873 lines
52 KiB
Plaintext
873 lines
52 KiB
Plaintext
Function CLEAN_INSP_Actions_Dev(Action, CalcColName, FSList, Handle, Name, FMC, Record, Status, OrigRecord, Param1, Param2, Param3, Param4, Param5, Param6, Param7, Param8, Param9, Param10)
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/***********************************************************************************************************************
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This program is proprietary and is not to be used by or disclosed to others, nor is it to be copied without written
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permission from Infineon.
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Name : CLEAN_INSP_Actions
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Description : Handles calculated columns and MFS calls for the current table.
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Notes : This function uses @ID, @RECORD, and @DICT to make sure {ColumnName} references work correctly.
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If called from outside of a calculated column these will need to be set and restored.
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Parameters :
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Action [in] -- Name of the action to be taken
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CalcColName [in] -- Name of the calculated column that needs to be processed. Normally this should only be
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populated when the CalcField action is being used.
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FSList [in] -- The list of MFSs and the BFS name for the current file or volume. This is an @SVM
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delimited array, with the current MFS name as the first value in the array, and the BFS
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name as the last value. Normally set by a calling MFS.
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Handle [in] -- The file handle of the file or media map being accessed. Note, this does contain the
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entire handle structure that the Basic+ Open statement would provide. Normally set by a
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calling MFS.
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Name [in] -- The name (key) of the record or file being accessed. Normally set by a calling MFS.
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FMC [in] -- Various functions. Normally set by a calling MFS.
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Record [in] -- The entire record (for record-oriented functions) or a newly-created handle (for
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"get handle" functions). Normally set by a calling MFS.
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Status [in/out] -- Indicator of the success or failure of an action. Normally set by the calling MFS but
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for some actions can be set by the action handler to indicate failure.
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OrigRecord [in] -- Original content of the record being processed by the current action. This is
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automatically being assigned by the WRITE_RECORD and DELETE_RECORD actions within
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BASE_MFS.
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Param1-10 [in/out] -- Additional request parameter holders
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ActionFlow [out] -- Used to control the action chain (see the ACTION_SETUP insert for more information.)
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Can also be used to return a special value, such as the results of the CalcField
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method.
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History : (Date, Initials, Notes)
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07/28/10 dmb Original programmer.
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10/13/10 dmb Fix logic to extract the file handle if file has an index
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03/26/11 dmb Add logic to save and restore @FILE.ERROR
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01/03/17 dmb Updated the ROTR compare logic to search for a recipe match.
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04/09/18 dmb Updated the ROTR compare logic to be limited to FWI stages. Also modified the default logic
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to be Failed unless proven otherwise.
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04/19/18 djs Update ROTR compare logic to support multiple spec recipes.
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05/04/18 dmb Update the special metrology log entry log to use the GetServer service rather than the
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@STATION global variable.
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06/13/18 dmb Replaced CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$ with CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$ when comparing
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against the Sum of Defects in the SurfScan recipe. - [IREPIOI-43]
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09/24/18 djs Adjusted the OConv call on the ScanDefect variable within the WRITE_RECORD_PRE action.
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10/29/18 djs Updated the WRITE_RECORD_PRE event to calculate the SOD average to only use wafers that
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are below the USL (SOD Max) as per ROTR Project requirements. Also updated the UCL request
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using QA_Services to include the scanned Tencor Recipe name in order to return the UCL
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associated with the particular recipe being processed at that time.
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06/07/19 djs Updated the WRITE_RECORD_PRE GoSub to support ROTR requirements for POST stage SurfScan
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rundata files.
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08/12/20 djs Added logging within the WRITE_RECORD_PRE GoSub to gather data for a bug within the
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Metrology_Services('ImportMetrologyService') subroutine. Occasionally the DB server is
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getting an out of memory error when importing metrology files.
