:24':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5089':@VM:'1':@VM:'6in':@VM:'Phos_100_5-25 ohm-cm _635 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:24':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5090':@VM:'1':@VM:'6in':@VM:'Phos (111) 5-25 ohm-cm 635 um Test Wafer':@VM:'1.0':@VM:'2/25/2010 14:58':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5091':@VM:'1':@VM:'6in':@VM:'Boron_100_.005-.02 ohm-cm _635 um Test Wafer with Oxide ':@VM:'1.0':@VM:'2/25/2010 23:07':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5092':@VM:'1':@VM:'6in':@VM:'Boron_111_.005-.02 ohm-cm _635 um Test Wafer with Oxide':@VM:'1.0':@VM:'2/25/2010 15:13':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5093':@VM:'1':@VM:'6in':@VM:'Boron_100 5-25 ohm-cm 635 um Test Wafer ':@VM:'1.0':@VM:'2/25/2010 15:04':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5094':@VM:'1':@VM:'6in':@VM:'Boron_111_5-25 ohm-cm _635 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:27':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5095':@VM:'2':@VM:'8in':@VM:'Antimony_100_.005-.02 ohm-cm _725 um Test Wafer':@VM:'2.0':@VM:'1/25/2010 2:27':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5096':@VM:'1':@VM:'8in':@VM:'Antimony_111_.005-.02 ohm-cm _725 um Test Wafer':@VM:'1.0':@VM:'1/25/2010 2:28':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5097':@VM:'1':@VM:'8in':@VM:'Phos_100_5-25 ohm-cm _725 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:28':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5098':@VM:'1':@VM:'8in':@VM:'Phos_111_5-25 ohm-cm _725 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:29':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5099':@VM:'3':@VM:'8in':@VM:'Boron_100_.005-.02 ohm-cm _725 um Test Wafer':@VM:'3.0':@VM:'1/25/2010 2:30':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5100':@VM:'1':@VM:'8in':@VM:'Boron_111_.005-.02 ohm-cm _725 um Test Wafer with Oxide ':@VM:'1.0':@VM:'1/25/2010 2:30':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5101':@VM:'3':@VM:'8in':@VM:'Boron_100_5-25 ohm-cm _725 um Test Wafer':@VM:'3.0':@VM:'1/25/2010 2:31':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5102':@VM:'1':@VM:'8in':@VM:'Boron_111_5-25 ohm-cm _725 um Test Wafer ':@VM:'1.0':@VM:'1/25/2010 2:31':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5103':@VM:'1':@VM:'8in':@VM:'Boron_100_5-25 ohm-cm _725 um Test Wafer with 1000 amg Thermal Oxide ':@VM:'1.0':@VM:'1/26/2010 10:13':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5104':@VM:'2':@VM:'8in':@VM:'Boron_100_5-25 ohm-cm _725 um Test Wafer Prime Test Wafer for Particle Testing ':@VM:'2.0':@VM:'1/25/2010 2:32':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5105':@VM:'1':@VM:'6in':@VM:'Boron_100_5-25 ohm-cm _635 um Test Wafer with 1000 amg Themral Oxide':@VM:'1.0':@VM:'1/25/2010 2:32':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5106':@VM:'2':@VM:'6in':@VM:'Boron_100_5-25 ohm-cm _635 um Test Wafer for Particle Testing ':@VM:'2.0':@VM:'1/25/2010 2:33':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5107':@VM:'1':@VM:'5in':@VM:'Boron_100_5-25 ohm-cm _600 um Test Wafer with 1000 amg Thermal Oxide':@VM:'1.0':@VM:'1/25/2010 2:33':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5108':@VM:'8':@VM:'6in':@VM:'Arsenic_100 .005 ohm-cm 375um_6593O Siltronics.doc':@VM:'1.0':@VM:'10/1/2010 10:05':@VM:'10/1/2010 10:05':@FM
Data := 'EpiMSA PS-5109':@VM:'6':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _375 um_6593O_Siltronics ':@VM:'6.0':@VM:'12/21/2009 16:31':@VM:'12/21/2009 16:31':@FM
Data := 'EpiMSA PS-5110':@VM:'3':@VM:'6in':@VM:'Boron_100_.005 ohm-cm _375 um_6593O_Siltronics.doc':@VM:'1.0':@VM:'5/31/2010 15:34':@VM:'5/31/2010 15:34':@FM
Data := 'EpiMSA PS-5111':@VM:'5':@VM:'6in':@VM:'Boron_100_.01 ohm-cm _375 um_6593O_Siltronics.doc':@VM:'1.0':@VM:'5/31/2010 15:41':@VM:'5/31/2010 15:41':@FM
Data := 'EpiMSA PS-5112':@VM:'4':@VM:'6in':@VM:'Boron_100_.020 ohm-cm _375 um_6593O_Siltronics ':@VM:'4.0':@VM:'12/21/2009 15:24':@VM:'12/21/2009 15:24':@FM
Data := 'EpiMSA PS-5113':@VM:'6':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6593O_WWX ':@VM:'6.0':@VM:'1/25/2010 2:35':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5114':@VM:'1':@VM:'6in':@VM:'Boron_100_.004-.008 ohm-cm _625 um_6896O ':@VM:'1.0':@VM:'1/25/2010 2:35':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5115':@VM:'5':@VM:'6in':@VM:'Arsenic_100_.003-.005 ohm-cm _375 um TW ':@VM:'1.0':@VM:'1/25/2010 2:36':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5116':@VM:'3':@VM:'6in':@VM:'Boron_100_.01-.02 ohm-cm _675 um TW ':@VM:'3.0':@VM:'1/25/2010 2:36':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5117':@VM:'9':@VM:'6in':@VM:'Phos_100_.011-.017 ohm-cm _508 um_6874O_ WWX ':@VM:'9.0':@VM:'12/22/2009 1:30':@VM:'12/22/2009 1:30':@FM
