phares3757/open-insight
3
0
Fork 0
Code Issues Pull Requests Actions Packages Projects Releases Wiki Activity
open-insight/.vscode/638811099895374259/TENCOR1_250424164629000.pdsf
Mike Phares 88816d9a74 Stratus own Qual 
Common ResourceID and IsViewerFile

Test data and vba
2025-05-27 15:29:14 -07:00

43 lines
6.4 KiB
Plaintext
Raw Blame History

HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Comments" "Diameter" "Exclusion" "Gain" "HeaderUniqueId" "Laser" "ParseErrorText" "RDS" "Slot" "UniqueId" "AreaCount" "AreaCountAvg" "AreaCountMax" "AreaCountMin" "AreaCountStdDev" "AreaTotal" "AreaTotalAvg" "AreaTotalMax" "AreaTotalMin" "AreaTotalStdDev" "Bin1" "Bin2" "Bin3" "Bin4" "Bin5" "Bin6" "Bin7" "Bin8" "HazeAverage" "HazeAverageAvg" "HazeAverageMax" "HazeAverageMin" "HazeAverageStdDev" "HazePeak" "HazeRegion" "HazeRegionAvg" "HazeRegionMax" "HazeRegionMin" "HazeRegionStdDev" "HazeRng" "LPDCM2" "LPDCM2Avg" "LPDCM2Max" "LPDCM2Min" "LPDCM2StdDev" "LPDCount" "LPDCountAvg" "LPDCountMax" "LPDCountMin" "LPDCountStdDev" "Mean" "ScratchCount" "ScratchCountAvg" "ScratchCountMax" "ScratchCountMin" "ScratchCountStdDev" "ScratchTotal" "ScratchTotalAvg" "ScratchTotalMax" "ScratchTotalMin" "ScratchTotalStdDev" "Sort" "StdDev" "SumOfDefects" "SumOfDefectsAvg" "SumOfDefectsMax" "SumOfDefectsMin" "SumOfDefectsStdDev" "Thresh" "Thruput"
0.00 1 2 7 3 0 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 01 UniqueId 1 1 1 1 0 0.0716mm2 0.10 0.21 0.019 0.10 2 1 0 0 0 0 1.16ppm 1.15 1.18 1.12 0.0291 25.5ppm 100% 100 100 100 0 500ppm 0.019 0.013 0.019 0.006 0.006 3 2 3 1 1 0.252 1 0.3 1 0 0.6 1.02mm 0.34 1.02 0 0.59 PASS 0.043 4 3 4 2 1 0.200um Normal
0.00 1 2 7 3 1 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 15 UniqueId 1 1 1 1 0 0.0195mm2 0.10 0.21 0.019 0.10 1 0 0 0 1 0 1.18ppm 1.15 1.18 1.12 0.0291 25.0ppm 100% 100 100 100 0 500ppm 0.013 0.013 0.019 0.006 0.006 2 2 3 1 1 1.32 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 1.54 3 3 4 2 1 0.200um Normal
0.00 1 2 7 3 2 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 25 UniqueId 1 1 1 1 0 0.213mm2 0.10 0.21 0.019 0.10 0 1 0 0 0 0 1.12ppm 1.15 1.18 1.12 0.0291 22.5ppm 100% 100 100 100 0 500ppm 0.006 0.013 0.019 0.006 0.006 1 2 3 1 1 0.307 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 0.000 2 3 4 2 1 0.200um Normal
NUM_DATA_ROWS 000000003
NUM_DATA_COLUMNS 000000083
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 16:46:29
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=524300;A_SubgroupId=1745538421;A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=524300;B_SubgroupId=1745538421;B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000002772
DATA_OFFSET|000000128
END_OFFSET|000003437
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Date|Recipe|Id|WaferId|LPDCount|LPDCM2|AreaCount|AreaTotal|ScratchCount|ScratchTotal|SumOfDefects|HazeRegion|HazeAverage|Grade|LPDCountMin|LPDCM2Min|AreaCountMin|AreaTotalMin|ScratchCountMin|ScratchTotalMin|SumOfDefectsMin|HazeRegionMin|HazeAverageMin|LPDCountMax|LPDCM2Max|AreaCountMax|AreaTotalMax|ScratchCountMax|ScratchTotalMax|SumOfDefectsMax|HazeRegionMax|HazeAverageMax|LPDCountAvg|LPDCM2Avg|AreaCountAvg|AreaTotalAvg|ScratchCountAvg|ScratchTotalAvg|SumOfDefectsAvg|HazeRegionAvg|HazeAverageAvg|LPDCountStdDev|LPDCM2StdDev|AreaCountStdDev|AreaTotalStdDev|ScratchCountStdDev|ScratchTotalStdDev|SumOfDefectsStdDev|HazeRegionStdDev|HazeAverageStdDev|WaferDate|Comments|Sort|WaferLPDCount|WaferLPDCM2|Bin1|Bin2|Bin3|Bin4|Bin5|Bin6|Bin7|Bin8|Mean|StdDev|WaferAreaCount|WaferAreaTotal|WaferScratchCount|WaferScratchTotal|WaferSumOfDefects|WaferHazeRegion|WaferHazeAverage|HazePeak|Laser|Gain|Diameter|Thresh|Exclusion|HazeRng|Thruput|WaferRecipe|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|3|638811099895374259|TENCOR1|0|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|01|3|0.019|1|0.072|1|1.02|4|100|1.16|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:34:51 AM|- High Thruput|PASS|3|0.019|2|1|0|0|0|0|||0.252|0.043|1|0.0716mm2|1|1.02mm|4|100%|1.16ppm|25.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|1|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|15|2|0.013|1|0.019|0|0|3|100|1.18|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:35:39 AM|- High Thruput|PASS|2|0.013|1|0|0|0|1|0|||1.32|1.54|1|0.0195mm2|0|0mm|3|100%|1.18ppm|25.0ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|2|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|25|1|0.006|1|0.21|0|0|2|100|1.12|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:36:22 AM|- High Thruput|PASS|1|0.006|0|1|0|0|0|0|||0.307|0.000|1|0.213mm2|0|0mm|2|100%|1.12ppm|22.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
NUM_DATA_ROWS|000000003
NUM_DATA_COLUMNS|000000096
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 16:46:29
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER
Reference in New Issue View Git Blame Copy Permalink