open-insight/LSL2/STPROC/CLEAN_INSP_ACTIONS_DEV.txt
2024-05-22 14:06:46 -07:00

873 lines
52 KiB
Plaintext

Function CLEAN_INSP_Actions_Dev(Action, CalcColName, FSList, Handle, Name, FMC, Record, Status, OrigRecord, Param1, Param2, Param3, Param4, Param5, Param6, Param7, Param8, Param9, Param10)
/***********************************************************************************************************************
This program is proprietary and is not to be used by or disclosed to others, nor is it to be copied without written
permission from Infineon.
Name : CLEAN_INSP_Actions
Description : Handles calculated columns and MFS calls for the current table.
Notes : This function uses @ID, @RECORD, and @DICT to make sure {ColumnName} references work correctly.
If called from outside of a calculated column these will need to be set and restored.
Parameters :
Action [in] -- Name of the action to be taken
CalcColName [in] -- Name of the calculated column that needs to be processed. Normally this should only be
populated when the CalcField action is being used.
FSList [in] -- The list of MFSs and the BFS name for the current file or volume. This is an @SVM
delimited array, with the current MFS name as the first value in the array, and the BFS
name as the last value. Normally set by a calling MFS.
Handle [in] -- The file handle of the file or media map being accessed. Note, this does contain the
entire handle structure that the Basic+ Open statement would provide. Normally set by a
calling MFS.
Name [in] -- The name (key) of the record or file being accessed. Normally set by a calling MFS.
FMC [in] -- Various functions. Normally set by a calling MFS.
Record [in] -- The entire record (for record-oriented functions) or a newly-created handle (for
"get handle" functions). Normally set by a calling MFS.
Status [in/out] -- Indicator of the success or failure of an action. Normally set by the calling MFS but
for some actions can be set by the action handler to indicate failure.
OrigRecord [in] -- Original content of the record being processed by the current action. This is
automatically being assigned by the WRITE_RECORD and DELETE_RECORD actions within
BASE_MFS.
Param1-10 [in/out] -- Additional request parameter holders
ActionFlow [out] -- Used to control the action chain (see the ACTION_SETUP insert for more information.)
Can also be used to return a special value, such as the results of the CalcField
method.
History : (Date, Initials, Notes)
07/28/10 dmb Original programmer.
10/13/10 dmb Fix logic to extract the file handle if file has an index
03/26/11 dmb Add logic to save and restore @FILE.ERROR
01/03/17 dmb Updated the ROTR compare logic to search for a recipe match.
04/09/18 dmb Updated the ROTR compare logic to be limited to FWI stages. Also modified the default logic
to be Failed unless proven otherwise.
04/19/18 djs Update ROTR compare logic to support multiple spec recipes.
05/04/18 dmb Update the special metrology log entry log to use the GetServer service rather than the
@STATION global variable.
06/13/18 dmb Replaced CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$ with CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$ when comparing
against the Sum of Defects in the SurfScan recipe. - [IREPIOI-43]
09/24/18 djs Adjusted the OConv call on the ScanDefect variable within the WRITE_RECORD_PRE action.
10/29/18 djs Updated the WRITE_RECORD_PRE event to calculate the SOD average to only use wafers that
are below the USL (SOD Max) as per ROTR Project requirements. Also updated the UCL request
using QA_Services to include the scanned Tencor Recipe name in order to return the UCL
associated with the particular recipe being processed at that time.
06/07/19 djs Updated the WRITE_RECORD_PRE GoSub to support ROTR requirements for POST stage SurfScan
rundata files.
08/12/20 djs Added logging within the WRITE_RECORD_PRE GoSub to gather data for a bug within the
Metrology_Services('ImportMetrologyService') subroutine. Occasionally the DB server is
getting an out of memory error when importing metrology files.
