949 lines
57 KiB
Plaintext
949 lines
57 KiB
Plaintext
Function CLEAN_INSP_Actions(Action, CalcColName, FSList, Handle, Name, FMC, Record, Status, OrigRecord, Param1, Param2, Param3, Param4, Param5, Param6, Param7, Param8, Param9, Param10)
|
|
/***********************************************************************************************************************
|
|
|
|
This program is proprietary and is not to be used by or disclosed to others, nor is it to be copied without written
|
|
permission from Infineon.
|
|
|
|
Name : CLEAN_INSP_Actions
|
|
|
|
Description : Handles calculated columns and MFS calls for the current table.
|
|
|
|
Notes : This function uses @ID, @RECORD, and @DICT to make sure {ColumnName} references work correctly.
|
|
If called from outside of a calculated column these will need to be set and restored.
|
|
|
|
Parameters :
|
|
Action [in] -- Name of the action to be taken
|
|
CalcColName [in] -- Name of the calculated column that needs to be processed. Normally this should only be
|
|
populated when the CalcField action is being used.
|
|
FSList [in] -- The list of MFSs and the BFS name for the current file or volume. This is an @SVM
|
|
delimited array, with the current MFS name as the first value in the array, and the BFS
|
|
name as the last value. Normally set by a calling MFS.
|
|
Handle [in] -- The file handle of the file or media map being accessed. Note, this does contain the
|
|
entire handle structure that the Basic+ Open statement would provide. Normally set by a
|
|
calling MFS.
|
|
Name [in] -- The name (key) of the record or file being accessed. Normally set by a calling MFS.
|
|
FMC [in] -- Various functions. Normally set by a calling MFS.
|
|
Record [in] -- The entire record (for record-oriented functions) or a newly-created handle (for
|
|
"get handle" functions). Normally set by a calling MFS.
|
|
Status [in/out] -- Indicator of the success or failure of an action. Normally set by the calling MFS but
|
|
for some actions can be set by the action handler to indicate failure.
|
|
OrigRecord [in] -- Original content of the record being processed by the current action. This is
|
|
automatically being assigned by the WRITE_RECORD and DELETE_RECORD actions within
|
|
BASE_MFS.
|
|
Param1-10 [in/out] -- Additional request parameter holders
|
|
ActionFlow [out] -- Used to control the action chain (see the ACTION_SETUP insert for more information.)
|
|
Can also be used to return a special value, such as the results of the CalcField
|
|
method.
|
|
|
|
History : (Date, Initials, Notes)
|
|
07/28/10 dmb Original programmer.
|
|
10/13/10 dmb Fix logic to extract the file handle if file has an index
|
|
03/26/11 dmb Add logic to save and restore @FILE.ERROR
|
|
01/03/17 dmb Updated the ROTR compare logic to search for a recipe match.
|
|
04/09/18 dmb Updated the ROTR compare logic to be limited to FWI stages. Also modified the default logic
|
|
to be Failed unless proven otherwise.
|
|
04/19/18 djs Update ROTR compare logic to support multiple spec recipes.
|
|
05/04/18 dmb Update the special metrology log entry log to use the GetServer service rather than the
|
|
@STATION global variable.
|
|
06/13/18 dmb Replaced CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$ with CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$ when comparing
|
|
against the Sum of Defects in the SurfScan recipe. - [IREPIOI-43]
|
|
09/24/18 djs Adjusted the OConv call on the ScanDefect variable within the WRITE_RECORD_PRE action.
|
|
10/29/18 djs Updated the WRITE_RECORD_PRE event to calculate the SOD average to only use wafers that
|
|
are below the USL (SOD Max) as per ROTR Project requirements. Also updated the UCL request
|
|
using QA_Services to include the scanned Tencor Recipe name in order to return the UCL
|
|
associated with the particular recipe being processed at that time.
|
|
06/07/19 djs Updated the WRITE_RECORD_PRE GoSub to support ROTR requirements for POST stage SurfScan
|
|
rundata files.
|
|
08/12/20 djs Added logging within the WRITE_RECORD_PRE GoSub to gather data for a bug within the
|
|
Metrology_Services('ImportMetrologyService') subroutine. Occasionally the DB server is
|
|
getting an out of memory error when importing metrology files.
|
|
|
|
***********************************************************************************************************************/
|
|
|
|
#pragma precomp SRP_PreCompiler
|
|
|
|
$insert APP_INSERTS
|
|
$insert FILE.SYSTEM.EQUATES
|
|
$insert ACTION_SETUP
|
|
$insert CLEAN_INSP_EQUATES
|
|
$insert REACTOR_EQUATES
|
|
$insert RDS_EQUATES
|
|
$insert WM_OUT_EQUATES
|
|
$insert WO_LOG_EQUATES
|
|
$insert ROTR_EQUATES
|
|
$insert WO_MAT_EQUATES
|
|
|
|
Equ Comma$ to ','
|
|
|
|
Declare function Error_Services, Database_Services, Environment_Services, QA_Services, RDS_Services, MemberOf
|
|
Declare subroutine Error_Services, Database_Services, Post_Metrology_Manual_Data_Entry_Log
|
|
Declare subroutine Qa_Services
|
|
|
|
If KeyID then GoSub Initialize_System_Variables
|
|
|
|
Begin Case
|
|
|
|
Case Action _EQC 'CalculateColumn' ; GoSub CalculateColumn
|
|
Case Action _EQC 'READ_RECORD_PRE' ; GoSub READ_RECORD_PRE
|
|
Case Action _EQC 'READ_RECORD' ; GoSub READ_RECORD
|
|
Case Action _EQC 'READONLY_RECORD_PRE' ; GoSub READONLY_RECORD_PRE
|
|
Case Action _EQC 'READONLY_RECORD' ; GoSub READONLY_RECORD
|
|
Case Action _EQC 'WRITE_RECORD_PRE' ; GoSub WRITE_RECORD_PRE
|
|
Case Action _EQC 'WRITE_RECORD' ; GoSub WRITE_RECORD
|
|
Case Action _EQC 'DELETE_RECORD_PRE' ; GoSub DELETE_RECORD_PRE
|
|
Case Action _EQC 'DELETE_RECORD' ; GoSub DELETE_RECORD
|
|
Case Otherwise$ ; Status = 'Invalid Action'
|
|
|
|
End Case
|
|
|
|
If KeyID then GoSub Restore_System_Variables
|
|
|
|
If Assigned(ActionFlow) else ActionFlow = ACTION_CONTINUE$
|
|
|
|
Return ActionFlow
|
|
|
|
|
|
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
|
|
// Calculated Columns
|
|
//
|
|
// The typical structure of a calculated column will look like this:
|
|
//
|
|
// Declare function Database_Services
|
|
//
|
|
// @ANS = Database_Services('CalculateColumn')
|
|
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
|
|
|
|
CalculateColumn:
|
|
// Make sure the ActionFlow return variable is cleared in case nothing is calculated.