Data := 'EpiMSA PS-5118':@VM:'7':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm _508 um_6874O_ WWX ':@VM:'7.0':@VM:'1/25/2010 2:37':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5119':@VM:'1':@VM:'6in':@VM:'Boron_100_70.0-90.0 ohm-cm _625 um_408O ':@VM:'1.0':@VM:'1/25/2010 2:37':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5120':@VM:'1':@VM:'6in':@VM:'Boron_100_140-180 ohm-cm _625 um_408O ':@VM:'1.0':@VM:'1/25/2010 2:38':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5121':@VM:'5':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6874O WWX ':@VM:'5.0':@VM:'1/25/2010 2:38':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5122':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6874O ':@VM:'1.0':@VM:'1/25/2010 2:39':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5123':@VM:'5':@VM:'6in':@VM:'Phosphorus_100_.00115-.0017 ohm-cm _508 um_6874O Siltronics':@VM:'5.0':@VM:'1/25/2010 2:40':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5124':@VM:'3':@VM:'6in':@VM:'Arsenic_100_.002-.003 ohm-cm _508 um_6874O Siltronics':@VM:'1.0':@VM:'7/16/2010 10:07':@VM:'7/16/2010 10:07':@FM
Data := 'EpiMSA PS-5125':@VM:'2':@VM:'6in':@VM:'Boron_100_.0035-.005 ohm-cm _508 um_6874O Siltronics ':@VM:'2.0':@VM:'1/25/2010 2:40':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5126':@VM:'2':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6874O Siltronics ':@VM:'2.0':@VM:'1/25/2010 2:41':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5127':@VM:'5':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm _375 um_6593O WWX':@VM:'5.0':@VM:'1/25/2010 2:41':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5128':@VM:'3':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6874O Siltronics':@VM:'1.0':@VM:'7/16/2010 9:46':@VM:'7/16/2010 9:46':@FM
Data := 'EpiMSA PS-5129':@VM:'3':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm _375 um_6593O WWX ':@VM:'3.0':@VM:'1/25/2010 2:43':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5130':@VM:'4':@VM:'5in':@VM:'Phosphorus_100_1-15 ohm-cm _381 um_DSP_562O_WWX ':@VM:'4.0':@VM:'1/25/2010 2:43':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5131':@VM:'2':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _375 um_6593O_WWX ':@VM:'2.0':@VM:'1/25/2010 2:44':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5132':@VM:'2':@VM:'6in':@VM:'Boron_100_.005 ohm-cm _375 um_6593O_WWX ':@VM:'2.0':@VM:'1/25/2010 2:44':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5133':@VM:'3':@VM:'6in':@VM:'Boron_100 .01 ohm-cm 375um_6593O_WWX':@VM:'3.0':@VM:'1/25/2010 2:44':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5134':@VM:'2':@VM:'6in':@VM:'Boron_100_.020 ohm-cm _375 um_6593O_WWX ':@VM:'2.0':@VM:'1/25/2010 2:45':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5135':@VM:'5':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _375 um_6593O_WWX ':@VM:'5.0':@VM:'1/25/2010 2:45':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5136':@VM:'2':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm _508 um_6847O_Siltronics':@VM:'2.0':@VM:'1/25/2010 2:46':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5137':@VM:'8':@VM:'8in':@VM:'Phosphorous_100 ,00115-.0017 ohm-cm 725um_6874O_Sumco':@VM:'8.0':@VM:'12/22/2009 1:38':@VM:'12/22/2009 1:38':@FM
Data := 'EpiMSA PS-5138':@VM:'9':@VM:'8in':@VM:'Phosphorous_100 .00115-.0017 ohm-cm 725um ':@VM:'9.0':@VM:'12/21/2009 17:31':@VM:'12/21/2009 17:31':@FM
Data := 'EpiMSA PS-5139':@VM:'6':@VM:'6in':@VM:'Boron_100_.01-.02 ohm-cm _508 um_6593O_WWX':@VM:'6.0':@VM:'1/25/2010 2:46':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5140':@VM:'1':@VM:'6in':@VM:'Boron_100_.01-.02 ohm-cm _508 um_6593O_Siltronics ':@VM:'1.0':@VM:'1/25/2010 2:47':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5141':@VM:'2':@VM:'4in':@VM:'Boron_100_3-5 ohm-cm _390 um_DSP_6900 O ':@VM:'2.0':@VM:'1/25/2010 2:47':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5142':@VM:'4':@VM:'6in':@VM:'Boron_100_.015-.02 ohm-cm _375 um_6593O_WWX ':@VM:'4.0':@VM:'1/25/2010 2:48':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5143':@VM:'1':@VM:'6in':@VM:'Antimony_100_.01-.02 ohm-cm _675 um_6477O':@VM:'1.0':@VM:'1/25/2010 2:49':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5144':@VM:'1':@VM:'6in':@VM:'Boron_100_.01-.02 ohm-cm _508 um_6593O_MEMC':@VM:'1.0':@VM:'2/22/2010 14:19':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5145':@VM:'5':@VM:'6in':@VM:'Boron_100_.015-.020 ohm-cm _375 um_6593O_MEMC ':@VM:'5.0':@VM:'12/21/2009 16:38':@VM:'12/21/2009 16:38':@FM