***********************************************************************************************************************/
#pragma precomp SRP_PreCompiler
$insert APP_INSERTS
$insert FILE.SYSTEM.EQUATES
$insert ACTION_SETUP
$insert CLEAN_INSP_EQUATES
$insert REACTOR_EQUATES
$insert RDS_EQUATES
$insert WM_OUT_EQUATES
$insert WO_LOG_EQUATES
$insert ROTR_EQUATES
$insert WO_MAT_EQUATES
Equ Comma$ to ','
Declare function Error_Services, Database_Services, Environment_Services, QA_Services, Logging_Services, RDS_Services
Declare function Trim
Declare subroutine Error_Services, Database_Services, Post_Metrology_Manual_Data_Entry_Log, Logging_Services
Declare subroutine Qa_Services
LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\CleanInsp'
LogDate = Oconv(Date(), 'D4/')
LogTime = Oconv(Time(), 'MTS')
LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' CLEAN_INSP Log.csv'
Headers = 'Logging DTM' : @FM : 'User' : @FM : 'RDS Key ID' : @FM : 'CLEAN_INSP Key ID' : @FM : 'Notes' : @FM : 'Stack'
objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$)
LoggingDTM = LogDate : ' ' : LogTime ; // Logging DTM
LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\FQABlocked'
LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' FQA Log.csv'
Headers = 'Logging DTM' : @FM : 'RDS Key ID' : @FM : 'Table' : @FM : 'Key' : @FM : 'Notes'
FQAobjLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$)
If KeyID then GoSub Initialize_System_Variables
Begin Case
Case Action _EQC 'CalculateColumn' ; GoSub CalculateColumn
Case Action _EQC 'READ_RECORD_PRE' ; GoSub READ_RECORD_PRE
Case Action _EQC 'READ_RECORD' ; GoSub READ_RECORD
Case Action _EQC 'READONLY_RECORD_PRE' ; GoSub READONLY_RECORD_PRE
Case Action _EQC 'READONLY_RECORD' ; GoSub READONLY_RECORD
Case Action _EQC 'WRITE_RECORD_PRE' ; GoSub WRITE_RECORD_PRE
Case Action _EQC 'WRITE_RECORD' ; GoSub WRITE_RECORD
Case Action _EQC 'DELETE_RECORD_PRE' ; GoSub DELETE_RECORD_PRE
Case Action _EQC 'DELETE_RECORD' ; GoSub DELETE_RECORD
Case Otherwise$ ; Status = 'Invalid Action'
End Case
If KeyID then GoSub Restore_System_Variables
If Assigned(ActionFlow) else ActionFlow = ACTION_CONTINUE$
Return ActionFlow
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
// Calculated Columns
//
// The typical structure of a calculated column will look like this:
//
// Declare function Database_Services
//
// @ANS = Database_Services('CalculateColumn')
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
CalculateColumn:
// Make sure the ActionFlow return variable is cleared in case nothing is calculated.
ActionFlow = ''
Begin Case
Case CalcColName EQ 'INSP_REQ' ; GoSub INSP_REQ
Case CalcColName EQ 'RDS_ROTR_ACTION' ; GoSub RDS_ROTR_ACTION
End Case
return
INSP_REQ:
RDSNo = {RDS_NO}
WONo = {WO_NO}
WOQty = Xlate('WO_LOG', WONo, 'QTY', 'X')
RunNo = Xlate('RDS', RDSNo, 'RUN_ORDER_NUM', 'X')
InspInterval = Xlate('PRS_STAGE', {PS_STAGE_KEY}, 'INSP_INTERVAL', 'X')
LastRun = ( (RunNo * 25) EQ WOQty )
InspReq = ( (Mod((RunNo - 1), InspInterval) EQ 0) or LastRun )
ActionFlow = InspReq
return
RDS_ROTR_ACTION:
ROTRAction = {ROTR_ACTION}
If ROTRAction EQ 'F' then
// Before returning a Fail, check to see if there is an acceptance for the results.
