open-insight/LSL2/STPROCINS/RECIPE_EQU.txt
2024-03-25 15:12:53 -07:00

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* Equates for RECIPE created on 03/26/01 10:03AM
equ RECIPE_EPI_DOPANT$ to 1
equ RECIPE_EPI_TEMP$ to 2
equ RECIPE_REACTOR_TYPE$ to 3
equ RECIPE_EPI_DILUENT$ to 4
equ RECIPE_EPI_GASES$ to 5
equ RECIPE_EPI_GASES_UNIT$ to 6
equ RECIPE_DEP_TIME_MIN$ to 7
equ RECIPE_DEP_TIME_MAX$ to 8
equ RECIPE_DOPANT_FLOW_MIN$ to 9
equ RECIPE_DOPANT_FLOW_MAX$ to 10
equ RECIPE_ETCH_TIME$ to 11
equ RECIPE_BAKE_TIME_MAX$ to 12
equ RECIPE_H2_FLOW_MIN$ to 13
equ RECIPE_H2_FLOW_MAX$ to 14
equ RECIPE_DCS_FLOW_MIN$ to 15
equ RECIPE_NOTES$ to 16
equ RECIPE_RECIPE_NAME$ to 17
equ RECIPE_ENTRY_ID$ to 18
equ RECIPE_ENTRY_DATE$ to 19
equ RECIPE_EPI_GAS_RATE$ to 20
equ RECIPE_LAYER_INFO$ to 21
equ RECIPE_MOD_ID$ to 22
equ RECIPE_MOD_DATE$ to 23
equ RECIPE_DCS_FLOW_MAX$ to 24
equ RECIPE_AUX1_MIN$ to 25
equ RECIPE_AUX1_MAX$ to 26
equ RECIPE_AUX2_MIN$ to 27
equ RECIPE_AUX2_MAX$ to 28
equ RECIPE_F_OFFSET_MIN$ to 29
equ RECIPE_F_OFFSET_MAX$ to 30
equ RECIPE_S_OFFSET_MIN$ to 31
equ RECIPE_S_OFFSET_MAX$ to 32
equ RECIPE_R_OFFSET_MIN$ to 33
equ RECIPE_R_OFFSET_MAX$ to 34
equ RECIPE_BAKE_TIME_MIN$ to 35
equ RECIPE_DISK$ to 36
equ RECIPE_DILUENT_MIN$ to 37
equ RECIPE_DILUENT_MAX$ to 38
equ RECIPE_HCL_FLOW_MIN$ to 39
equ RECIPE_HCL_FLOW_MAX$ to 40
equ RECIPE_TCS_FLOW_MIN$ to 41
equ RECIPE_TCS_FLOW_MAX$ to 42
equ RECIPE_CAP_BURST$ to 43
equ RECIPE_CAP_BURST_GASES$ to 44
equ RECIPE_PROD_SPEC_IDS$ to 45
equ RECIPE_RMOD_FIELD$ to 46
equ RECIPE_RMOD_ID$ to 47
equ RECIPE_STATUS$ to 48
equ RECIPE_ENG_SIG$ to 49
equ RECIPE_ETCH1_MIN$ to 50
equ RECIPE_ETCH1_MAX$ to 51
equ RECIPE_ETCH2_MIN$ to 52
equ RECIPE_ETCH2_MAX$ to 53