|
|
ActionFlow = ''
|
|
|
|
Begin Case
|
|
Case CalcColName EQ 'INSP_REQ' ; GoSub INSP_REQ
|
|
Case CalcColName EQ 'RDS_ROTR_ACTION' ; GoSub RDS_ROTR_ACTION
|
|
End Case
|
|
|
|
return
|
|
|
|
|
|
INSP_REQ:
|
|
|
|
SkipInsp = Xlate('WO_MAT', {WO_MAT_KEY}, 'CONVERTED_MATERIAL', 'X')
|
|
If SkipInsp EQ '' then
|
|
RDSNo = {RDS_NO}
|
|
WONo = {WO_NO}
|
|
WOQty = Xlate('WO_LOG', WONo, 'QTY', 'X')
|
|
RunNo = Xlate('RDS', RDSNo, 'RUN_ORDER_NUM', 'X')
|
|
InspInterval = {INSP_INTERVAL}
|
|
LastRun = ( (RunNo * 25) EQ WOQty )
|
|
InspReq = ( (Mod((RunNo - 1), InspInterval) EQ 0) or LastRun )
|
|
ActionFlow = InspReq
|
|
end else
|
|
ActionFlow = False$
|
|
end
|
|
|
|
return
|
|
|
|
|
|
RDS_ROTR_ACTION:
|
|
|
|
|
|
ROTRAction = {ROTR_ACTION}
|
|
If ROTRAction EQ 'F' then
|
|
// Before returning a Fail, check to see if there is an acceptance for the results.
|
|
AcceptedSignature = {SIGN_ROTR_SIGNATURE}
|
|
AcceptedReason = {SIGN_ROTR_REASON}
|
|
If (AcceptedSignature NE '') AND (AcceptedReason NE '') then ROTRAction = 'A'
|
|
end
|
|
ActionFlow = ROTRAction
|
|
|
|
return
|
|
|
|
|
|
// ----- MFS calls -----------------------------------------------------------------------------------------------------
|
|
|
|
READ_RECORD_PRE:
|
|
// In order to stop a record from being read in this action these lines of code must be used:
|
|
//
|
|
// OrigFileError = 100 : @FM : KeyID
|
|
// Status = 0
|
|
// Record = ''
|
|
// ActionFlow = ACTION_STOP$
|
|
return
|
|
|
|
|
|
READ_RECORD:
|
|
// In order to stop a record from being read in this action these lines of code must be used:
|
|
//
|
|
// OrigFileError = 100 : @FM : KeyID
|
|
// Status = 0
|
|
// Record = ''
|
|
return
|
|
|
|
|
|
READONLY_RECORD_PRE:
|
|
// In order to stop a record from being read in this action these lines of code must be used:
|
|
//
|
|
// OrigFileError = 100 : @FM : KeyID
|
|
// Status = 0
|
|
// Record = ''
|
|
// ActionFlow = ACTION_STOP$
|
|
return
|
|
|
|
READONLY_RECORD:
|
|
// In order to stop a record from being read in this action these lines of code must be used:
|
|
//
|
|
// OrigFileError = 100 : @FM : KeyID
|
|
// Status = 0
|
|
// Record = ''
|
|
return
|
|
|
|
|
|
WRITE_RECORD_PRE:
|
|
|
|
OrigRecCopy = OrigRecord
|
|
RecCopy = Record
|
|
Convert @VM to '' in OrigRecCopy
|
|
Convert @VM to '' in RecCopy
|
|
// LWII Specification limits
|
|
|
|
OrigLWIISpecLPD = Trim(OrigRecCopy<CLEAN_INSP_INSP_LPD$>)
|
|
OrigLWIISpecScr = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
|
|
OrigLWIISpecScrLen = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
|
|
OrigLWIISpecPits = Trim(OrigRecCopy<CLEAN_INSP_INSP_PITS$>)
|
|
OrigLWIISpecMounds = Trim(OrigRecCopy<CLEAN_INSP_INSP_MOUNDS$>)
|
|
OrigLWIISpecStack = Trim(OrigRecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
|
|
OrigLWIISpecSpikes = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPIKES$>)
|
|
OrigLWIISpecSpots = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPOTS$>)
|
|
OrigLWIISpecBLDef = Trim(OrigRecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
|
|
OrigLWIISpecFOV = Trim(OrigRecCopy<CLEAN_INSP_INSP_FOV$>)
|
|
NewLWIISpecLPD = Trim(RecCopy<CLEAN_INSP_INSP_LPD$>)
|
|
NewLWIISpecScr = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
|
|
NewLWIISpecScrLen = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
|
|
NewLWIISpecPits = Trim(RecCopy<CLEAN_INSP_INSP_PITS$>)
|
|
NewLWIISpecMounds = Trim(RecCopy<CLEAN_INSP_INSP_MOUNDS$>)
|
|
NewLWIISpecStack = Trim(RecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
|
|
NewLWIISpecSpikes = Trim(RecCopy<CLEAN_INSP_INSP_SPIKES$>)
|
|
NewLWIISpecSpots = Trim(RecCopy<CLEAN_INSP_INSP_SPOTS$>)
|
|
NewLWIISpecBLDef = Trim(RecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
|
|
NewLWIISpecFOV = Trim(RecCopy<CLEAN_INSP_INSP_FOV$>)
|
|
|
|
// LWII Signature
|
|
OrigLWIISig = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG$>)
|
|
OrigLWIIDtm = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