AcceptedSignature = {SIGN_ROTR_SIGNATURE}
AcceptedReason = {SIGN_ROTR_REASON}
If (AcceptedSignature NE '') AND (AcceptedReason NE '') then ROTRAction = 'A'
end
ActionFlow = ROTRAction
return
// ----- MFS calls -----------------------------------------------------------------------------------------------------
READ_RECORD_PRE:
// In order to stop a record from being read in this action these lines of code must be used:
//
// OrigFileError = 100 : @FM : KeyID
// Status = 0
// Record = ''
// ActionFlow = ACTION_STOP$
return
READ_RECORD:
// In order to stop a record from being read in this action these lines of code must be used:
//
// OrigFileError = 100 : @FM : KeyID
// Status = 0
// Record = ''
return
READONLY_RECORD_PRE:
// In order to stop a record from being read in this action these lines of code must be used:
//
// OrigFileError = 100 : @FM : KeyID
// Status = 0
// Record = ''
// ActionFlow = ACTION_STOP$
return
READONLY_RECORD:
// In order to stop a record from being read in this action these lines of code must be used:
//
// OrigFileError = 100 : @FM : KeyID
// Status = 0
// Record = ''
return
WRITE_RECORD_PRE:
OrigRecCopy = OrigRecord
RecCopy = Record
Convert @VM to '' in OrigRecCopy
Convert @VM to '' in RecCopy
// LWII Specification limits
OrigLWIISpecLPD = Trim(OrigRecCopy<CLEAN_INSP_INSP_LPD$>)
OrigLWIISpecScr = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
OrigLWIISpecScrLen = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
OrigLWIISpecPits = Trim(OrigRecCopy<CLEAN_INSP_INSP_PITS$>)
OrigLWIISpecMounds = Trim(OrigRecCopy<CLEAN_INSP_INSP_MOUNDS$>)
OrigLWIISpecStack = Trim(OrigRecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
OrigLWIISpecSpikes = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPIKES$>)
OrigLWIISpecSpots = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPOTS$>)
OrigLWIISpecBLDef = Trim(OrigRecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
OrigLWIISpecFOV = Trim(OrigRecCopy<CLEAN_INSP_INSP_FOV$>)
NewLWIISpecLPD = Trim(RecCopy<CLEAN_INSP_INSP_LPD$>)
NewLWIISpecScr = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
NewLWIISpecScrLen = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
NewLWIISpecPits = Trim(RecCopy<CLEAN_INSP_INSP_PITS$>)
NewLWIISpecMounds = Trim(RecCopy<CLEAN_INSP_INSP_MOUNDS$>)
NewLWIISpecStack = Trim(RecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
NewLWIISpecSpikes = Trim(RecCopy<CLEAN_INSP_INSP_SPIKES$>)
NewLWIISpecSpots = Trim(RecCopy<CLEAN_INSP_INSP_SPOTS$>)
NewLWIISpecBLDef = Trim(RecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
NewLWIISpecFOV = Trim(RecCopy<CLEAN_INSP_INSP_FOV$>)
// LWII Signature
OrigLWIISig = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG$>)
OrigLWIIDtm = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
NewLWIISig = Trim(RecCopy<CLEAN_INSP_INSP_SIG$>)
NewLWIIDtm = Trim(RecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
// LWIS Specification Limits
OrigLWISRecipe = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
OrigLWISSpecDef = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
OrigLWISSpecHaze = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
NewLWISRecipe = Trim(RecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
NewLWISSpecDef = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
NewLWISSpecHaze = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
// LWIS Signature
OrigLWISSig = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG$>)
OrigLWISDtm = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
NewLWISSig = Trim(RecCopy<CLEAN_INSP_SCAN_SIG$>)
NewLWISDtm = Trim(RecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
RDSKeyID = RecCopy<CLEAN_INSP_RDS_NO$>
RDSNo = RDSKeyID
FinalQA = False$
RDSRow = Database_Services('ReadDataRow', 'RDS', RDSNo)
WorkOrderNo = RDSRow<RDS_WO$>
WorkOrderRow = Database_Services('ReadDataRow', 'WO_LOG', WorkOrderNo)
ReactType = WorkOrderRow<WO_LOG_REACT_TYPE$>
// Check to see if the Final QA signature is in place.
If ReactType EQ 'EPP' then
CassetteNos = RDSRow<RDS_OUT_CASS_NO$>
OutNCRNos = RDSRow<RDS_OUT_NCR$>
For Each CassetteNo in CassetteNos using @VM setting vPos
OutNCRNo = OutNCRNos<0, vPos>
// Ignore NCRd wafers
If OutNCRNo EQ '' then
WMOutKey = RDSRow<RDS_WO_STEP_KEY$> : '*' : CassetteNo
WMOutRow = Database_Services('ReadDataRow', 'WM_OUT', WMOutKey)
If WMOutRow<WM_OUT_SUP_VER_SIG$> NE '' then
FinalQA = True$
end
end
Until FinalQA
Next CassetteNo
end else
If RDSRow<RDS_SUP_VER_SIG$> NE '' then
FinalQA = True$
end
end
If @USER4 EQ 'DANIEL_ST' then FinalQA = False$
// If Final QA signature is in place, implement the control logic.
If FinalQA EQ True$ then
// User is attempting to modify this row. Set the FS104 error and log the event.
Error_Services('Add', 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!')
OrigFileError = 104 : @FM : 'FQA has already been signed. CLEAN_INSP record cannot be updated!'
LogData = ''
LogData<1> = LoggingDTM
LogData<2> = @User4
LogData<3> = RDSNo
LogData<4> = 'CLEAN_INSP'
LogData<5> = Name
LogData<6> = 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!'