Data := 'EpiMSA PS-5146':@VM:'4':@VM:'6in':@VM:'Phosphorus_100_.00115-.0017 ohm-cm _508 um_6847O_MEMC ':@VM:'4.0':@VM:'1/25/2010 2:50':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5147':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6847O_MEMC ':@VM:'1.0':@VM:'1/25/2010 2:51':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5148':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm _508 um_6847O_MEMC ':@VM:'1.0':@VM:'1/25/2010 2:57':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5149':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm _508 um_6847O_MEMC':@VM:'1.0':@VM:'1/25/2010 2:57':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5150':@VM:'1':@VM:'6in':@VM:'Boron_100_.0035-.005 ohm-cm _508 um_6874O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:42':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5151':@VM:'2':@VM:'6in':@VM:'Arsenic 100_.005 ohm-cm _375 um_6593O_MEMC ':@VM:'2.0':@VM:'1/26/2010 17:43':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5152':@VM:'1':@VM:'6in':@VM:'Arsenic 100_.003 ohm-cm _375 um_6593O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:43':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5153':@VM:'1':@VM:'6in':@VM:'Boron 100_.005 ohm-cm _375 um_6593O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:44':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5154':@VM:'1':@VM:'6in':@VM:'Boron 100_.01 ohm-cm _375 um_6593O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:45':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5155':@VM:'1':@VM:'6in':@VM:'Boron 100_.020 ohm-cm _375 um_6593O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:46':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5156':@VM:'3':@VM:'6in':@VM:'Phos 100_.0011-.0017 ohm-cm _508 um_6874O_SUMCO ':@VM:'3.0':@VM:'1/26/2010 17:46':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5157':@VM:'4':@VM:'6in':@VM:'Boron 100_36.0-48.0 ohm-cm _508 um_LTO_6874O ':@VM:'1.0':@VM:'7/15/2010 18:04':@VM:'7/15/2010 18:04':@FM
Data := 'EpiMSA PS-5158':@VM:'4':@VM:'6in':@VM:'Boron 100_36.0-48.0 ohm-cm _508 um_LTO_6874O_WWX ':@VM:'4.0':@VM:'1/26/2010 17:47':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5159':@VM:'4':@VM:'6in':@VM:'Boron 100_70.0-90.0 ohm-cm _508 um_6874O_Siltronics dated 03-10-06.doc':@VM:'1.0':@VM:'7/14/2010 17:36':@VM:'7/14/2010 17:36':@FM
Data := 'EpiMSA PS-5160':@VM:'1':@VM:@VM:'EpiPro Reactor Equipment Specification ':@VM:'1.0':@VM:'2/22/2010 14:26':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5161':@VM:'1':@VM:'6in':@VM:'_Arsenic_100_.002-.003 ohm-cm 508 um_6874O_MEMC ':@VM:'1.0':@VM:'1/26/2010 17:49':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5162':@VM:'2':@VM:'6in':@VM:'_Boron_100_140-180 ohm-cm 508 um_6874O_Siltronic ':@VM:'2.0':@VM:'12/22/2009 1:46':@VM:'12/22/2009 1:46':@FM
Data := 'EpiMSA PS-5163':@VM:'3':@VM:'6in':@VM:'_Arsenic_100_.005 ohm-cm 375 um_6593O_Hi Voltage FET-Fred ':@VM:'3.0':@VM:'1/26/2010 17:50':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5164':@VM:'1':@VM:'6in':@VM:'_Arsenic_100_.003 ohm-cm 508 um_408O_Siltronics ':@VM:'1.0':@VM:'1/26/2010 17:50':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5165':@VM:'2':@VM:'6in':@VM:'_Boron_100_.015-.020 ohm-cm 375 um_6593O_Siltronic ':@VM:'2.0':@VM:'1/26/2010 17:51':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5166':@VM:'2':@VM:'6in':@VM:'_Arsenic_100_.005 ohm-cm 375 um_6593O_High Voltage FET-Fred Siltronic ':@VM:'2.0':@VM:'1/26/2010 17:52':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5167':@VM:'1':@VM:'6in':@VM:'_Boron_100_.005-.02 ohm-cm 625 um_6841O_WWX':@VM:'1.0':@VM:'1/26/2010 17:52':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5168':@VM:'6':@VM:'6in':@VM:'_Boron_100_140-180 ohm-cm 508 um_6874O_Siltronic ':@VM:'6.0':@VM:'1/26/2010 17:53':@VM:'12/22/2009 2:10':@FM
Data := 'EpiMSA PS-5169':@VM:'4':@VM:'6in':@VM:'_Arsenic_100_.003 ohm-cm 508 um_408O_WWX ':@VM:'4.0':@VM:'1/26/2010 17:53':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5170':@VM:'3':@VM:'6in':@VM:'_Arsenic_100_.005 ohm-cm_408O_WWX ':@VM:'3.0':@VM:'1/26/2010 17:54':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5171':@VM:'1':@VM:'6in':@VM:'_Arsenic_100_.005 ohm-cm_508um__408O_Siltronic ':@VM:'1.0':@VM:'2/25/2010 22:57':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5172':@VM:'1':@VM:'5in':@VM:'Boron_100 .007-.02 ohm-cm 625um LTO_6781O.doc':@VM:'1.0':@VM:'3/24/2010 9:44':@VM:'3/24/2010 9:44':@FM
Data := 'EpiMSA PS-5173':@VM:'1':@VM:'5in':@VM:'Antimony (100) .007-020 ohm-cm 625um LTO (6781O)':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5174':@VM:'1':@VM:'8in':@VM:'Boron (100) .007-.02 ohm-cm 725um LTO (6781O)':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5175':@VM:'1':@VM:'8in':@VM:'Boron (100) 13-23 ohm-cm 725 LTO (6781O)':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5177':@VM:'2':@VM:'6in':@VM:'Boron .01-.02 ohm-cm 625um_6841O.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5178':@VM:'1':@VM:'6in':@VM:'Boron .01-.02 ohm-cm_Reclaim Test Wafer.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5179':@VM:'8':@VM:'8in':@VM:'Phosphorous_100_.00115 -.0017 ohm-cm 725um_6874O_WWX':@VM:'8.0':@VM:'1/26/2010 17:55':@VM:'12/22/2009 2:27':@FM