|
|
NewLWIISig = Trim(RecCopy<CLEAN_INSP_INSP_SIG$>)
|
|
NewLWIIDtm = Trim(RecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
|
|
|
|
// LWIS Specification Limits
|
|
OrigLWISRecipe = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
|
|
OrigLWISSpecDef = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
|
|
OrigLWISSpecHaze = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
|
|
NewLWISRecipe = Trim(RecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
|
|
NewLWISSpecDef = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
|
|
NewLWISSpecHaze = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
|
|
|
|
// LWIS Signature
|
|
OrigLWISSig = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG$>)
|
|
OrigLWISDtm = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
|
|
NewLWISSig = Trim(RecCopy<CLEAN_INSP_SCAN_SIG$>)
|
|
NewLWISDtm = Trim(RecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
|
|
RDSKeyID = RecCopy<CLEAN_INSP_RDS_NO$>
|
|
|
|
// Check if run aborted and wafers were removed
|
|
WafersRemoved = Trim(RecCopy<CLEAN_INSP_WAFERS_REMOVED$>)
|
|
|
|
RDSNo = RDSKeyID
|
|
FinalQA = False$
|
|
RDSRow = Database_Services('ReadDataRow', 'RDS', RDSNo)
|
|
WorkOrderNo = RDSRow<RDS_WO$>
|
|
WorkOrderRow = Database_Services('ReadDataRow', 'WO_LOG', WorkOrderNo)
|
|
ReactType = WorkOrderRow<WO_LOG_REACT_TYPE$>
|
|
// Check to see if the Final QA signature is in place.
|
|
|
|
If ReactType EQ 'EPP' then
|
|
CassetteNos = RDSRow<RDS_OUT_CASS_NO$>
|
|
OutNCRNos = RDSRow<RDS_OUT_NCR$>
|
|
For Each CassetteNo in CassetteNos using @VM setting vPos
|
|
OutNCRNo = OutNCRNos<0, vPos>
|
|
// Ignore NCRd wafers
|
|
If OutNCRNo EQ '' then
|
|
WMOutKey = RDSRow<RDS_WO_STEP_KEY$> : '*' : CassetteNo
|
|
WMOutRow = Database_Services('ReadDataRow', 'WM_OUT', WMOutKey)
|
|
If WMOutRow<WM_OUT_SUP_VER_SIG$> NE '' then
|
|
FinalQA = True$
|
|
end
|
|
end
|
|
Until FinalQA
|
|
Next CassetteNo
|
|
end else
|
|
If RDSRow<RDS_SUP_VER_SIG$> NE '' then
|
|
FinalQA = True$
|
|
end
|
|
end
|
|
|
|
// If Final QA signature is in place, implement the control logic.
|
|
If FinalQA EQ True$ then
|
|
|
|
// User is attempting to modify this row. Set the FS104 error and log the event.
|
|
Error_Services('Add', 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!')
|
|
OrigFileError = 104 : @FM : 'FQA has already been signed. CLEAN_INSP record cannot be updated!'
|
|
Status = 0
|
|
Record = ''
|
|
ActionFlow = ACTION_STOP$
|
|
|
|
end else
|
|
|
|
If ( (OrigLWIISpecLPD NE '') and (NewLWIISpecLPD EQ '') ) |
|
|
or ( (OrigLWIISpecScr NE '') and (NewLWIISpecScr EQ '') ) |
|
|
or ( (OrigLWIISpecScrLen NE '') and (NewLWIISpecScrLen EQ '') ) |
|
|
or ( (OrigLWIISpecPits NE '') and (NewLWIISpecPits EQ '') ) |
|
|
or ( (OrigLWIISpecMounds NE '') and (NewLWIISpecMounds EQ '') ) |
|
|
or ( (OrigLWIISpecStack NE '') and (NewLWIISpecStack EQ '') ) |
|
|
or ( (OrigLWIISpecSpikes NE '') and (NewLWIISpecSpikes EQ '') ) |
|
|
or ( (OrigLWIISpecSpots NE '') and (NewLWIISpecSpots EQ '') ) |
|
|
or ( (OrigLWIISpecBLDef NE '') and (NewLWIISpecBLDef EQ '') ) |
|
|
or ( (OrigLWIISpecFOV NE '') and (NewLWIISpecFOV EQ '') ) |
|
|
or ( (OrigLWIISig NE '') and (NewLWIISig EQ '') ) |
|
|
or ( (OrigLWIIDtm NE '') and (NewLWIIDtm EQ '') ) |
|
|
or ( (OrigLWISRecipe NE '') and (NewLWISRecipe EQ '') ) |
|
|
or ( (OrigLWISSpecDef NE '') and (NewLWISSpecDef EQ '') ) |
|
|
or ( (OrigLWISSpecHaze NE '') and (NewLWISSpecHaze EQ '') ) |
|
|
or ( (OrigLWISSig NE '') and (NewLWISSig EQ '') ) |
|
|
or ( (OrigLWISDtm NE '') and (NewLWISDtm EQ '') ) and Not(MemberOf(@User4, 'OI_ADMIN')) then
|
|
|
|
// User is attempting to erase data that is prohibited from being erased Set the FS104 error and block the write.
|
|
Error_Services('Add', 'FS104:Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!')
|
|
OrigFileError = 104 : @FM : 'Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!'