Logging_Services('AppendLog', FQAobjLog, LogData, @RM, @FM)
Status = 0
Record = ''
ActionFlow = ACTION_STOP$
end else
LogData = ''
LogData<1> = LoggingDTM
LogData<2> = @USER4
LogData<3> = RDSKeyID
LogData<4> = Name
LogData<5> = 'Begin log trace'
Stack = RetStack()
Swap @FM with ' || ' in Stack
LogData<6> = Stack
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
If ( (OrigLWIISpecLPD NE '') and (NewLWIISpecLPD EQ '') ) |
or ( (OrigLWIISpecScr NE '') and (NewLWIISpecScr EQ '') ) |
or ( (OrigLWIISpecScrLen NE '') and (NewLWIISpecScrLen EQ '') ) |
or ( (OrigLWIISpecPits NE '') and (NewLWIISpecPits EQ '') ) |
or ( (OrigLWIISpecMounds NE '') and (NewLWIISpecMounds EQ '') ) |
or ( (OrigLWIISpecStack NE '') and (NewLWIISpecStack EQ '') ) |
or ( (OrigLWIISpecSpikes NE '') and (NewLWIISpecSpikes EQ '') ) |
or ( (OrigLWIISpecSpots NE '') and (NewLWIISpecSpots EQ '') ) |
or ( (OrigLWIISpecBLDef NE '') and (NewLWIISpecBLDef EQ '') ) |
or ( (OrigLWIISpecFOV NE '') and (NewLWIISpecFOV EQ '') ) |
or ( (OrigLWIISig NE '') and (NewLWIISig EQ '') ) |
or ( (OrigLWIIDtm NE '') and (NewLWIIDtm EQ '') ) |
or ( (OrigLWISRecipe NE '') and (NewLWISRecipe EQ '') ) |
or ( (OrigLWISSpecDef NE '') and (NewLWISSpecDef EQ '') ) |
or ( (OrigLWISSpecHaze NE '') and (NewLWISSpecHaze EQ '') ) |
or ( (OrigLWISSig NE '') and (NewLWISSig EQ '') ) |
or ( (OrigLWISDtm NE '') and (NewLWISDtm EQ '') ) and @User4 NE 'DANIEL_ST' then
// User is attempting to erase data that is prohibited from being erased Set the FS104 error and block the write.
Error_Services('Add', 'FS104:Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!')
OrigFileError = 104 : @FM : 'Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!'
Status = 0
Record = ''
ActionFlow = ACTION_STOP$
LogData = ''
LogData<1> = LoggingDTM
LogData<2> = @USER4
LogData<3> = RDSKeyID
LogData<4> = Name
LogData<5> = RetStack()
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
end else
LogData = ''
LogData<1> = LoggingDTM
LogData<2> = @USER4
LogData<3> = RDSKeyID
LogData<4> = Name
LogData<5> = 'Log trace 1'
LogData<6> = ''
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
Stage = Record<CLEAN_INSP_STAGE$>
IsEpiPro = Rds_Services('IsEpiPro', RDSKeyID)
// This ROTR logic is only applicable to LWI clean & inspection rows.
CleanInspKeyID = Name
// Get the current signature required and signature entries.
SigRequired = Record<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
ScanSigs = Record<CLEAN_INSP_SCAN_SIG$>
// Get the specifications
SpecRecipes = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
SpecDefects = Record<CLEAN_INSP_SPEC_SURF_DEFECTS$> ; // USL - Spec SOD Max
SpecHazes = Record<CLEAN_INSP_SPEC_SURF_HAZE$>
SpecQuantities = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$>
// Get the new scanned values
ScanRecipes = Record<CLEAN_INSP_SCAN_RECIPE$>
ScanTools = Record<CLEAN_INSP_SCAN_TOOL$>
ScanDefectsAvg = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
ScanDefects = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
ScanHazes = Record<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
ScanMismatch = Record<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
QtyMismatch = Record<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
// Get scan results
ScanRecipeResults = Record<CLEAN_INSP_SCAN_RESULT$>
ScanRecipeReasons = Record<CLEAN_INSP_SCAN_RESULT_REASON$>
// Get the original scanned values
SpecRecipesOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
ScanRecipesOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE$>
ScanDefectsAvgOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
ScanDefectsOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
ScanHazesOrig = OrigRecord<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
ScanMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
QtyMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
// Get the original signature required and signature entries.
SigRequiredOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
ScanSigsOrig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
// Get the individual SOD values per wafer.
SODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
SODPerWaferOrig = OrigRecord<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
// Get the 100 failure scan flags, which is null by default and set/cleared by this MFS.
