open-insight/LSL2/STPROCINS/QUOTE_OLD_SPEC_EQU.txt
2024-03-25 15:12:53 -07:00

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compile insert QUOTE_OLD_SPEC_EQU
* These are equates for the spec_substrate field in the quote table
* so they are the @vm positions. This is used when defining spec information
* for a particular quote
equ QSSubOrientation$ to 1
equ QSSubType$ to 2
equ QSSubWafersize$ to 3
equ QSSubResistivity$ to 4
equ QSSubResUnits$ to 5
equ QSSubDopant$ to 6
equ QSSubPreClean$ to 7
equ QSSubBl1Dopant$ to 8
equ QSSubBl2Dopant$ to 9
equ QSSubOxide$ to 10
equ QSSubPostClean$ to 11
equ QSSubResRadGrad$ to 12
equ QSSubCarbon$ to 13
equ QSSubDisDensity$ to 14
equ QSSubInstructions$ to 15
equ QSSubOtherSpecs$ to 16
* now these are the equates for the spec_epi field in the quote table
* so they are the @vm positions.
equ QSEpiConcMinThick$ to 1 ;* could have @svm
equ QSEpiConcMaxThick$ to 2 ;* could have @svm
equ QSEpiConcUnits$ to 3
equ QSEpiResMinThick$ to 4
equ QSEpiResMaxThick$ to 5
equ QSEpiResUnits$ to 6
equ QSEpiMinThick$ to 7
equ QSEpiMaxThick$ to 8
equ QSEpiThickUnits$ to 9
equ QSEpiDopant$ to 10
equ QSEpiRecipe$ to 11
equ QSEpiRecipeName$ to 12
* it is these twelve values delimited by char(247) for each seperate
* reactor layer then char(245) and then as follows as @vm
equ QSOEpiThickMeasure$ to 1
equ QSOEpiResMeasure$ to 2
equ QSOEpiThickTol$ to 3 ;* from 3 - 13 can go
equ QSOEpiThickWWTol$ to 4
equ QSOEpiResTol$ to 5
equ QSOEpiResWWTol$ to 6
equ QSOEpiDopTrans$ to 7
equ QSOEpiLpDef$ to 8
equ QSOEpiSlip$ to 9
equ QSOEpiStackFaults$ to 10
equ QSOEpiStress$ to 11
equ QSOEpiEdgeCrown$ to 12
equ QSOEpiMContam$ to 13