|
|
Status = 0
|
|
Record = ''
|
|
ActionFlow = ACTION_STOP$
|
|
|
|
end else
|
|
|
|
Stage = Record<CLEAN_INSP_STAGE$>
|
|
IsEpiPro = Rds_Services('IsEpiPro', RDSKeyID)
|
|
// This ROTR logic is only applicable to LWI clean & inspection rows.
|
|
CleanInspKeyID = Name
|
|
|
|
// Get the current signature required and signature entries.
|
|
SigRequired = Record<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
|
|
ScanSigs = Record<CLEAN_INSP_SCAN_SIG$>
|
|
// Get the specifications
|
|
SpecRecipes = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
|
|
SpecDefects = Record<CLEAN_INSP_SPEC_SURF_DEFECTS$> ; // USL - Spec SOD Max
|
|
SpecHazes = Record<CLEAN_INSP_SPEC_SURF_HAZE$>
|
|
SpecQuantities = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$>
|
|
// Get the new scanned values
|
|
ScanRecipes = Record<CLEAN_INSP_SCAN_RECIPE$>
|
|
ScanTools = Record<CLEAN_INSP_SCAN_TOOL$>
|
|
ScanDefectsAvg = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
|
|
ScanDefects = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
|
|
ScanHazes = Record<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
|
|
ScanMismatch = Record<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
|
|
QtyMismatch = Record<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
|
|
// Get scan results
|
|
ScanRecipeResults = Record<CLEAN_INSP_SCAN_RESULT$>
|
|
ScanRecipeReasons = Record<CLEAN_INSP_SCAN_RESULT_REASON$>
|
|
|
|
// Get the original scanned values
|
|
SpecRecipesOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
|
|
ScanRecipesOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE$>
|
|
ScanDefectsAvgOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
|
|
ScanDefectsOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
|
|
ScanHazesOrig = OrigRecord<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
|
|
ScanMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
|
|
QtyMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
|
|
// Get the original signature required and signature entries.
|
|
SigRequiredOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
|
|
ScanSigsOrig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
|
|
// Get the individual SOD values per wafer.
|
|
SODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
|
|
SODPerWaferOrig = OrigRecord<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
|
|
// Get the 100 failure scan flags, which is null by default and set/cleared by this MFS.
|
|
FailScanFlags = Record<CLEAN_INSP_FAIL_SCAN_REQ$>
|
|
FailScanReq = Sum(FailScanFlags)
|
|
If FailScanReq GT 0 then
|
|
FailScanReq = True$
|
|
end else
|
|
FailScanReq = False$
|
|
end
|
|
|
|
CIReactor = Xlate('CLEAN_INSP', CleanInspKeyID, 'REACT_NO', 'X')
|
|
ROTREnabled = Xlate('REACTOR', CIReactor, 'ENABLE_ROTR', 'X')
|
|
ROTRFailLimit = Xlate('REACTOR', CIReactor, 'ROTR_FAIL_LIMIT', 'X')
|
|
|
|
// Get ROTR Reactor values
|
|
ROTRReactorStatus = Record<CLEAN_INSP_ROTR_REACTOR_STATUS$>
|
|
ROTRReactorStatusReason = Record<CLEAN_INSP_ROTR_REACTOR_STATUS_REASON$>
|
|
|
|
FailedWafers = Record<CLEAN_INSP_FAILED_WAFERS$>
|
|
|
|
If OrigRecord NE Record then
|
|
|
|
// Backlog Req 731 - ROTR Post Supercede
|
|
// Increase POST stage surfscan sample quantity specification to number of LWI stage failed wafers.
|
|
If Stage EQ 'POST' then
|
|
RDSNo = Record<CLEAN_INSP_RDS_NO$>
|
|
LWICIKey = Xlate('RDS', RDSNo, 'LWI_CI_NO', 'X')
|
|
If LWICIKey NE '' then
|
|
LWIFailedWafers = Xlate('CLEAN_INSP', LWICIKey, 'FAILED_WAFERS', 'X')
|
|
If LWIFailedWafers NE '' then
|
|
NewPostSpecSampleQty = Sum(LWIFailedWafers)
|
|
PostSpecRecipes = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
|
|
NumRecipes = DCount(PostSpecRecipes, @VM)
|
|
If NumRecipes GT 0 then
|
|
For RecipeIndex = 1 to NumRecipes
|
|
CurrSpec = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex>
|
|
If ( (CurrSpec EQ '') or (CurrSpec LT NewPostSpecSampleQty) ) then
|
|
Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> = NewPostSpecSampleQty
|
|
end
|
|
Next RecipeIndex
|
|
end
|
|
end
|
|
end
|
|
end
|
|
|
|
|
|
// Reset ROTR update flag so that future ROTR requests will re-trigger this routine (via BASE_MFS).
|
|
Record<CLEAN_INSP_ROTR_UPDATE_FLAG$> = False$
|
|
// Tencor data has been updated. Update the ROTR_ACTION data column in the CLEAN_INSP record.
|
|
// Check if ScanMismatch field has been set by Metrology_Services. If so, then the user attempted to
|
|
// load run data, which containted the wrong recipe name. (i.e. it did not match the spec recipe)
|
|
If (ScanMismatch EQ '') then
|
|
RDSKey = Record<CLEAN_INSP_RDS_NO$>
|
|
NumScanRecipes = DCount(ScanRecipes, @VM)
|
|
ROTRAction = ''
|
|
ROTRActionReason = ''
|
|
Begin Case
|
|
Case Stage _EQC 'LWI'
|
|
If SpecRecipes NE '' then
|
|
ReactorBlocked = False$ ;// Assume false until proven otherwise.
|
|
// ROTR Reactor/PSN Status Health Check - Uses parameters set within the ROTR Parameters form.
|
|
// We only need to run this once per CLEAN_INSP record.
|
|
ROTRStatus = 'P' ; // Assume pass until proven otherwise.
