23 lines
637 B
Plaintext
23 lines
637 B
Plaintext
compile insert RECIPE_INFO_ARRAY_EQU
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* THESE ARE THE EQUATED POSITIONS FOR THE RECIPE_INFO EDITTABLE IN
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* RDS "First Wafer Inspection" area
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equ RecInfoDepTime$ to 1
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equ RecInfoDiluentFlow$ to 2
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equ RecInfoDopantFlow$ to 3
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equ RecInfoHCLFlow$ to 4
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equ RecInfoBake$ to 5
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equ RecInfoH2$ to 6
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equ RecInfoTCS$ to 7
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equ RecInfoDCS$ to 8
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equ RecInfoAux1$ to 9
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equ RecInfoAux2$ to 10
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equ RecInfoFOffset$ to 11
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equ RecInfoSOffset$ to 12
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equ RecInfoROffset$ to 13
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equ RecInfoEtch1$ to 14
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equ RecInfoEtch2$ to 15
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equ RecInfoEtch3$ to 16
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