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***********************************************************************************************************************/
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#pragma precomp SRP_PreCompiler
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$insert APP_INSERTS
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$insert FILE.SYSTEM.EQUATES
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$insert ACTION_SETUP
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$insert CLEAN_INSP_EQUATES
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$insert REACTOR_EQUATES
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$insert RDS_EQUATES
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$insert WM_OUT_EQUATES
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$insert WO_LOG_EQUATES
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$insert ROTR_EQUATES
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$insert WO_MAT_EQUATES
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Equ Comma$ to ','
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Declare function Error_Services, Database_Services, Environment_Services, QA_Services, Logging_Services, RDS_Services
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Declare function Trim
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Declare subroutine Error_Services, Database_Services, Post_Metrology_Manual_Data_Entry_Log, Logging_Services
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Declare subroutine Qa_Services
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LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\CleanInsp'
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LogDate = Oconv(Date(), 'D4/')
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LogTime = Oconv(Time(), 'MTS')
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LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' CLEAN_INSP Log.csv'
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Headers = 'Logging DTM' : @FM : 'User' : @FM : 'RDS Key ID' : @FM : 'CLEAN_INSP Key ID' : @FM : 'Notes' : @FM : 'Stack'
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objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$)
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LoggingDTM = LogDate : ' ' : LogTime ; // Logging DTM
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LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\FQABlocked'
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LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' FQA Log.csv'
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Headers = 'Logging DTM' : @FM : 'RDS Key ID' : @FM : 'Table' : @FM : 'Key' : @FM : 'Notes'
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FQAobjLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$)
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If KeyID then GoSub Initialize_System_Variables
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Begin Case
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Case Action _EQC 'CalculateColumn' ; GoSub CalculateColumn
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Case Action _EQC 'READ_RECORD_PRE' ; GoSub READ_RECORD_PRE
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Case Action _EQC 'READ_RECORD' ; GoSub READ_RECORD
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Case Action _EQC 'READONLY_RECORD_PRE' ; GoSub READONLY_RECORD_PRE
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Case Action _EQC 'READONLY_RECORD' ; GoSub READONLY_RECORD
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Case Action _EQC 'WRITE_RECORD_PRE' ; GoSub WRITE_RECORD_PRE
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Case Action _EQC 'WRITE_RECORD' ; GoSub WRITE_RECORD
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Case Action _EQC 'DELETE_RECORD_PRE' ; GoSub DELETE_RECORD_PRE
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Case Action _EQC 'DELETE_RECORD' ; GoSub DELETE_RECORD
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Case Otherwise$ ; Status = 'Invalid Action'
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End Case
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If KeyID then GoSub Restore_System_Variables
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If Assigned(ActionFlow) else ActionFlow = ACTION_CONTINUE$
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Return ActionFlow
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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// Calculated Columns
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//
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// The typical structure of a calculated column will look like this:
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//
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// Declare function Database_Services
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//
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// @ANS = Database_Services('CalculateColumn')
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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CalculateColumn:
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// Make sure the ActionFlow return variable is cleared in case nothing is calculated.
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ActionFlow = ''
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Begin Case
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Case CalcColName EQ 'INSP_REQ' ; GoSub INSP_REQ
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Case CalcColName EQ 'RDS_ROTR_ACTION' ; GoSub RDS_ROTR_ACTION
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End Case
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return
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INSP_REQ:
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RDSNo = {RDS_NO}
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WONo = {WO_NO}
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WOQty = Xlate('WO_LOG', WONo, 'QTY', 'X')
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RunNo = Xlate('RDS', RDSNo, 'RUN_ORDER_NUM', 'X')
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InspInterval = Xlate('PRS_STAGE', {PS_STAGE_KEY}, 'INSP_INTERVAL', 'X')
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LastRun = ( (RunNo * 25) EQ WOQty )
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InspReq = ( (Mod((RunNo - 1), InspInterval) EQ 0) or LastRun )
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ActionFlow = InspReq
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return
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RDS_ROTR_ACTION:
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ROTRAction = {ROTR_ACTION}
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If ROTRAction EQ 'F' then
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// Before returning a Fail, check to see if there is an acceptance for the results.