FailScanFlags = Record<CLEAN_INSP_FAIL_SCAN_REQ$>
FailScanReq = Sum(FailScanFlags)
If FailScanReq GT 0 then
FailScanReq = True$
end else
FailScanReq = False$
end
// Get ROTR Reactor values
ROTRReactorStatus = Record<CLEAN_INSP_ROTR_REACTOR_STATUS$>
ROTRReactorStatusReason = Record<CLEAN_INSP_ROTR_REACTOR_STATUS_REASON$>
If OrigRecord NE Record then
// Reset ROTR update flag so that future ROTR requests will re-trigger this routine (via BASE_MFS).
Record<CLEAN_INSP_ROTR_UPDATE_FLAG$> = False$
LogData<5> = 'Log trace 2'
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
// Tencor data has been updated. Update the ROTR_ACTION data column in the CLEAN_INSP record.
// Check if ScanMismatch field has been set by Metrology_Services. If so, then the user attempted to
// load run data, which containted the wrong recipe name. (i.e. it did not match the spec recipe)
If (ScanMismatch EQ '') then
If (QtyMismatch EQ '') or (IsEpiPro EQ True$) then
RDSKey = Record<CLEAN_INSP_RDS_NO$>
NumScanRecipes = DCount(ScanRecipes, @VM)
ROTRAction = ''
ROTRActionReason = ''
Begin Case
Case Stage _EQC 'LWI'
LogData<5> = 'Log trace 3'
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
CIReactor = Xlate('CLEAN_INSP', CleanInspKeyID, 'REACT_NO', 'X')
ROTREnabled = Xlate('REACTOR', CIReactor, 'ENABLE_ROTR', 'X')
ReactorBlocked = False$ ;// Assume false until proven otherwise.
// ROTR Reactor/PSN Status Health Check - Uses parameters set within the ROTR Parameters form.
// We only need to run this once per CLEAN_INSP record.
ROTRStatus = 'P' ; // Assume pass until proven otherwise.
If ( (ROTREnabled EQ True$) and (ROTRReactorStatus EQ '') ) then
ROTRReactorStatus = 'W'
ROTRReactorStatusReason = 'ROTR awaiting processing'
// Set ROTR Reactor processing status so that the WRITE_RECORD_POST event will
// post an ROTR request to calculate the reactor ROTR health for this run.
QA_Services('PostROTRRequest', RDSKey)
end
LogData<5> = 'Log trace 4'
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
// Check each scan recipe.
For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex
Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
If (UCL EQ '') or (UCL EQ 0) then
// The UCL has not yet been retrieved from SPC or an error could have
// occurred when the last attempt to retrieve it, so try to get it now.
UCL = QA_Services('PostUCLRequest', RDSKey, SpecRecipeName)
If (UCL NE '') and (UCL NE 0) then
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
end else
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
Error_Services('Add', ErrorMessage)
end
end
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
SpecQty = SpecQuantities<0, SpecRecipeIndex>
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
ScanSig = ScanSigs<0, ScanRecipeIndex>
FailureScan = False$
// RDS < UCL (SOD Spec Avg) Check
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
WaferCount = 0
SODAvgSum = 0
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
NumFailedWafers = 0
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
If WaferSOD NE '' then
// We have SOD data for this wafer so check if it is < SOD Max
If WaferSOD LE SpecDefect then
WaferCount += 1
SODAvgSum += WaferSOD
end else
NumFailedWafers += 1
end
end
Next WaferSOD
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
// This is the first time we are recording the scanned SOD average value. Store this
// for determining reactor health. (ROTR Status)
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
end
If WaferCount GT 0 and SODAvgSum GT 0 then
SODAvg = SODAvgSum / WaferCount
// Update scanned SOD average to not include wafers exceeding SOD max
// Adjust value to conform to internal storage format
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
end
If (ROTREnabled EQ True$) then
// ROTR Sign-off Project
// We need to check if reactor recently underwent ROTR maintenance. If so, then
// we must also check if this RDS is one of the first two runs after maintenance.
// If this is the case, then the RDS must undergo a 100% scan.
MaintScanReq = QA_Services('GetMaintenanceScanStatus', RDSKey)
FailScanReq = (FailScanReq or MaintScanReq)
// Search for '100' in the recipe name to determine if this is a failure scan.
FailureScan = (Index(ScanRecipes, '100', 1) or Index(ScanRecipes, '25', 1))
If FailureScan GT 0 then FailureScan = True$
If (FailScanReq EQ True$) and (FailureScan EQ True$) then
// Fail scan was required and submitted, so turn off all fail scan required flags.