|
|
If ( (ROTREnabled EQ True$) and (ROTRReactorStatus EQ '') ) then
|
|
ROTRReactorStatus = 'W'
|
|
ROTRReactorStatusReason = 'ROTR awaiting processing'
|
|
// Set ROTR Reactor processing status so that the WRITE_RECORD_POST event will
|
|
// post an ROTR request to calculate the reactor ROTR health for this run.
|
|
QA_Services('PostROTRRequest', RDSKey)
|
|
end
|
|
// Check each scan recipe.
|
|
For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex
|
|
Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then
|
|
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
|
|
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
|
|
If (UCL EQ '') or (UCL EQ 0) then
|
|
// The UCL has not yet been retrieved from SPC or an error could have
|
|
// occurred when the last attempt to retrieve it, so try to get it now.
|
|
UCL = QA_Services('PostUCLRequest', RDSKey, ScanRecipeName)
|
|
If (UCL NE '') and (UCL NE 0) then
|
|
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
|
|
end else
|
|
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
|
|
Error_Services('Add', ErrorMessage)
|
|
end
|
|
end
|
|
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
|
|
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
|
|
SpecQty = SpecQuantities<0, SpecRecipeIndex>
|
|
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
|
|
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
|
|
ScanSig = ScanSigs<0, ScanRecipeIndex>
|
|
FailureScan = False$
|
|
// RDS < UCL (SOD Spec Avg) Check
|
|
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
|
|
ScanSortPerWafer = Record<CLEAN_INSP_SCAN_SORT_PER_WAFER$, ScanRecipeIndex>
|
|
WaferCount = 0
|
|
SODAvgSum = 0
|
|
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
|
|
NumFailedWafers = 0
|
|
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
|
|
WaferSort = ScanSortPerWafer<0, ScanRecipeIndex, WaferIndex>
|
|
If ( (WaferSOD NE '') or (WaferSort NE '') ) then
|
|
// We have SOD data for this wafer so check if it is < SOD Max
|
|
If ( (WaferSOD LE SpecDefect) and (WaferSort NE 'FAIL') ) then
|
|
WaferCount += 1
|
|
SODAvgSum += WaferSOD
|
|
FailedWafers<0, WaferIndex> = False$
|
|
end else
|
|
NumFailedWafers += 1
|
|
FailedWafers<0, WaferIndex> = True$
|
|
end
|
|
end
|
|
Next WaferSOD
|
|
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
|
|
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
|
|
// This is the first time we are recording the scanned SOD average value. Store this
|
|
// for determining reactor health. (ROTR Status)
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
end
|
|
If WaferCount GT 0 and SODAvgSum GT 0 then
|
|
SODAvg = SODAvgSum / WaferCount
|
|
// Update scanned SOD average to not include wafers exceeding SOD max
|
|
// Adjust value to conform to internal storage format
|
|
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
|
|
end
|
|
If (ROTREnabled EQ True$) then
|
|
// ROTR Sign-off Project
|
|
// We need to check if reactor recently underwent ROTR maintenance. If so, then
|
|
// we must also check if this RDS is one of the first two runs after maintenance.
|
|
// If this is the case, then the RDS must undergo a 100% scan.
|
|
|
|
MaintScanReq = QA_Services('GetMaintenanceScanStatus', RDSKey)
|
|
FailScanReq = (FailScanReq or MaintScanReq or WafersRemoved)
|
|
// Search for '100' in the recipe name to determine if this is a failure scan.
|
|
If (WafersRemoved) then
|
|
FailureScan = Index(ScanRecipes, '25', 1)
|
|
end else
|
|
FailureScan = (Index(ScanRecipes, '100', 1) or Index(ScanRecipes, '25', 1))
|
|
end
|
|
If FailureScan GT 0 then FailureScan = True$
|
|
If (FailScanReq EQ True$) and (FailureScan EQ True$) then
|
|
// Fail scan was required and submitted, so turn off all fail scan required flags.
|
|
FailScanReq = False$
|
|
NumScans = DCount(ScanRecipes, @VM)
|
|
For ScanIndex = 1 to NumScans
|
|
FailScanFlags<0, ScanIndex> = False$
|
|
Next ScanIndex
|
|
WafersRemoved = False$
|
|
end
|
|
end
|
|
Begin Case
|
|
Case WafersRemoved
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = '100% scan required due to aborted run.'
|
|
Case (FailScanReq EQ True$) and (FailureScan EQ False$) and (ROTREnabled EQ True$)
|
|
If (MaintScanReq EQ True$) then
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = '100% scan required due to ROTR maint.'
|
|
end else
|
|
// If ROTR maintenance flag not set, then wafer fail limit must have been met in
|
|
// an earlier Tencor run. We must set it here again due to the design of this
|
|
// MFS.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
|
|
FailScanReq = True$
|
|
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
|
|
end
|
|
Case (ROTRReactorStatus EQ 'W') and (ROTREnabled EQ True$)
|
|
// Awaiting ROTR results. Request in queue. This MFS will be triggered
|
|
// once the request is processed.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ROTRReactorStatusReason
|
|
Case (ROTRReactorStatus EQ 'F') and (ROTREnabled EQ True$)
|
|
// Check this case first as to not miss blocking the reactor if necessary.
|
|
// Block load signature on this reactor for future lots until overriden at Load button
|
|
// signature click event by supervisor, lead, or engineer.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ROTRReactorStatusReason
|
|
CIReactorRec = Database_Services('ReadDataRow', 'REACTOR', CIReactor)
|
|
CIReactorRec<REACTOR_ROTR_STATUS$> = 'F'
|
|
CIReactorRec<REACTOR_ROTR_STATUS_REASON$> = ROTRReactorStatusReason
|
|
Database_Services('WriteDataRow','REACTOR',CIReactor,CIReactorRec, True$, False$, True$)
|
|
ReactorBlocked = True$
|
|
Case (ScanDefect EQ '') OR (ScanHaze EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data is missing.'
