176 lines
4.3 KiB
JSON
176 lines
4.3 KiB
JSON
{
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"Id": -1,
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"AreaCountAvg": "1",
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"AreaCountMax": "1",
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"AreaCountMin": "1",
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"AreaCountStdDev": "0",
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"AreaTotalAvg": "0.10",
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"AreaTotalMax": "0.21",
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"AreaTotalMin": "0.019",
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"AreaTotalStdDev": "0.10",
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"Date": "4/24/2025 4:46:29 PM",
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"HazeAverageAvg": "1.15",
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"HazeAverageMax": "1.18",
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"HazeAverageMin": "1.12",
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"HazeAverageStdDev": "0.0291",
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"HazeRegionAvg": "100",
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"HazeRegionMax": "100",
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"HazeRegionMin": "100",
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"HazeRegionStdDev": "0",
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"Layer": null,
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"LotID": "667227",
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"LPDCM2Avg": "0.013",
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"LPDCM2Max": "0.019",
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"LPDCM2Min": "0.006",
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"LPDCM2StdDev": "0.006",
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"LPDCountAvg": "2",
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"LPDCountMax": "3",
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"LPDCountMin": "1",
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"LPDCountStdDev": "1",
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"Operator": "",
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"ParseErrorText": "ParseErrorText",
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"PSN": "5142",
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"RDS": "667227",
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"Reactor": "36",
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"Recipe": "6IN_THIN ROTR",
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"ScratchCountAvg": "0.3",
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"ScratchCountMax": "1",
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"ScratchCountMin": "0",
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"ScratchCountStdDev": "0.6",
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"ScratchTotalAvg": "0.34",
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"ScratchTotalMax": "1.02",
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"ScratchTotalMin": "0",
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"ScratchTotalStdDev": "0.59",
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"SumOfDefectsAvg": "3",
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"SumOfDefectsMax": "4",
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"SumOfDefectsMin": "2",
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"SumOfDefectsStdDev": "1",
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"Title": null,
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"UniqueId": "TENCOR1_1T667227_202504241646295374",
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"Zone": null,
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"CellName": "TENCOR1",
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"Data": "*Data*",
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"i": -1,
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"Details": [
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{
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"Id": 0,
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"AreaCount": "1",
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"AreaTotal": "0.0716mm2",
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"Bin1": "2",
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"Bin2": "1",
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"Bin3": "0",
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"Bin4": "0",
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"Bin5": "0",
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"Bin6": "0",
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"Bin7": null,
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"Bin8": null,
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"Comments": "- High Thruput",
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"Date": "4/24/2025 4:46:29 PM",
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"Diameter": "150 mm",
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"Exclusion": "4mm",
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"Gain": "4",
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"HazeAverage": "1.16ppm",
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"HazePeak": "25.5ppm",
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"HazeRegion": "100%",
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"HazeRng": "500ppm",
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"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
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"LPDCM2": "0.019",
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"LPDCount": "3",
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"Laser": "488nm",
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"Mean": "0.252",
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"Recipe": "6IN_THIN ROTR",
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"ScratchCount": "1",
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"ScratchTotal": "1.02mm",
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"Slot": "01",
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"Sort": "PASS",
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"StdDev": "0.043",
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"SumOfDefects": "4",
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"Thresh": "0.200um",
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"Thruput": "Normal",
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"Title": null,
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"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-1",
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"Data": "*Data*",
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"i": -1
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},
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{
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"Bin2": "0",
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"Bin3": "0",
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"Bin4": "0",
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"Bin5": "1",
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"Bin6": "0",
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"Bin7": null,
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"Bin8": null,
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"Comments": "- High Thruput",
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"Date": "4/24/2025 4:46:29 PM",
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"Diameter": "150 mm",
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"Exclusion": "4mm",
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"Gain": "4",
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"HazeAverage": "1.18ppm",
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"HazePeak": "25.0ppm",
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"HazeRegion": "100%",
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"HazeRng": "500ppm",
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"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
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"LPDCM2": "0.013",
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"LPDCount": "2",
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"Laser": "488nm",
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"Mean": "1.32",
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"Recipe": "6IN_THIN ROTR",
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"ScratchCount": "0",
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"ScratchTotal": "0mm",
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"Slot": "15",
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"Sort": "PASS",
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"StdDev": "1.54",
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"SumOfDefects": "3",
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"Thresh": "0.200um",
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"Thruput": "Normal",
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"Title": null,
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"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-2",
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"Data": "*Data*",
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"i": -1
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},
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{
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"Id": 0,
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"AreaTotal": "0.213mm2",
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"Bin1": "0",
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"Bin2": "1",
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"Bin3": "0",
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"Bin4": "0",
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"Bin5": "0",
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"Bin6": "0",
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"Bin7": null,
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"Bin8": null,
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"Comments": "- High Thruput",
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"Date": "4/24/2025 4:46:29 PM",
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"Diameter": "150 mm",
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"Exclusion": "4mm",
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"Gain": "4",
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"HazeAverage": "1.12ppm",
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"HazePeak": "22.5ppm",
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"HazeRegion": "100%",
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"HazeRng": "500ppm",
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"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
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"LPDCM2": "0.006",
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"LPDCount": "1",
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"Laser": "488nm",
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"Mean": "0.307",
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"Recipe": "6IN_THIN ROTR",
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"ScratchCount": "0",
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"ScratchTotal": "0mm",
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"Slot": "25",
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"Sort": "PASS",
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"StdDev": "0.000",
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"SumOfDefects": "2",
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"Thresh": "0.200um",
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"Thruput": "Normal",
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"Title": null,
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"i": -1
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}
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]
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} |