FailScanReq = False$
NumScans = DCount(ScanRecipes, @VM)
For ScanIndex = 1 to NumScans
FailScanFlags<0, ScanIndex> = False$
Next ScanIndex
end
end
Begin Case
Case (FailScanReq EQ True$) and (FailureScan EQ False$) and (ROTREnabled EQ True$)
If MaintScanReq EQ True$ then
ROTRAction = 'F'
ROTRActionReason = '100% scan required due to ROTR maint.'
end else
// If ROTR maintenance flag not set, then wafer fail limit must have been met in
// an earlier Tencor run. We must set it here again due to the design of this
// MFS.
ROTRAction = 'F'
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
FailScanReq = True$
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
end
Case (ROTRReactorStatus EQ 'W') and (ROTREnabled EQ True$)
// Awaiting ROTR results. Request in queue. This MFS will be triggered
// once the request is processed.
ROTRAction = 'F'
ROTRActionReason = ROTRReactorStatusReason
Case (ROTRReactorStatus EQ 'F') and (ROTREnabled EQ True$)
// Check this case first as to not miss blocking the reactor if necessary.
// Block load signature on this reactor for future lots until overriden at Load button
// signature click event by supervisor, lead, or engineer.
ROTRAction = 'F'
ROTRActionReason = ROTRReactorStatusReason
CIReactorRec = Database_Services('ReadDataRow', 'REACTOR', CIReactor)
CIReactorRec<REACTOR_ROTR_STATUS$> = 'F'
CIReactorRec<REACTOR_ROTR_STATUS_REASON$> = ROTRReactorStatusReason
Database_Services('WriteDataRow','REACTOR',CIReactor,CIReactorRec, True$, False$, True$)
ReactorBlocked = True$
Case (ScanDefect EQ '') OR (ScanHaze EQ '')
ROTRAction = 'F'
ROTRActionReason = 'SurfScan data is missing.'
Case (SigRequired EQ True$) AND (ScanSig EQ '')
ROTRAction = 'F'
ROTRActionReason = 'SurfScan signature is missing.'
Case (ScanDefect GT SpecDefect)
If (ROTREnabled EQ True$) then
ROTRFailLimit = Xlate('REACTOR', CIReactor, 'ROTR_FAIL_LIMIT', 'X')
// If a Post Clean is required, then disregard the ROTRFailLimit per Tom Tillery.
CleanReq = False$
PSNo = Xlate('CLEAN_INSP', CleanInspKeyID, 'PS_NO', 'X')
PRSStages = Xlate('PROD_SPEC', PSNo, 'PRS_STAGE_KEY', 'X')
If Index(PRSStages, 'POST', 1) then
CleanReq = Xlate('PRS_STAGE', PSNo:'*POST', 'CLEAN_SIG_REQ', 'X')
end
If (NumFailedWafers LT ROTRFailLimit) or (CleanReq EQ True$) or (FailureScan EQ True$) then
ROTRAction = 'F'
ROTRActionReason = 'SurfScan SoD out of bounds.'
end else
ROTRAction = 'F'
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
FailScanReq = True$
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
end
end else
ROTRAction = 'F'
ROTRActionReason = 'SurfScan SoD out of bounds.'
end
Case (ScanHaze GT SpecHaze)
ROTRAction = 'F'
ROTRActionReason = 'SurfScan Haze out of bounds.'
Case Otherwise$
// This scan data is within spec.
ROTRAction = 'P'
ROTRActionReason = 'Passed'
End Case
LogData<5> = 'Log trace 5.':SpecRecipeIndex
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
// Store this result for final disposition
ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction
ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason
end
Next ScanRecipeName
FinalROTRAction = 'P'
FinalROTRActionReason = ''
// Final disposition
// If no scan data or if any scan data has failed, then FinalROTRAction = F.
NumScanRecipes = DCount(ScanRecipes, @VM)
If NumScanRecipes EQ 0 then
FinalROTRAction = 'F'
FinalROTRActionReason = 'Scan data is missing.'
end else
NumFailures = Count(ScanRecipeResults, 'F')
Begin Case
Case NumFailures EQ 0
// No failures so this is a pass.
FinalROTRAction = 'P'
FInalROTRActionReason = ''
Case NumFailures EQ 1
// Display the failure reason
Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then
FailureReason = ScanRecipeReasons<0, ScanRecipeIndex>
FinalROTRAction = 'F'
FinalROTRActionReason = FailureReason
end
Case NumFailures GT 1
// Inform the user that multiple scans failed
FinalROTRAction = 'F'
FinalROTRActionReason = 'Multiple scans failed to meet criteria.'