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AcceptedSignature = {SIGN_ROTR_SIGNATURE}
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AcceptedReason = {SIGN_ROTR_REASON}
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If (AcceptedSignature NE '') AND (AcceptedReason NE '') then ROTRAction = 'A'
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end
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ActionFlow = ROTRAction
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return
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// ----- MFS calls -----------------------------------------------------------------------------------------------------
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READ_RECORD_PRE:
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// In order to stop a record from being read in this action these lines of code must be used:
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//
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// OrigFileError = 100 : @FM : KeyID
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// Status = 0
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// Record = ''
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// ActionFlow = ACTION_STOP$
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return
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READ_RECORD:
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// In order to stop a record from being read in this action these lines of code must be used:
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//
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// OrigFileError = 100 : @FM : KeyID
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// Status = 0
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// Record = ''
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return
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READONLY_RECORD_PRE:
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// In order to stop a record from being read in this action these lines of code must be used:
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//
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// OrigFileError = 100 : @FM : KeyID
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// Status = 0
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// Record = ''
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// ActionFlow = ACTION_STOP$
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return
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READONLY_RECORD:
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// In order to stop a record from being read in this action these lines of code must be used:
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//
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// OrigFileError = 100 : @FM : KeyID
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// Status = 0
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// Record = ''
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return
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WRITE_RECORD_PRE:
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OrigRecCopy = OrigRecord
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RecCopy = Record
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Convert @VM to '' in OrigRecCopy
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Convert @VM to '' in RecCopy
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// LWII Specification limits
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OrigLWIISpecLPD = Trim(OrigRecCopy<CLEAN_INSP_INSP_LPD$>)
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OrigLWIISpecScr = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
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OrigLWIISpecScrLen = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
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OrigLWIISpecPits = Trim(OrigRecCopy<CLEAN_INSP_INSP_PITS$>)
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OrigLWIISpecMounds = Trim(OrigRecCopy<CLEAN_INSP_INSP_MOUNDS$>)
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OrigLWIISpecStack = Trim(OrigRecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
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OrigLWIISpecSpikes = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPIKES$>)
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OrigLWIISpecSpots = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPOTS$>)
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OrigLWIISpecBLDef = Trim(OrigRecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
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OrigLWIISpecFOV = Trim(OrigRecCopy<CLEAN_INSP_INSP_FOV$>)
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NewLWIISpecLPD = Trim(RecCopy<CLEAN_INSP_INSP_LPD$>)
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NewLWIISpecScr = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCHES$>)
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NewLWIISpecScrLen = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>)
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NewLWIISpecPits = Trim(RecCopy<CLEAN_INSP_INSP_PITS$>)
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NewLWIISpecMounds = Trim(RecCopy<CLEAN_INSP_INSP_MOUNDS$>)
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NewLWIISpecStack = Trim(RecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>)
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NewLWIISpecSpikes = Trim(RecCopy<CLEAN_INSP_INSP_SPIKES$>)
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NewLWIISpecSpots = Trim(RecCopy<CLEAN_INSP_INSP_SPOTS$>)
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NewLWIISpecBLDef = Trim(RecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>)
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NewLWIISpecFOV = Trim(RecCopy<CLEAN_INSP_INSP_FOV$>)
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// LWII Signature
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OrigLWIISig = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG$>)
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OrigLWIIDtm = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
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NewLWIISig = Trim(RecCopy<CLEAN_INSP_INSP_SIG$>)
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NewLWIIDtm = Trim(RecCopy<CLEAN_INSP_INSP_SIG_DTM$>)
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// LWIS Specification Limits
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OrigLWISRecipe = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
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OrigLWISSpecDef = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
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OrigLWISSpecHaze = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
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NewLWISRecipe = Trim(RecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>)
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NewLWISSpecDef = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>)
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NewLWISSpecHaze = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>)
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// LWIS Signature
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OrigLWISSig = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG$>)
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OrigLWISDtm = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
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NewLWISSig = Trim(RecCopy<CLEAN_INSP_SCAN_SIG$>)
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NewLWISDtm = Trim(RecCopy<CLEAN_INSP_SCAN_SIG_DTM$>)
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RDSKeyID = RecCopy<CLEAN_INSP_RDS_NO$>
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RDSNo = RDSKeyID
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FinalQA = False$
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RDSRow = Database_Services('ReadDataRow', 'RDS', RDSNo)
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WorkOrderNo = RDSRow<RDS_WO$>
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WorkOrderRow = Database_Services('ReadDataRow', 'WO_LOG', WorkOrderNo)
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ReactType = WorkOrderRow<WO_LOG_REACT_TYPE$>
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// Check to see if the Final QA signature is in place.