Data := 'EpiMSA PS-5181':@VM:'2':@VM:'6in':@VM:'Boron 0.01-0.02 ohm-cm 508um_Test Wafer.doc':@VM:'1.0':@VM:'3/24/2010 9:45':@VM:'3/24/2010 9:45':@FM
Data := 'EpiMSA PS-5182':@VM:'1':@VM:'8in':@VM:'Boron_100 5-25 ohm-cm Reclaim Test Wafer.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5183':@VM:'1':@VM:'8in':@VM:'Boron_100 .005-02 ohm-cm Reclaim Test Wafer.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5184':@VM:'2':@VM:'5in':@VM:'Boron_100 .005-.02_Reclaim Test Wafer.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5185':@VM:'1':@VM:'5in':@VM:'Boron_100 5-25 ohm-cm Reclaim Test.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5186':@VM:'6':@VM:'8in':@VM:'Arsenic_100_.003 ohm-cm 725um_6874O_WWX ':@VM:'6.0':@VM:'1/26/2010 17:55':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5187':@VM:'4':@VM:'8in':@VM:'Arsenic_100 .003 ohm-cm 725 um_6874O_Sumco':@VM:'4.0':@VM:'1/26/2010 17:56':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5188':@VM:'4':@VM:'8in':@VM:'Arsenic_100 ,003 ohm-cm 725 um_6874O_Siltronic ':@VM:'4.0':@VM:'1/26/2010 17:56':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5189':@VM:'2':@VM:'8in':@VM:'_Boron_100_10-20 ohm-cm_SPV Test Wafer WWX ':@VM:'2.0':@VM:'1/26/2010 17:57':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5190':@VM:'1':@VM:'5in':@VM:'Boron_100 10-20 ohm-cm SPV Test Wafer WWX.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5192':@VM:'2':@VM:'6in':@VM:'_Arsenic_100_.002-.003 ohm-cm_508um_6874O_WWX':@VM:'2.0':@VM:'12/23/2009 16:40':@VM:'12/23/2009 16:40':@FM
Data := 'EpiMSA PS-5195':@VM:'4':@VM:'8in':@VM:'Arsenic_100 .003 ohm-cm 725um Test Wafer':@VM:'1.0':@VM:'1/26/2010 17:57':@VM:'1/22/2010 16:07':@FM
Data := 'EpiMSA PS-5196':@VM:'3':@VM:'6in':@VM:'Phosphorous (100) 5-35 ohm-cm 375um (6593O) WWX':@VM:'1.0':@VM:'5/7/2010 10:10':@VM:'5/7/2010 10:10':@FM
Data := 'EpiMSA PS-5197':@VM:'1':@VM:'6in':@VM:'Phos 100 20-30 ohm-cm 635um Test Wafer.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5198':@VM:'1':@VM:'5in':@VM:'Boron 100 .01-.02 ohm-cm 525 LTO 406O.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5199':@VM:'1':@VM:'5in':@VM:'_Arsenic_100_.005 ohm-cm_375um_408O ':@VM:'1.0':@VM:'1/26/2010 17:58':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5200':@VM:'2':@VM:'5in':@VM:'_Arsenic_100_.005 ohm-cm_375um_408O_Siltronics ':@VM:'2.0':@VM:'1/26/2010 17:59':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5201':@VM:'1':@VM:'5in':@VM:'_Arsenic_100_.005 ohm-cm_375um_408O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 17:59':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5202':@VM:'2':@VM:'5in':@VM:'_Arsenic_100_.005 ohm-cm_340um_408O_Siltronics ':@VM:'2.1':@VM:'1/26/2010 18:00':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5203':@VM:'1':@VM:'5in':@VM:'_Arsenic_100_.005 ohm-cm_340um_408O_WWX ':@VM:'1.1':@VM:'1/26/2010 18:00':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5204':@VM:'1':@VM:'5in':@VM:'_Boron_100_.005 ohm-cm_340um_408O_Siltronics ':@VM:'1.1':@VM:'1/26/2010 18:01':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5205':@VM:'1':@VM:'5in':@VM:'_Boron_100_.005 ohm-cm_340um_408O_WWX ':@VM:'1.1':@VM:'1/26/2010 18:02':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5206':@VM:'1':@VM:'8in':@VM:'_Phos_100_5-25 ohm-cm_Reclaim Test Wafer ':@VM:'1.1':@VM:'1/26/2010 18:02':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5207':@VM:'1':@VM:'6in':@VM:'_Arsenic_100_.003 ohm-cm_375um_6593O_SUMCO ':@VM:'1.1':@VM:'1/26/2010 18:03':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5208':@VM:'1':@VM:'6in':@VM:'_Arsenic_100_.005 ohm-cm_375um_6593O_SUMCO':@VM:'1.1':@VM:'1/26/2010 18:03':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5209':@VM:'1':@VM:'6in':@VM:'_Boron_100_.005 ohm-cm_375um_6593O_SUMCO ':@VM:'1.1':@VM:'1/26/2010 18:04':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5210':@VM:'1':@VM:'6in':@VM:'_Boron_100_.01-.02 ohm-cm_508um_408O_WWX':@VM:'1.1':@VM:'1/26/2010 18:05':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5211':@VM:'1':@VM:'8in':@VM:'_Boron_100_.01-.025 ohm-cm_725um_LTO_7039O ':@VM:'1.1':@VM:'1/26/2010 18:05':@VM:'1/15/2010 15:24':@FM
Data := 'EpiMSA PS-5212':@VM:'2':@VM:'6in':@VM:'_Boron_100_.015-.020 ohm-cm_375um_6593O ':@VM:'2.0':@VM:'1/26/2010 18:06':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5213':@VM:'0':@VM:'6in':@VM:'Arsenic_100 .005 ohm-cm 508um_408O WWX.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5214':@VM:'1':@VM:'6in':@VM:'Phos_100 .0011-.0017 ohms-cm 625um_527O WWX.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5216':@VM:'2':@VM:'6in':@VM:'_Boron_100_.010-.020 ohm-cm_675um_3756O WWX ':@VM:'2.0':@VM:'1/26/2010 18:06':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5217':@VM:'2':@VM:'6in':@VM:'_Boron_100_.010-.020 ohm-cm_675um_3756O_C-Flat Material WWX ':@VM:'2.0':@VM:'1/26/2010 18:07':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5218':@VM:'4':@VM:'8in':@VM:'Phosphorous_100 _.00112-.0017 ohm-cm 725um ':@VM:'4.0':@VM:'1/26/2010 18:07':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5219':@VM:'3':@VM:'6in':@VM:'_Arsenic_100_.003 ohm-cm_508um_6874O_SUMCO ':@VM:'3.0':@VM:'1/26/2010 18:08':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5220':@VM:'3':@VM:'6in':@VM:'_Arsenic_100_.003 ohm-cm_508um_6874O_SUMCO ':@VM:'3.0':@VM:'1/26/2010 18:08':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5221':@VM:'6':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 375um Polyback (6593O) Siltronic':@VM:'1.0':@VM:'5/4/2010 10:15':@VM:'5/4/2010 10:15':@FM