|
|
Case (SigRequired EQ True$) AND (ScanSig EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan signature is missing.'
|
|
Case (ScanDefect GT SpecDefect) or (NumFailedWafers GE ROTRFailLimit)
|
|
If (ROTREnabled EQ True$) then
|
|
// If a Post Clean is required, then disregard the ROTRFailLimit per Tom Tillery.
|
|
CleanReq = False$
|
|
PSNo = Xlate('CLEAN_INSP', CleanInspKeyID, 'PS_NO', 'X')
|
|
PRSStages = Xlate('PROD_SPEC', PSNo, 'PRS_STAGE_KEY', 'X')
|
|
If Index(PRSStages, 'POST', 1) then
|
|
CleanReq = Xlate('PRS_STAGE', PSNo:'*POST', 'CLEAN_SIG_REQ', 'X')
|
|
end
|
|
If (NumFailedWafers LT ROTRFailLimit) or (CleanReq EQ True$) or (FailureScan EQ True$) then
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data out of bounds.'
|
|
end else
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
|
|
FailScanReq = True$
|
|
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
|
|
end
|
|
end else
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data out of bounds.'
|
|
end
|
|
Case (ScanHaze GT SpecHaze)
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan Haze out of bounds.'
|
|
Case Otherwise$
|
|
// This scan data is within spec.
|
|
ROTRAction = 'P'
|
|
ROTRActionReason = 'Passed'
|
|
End Case
|
|
|
|
// Store this result for final disposition
|
|
ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction
|
|
ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason
|
|
end
|
|
Next ScanRecipeName
|
|
|
|
FinalROTRAction = 'P'
|
|
FinalROTRActionReason = ''
|
|
// Final disposition
|
|
// If no scan data or if any scan data has failed, then FinalROTRAction = F.
|
|
NumScanRecipes = DCount(ScanRecipes, @VM)
|
|
If NumScanRecipes EQ 0 then
|
|
FinalROTRAction = 'F'
|
|
If WafersRemoved then
|
|
FinalROTRActionReason = '100% scan required due to aborted run.'
|
|
end else
|
|
FinalROTRActionReason = 'Scan data is missing.'
|
|
end
|
|
end else
|
|
NumFailures = Count(ScanRecipeResults, 'F')
|
|
Begin Case
|
|
Case NumFailures EQ 0
|
|
// No failures so this is a pass.
|
|
FinalROTRAction = 'P'
|
|
FInalROTRActionReason = ''
|
|
Case NumFailures EQ 1
|
|
// Display the failure reason
|
|
Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then
|
|
FailureReason = ScanRecipeReasons<0, ScanRecipeIndex>
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = FailureReason
|
|
end
|
|
Case NumFailures GT 1
|
|
// Inform the user that multiple scans failed
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = 'Multiple scans failed to meet criteria.'
|
|
End Case
|
|
end
|
|
ROTRAction = FinalROTRAction
|
|
ROTRActionReason = FinalROTRActionReason
|
|
end
|
|
|
|
Case Stage _EQC 'POST'
|
|
|
|
If SpecRecipes NE '' then
|
|
|
|
// Check each scan recipe.
|
|
For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex
|
|
Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then
|
|
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
|
|
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
|
|
If (UCL EQ '') or (UCL EQ 0) then
|
|
// The UCL has not yet been retrieved from SPC or an error could have
|
|
// occurred when the last attempt to retrieve it, so try to get it now.
|
|
UCL = QA_Services('PostUCLRequest', RDSKey, ScanRecipeName)
|
|
If (UCL NE '') and (UCL NE 0) then
|
|
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
|
|
end else
|
|
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
|
|
Error_Services('Add', ErrorMessage)
|
|
end
|
|
end
|
|
SpecSampleQty = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, SpecRecipeIndex>
|
|
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
|
|
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
|
|
SpecQty = SpecQuantities<0, SpecRecipeIndex>
|
|
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
|
|
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
|
|
ScanSig = ScanSigs<0, ScanRecipeIndex>
|
|
FailureScan = False$
|
|
// RDS < UCL (SOD Spec Avg) Check
|
|
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
|
|
ScanSortPerWafer = Record<CLEAN_INSP_SCAN_SORT_PER_WAFER$, ScanRecipeIndex>
|
|
WaferCount = 0
|
|
SODAvgSum = 0
|
|
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
|
|
NumFailedWafers = 0
|
|
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
|
|
WaferSort = ScanSortPerWafer<0, ScanRecipeIndex, WaferIndex>
|
|
If ( (WaferSOD NE '') or (WaferSort NE '') ) then
|
|
// We have SOD data for this wafer so check if it is < SOD Max
|
|
If ( (WaferSOD LE SpecDefect) and (WaferSort NE 'FAIL') ) then
|
|
WaferCount += 1
|
|
SODAvgSum += WaferSOD
|
|
FailedWafers<0, WaferIndex> = False$
|
|
end else
|
|
NumFailedWafers += 1
|
|
FailedWafers<0, WaferIndex> = True$
|
|
end
|
|
end
|
|
Next WaferSOD
|
|
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
|
|
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
|
|
// This is the first time we are recording the scanned SOD average value. Store this
|
|
// for determining reactor health. (ROTR Status)
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
end
|
|
If WaferCount GT 0 and SODAvgSum GT 0 then
|
|
SODAvg = SODAvgSum / WaferCount
|
|
// Update scanned SOD average to not include wafers exceeding SOD max
|
|
// Adjust value to conform to internal storage format
|
|
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
|
|
end
|
|
|
|
Begin Case
|
|
Case (ScanDefect EQ '') OR (ScanHaze EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data is missing.'
|
|
Case (SigRequired EQ True$) AND (ScanSig EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan signature is missing.'
|
|
Case (ScanDefect GT SpecDefect) or (NumFailedWafers GE ROTRFailLimit)
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data out of bounds.'