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If ReactType EQ 'EPP' then
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CassetteNos = RDSRow<RDS_OUT_CASS_NO$>
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OutNCRNos = RDSRow<RDS_OUT_NCR$>
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For Each CassetteNo in CassetteNos using @VM setting vPos
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OutNCRNo = OutNCRNos<0, vPos>
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// Ignore NCRd wafers
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If OutNCRNo EQ '' then
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WMOutKey = RDSRow<RDS_WO_STEP_KEY$> : '*' : CassetteNo
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WMOutRow = Database_Services('ReadDataRow', 'WM_OUT', WMOutKey)
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If WMOutRow<WM_OUT_SUP_VER_SIG$> NE '' then
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FinalQA = True$
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end
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end
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Until FinalQA
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Next CassetteNo
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end else
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If RDSRow<RDS_SUP_VER_SIG$> NE '' then
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FinalQA = True$
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end
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end
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If @USER4 EQ 'DANIEL_ST' then FinalQA = False$
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// If Final QA signature is in place, implement the control logic.
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If FinalQA EQ True$ then
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// User is attempting to modify this row. Set the FS104 error and log the event.
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Error_Services('Add', 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!')
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OrigFileError = 104 : @FM : 'FQA has already been signed. CLEAN_INSP record cannot be updated!'
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LogData = ''
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LogData<1> = LoggingDTM
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LogData<2> = @User4
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LogData<3> = RDSNo
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LogData<4> = 'CLEAN_INSP'
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LogData<5> = Name
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LogData<6> = 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!'
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Logging_Services('AppendLog', FQAobjLog, LogData, @RM, @FM)
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Status = 0
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Record = ''
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ActionFlow = ACTION_STOP$
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end else
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LogData = ''
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LogData<1> = LoggingDTM
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LogData<2> = @USER4
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LogData<3> = RDSKeyID
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LogData<4> = Name
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LogData<5> = 'Begin log trace'
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Stack = RetStack()
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Swap @FM with ' || ' in Stack
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LogData<6> = Stack
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Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
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If ( (OrigLWIISpecLPD NE '') and (NewLWIISpecLPD EQ '') ) |
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or ( (OrigLWIISpecScr NE '') and (NewLWIISpecScr EQ '') ) |
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or ( (OrigLWIISpecScrLen NE '') and (NewLWIISpecScrLen EQ '') ) |
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or ( (OrigLWIISpecPits NE '') and (NewLWIISpecPits EQ '') ) |
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or ( (OrigLWIISpecMounds NE '') and (NewLWIISpecMounds EQ '') ) |
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or ( (OrigLWIISpecStack NE '') and (NewLWIISpecStack EQ '') ) |
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or ( (OrigLWIISpecSpikes NE '') and (NewLWIISpecSpikes EQ '') ) |
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or ( (OrigLWIISpecSpots NE '') and (NewLWIISpecSpots EQ '') ) |
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or ( (OrigLWIISpecBLDef NE '') and (NewLWIISpecBLDef EQ '') ) |
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or ( (OrigLWIISpecFOV NE '') and (NewLWIISpecFOV EQ '') ) |
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or ( (OrigLWIISig NE '') and (NewLWIISig EQ '') ) |
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or ( (OrigLWIIDtm NE '') and (NewLWIIDtm EQ '') ) |
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or ( (OrigLWISRecipe NE '') and (NewLWISRecipe EQ '') ) |
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or ( (OrigLWISSpecDef NE '') and (NewLWISSpecDef EQ '') ) |
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or ( (OrigLWISSpecHaze NE '') and (NewLWISSpecHaze EQ '') ) |
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or ( (OrigLWISSig NE '') and (NewLWISSig EQ '') ) |
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or ( (OrigLWISDtm NE '') and (NewLWISDtm EQ '') ) and @User4 NE 'DANIEL_ST' then
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// User is attempting to erase data that is prohibited from being erased Set the FS104 error and block the write.