Data := 'EpiMSA PS-5222':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_6874O_Siltronics ':@VM:'1.0':@VM:'1/26/2010 18:09':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5223':@VM:'1':@VM:'6in':@VM:'Boron_100 0.012-0.020 ohms-cm 675um_527O WWX.doc':@VM:'1.0':@VM:'3/25/2010 16:28':@VM:'3/25/2010 16:28':@FM
Data := 'EpiMSA PS-5224':@VM:'2':@VM:'8in':@VM:'Boron_100_81-99 ohm-cm_725um_6874O_Siltronic ':@VM:'2.0':@VM:'2/22/2010 14:33':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5228':@VM:'2':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm_508um_6847O_SUMCO ':@VM:'2.0':@VM:'1/26/2010 18:10':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5229':@VM:'1':@VM:'6in':@VM:'Boron_100_5-25 ohm-cm_635um_Test wafer with 10K Ang Oxide ':@VM:'1.0':@VM:'1/26/2010 18:10':@VM:'3/9/2009 14:15':@FM
Data := 'EpiMSA PS-5230':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_6847O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 18:11':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5231':@VM:'2':@VM:'6in':@VM:'Arsenic_100 .003 ohm-cm 508um_6847O SUMCO.doc':@VM:'1.0':@VM:'3/25/2010 16:35':@VM:'3/25/2010 16:35':@FM
Data := 'EpiMSA PS-5232':@VM:'1':@VM:'6in':@VM:'Arsenic_100 .005 ohm-cm 508 um.doc':@VM:'1.0':@VM:'3/25/2010 16:35':@VM:'3/25/2010 16:35':@FM
Data := 'EpiMSA PS-5233':@VM:'4':@VM:'5in':@VM:'Antimony (100) .010-.030 ohm-cm 375um (7085O) WWX.doc':@VM:'1.0':@VM:'9/13/2010 10:40':@VM:'9/13/2010 10:40':@FM
Data := 'EpiMSA PS-5234':@VM:'1':@VM:'8in':@VM:'Phos .00115-.0017 ohm-cm Reclaim Prime.doc':@VM:'1.0':@VM:'3/25/2010 16:35':@VM:'3/25/2010 16:35':@FM
Data := 'EpiMSA PS-5235':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm_6874O_WWX ':@VM:'1.0':@VM:'1/26/2010 18:12':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5236':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_6874O_WWX ':@VM:'1.0':@VM:'1/26/2010 18:12':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5237':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_6874O_WWX ':@VM:'1.0':@VM:'1/26/2010 18:13':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5238':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_6874O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 18:13':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5239':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_6874O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 18:14':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5240':@VM:'1':@VM:'6in':@VM:'Phosphorous_100_.00115-.0017 ohm-cm_508um_6874O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 18:14':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5241':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.005 ohm-cm_508um_6874O_SUMCO ':@VM:'1.0':@VM:'1/26/2010 18:15':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5243':@VM:'1':@VM:'6in':@VM:'Phosphorous_100_.00115-.0017 ohm-cm_508um_6874O_SUMCO ':@VM:'1.0':@VM:'1/25/2010 2:56':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5244':@VM:'1':@VM:'6in':@VM:'Boron_.01-.02 ohm-cm_Reclaim Test Wafer with Particle Specs ':@VM:'1.0':@VM:'1/25/2010 2:55':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5245':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um KV3 Edge_6874O_Siltronic ':@VM:'1.0':@VM:'1/25/2010 2:55':@VM:'3/9/2009 14:17':@FM
Data := 'EpiMSA PS-5246':@VM:'5':@VM:'6in':@VM:'Arsenic_100 .005 ohm-cm 625 um_7034O WWX.doc':@VM:'1.0':@VM:'9/13/2010 13:31':@VM:'9/13/2010 13:31':@FM
Data := 'EpiMSA PS-5247':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.003 ohm-cm_508um_Thick Epi Trench_6847O_WWX ':@VM:'1.0':@VM:'1/25/2010 2:54':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5248':@VM:'1':@VM:'6in':@VM:'Boron_100_.0035-.005 ohm-cm_508um_6847O_Polyback Siltronics':@VM:'1.0':@VM:'1/25/2010 2:53':@VM:'3/9/2009 14:13':@FM
Data := 'EpiMSA PS-5249':@VM:'2':@VM:'6in':@VM:'Arsenic_.003 ohm-cm_508um_Thick Epi Trench_6847O_Siltronic':@VM:'2.0':@VM:'12/28/2009 13:26':@VM:'12/28/2009 13:26':@FM
Data := 'EpiMSA PS-5250':@VM:'2':@VM:'6in':@VM:'Arsenic_.003 ohm-cm_508um_6847O_Siltronic ':@VM:'2.0':@VM:'1/25/2010 2:53':@VM:'3/9/2009 14:14':@FM
