109 lines
		
	
	
		
			3.6 KiB
		
	
	
	
		
			Plaintext
		
	
	
	
	
	
			
		
		
	
	
			109 lines
		
	
	
		
			3.6 KiB
		
	
	
	
		
			Plaintext
		
	
	
	
	
	
| compile insert SPC_LIMITS_EQU
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| * equates for "CONFIG" "SPC_LIMITS"
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| 
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| equ SRDParticleMin$        to 1
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| equ SRDParticleMax$        to 2
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| equ SRDParticleDate$       to 3
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| equ SC1ParticleMin$        to 4
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| equ SC1ParticleMax$        to 5
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| equ SC1ParticleDate$       to 6
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| equ HFParticleMin$         to 7
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| equ HFParticleMax$         to 8
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| equ HFParticleDate$        to 9
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| equ HFEtchRemMin$          to 10
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| equ HFEtchRemMax$          to 11
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| equ HFEtchRemDate$         to 12
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| equ WafEtchMin$            to 13
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| equ WafEtchMax$            to 14
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| equ WafEtchDate$           to 15
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| equ Eval4PPHMin$           to 16
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| equ Eval4PPHMax$           to 17
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| equ Eval4PPHDate$          to 18
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| equ Eval4PPHStdevMin$      to 19
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| equ Eval4PPHStdevMax$      to 20
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| equ Eval4PPHStdevDate$     to 21
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| equ EvalFTIRHMin$          to 22
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| equ EvalFTIRHMax$          to 23
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| equ EvalFTIRHDate$         to 24
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| equ EvalFTIRHStdevMin$     to 25
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| equ EvalFTIRHStdevMax$     to 26
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| equ EvalFTIRHStdevDate$    to 27
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| equ Eval4PPMMin$           to 28
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| equ Eval4PPMMax$           to 29
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| equ Eval4PPMDate$          to 30
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| equ Eval4PPMStdevMin$      to 31
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| equ Eval4PPMStdevMax$      to 32
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| equ Eval4PPMStdevDate$     to 33
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| equ EvalFTIRMMin$          to 34
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| equ EvalFTIRMMax$          to 35
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| equ EvalFTIRMDate$         to 36
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| equ EvalFTIRMStdevMin$     to 37
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| equ EvalFTIRMStdevMax$     to 38
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| equ EvalFTIRMStdevDate$    to 39
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| equ Eval4PPLMin$           to 40
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| equ Eval4PPLMax$           to 41
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| equ Eval4PPLDate$          to 42
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| equ Eval4PPLStdevMin$      to 43
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| equ Eval4PPLStdevMax$      to 44
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| equ Eval4PPLStdevDate$     to 45
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| equ EvalFTIRLMin$          to 46
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| equ EvalFTIRLMax$          to 47
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| equ EvalFTIRLDate$         to 48
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| equ EvalFTIRLStdevMin$     to 49
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| equ EvalFTIRLStdevMax$     to 50
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| equ EvalFTIRLStdevDate$    to 51
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| equ Eval4PPHWaferID$       to 52
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| equ Eval4PPMWaferID$       to 53
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| equ Eval4PPLWaferID$       to 54
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| equ Eval4PPHStdevWaferID$  to 55
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| equ Eval4PPMStdevWaferID$  to 56
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| equ Eval4PPLStdevWaferID$  to 57
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| equ EvalFTIRHWaferID$      to 58
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| equ EvalFTIRMWaferID$      to 59
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| equ EvalFTIRLWaferID$      to 60
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| equ EvalFTIRHStdevWaferID$ to 61
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| equ EvalFTIRMStdevWaferID$ to 62
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| equ EvalFTIRLStdevWaferID$ to 63
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| equ ReactPartMin$          to 64
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| equ ReactPartMax$          to 65
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| equ ReactPartDate$         to 66
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| equ ReactHazeMin$          to 67
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| equ ReactHazeMax$          to 68
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| equ ReactHazeDate$         to 69
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| equ HFEtchAkrionRemEtchMin$    to 70
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| equ HFEtchAkrionRemEtchMax$    to 71
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| equ HFEtchAkrionRemEtchDate$   to 72
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| equ HFParticleAkrionQualMin$   to 73
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| equ HFParticleAkrionQualMax$   to 74
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| equ HFParticleAkrionQualDate$  to 75
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| equ HFParticleAkrionHFLastMin$   to 76
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| equ HFParticleAkrionHFLastMax$   to 77
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| equ HFParticleAkrionHFLastDate$  to 78
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| equ HFEtchAkrionRemDiluteMin$    to 79
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| equ HFEtchAkrionRemDiluteMax$    to 80
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| equ HFEtchAkrionRemDiluteDate$   to 81
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| equ EvalADEHMin$          to 82
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| equ EvalADEHMax$          to 83
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| equ EvalADEHDate$         to 84
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| equ EvalADEHStdevMin$     to 85
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| equ EvalADEHStdevMax$     to 86
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| equ EvalADEHStdevDate$    to 87
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| equ EvalADEMMin$          to 88
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| equ EvalADEMMax$          to 89
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| equ EvalADEMDate$         to 90
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| equ EvalADEMStdevMin$     to 91
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| equ EvalADEMStdevMax$     to 92
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| equ EvalADEMStdevDate$    to 93
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| equ EvalADELMin$          to 94
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| equ EvalADELMax$          to 95
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| equ EvalADELDate$         to 96
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| equ EvalADELStdevMin$     to 97
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| equ EvalADELStdevMax$     to 98
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| equ EvalADELStdevDate$    to 99
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| equ EvalADEHWaferID$      to 100
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| equ EvalADEMWaferID$      to 101
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| equ EvalADELWaferID$      to 102
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| equ EvalADEHStdevWaferID$ to 103
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| equ EvalADEMStdevWaferID$ to 104
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| equ EvalADELStdevWaferID$ to 105
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