|
|
Case (ScanHaze GT SpecHaze)
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan Haze out of bounds.'
|
|
Case Otherwise$
|
|
// This scan data is within spec.
|
|
ROTRAction = 'P'
|
|
ROTRActionReason = 'Passed'
|
|
End Case
|
|
|
|
// Store this result for final disposition
|
|
ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction
|
|
ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason
|
|
end
|
|
Next ScanRecipeName
|
|
|
|
FinalROTRAction = 'P'
|
|
FinalROTRActionReason = ''
|
|
// Final disposition
|
|
// If no scan data or if any scan data has failed, then FinalROTRAction = F.
|
|
NumScanRecipes = DCount(ScanRecipes, @VM)
|
|
If NumScanRecipes EQ 0 then
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = 'Scan data is missing.'
|
|
end else
|
|
|
|
TotalScanWfrCnt = Count(FailedWafers, '0') + Count(FailedWafers, '1')
|
|
|
|
Begin Case
|
|
Case (SpecSampleQty EQ '')
|
|
QtyMismatch = 'Error determining sample qty spec'
|
|
Case (TotalScanWfrCnt LT SpecSampleQty)
|
|
QtyMismatch = 'Min sample quantity not met.'
|
|
Case Otherwise$
|
|
QtyMismatch = ''
|
|
// Set flag to inform FQA that POST surfscan failure results should be used instead.
|
|
RDSRec = Database_Services('ReadDataRow', 'RDS', RDSNo)
|
|
RDSRec<RDS_POST_SUPERCEDE$> = True$
|
|
Database_Services('WriteDataRow', 'RDS', RDSNo, RDSRec, True$, False$, True$)
|
|
End Case
|
|
|
|
NumFailures = Count(ScanRecipeResults, 'F')
|
|
Begin Case
|
|
Case ( (QtyMismatch NE '') and Not(IsEpiPro) )
|
|
FinalROTRAction = 'F'
|
|
FInalROTRActionReason = QtyMismatch
|
|
Case NumFailures EQ 0
|
|
// No failures so this is a pass.
|
|
FinalROTRAction = 'P'
|
|
FInalROTRActionReason = ''
|
|
Case NumFailures EQ 1
|
|
// Display the failure reason
|
|
Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then
|
|
FailureReason = ScanRecipeReasons<0, ScanRecipeIndex>
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = FailureReason
|
|
end
|
|
Case NumFailures GT 1
|
|
// Inform the user that multiple scans failed
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = 'Multiple scans failed to meet criteria.'
|
|
End Case
|
|
end
|
|
ROTRAction = FinalROTRAction
|
|
ROTRActionReason = FinalROTRActionReason
|
|
end
|
|
|
|
End Case
|
|
end else
|
|
// Recipe mismatch field set. Set ROTR to failed and inform user.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ScanMismatch:' does not match spec.'
|
|
end
|
|
If ROTRAction EQ 'P' then
|
|
// Clear any previously set failure reasons or failure scan flags.
|
|
ROTRActionReason = ''
|
|
NumScans = DCount(ScanRecipes, @VM)
|
|
For ScanIndex = 1 to NumScans
|
|
FailScanFlags<0, ScanIndex> = False$
|
|
Next ScanIndex
|
|
Record<CLEAN_INSP_WAFERS_REMOVED$> = False$
|
|
end
|
|
Record<CLEAN_INSP_ROTR_ACTION$> = ROTRAction
|
|
Record<CLEAN_INSP_ROTR_ACTION_REASON$> = ROTRActionReason
|
|
Record<CLEAN_INSP_FAIL_SCAN_REQ$> = FailScanFlags
|
|
Record<CLEAN_INSP_SCAN_RESULT$> = ScanRecipeResults
|
|
Record<CLEAN_INSP_SCAN_RESULT_REASON$> = ScanRecipeReasons
|
|
Record<CLEAN_INSP_FAILED_WAFERS$> = FailedWafers
|
|
|
|
SaveRecord = Record
|
|
Server = Environment_Services('GetServer')
|
|
If (Server NE 'MESSA005') AND (Server NE 'MESSA01EC') then
|
|
// The metrology data was updated by an end user on a workstation. Add this information to a special log
|
|
// for Balan.