Data := 'EpiMSA PS-5251':@VM:'1':@VM:'6in':@VM:'Arsenic_100 .005 ohm-cm 375um Poly Back 6593O_WWX ':@VM:'1.0':@VM:'1/25/2010 2:52':@VM:'3/9/2009 14:12':@FM
Data := 'EpiMSA PS-5252':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 375um 6593O SUMCO.doc':@VM:'1.0':@VM:'1/22/2010 11:39':@VM:'1/22/2010 11:39':@FM
Data := 'EpiMSA PS-5253':@VM:'1':@VM:'8in':@VM:'Arsenic 100 .003 ohm-cm 725um 6874O MEMC.doc':@VM:'1.0':@VM:'12/28/2009 13:30':@VM:'12/28/2009 13:30':@FM
Data := 'EpiMSA PS-5254':@VM:'0':@VM:'8in':@VM:'Boron 100 .015-.02 ohm-cm 725um 6874O.doc':@VM:'1.0':@VM:'3/25/2010 16:35':@VM:'3/25/2010 16:35':@FM
Data := 'EpiMSA PS-5255':@VM:'0':@VM:'8in':@VM:'Boron .0008-.0015 ohm-cm 725um 6874O.doc':@VM:'1.0':@VM:'3/25/2010 16:35':@VM:'3/25/2010 16:35':@FM
Data := 'EpiMSA PS-5256':@VM:'1':@VM:'8in':@VM:'Boron .0008-.0015 ohm-cm 725um_6874O Siltronic':@VM:'1.1':@VM:'12/28/2009 13:36':@VM:'12/28/2009 13:36':@FM
Data := 'EpiMSA PS-5257':@VM:'1':@VM:'6in':@VM:'Arsenic_100 .0005 ohm-cm 375um Poly Back_6593O':@VM:'1.0':@VM:'1/25/2010 2:52':@VM:'3/9/2009 14:16':@FM
Data := 'EpiMSA PS-5259':@VM:'2':@VM:'8in':@VM:'Boron .0008-.0015 ohm-cm 725 um_6874O Specific Values':@VM:'2.0':@VM:'12/28/2009 13:41':@VM:'12/28/2009 13:41':@FM
Data := 'EpiMSA PS-5260':@VM:'1':@VM:'8in':@VM:'Boron 100 .015-.020 ohm-cm 725um 6874O Siltronic.doc':@VM:'1.0':@VM:'12/10/2009 10:39':@VM:'12/10/2009 10:39':@FM
Data := 'EpiMSA PS-5261':@VM:'2':@VM:'8in':@VM:'Boron 100 .015-.020 ohm-cm 725um SUMCO.doc':@VM:'1.0':@VM:'12/10/2009 10:39':@VM:'12/10/2009 10:39':@FM
Data := 'EpiMSA PS-5262':@VM:'3':@VM:'6in':@VM:'Boron 100 70.0-90.0 ohm-cm 508um with poly and Ox 6874O Siltronic.doc':@VM:'1.0':@VM:'1/15/2010 15:18':@VM:'12/10/2009 10:39':@FM
Data := 'EpiMSA PS-5263':@VM:'1':@VM:'8in':@VM:'Boron .0008-.0015 ohm-cm 725um 6874O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5264':@VM:'1':@VM:'8in':@VM:'Phosphorous 100 .0012 ohm-cm 725um 6874O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5265':@VM:'1':@VM:@VM:'Linde-BOC.doc':@VM:'1.0':@VM:'4/21/2010 13:48':@VM:'4/21/2010 13:48':@FM
Data := 'EpiMSA PS-5266':@VM:'1':@VM:'8in':@VM:'Boron .0006-.0008 ohm-cm 725um 6874O SUMCO.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5267':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 375um 6593O SUMCO.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5268':@VM:'1':@VM:'6in':@VM:'Antimony 100 .01-.02 ohm-cm 625um 7041O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5269':@VM:'1':@VM:'6in':@VM:'Boron 100 .01-.02 ohm-cm 625 um 7058O WWX.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5270':@VM:'1':@VM:'6in':@VM:'Arseni 100 .005 ohm-cm 625um 7058O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5271':@VM:'1':@VM:@VM:'Test of System.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5272':@VM:'2':@VM:'8in':@VM:'Boron 100 60-100 ohm-cm 725um 6874O MEMC.doc':@VM:'1.1':@VM:'2/22/2010 14:40':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5273':@VM:'1':@VM:@VM:'KMG Chemicals.doc':@VM:'1.0':@VM:'3/12/2010 16:01':@VM:'3/12/2010 16:01':@FM
Data := 'EpiMSA PS-5274':@VM:'1':@VM:@VM:'Air Liquide.doc':@VM:'1.0':@VM:'4/21/2010 13:39':@VM:'4/21/2010 13:39':@FM
Data := 'EpiMSA PS-5275':@VM:'1':@VM:@VM:'Honeywell.doc':@VM:'1.0':@VM:'4/21/2010 13:28':@VM:'4/21/2010 13:28':@FM
Data := 'EpiMSA PS-5276':@VM:'1':@VM:@VM:'Hill Brothers.doc':@VM:'1.0':@VM:'4/21/2010 13:13':@VM:'4/21/2010 13:13':@FM
Data := 'EpiMSA PS-5277':@VM:'1':@VM:@VM:'Praxair.doc':@VM:'1.0':@VM:'4/21/2010 13:01':@VM:'4/21/2010 13:01':@FM
Data := 'EpiMSA PS-5278':@VM:'1':@VM:@VM:'Voltaix.doc':@VM:'1.0':@VM:'4/21/2010 11:35':@VM:'4/21/2010 11:35':@FM
Data := 'EpiMSA PS-5279':@VM:'0':@VM:'6in':@VM:'Antimony 100 .010-.018 ohm-cm 508um 6593O.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5280':@VM:'0':@VM:'6in':@VM:'Arsenic 100 .003-.005 ohm-cm 508um 6593O.doc':@VM:'1.0':@VM:'12/10/2009 10:40':@VM:'12/10/2009 10:40':@FM
Data := 'EpiMSA PS-5281':@VM:'1':@VM:'6in':@VM:'Phos_100 .0011-.0017 ohm-cm 508um 6874O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5282':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 375um 6593O WWX.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5283':@VM:'1':@VM:'8in':@VM:'Boron with Arsenic Implant 725um.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5284':@VM:'1':@VM:'6in':@VM:'Boron 100 .0035-.005 ohm-cm 508um 6874O SUMCO.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5285':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 625um.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5286':@VM:'1':@VM:'6in':@VM:'Antimony 100 .01-.018 ohm-cm 625um.