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Error_Services('Add', 'FS104:Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!')
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OrigFileError = 104 : @FM : 'Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!'
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Status = 0
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Record = ''
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ActionFlow = ACTION_STOP$
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LogData = ''
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LogData<1> = LoggingDTM
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LogData<2> = @USER4
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LogData<3> = RDSKeyID
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LogData<4> = Name
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LogData<5> = RetStack()
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Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
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end else
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LogData = ''
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LogData<1> = LoggingDTM
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LogData<2> = @USER4
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LogData<3> = RDSKeyID
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LogData<4> = Name
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LogData<5> = 'Log trace 1'
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LogData<6> = ''
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Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
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Stage = Record<CLEAN_INSP_STAGE$>
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IsEpiPro = Rds_Services('IsEpiPro', RDSKeyID)
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// This ROTR logic is only applicable to LWI clean & inspection rows.
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CleanInspKeyID = Name
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// Get the current signature required and signature entries.
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SigRequired = Record<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
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ScanSigs = Record<CLEAN_INSP_SCAN_SIG$>
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// Get the specifications
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SpecRecipes = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
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SpecDefects = Record<CLEAN_INSP_SPEC_SURF_DEFECTS$> ; // USL - Spec SOD Max
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SpecHazes = Record<CLEAN_INSP_SPEC_SURF_HAZE$>
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SpecQuantities = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$>
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// Get the new scanned values
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ScanRecipes = Record<CLEAN_INSP_SCAN_RECIPE$>
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ScanTools = Record<CLEAN_INSP_SCAN_TOOL$>
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ScanDefectsAvg = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
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ScanDefects = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
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ScanHazes = Record<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
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ScanMismatch = Record<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
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QtyMismatch = Record<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
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// Get scan results
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ScanRecipeResults = Record<CLEAN_INSP_SCAN_RESULT$>
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ScanRecipeReasons = Record<CLEAN_INSP_SCAN_RESULT_REASON$>
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// Get the original scanned values
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SpecRecipesOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>
|
|
ScanRecipesOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE$>
|
|
ScanDefectsAvgOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$>
|
|
ScanDefectsOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$>
|
|
ScanHazesOrig = OrigRecord<CLEAN_INSP_SCAN_HAZE_AVG_AVG$>
|
|
ScanMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_RECIPE_MISMATCH$>
|
|
QtyMismatchOrig = OrigRecord<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$>
|
|
// Get the original signature required and signature entries.
|
|
SigRequiredOrig = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_REQ$>
|
|
ScanSigsOrig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
|
|
// Get the individual SOD values per wafer.
|
|
SODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
|
|
SODPerWaferOrig = OrigRecord<CLEAN_INSP_SCAN_SOD_PER_WAFER$>
|
|
// Get the 100 failure scan flags, which is null by default and set/cleared by this MFS.
|
|
FailScanFlags = Record<CLEAN_INSP_FAIL_SCAN_REQ$>
|
|
FailScanReq = Sum(FailScanFlags)
|
|
If FailScanReq GT 0 then
|
|
FailScanReq = True$
|
|
end else
|
|
FailScanReq = False$
|
|
end
|
|
|
|
// Get ROTR Reactor values
|
|
ROTRReactorStatus = Record<CLEAN_INSP_ROTR_REACTOR_STATUS$>
|
|
ROTRReactorStatusReason = Record<CLEAN_INSP_ROTR_REACTOR_STATUS_REASON$>
|
|
|
|
If OrigRecord NE Record then
|
|
// Reset ROTR update flag so that future ROTR requests will re-trigger this routine (via BASE_MFS).
|
|
Record<CLEAN_INSP_ROTR_UPDATE_FLAG$> = False$
|
|
LogData<5> = 'Log trace 2'
|
|
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
|
|
// Tencor data has been updated. Update the ROTR_ACTION data column in the CLEAN_INSP record.