End Case
end
ROTRAction = FinalROTRAction
ROTRActionReason = FinalROTRActionReason
Case Stage _EQC 'POST'
ROTRReactorStatus = 'P' ; // Assume pass until proven otherwise.
// Check each spec recipe. There must be at least one scan recorded for each spec recipe.
For Each SpecRecipeName in SpecRecipes using @VM setting SpecRecipeIndex
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
If (UCL EQ '') or (UCL EQ 0) then
// The UCL has not yet been retrieved from SPC or an error could have
// occurred when the last attempt to retrieve it, so try to get it now.
UCL = QA_Services('PostUCLRequest', RDSKey, SpecRecipeName)
If (UCL NE '') and (UCL NE 0) then
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
end else
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
Error_Services('Add', ErrorMessage)
end
end
// Look for the last scan entry related to the current spec recipe.
RecipeFound = False$
For ScanRecipeIndex = NumScanRecipes To 1 Step -1
ScanRecipeName = ScanRecipes<0, ScanRecipeIndex>
RecipeFound = (ScanRecipeName EQ SpecRecipeName)
Until RecipeFound
Next ScanRecipeIndex
// If a scan was found, then analyze the scan data for spec requirements. If not found, this
// automatically fails.
If RecipeFound EQ True$ then
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
ScanSig = ScanSigs<0, ScanRecipeIndex>
FailureScan = False$
// RDS < UCL (SOD Spec Avg) Check
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
WaferCount = 0
SODAvgSum = 0
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
NumFailedWafers = 0
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
If WaferSOD NE '' then
// We have SOD data for this wafer so check if it is < SOD Max
If WaferSOD LE SpecDefect then
WaferCount += 1
SODAvgSum += WaferSOD
end else
NumFailedWafers += 1
end
end
Next WaferSOD
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
// This is the first time we are recording the scanned SOD average value. Store this
// for determining reactor health. (ROTR Status)
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
end
If WaferCount GT 0 and SODAvgSum GT 0 then
SODAvg = SODAvgSum / WaferCount
// Update scanned SOD average to not include wafers exceeding SOD max
// Adjust value to conform to internal storage format
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
end
Begin Case
Case (ScanDefect EQ '')
ROTRAction = 'F'
ROTRActionReason = 'SurfScan data is missing.'
Case (ScanDefect GT SpecDefect)
ROTRAction = 'F'
ROTRActionReason = 'SurfScan SoD out of bounds.'
Case (SigRequired EQ True$) AND (ScanSig EQ '')
ROTRAction = 'F'
ROTRActionReason = 'SurfScan signature is missing.'
Case Otherwise$
// This scan data is within spec.
ROTRAction = 'P'
End Case
end else
ROTRAction = 'F'
ROTRActionReason = 'Scan data for ' : SpecRecipeName : ' is missing.'
end
Until ROTRAction EQ 'P' or ROTRActionReason _EQC 'SurfScan signature is missing.'
Next SpecRecipeName
End Case
end else
// Sample quantity mismatch field set. Set ROTR to failed and inform user.
ROTRAction = 'F'
ROTRActionReason = QtyMismatch
end
end else
// Recipe mismatch field set. Set ROTR to failed and inform user.
ROTRAction = 'F'
ROTRActionReason = ScanMismatch:' does not match spec.'
end
If ROTRAction EQ 'P' then
// Clear any previously set failure reasons or failure scan flags.
ROTRActionReason = ''
NumScans = DCount(ScanRecipes, @VM)
For ScanIndex = 1 to NumScans
FailScanFlags<0, ScanIndex> = False$
Next ScanIndex
end
Record<CLEAN_INSP_ROTR_ACTION$> = ROTRAction
Record<CLEAN_INSP_ROTR_ACTION_REASON$> = ROTRActionReason
Record<CLEAN_INSP_FAIL_SCAN_REQ$> = FailScanFlags
Record<CLEAN_INSP_SCAN_RESULT$> = ScanRecipeResults
Record<CLEAN_INSP_SCAN_RESULT_REASON$> = ScanRecipeReasons
SaveRecord = Record
LogData<5> = 'Log trace 6'
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
Server = Environment_Services('GetServer')
If (Server NE 'MESSA005') AND (Server NE 'MESSA01EC') then
// The metrology data was updated by an end user on a workstation. Add this information to a special log
// for Balan.
