55 lines
7.0 KiB
Plaintext
55 lines
7.0 KiB
Plaintext
HEADER_TAG HEADER_VALUE
|
|
FORMAT 2.00
|
|
NUMBER_PASSES 0001
|
|
HEADER_OFFSET H#######T
|
|
DATA_OFFSET D#######T
|
|
END_OFFSET E#######T
|
|
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Cassette" "HeaderUniqueId" "Layer" "PassFail" "Position" "RDS" "Title" "UniqueId" "Wafer" "Zone" "MeanThickness" "RVThickness" "StdDev" "Thickness" "Slot" "ThicknessFourteen3mmEdgeMean" "ThicknessFourteen3mmEdgePercent" "ThicknessFourteen5mmEdgeMean" "ThicknessFourteen5mmEdgePercent" "ThicknessFourteenCenterMean" "ThicknessFourteenCriticalPointsAverage" "ThicknessFourteenCriticalPointsStdDev" "ThicknessFourteenMeanFrom" "Thickness01" "Thickness02" "Thickness03" "Thickness04" "Thickness05" "Thickness06" "Thickness07" "Thickness08" "Thickness09" "Thickness10" "Thickness11" "Thickness12" "Thickness13" "Thickness14"
|
|
0.00 1 2 25 9 0 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 1 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 119.11 00 119.11
|
|
0.00 1 2 25 9 1 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 2 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
|
|
0.00 1 2 25 9 2 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 3 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 118.87 00 118.87
|
|
0.00 1 2 25 9 3 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 4 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
|
|
0.00 1 2 25 9 4 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 5 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
|
|
0.00 1 2 25 9 5 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 6 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
|
|
0.00 1 2 25 9 6 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 7 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 117.12 00 117.12
|
|
0.00 1 2 25 9 7 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 8 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 116.95 00 116.95
|
|
0.00 1 2 25 9 8 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 9 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 116.18 00 116.18
|
|
NUM_DATA_ROWS 000000009
|
|
NUM_DATA_COLUMNS 000000050
|
|
DELIMITER ;
|
|
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
|
|
START_TIME 04/24/2025 18:11:07
|
|
LOGISTICS_COLUMN A_LOGISTICS
|
|
LOGISTICS_COLUMN B_LOGISTICS
|
|
LOGISTICS_1 A_HeaderId=514141;A_SubgroupId=1745543491;A_BASIC_TYPE=;A_INFO=202504241811079527.TXT.csv;A_INFO2=9;A_JOBID=BIORAD2;A_MES_ENTITY=BIORAD2;A_MID=40-667740-5159.1-1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811150679527382;A_WAFER_ID=;A_WAFER_POS=;
|
|
LOGISTICS_2 B_HeaderId=514141;B_SubgroupId=1745543491;B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667740;B_NULL_DATA=;B_PPID=6inTHICK;B_PROCESS_JOBID=40;B_PRODUCT=5159;B_SEQUENCE=638811150679527382;B_WAFER_ID=-;B_WAFER_POS=1;
|
|
EOF
|
|
HEADER_TAG|HEADER_VALUE
|
|
FORMAT|2.00
|
|
NUMBER_PASSES|0001
|
|
HEADER_OFFSET|000003202
|
|
DATA_OFFSET|000000128
|
|
END_OFFSET|000003871
|
|
|
|
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Title|Recipe|DateTime|Operator|Batch|Cassette|UsedLast|Wafer|Position|Thickness|WaferMeanThickness|StdDev|PassFail|Line|RadialVariationThickness|Slot|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Thickness 14 3mm Edge Mean|Thickness 14 3mm Edge % from R/2|Thickness 14 5mm Edge Mean|Thickness 14 5mm Edge % from R/2|Thickness 14 Center Mean|Thickness 14 Average|Thickness 14 Std Dev|Thickness 14 R 2/Mean|Thickness01|Thickness02|Thickness03|Thickness04|Thickness05|Thickness06|Thickness07|Thickness08|Thickness09|Thickness10|Thickness11|Thickness12|Thickness13|Thickness14|EventId|
|
|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
|
|
0.00|1|2|9|638811150679527382|BIORAD2|0|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|1|119.11|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||119.11||||||||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|1|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|2|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||0.00|||||||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|2|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|3|118.87|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||118.87||||||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|3|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|4|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||0.00|||||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|4|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|5|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||0.00||||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|5|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|6|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||||0.00|||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|6|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|7|117.12|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||||117.12||||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|7|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|8|116.95|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||||||116.95|||||||25
|
|
0.00|1|2|9|638811150679527382|BIORAD2|8|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|9|116.18|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||||||116.18||||||25
|
|
|
|
NUM_DATA_ROWS|000000009
|
|
NUM_DATA_COLUMNS|000000053
|
|
DELIMITER|;
|
|
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
|
|
START_TIME|04/24/2025 18:11:07
|
|
LOGISTICS_COLUMN|A_LOGISTICS
|
|
LOGISTICS_COLUMN|B_LOGISTICS
|
|
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504241811079527.TXT.csv;A_INFO2=9;A_JOBID=BIORAD2;A_MES_ENTITY=BIORAD2;A_MID=40-667740-5159.1-1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811150679527382;A_WAFER_ID=;A_WAFER_POS=;
|
|
LOGISTICS_2|B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667740;B_NULL_DATA=;B_PPID=6inTHICK;B_PROCESS_JOBID=40;B_PRODUCT=5159;B_SEQUENCE=638811150679527382;B_WAFER_ID=-;B_WAFER_POS=1;
|
|
END_HEADER |