|
|
// Check if ScanMismatch field has been set by Metrology_Services. If so, then the user attempted to
|
|
// load run data, which containted the wrong recipe name. (i.e. it did not match the spec recipe)
|
|
If (ScanMismatch EQ '') then
|
|
If (QtyMismatch EQ '') or (IsEpiPro EQ True$) then
|
|
RDSKey = Record<CLEAN_INSP_RDS_NO$>
|
|
NumScanRecipes = DCount(ScanRecipes, @VM)
|
|
ROTRAction = ''
|
|
ROTRActionReason = ''
|
|
Begin Case
|
|
Case Stage _EQC 'LWI'
|
|
LogData<5> = 'Log trace 3'
|
|
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
|
|
CIReactor = Xlate('CLEAN_INSP', CleanInspKeyID, 'REACT_NO', 'X')
|
|
ROTREnabled = Xlate('REACTOR', CIReactor, 'ENABLE_ROTR', 'X')
|
|
ReactorBlocked = False$ ;// Assume false until proven otherwise.
|
|
// ROTR Reactor/PSN Status Health Check - Uses parameters set within the ROTR Parameters form.
|
|
// We only need to run this once per CLEAN_INSP record.
|
|
ROTRStatus = 'P' ; // Assume pass until proven otherwise.
|
|
If ( (ROTREnabled EQ True$) and (ROTRReactorStatus EQ '') ) then
|
|
ROTRReactorStatus = 'W'
|
|
ROTRReactorStatusReason = 'ROTR awaiting processing'
|
|
// Set ROTR Reactor processing status so that the WRITE_RECORD_POST event will
|
|
// post an ROTR request to calculate the reactor ROTR health for this run.
|
|
QA_Services('PostROTRRequest', RDSKey)
|
|
end
|
|
LogData<5> = 'Log trace 4'
|
|
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
|
|
// Check each scan recipe.
|
|
For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex
|
|
Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then
|
|
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
|
|
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
|
|
If (UCL EQ '') or (UCL EQ 0) then
|
|
// The UCL has not yet been retrieved from SPC or an error could have
|
|
// occurred when the last attempt to retrieve it, so try to get it now.
|
|
UCL = QA_Services('PostUCLRequest', RDSKey, SpecRecipeName)
|
|
If (UCL NE '') and (UCL NE 0) then
|
|
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
|
|
end else
|
|
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
|
|
Error_Services('Add', ErrorMessage)
|
|
end
|
|
end
|
|
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
|
|
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
|
|
SpecQty = SpecQuantities<0, SpecRecipeIndex>
|
|
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
|
|
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
|
|
ScanSig = ScanSigs<0, ScanRecipeIndex>
|
|
FailureScan = False$
|
|
// RDS < UCL (SOD Spec Avg) Check
|
|
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
|
|
WaferCount = 0
|
|
SODAvgSum = 0
|
|
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
|
|
NumFailedWafers = 0
|
|
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
|
|
If WaferSOD NE '' then
|
|
// We have SOD data for this wafer so check if it is < SOD Max
|
|
If WaferSOD LE SpecDefect then
|
|
WaferCount += 1
|
|
SODAvgSum += WaferSOD
|
|
end else
|
|
NumFailedWafers += 1
|
|
end
|
|
end
|
|
Next WaferSOD
|
|
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
|
|
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
|
|
// This is the first time we are recording the scanned SOD average value. Store this
|
|
// for determining reactor health. (ROTR Status)
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
end
|
|
If WaferCount GT 0 and SODAvgSum GT 0 then
|
|
SODAvg = SODAvgSum / WaferCount
|
|
// Update scanned SOD average to not include wafers exceeding SOD max
|
|
// Adjust value to conform to internal storage format
|
|
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
|
|
end
|
|
If (ROTREnabled EQ True$) then
|
|
// ROTR Sign-off Project
|
|
// We need to check if reactor recently underwent ROTR maintenance. If so, then
|
|
// we must also check if this RDS is one of the first two runs after maintenance.
|
|
// If this is the case, then the RDS must undergo a 100% scan.
|
|
|
|
MaintScanReq = QA_Services('GetMaintenanceScanStatus', RDSKey)
|
|
FailScanReq = (FailScanReq or MaintScanReq)
|
|
// Search for '100' in the recipe name to determine if this is a failure scan.