Post_Metrology_Manual_Data_Entry_Log(@USER4,'Tencor',Record<CLEAN_INSP_RDS_NO$>:' / ':CleanInspKeyID)
end
end
end
end
return
WRITE_RECORD:
If @USER4 EQ 'DANIEL_ST' then
debug
// Sync up Insp, Clean, and SurfScan signatures with WO_MAT signature profile
Stage = {STAGE}
WOMatKey = {WO_MAT_KEY}
WOMatRec = Database_Services('ReadDataRow', 'WO_MAT', WOMatKey)
WOMatSigProf = WOMatRec<WO_MAT_SIG_PROFILE$>
WOMatSigs = WOMatRec<WO_MAT_SIGNATURE$>
WOMatSigDTMs = WOMatRec<WO_MAT_SIG_DTM$>
OrigInspSig = OrigRecord<CLEAN_INSP_INSP_SIG$>
OrigInspSigDTM = OrigRecord<CLEAN_INSP_INSP_SIG_DTM$>
InspSig = Record<CLEAN_INSP_INSP_SIG$>
InspSigDTM = Record<CLEAN_INSP_INSP_SIG_DTM$>
OrigCleanSig = OrigRecord<CLEAN_INSP_CLEAN_SIG$>
OrigCleanSigDTM = OrigRecord<CLEAN_INSP_CLEAN_SIG_DTM$>
CleanSig = Record<CLEAN_INSP_CLEAN_SIG$>
CleanSigDTM = Record<CLEAN_INSP_CLEAN_SIG_DTM$>
OrigScanSig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
OrigScanSigDTM = OrigRecord<CLEAN_INSP_SCAN_SIG_DTM$>
ScanSig = Record<CLEAN_INSP_SCAN_SIG$>
ScanSigDTM = Record<CLEAN_INSP_SCAN_SIG_DTM$>
SigProfUpdate = False$
If ( (OrigInspSig NE InspSig) or (OrigInspSigDTM NE InspSigDTM) ) then
WOMatStage = '1':Stage:'I'
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
WOMatSigs<0, vPos> = InspSig
WOMatSigDTMs<0, vPos> = InspSigDTM
SigProfUpdate = True$
end
end
If ( (OrigCleanSig NE CleanSig) or (OrigCleanSigDTM NE CleanSigDTM) ) then
WOMatStage = '1':Stage:'C'
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
WOMatSigs<0, vPos> = CleanSig
WOMatSigDTMs<0, vPos> = CleanSigDTM
SigProfUpdate = True$
end
end
If ( (OrigScanSig NE ScanSig) or (OrigScanSigDTM NE ScanSigDTM) ) then
WOMatStage = '1':Stage:'S'
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
WOMatSigs<0, vPos> = ScanSig
WOMatSigDTMs<0, vPos> = ScanSigDTM
SigProfUpdate = True$
end
end
If SigProfUpdate then
WOMatRec<WO_MAT_SIGNATURE$> = WOMatSigs
WOMatRec<WO_MAT_SIG_DTM$> = WOMatSigDTMs
Database_Services('WriteDataRow', 'WO_MAT', WOMatKey, WOMatRec, True$, False$, True$)
end
end
return
DELETE_RECORD_PRE:
return
DELETE_RECORD:
return
// ----- Internal Methods ----------------------------------------------------------------------------------------------
Initialize_System_Variables:
// Save these for restoration later
SaveDict = @DICT
SaveID = @ID
SaveRecord = @RECORD
OrigFileError = @FILE.ERROR
// Now make sure @DICT, ID, and @RECORD are populated
CurrentDictName = ''
If @DICT then
DictHandle = @DICT<1, 2>
Locate DictHandle in @TABLES(5) Using @FM Setting fPos then
CurrentDictName = Field(@TABLES(0), @FM, fPos, 1)
end
end
If CurrentDictName NE DictName then
Open DictName to @DICT else Status = 'Unable to initialize @DICT'
end
@ID = KeyID
If Record else
// Record might not have been passed in. Read the record from the database table just to make sure.
@FILE.ERROR = ''
Open TableName to hTable then
FullFSList = hTable[1, 'F' : @VM]
BFS = FullFSList[-1, 'B' : @SVM]
LastHandle = hTable[-1, 'B' : \0D\]
FileHandle = \0D\ : LastHandle[1, @VM]
Call @BFS(READO.RECORD, BFS, FileHandle, KeyID, FMC, Record, ReadOStatus)
end
end
@RECORD = Record
return
Restore_System_Variables:
Transfer SaveDict to @DICT
Transfer SaveID to @ID
Transfer SaveRecord to @RECORD
@FILE.ERROR = OrigFileError
return