|
|
Post_Metrology_Manual_Data_Entry_Log(@USER4,'Tencor',Record<CLEAN_INSP_RDS_NO$>:' / ':CleanInspKeyID)
|
|
end
|
|
end
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
WRITE_RECORD:
|
|
|
|
WONo = Record<CLEAN_INSP_WO_NO$>
|
|
ReactType = Xlate('WO_LOG', WONo, 'REACT_TYPE', 'X')
|
|
EpiPro = (ReactType EQ 'EPP')
|
|
GaN = (ReactType EQ 'GAN')
|
|
NonEpiPro = ( (ReactType NE 'EPP') and (ReactType NE 'GAN') )
|
|
Stage = Record<CLEAN_INSP_STAGE$>
|
|
|
|
If Stage EQ 'LWI' then
|
|
RDSNo = Record<CLEAN_INSP_RDS_NO$>
|
|
PostCIKey = Xlate('RDS', RDSNo, 'POST_CI_NO', 'X')
|
|
If PostCIKey NE '' then
|
|
FailedWafers = Record<CLEAN_INSP_FAILED_WAFERS$>
|
|
If FailedWafers NE '' then
|
|
NewPostSpecSampleQty = Sum(FailedWafers)
|
|
PostCIRec = Database_Services('ReadDataRow', 'CLEAN_INSP', PostCIKey)
|
|
PostSpecRecipes = PostCIRec<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
|
|
NumRecipes = DCount(PostSpecRecipes, @VM)
|
|
If NumRecipes GT 0 then
|
|
For RecipeIndex = 1 to NumRecipes
|
|
CurrSpec = PostCIRec<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex>
|
|
If ( (CurrSpec EQ '') or (CurrSpec LT NewPostSpecSampleQty) ) then
|
|
PostCIRec<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> = NewPostSpecSampleQty
|
|
end
|
|
Next RecipeIndex
|
|
Database_Services('WriteDataRow', 'CLEAN_INSP', PostCIKey, PostCIRec, True$, False$, True$)
|
|
end
|
|
end
|
|
end
|
|
end
|
|
|
|
If NonEpiPro then
|
|
// Sync up Insp, Clean, and SurfScan signatures with WO_MAT signature profile
|
|
Stage = {STAGE}
|
|
|
|
WOMatKey = {WO_MAT_KEY}
|
|
// Update failed wafer list
|
|
QA_Services('UpdateFailedWafers', WOMatKey)
|
|
WOMatRec = Database_Services('ReadDataRow', 'WO_MAT', WOMatKey)
|
|
WOMatSigProf = WOMatRec<WO_MAT_SIG_PROFILE$>
|
|
WOMatSigs = WOMatRec<WO_MAT_SIGNATURE$>
|
|
WOMatSigDTMs = WOMatRec<WO_MAT_SIG_DTM$>
|
|
|
|
OrigInspSig = OrigRecord<CLEAN_INSP_INSP_SIG$>
|
|
OrigInspSigDTM = OrigRecord<CLEAN_INSP_INSP_SIG_DTM$>
|
|
InspSig = Record<CLEAN_INSP_INSP_SIG$>
|
|
InspSigDTM = Record<CLEAN_INSP_INSP_SIG_DTM$>
|
|
|
|
OrigCleanSig = OrigRecord<CLEAN_INSP_CLEAN_SIG$>
|
|
OrigCleanSigDTM = OrigRecord<CLEAN_INSP_CLEAN_SIG_DTM$>
|
|
CleanSig = Record<CLEAN_INSP_CLEAN_SIG$>
|
|
CleanSigDTM = Record<CLEAN_INSP_CLEAN_SIG_DTM$>
|
|
|
|
OrigScanSig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
|
|
OrigScanSigDTM = OrigRecord<CLEAN_INSP_SCAN_SIG_DTM$>
|
|
ScanSig = Record<CLEAN_INSP_SCAN_SIG$>
|
|
ScanSigDTM = Record<CLEAN_INSP_SCAN_SIG_DTM$>
|
|
|
|
SigProfUpdate = False$
|
|
|
|
If ( (OrigInspSig NE InspSig) or (OrigInspSigDTM NE InspSigDTM) ) then
|
|
WOMatStage = '1':Stage:'I'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = InspSig[-1, 'B':@VM]
|
|
WOMatSigDTMs<0, vPos> = InspSigDTM[-1, 'B':@VM]
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If ( (OrigCleanSig NE CleanSig) or (OrigCleanSigDTM NE CleanSigDTM) ) then
|
|
WOMatStage = '1':Stage:'C'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = CleanSig[-1, 'B':@VM]
|
|
WOMatSigDTMs<0, vPos> = CleanSigDTM[-1, 'B':@VM]
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If ( (OrigScanSig NE ScanSig) or (OrigScanSigDTM NE ScanSigDTM) ) then
|
|
WOMatStage = '1':Stage:'S'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = ScanSig[-1, 'B':@VM]
|
|
WOMatSigDTMs<0, vPos> = ScanSigDTM[-1, 'B':@VM]
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If SigProfUpdate then
|
|
NumSteps = DCount(WOMatSigProf, @VM)
|
|
WOMatRec<WO_MAT_SIGNATURE$> = Field(WOMatSigs, @VM, 1, NumSteps)
|
|
WOMatRec<WO_MAT_SIG_DTM$> = Field(WOMatSigDTMs, @VM, 1, NumSteps)
|
|
Database_Services('WriteDataRow', 'WO_MAT', WOMatKey, WOMatRec, True$, False$, True$)
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
DELETE_RECORD_PRE:
|
|
return
|
|
|
|
DELETE_RECORD:
|
|
return
|
|
|
|
|
|
// ----- Internal Methods ----------------------------------------------------------------------------------------------
|
|
|
|
Initialize_System_Variables:
|
|
// Save these for restoration later
|
|
SaveDict = @DICT
|
|
SaveID = @ID
|
|
SaveRecord = @RECORD
|
|
OrigFileError = @FILE.ERROR
|
|
|
|
// Now make sure @DICT, ID, and @RECORD are populated
|
|
CurrentDictName = ''
|
|
If @DICT then
|
|
DictHandle = @DICT<1, 2>
|
|
Locate DictHandle in @TABLES(5) Using @FM Setting fPos then
|
|
CurrentDictName = Field(@TABLES(0), @FM, fPos, 1)
|
|
end
|
|
end
|
|
|
|
If CurrentDictName NE DictName then
|
|
Open DictName to @DICT else Status = 'Unable to initialize @DICT'
|
|
end
|
|
|
|
@ID = KeyID
|
|
If Record else
|
|
// Record might not have been passed in. Read the record from the database table just to make sure.
|
|
@FILE.ERROR = ''
|
|
Open TableName to hTable then
|
|
FullFSList = hTable[1, 'F' : @VM]
|
|
BFS = FullFSList[-1, 'B' : @SVM]
|
|
LastHandle = hTable[-1, 'B' : \0D\]
|
|
FileHandle = \0D\ : LastHandle[1, @VM]
|
|
|
|
Call @BFS(READO.RECORD, BFS, FileHandle, KeyID, FMC, Record, ReadOStatus)
|
|
end
|
|
end
|
|
@RECORD = Record
|
|
return
|
|
|
|
Restore_System_Variables:
|
|
Transfer SaveDict to @DICT
|
|
Transfer SaveID to @ID
|
|
Transfer SaveRecord to @RECORD
|
|
@FILE.ERROR = OrigFileError
|
|
return
|
|
|
|
|