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5287':@VM:'2':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 375um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5288':@VM:'2':@VM:'6in':@VM:'Boron 100 .005 ohm-cm 375um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5289':@VM:'2':@VM:'6in':@VM:'Boron 100 .015-.020 375um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5290':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .003 ohm-cm 375um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5291':@VM:'1':@VM:'6in':@VM:'Boron 100 36.0-48.0 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5292':@VM:'1':@VM:'6in':@VM:'Boron 100 140-180 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5293':@VM:'1':@VM:'6in':@VM:'Boron 100 70.0-90.0 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5294':@VM:'1':@VM:'6in':@VM:'Boron 100 36.0-48.0 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5295':@VM:'1':@VM:'6in':@VM:'Boron 100 140-180 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5296':@VM:'1':@VM:'6in':@VM:'Boron 100 70.0-90.0 ohm-cm 508um 6593O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5297':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .003 ohm-cm 508um 6874O Burghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5298':@VM:'1':@VM:'6in':@VM:'Phosphorous 100 .00115-.0017 ohm-cm 508um Berghausen.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5299':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 625um 7080O WWX.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5300':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 625um 7080O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5301':@VM:'1':@VM:'6in':@VM:'Arsenic 100 .005 ohm-cm 625um 7080O Siltronic.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5302':@VM:'1':@VM:'6in':@VM:'Antimony 100 .010-.018 ohm-cm 625um 7080O WWX.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5303':@VM:'1':@VM:'6in':@VM:'Antimony 100 .010-.018 ohm-cm 625um 7080O MEMC.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5304':@VM:'1':@VM:'6in':@VM:'Antimony 100 .010-.018 ohm-cm 625um 7080O Siltronic.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5305':@VM:'1':@VM:'8in':@VM:'Arsenic 100 .003 ohm-cm 725um 6874O MEMC Merano-Ipoh.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5306':@VM:'1':@VM:'8in':@VM:'Phosphorous 100 .000115-.0017 ohm-cm 725um 6874O MEMC Merano Ipoh.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5307':@VM:'1':@VM:'8in':@VM:'Boron 100 .003-.005 ohms-cm 725um 7053O Siltronic.doc':@VM:'1.1':@VM:'1/15/2010 15:18':@VM:'1/15/2010 15:18':@FM
Data := 'EpiMSA PS-5308':@VM:'1':@VM:'8in':@VM:'Arsenic_100_.003-.003 ohm-cm 725um_7041O Siltronic.doc':@VM:'1.0':@VM:'12/11/2009 14:40':@VM:'12/11/2009 14:40':@FM
Data := 'EpiMSA PS-5309':@VM:'1':@VM:'8in':@VM:'Arsenic_100_.001-.005 ohm-cm 725um_7041O Siltronic.doc':@VM:'1.0':@VM:'12/11/2009 14:40':@VM:'12/11/2009 14:40':@FM
Data := 'EpiMSA PS-5310':@VM:'5':@VM:'6in':@VM:'Arsenic_100_.01-.02 ohm-cm 625um_7077O.doc':@VM:'1.0':@VM:'6/2/2010 13:26':@VM:'6/2/2010 13:26':@FM
Data := 'EpiMSA PS-5311':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.001-.005 ohm-cm 575um_7041O_Siltronic.doc':@VM:'1.0':@VM:'12/11/2009 14:40':@VM:'12/11/2009 14:40':@FM
Data := 'EpiMSA PS-5312':@VM:'1':@VM:'6in':@VM:'Arsenic_100_.001-.005 ohm-cm 575um_7041O_MEMC.doc':@VM:'1.0':@VM:'12/11/2009 14:40':@VM:'12/11/2009 14:40':@FM
Data := 'EpiMSA PS-5313':@VM:'1':@VM:'6in':@VM:'Arsenic_100_ .005 ohm-cm 375um_6593O_ MEMC.doc':@VM:'1.0':@VM:'12/23/2009 14:22':@VM:'12/23/2009 14:22':@FM
Data := 'EpiMSA PS-5314':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 375um (6593O) Siltronic.doc':@VM:'1.0':@VM:'1/25/2010 0:28':@VM:'1/25/2010 0:28':@FM
Data := 'EpiMSA PS-5315':@VM:'2':@VM:'8in':@VM:'Phosphorous (100) .0014 ohm-cm 725um (7084O) SUMCO.doc':@VM:'1.0':@VM:'6/17/2010 8:40':@VM:'6/17/2010 8:40':@FM
Data := 'EpiMSA PS-5316':@VM:'3':@VM:'8in':@VM:'Phosphorous (100) .0014 ohm-cm 725um (7084O) MEMC.doc':@VM:'1.0':@VM:'3/19/2010 11:18':@VM:'3/19/2010 11:18':@FM
Data := 'EpiMSA PS-5317':@VM:'1':@VM:'8in':@VM:'Phosphorous (100) .0014 ohm-cm 725um (7084O) Siltronic.doc':@VM:'1.0':@VM:'1/19/2010 19:13':@VM:'1/19/2010 18:56':@FM
Data := 'EpiMSA PS-5318':@VM:'1':@VM:'8in':@VM:'Phosphorous (100) .0014 ohm-cm 725um (7084O) WWX.doc':@VM:'1.0':@VM:'1/22/2010 18:01':@VM:'1/22/2010 18:01':@FM
Data := 'EpiMSA PS-5319':@VM:'1':@VM:'8in':@VM:'Arsenic (100) .003 ohm-cm 725um (7084O) WWX.doc':@VM:'1.0':@VM:'1/26/2010 10:32':@VM:'1/26/2010 10:32':@FM
Data := 'EpiMSA PS-5320':@VM:'2':@VM:'8in':@VM:'Arsenic (100) .003 ohm-cm 725um (7084O) MEMC.doc':@VM:'1.0':@VM:'2/25/2010 14:21':@VM:'2/25/2010 14:21':@FM
Data := 'EpiMSA PS-5321':@VM:'1':@VM:'8in':@VM:'Arsenic (100) .003 ohm-cm 725um (7084O) SUMCOs.doc':@VM:'1.0':@VM:'1/19/2010 18:47':@VM:'1/19/2010 18:47':@FM
Data := 'EpiMSA PS-5322':@VM:'1':@VM:'8in':@VM:'Arsenic (100) .003 ohm-cm 725um (7084O) Siltronic.doc':@VM:'1.0':@VM:'1/23/2010 15:46':@VM:'1/23/2010 15:46':@FM
Data := 'EpiMSA PS-5323':@VM:'1':@VM:'5in':@VM:'Antimony (100) .010-.030 ohm-cm 375um (7034O) Siltronic.doc':@VM:'1.0':@VM:'1/23/2010 16:12':@VM:'1/23/2010 16:12':@FM
Data := 'EpiMSA PS-5324':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .003-.005 ohm-cm 625um (7058O) Siltronic.doc':@VM:'1.0':@VM:'1/19/2010 18:22':@VM:'1/19/2010 18:22':@FM
Data := 'EpiMSA PS-5325':@VM:'2':@VM:'5in':@VM:'Arsenic (100) .005 ohm-cm 375um (6593O) WWX.doc':@VM:'1.0':@VM:'9/13/2010 11:53':@VM:'9/13/2010 11:53':@FM
Data := 'EpiMSA PS-5326':@VM:'1':@VM:'6in':@VM:'Arsenic (100)_.003 ohm-cm 508um (6847O) Siltronic.doc':@VM:'1.0':@VM:'2/25/2010 14:51':@VM:'2/25/2010 14:51':@FM
Data := 'EpiMSA PS-5327':@VM:'2':@VM:'8in':@VM:'Arsenic (100)_ .003 ohm-cm 725um (6874O) Siltronic.doc':@VM:'2.0':@VM:'4/7/2010 13:43':@VM:'4/7/2010 13:43':@FM
Data := 'EpiMSA PS-5328':@VM:'2':@VM:'8in':@VM:'Phosphorous (100) .0017 ohm-cm 725um (6874O) Siltronic.doc':@VM:'1.0':@VM:'4/6/2010 16:03':@VM:'4/6/2010 16:03':@FM
Data := 'EpiMSA PS-5329':@VM:'2':@VM:'6in':@VM:'Arsenic (100)_ .005 ohm-cm 375um (6593O) WWX.doc':@VM:'1.0':@VM:'9/27/2010 16:34':@VM:'9/27/2010 16:34':@FM
Data := 'EpiMSA PS-5330':@VM:'2':@VM:'6in':@VM:'Arsenic (100)_ .005 ohm-cm 375um (6593O) MEMC.doc':@VM:'1.0':@VM:'9/27/2010 16:34':@VM:'9/27/2010 16:34':@FM
Data := 'EpiMSA PS-5331':@VM:'1':@VM:'6in':@VM:'Arsenic (100)_.005 ohm-cm 508um (6593O) WWX.doc':@VM:'1.0':@VM:'3/8/2010 14:21':@VM:'3/8/2010 14:21':@FM
Data := 'EpiMSA PS-5332':@VM:'1':@VM:'6in':@VM:'Arsenic (100)_ .005 ohm-cm 508um (6593O) MEMC.doc':@VM:'1.0':@VM:'3/8/2010 13:56':@VM:'3/8/2010 13:56':@FM
Data := 'EpiMSA PS-5333':@VM:'1':@VM:'6in':@VM:'Arsenic (100)_ .005 ohm-cm 375um (6593O) Siltronic.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5334':@VM:'1':@VM:'8in':@VM:'Boron (100)_ .005 ohm-cm 725um (7053O) MEMC.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5335':@VM:'1':@VM:'8in':@VM:'Boron (100) _ .005 ohm-cm 725um (7053O) SUMCO.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5336':@VM:'1':@VM:'6in':@VM:'Boron (100) .015-.020 ohm-cm 375um (6593O) WWX.doc':@VM:'1.0':@VM:'4/19/2010 16:43':@VM:'4/19/2010 16:43':@FM
Data := 'EpiMSA PS-5337':@VM:'3':@VM:'6in':@VM:'Antimony (100) .01-.02 ohm-cm 575um (7077O) MEMC':@VM:'1.0':@VM:'6/17/2010 8:27':@VM:'6/17/2010 8:27':@FM
Data := 'EpiMSA PS-5338':@VM:'1':@VM:'6in':@VM:'Boron (100) .015-.020 ohm-cm 375um (6593O) Siltronic.doc':@VM:'1.0':@VM:'4/19/2010 16:59':@VM:'4/19/2010 16:59':@FM
Data := 'EpiMSA PS-5339':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 625um (7058O) SAS.doc':@VM:'1.0':@VM:'5/31/2010 15:05':@VM:'5/31/2010 15:05':@FM
Data := 'EpiMSA PS-5340':@VM:'1':@VM:'6in':@VM:'Antimony (100) .01-.02 ohm-cm 575um (7077O) LG Siltron.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5341':@VM:'1':@VM:'6in':@VM:'Arsenic (100) _ .005 ohm-cm 508um (6593O) Siltronic.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5342':@VM:'1':@VM:'6in':@VM:'Boron (100) .01-.02 ohm-cm 625um (7058O) SUMCO.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5343':@VM:'1':@VM:'6in':@VM:'Boron (100) .01-.02 ohm-cm 625um (7058O) SAS.doc':@VM:'1.0':@VM:'5/31/2010 15:01':@VM:'5/31/2010 15:01':@FM
Data := 'EpiMSA PS-5347':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 585um (7058O) SAS.doc':@VM:'1.0':@VM:'8/11/2010 14:33':@VM:'8/11/2010 14:33':@FM
Data := 'EpiMSA PS-5348':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 535um (7058O) SAS.doc':@VM:'1.0':@VM:'8/11/2010 14:11':@VM:'8/11/2010 14:11':@FM
Data := 'EpiMSA PS-5349':@VM:'1':@VM:'5in':@VM:'Antimony (100) .01-.03 ohm-cm 375um (7085O) SAS.doc':@VM:'1.0':@VM:'9/17/2010 16:47':@VM:'9/17/2010 16:47':@FM
Data := 'EpiMSA PS-5350':@VM:'1':@VM:'5in':@VM:'Boron (100) .007-.02 ohm-cm 375um (7085O) SAS.doc':@VM:'1.0':@VM:'9/17/2010 15:50':@VM:'9/17/2010 15:50':@FM
Data := 'EpiMSA PS-5351':@VM:'1':@VM:'6in':@VM:'Boron (100) .01-.02 ohm-cm 625um (7080O) MEMC.doc':@VM:'1.0':@VM:'8/11/2010 13:37':@VM:'8/11/2010 13:37':@FM
Data := 'EpiMSA PS-5352':@VM:'1':@VM:'6in':@VM:'Boron (100) .015-.020 ohm-cm 375um (6593O) Siltronic BH.doc':@VM:'1.0':@VM:'7/14/2010 15:52':@VM:'7/14/2010 15:52':@FM
Data := 'EpiMSA PS-5353':@VM:'1':@VM:'6in':@VM:'Arsenic (100) .001-.005 ohm-cm 575um (7041O) Siltronic IB.doc':@VM:'1.0':@VM:'7/16/2010 11:25':@VM:'7/16/2010 11:25':@FM
Data := 'EpiMSA PS-5356':@VM:'2':@VM:'6in':@VM:'Arsenic (100) .005 ohm-cm 625um (7058O) WWX Shanghai_Taiwan.doc':@VM:'1.0':@VM:'9/17/2010 13:29':@VM:'9/17/2010 13:29':@FM
OPEN 'PURCH_SPEC' TO PSpecFile ELSE
debug
RETURN
END
LineCnt = COUNT(Data,@FM) + (Data NE '')
DEBUG
FOR I = 1 to LineCnt
LineData = Data<I>
PSpecRec = ''
PSpecID = LineData<1,1>[-1,'B ']
PSpecRec = FIELD(LineData,@VM,2,99)
CONVERT @VM TO @FM in PSpecRec
PSpecRec<PURCH_SPEC_MODIFY_DTM$> = ICONV(PSpecRec<PURCH_SPEC_MODIFY_DTM$>,'DT')
PSpecRec<PURCH_SPEC_CREATE_DTM$> = ICONV(PSpecRec<PURCH_SPEC_CREATE_DTM$>,'DT')
WRITE PSPecRec ON PSpecFile,PSpecID THEN
Send_Dyn(PSpecID)
END
NEXT I
* * * * * * *
Bail:
* * * * * * *
END