|
|
FailureScan = (Index(ScanRecipes, '100', 1) or Index(ScanRecipes, '25', 1))
|
|
If FailureScan GT 0 then FailureScan = True$
|
|
If (FailScanReq EQ True$) and (FailureScan EQ True$) then
|
|
// Fail scan was required and submitted, so turn off all fail scan required flags.
|
|
FailScanReq = False$
|
|
NumScans = DCount(ScanRecipes, @VM)
|
|
For ScanIndex = 1 to NumScans
|
|
FailScanFlags<0, ScanIndex> = False$
|
|
Next ScanIndex
|
|
end
|
|
end
|
|
Begin Case
|
|
Case (FailScanReq EQ True$) and (FailureScan EQ False$) and (ROTREnabled EQ True$)
|
|
If MaintScanReq EQ True$ then
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = '100% scan required due to ROTR maint.'
|
|
end else
|
|
// If ROTR maintenance flag not set, then wafer fail limit must have been met in
|
|
// an earlier Tencor run. We must set it here again due to the design of this
|
|
// MFS.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
|
|
FailScanReq = True$
|
|
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
|
|
end
|
|
Case (ROTRReactorStatus EQ 'W') and (ROTREnabled EQ True$)
|
|
// Awaiting ROTR results. Request in queue. This MFS will be triggered
|
|
// once the request is processed.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ROTRReactorStatusReason
|
|
Case (ROTRReactorStatus EQ 'F') and (ROTREnabled EQ True$)
|
|
// Check this case first as to not miss blocking the reactor if necessary.
|
|
// Block load signature on this reactor for future lots until overriden at Load button
|
|
// signature click event by supervisor, lead, or engineer.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ROTRReactorStatusReason
|
|
CIReactorRec = Database_Services('ReadDataRow', 'REACTOR', CIReactor)
|
|
CIReactorRec<REACTOR_ROTR_STATUS$> = 'F'
|
|
CIReactorRec<REACTOR_ROTR_STATUS_REASON$> = ROTRReactorStatusReason
|
|
Database_Services('WriteDataRow','REACTOR',CIReactor,CIReactorRec, True$, False$, True$)
|
|
ReactorBlocked = True$
|
|
Case (ScanDefect EQ '') OR (ScanHaze EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data is missing.'
|
|
Case (SigRequired EQ True$) AND (ScanSig EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan signature is missing.'
|
|
Case (ScanDefect GT SpecDefect)
|
|
If (ROTREnabled EQ True$) then
|
|
ROTRFailLimit = Xlate('REACTOR', CIReactor, 'ROTR_FAIL_LIMIT', 'X')
|
|
// If a Post Clean is required, then disregard the ROTRFailLimit per Tom Tillery.
|
|
CleanReq = False$
|
|
PSNo = Xlate('CLEAN_INSP', CleanInspKeyID, 'PS_NO', 'X')
|
|
PRSStages = Xlate('PROD_SPEC', PSNo, 'PRS_STAGE_KEY', 'X')
|
|
If Index(PRSStages, 'POST', 1) then
|
|
CleanReq = Xlate('PRS_STAGE', PSNo:'*POST', 'CLEAN_SIG_REQ', 'X')
|
|
end
|
|
If (NumFailedWafers LT ROTRFailLimit) or (CleanReq EQ True$) or (FailureScan EQ True$) then
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan SoD out of bounds.'
|
|
end else
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'Wafer fail limit met - 100% scan required'
|
|
FailScanReq = True$
|
|
FailScanFlags<0, ScanRecipeIndex> = FailScanReq
|
|
end
|
|
end else
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan SoD out of bounds.'
|
|
end
|
|
Case (ScanHaze GT SpecHaze)
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan Haze out of bounds.'
|
|
Case Otherwise$
|
|
// This scan data is within spec.
|
|
ROTRAction = 'P'
|
|
ROTRActionReason = 'Passed'
|
|
End Case
|
|
|
|
LogData<5> = 'Log trace 5.':SpecRecipeIndex
|
|
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
|
|
|
|
// Store this result for final disposition
|
|
ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction
|
|
ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason
|
|
end
|
|
Next ScanRecipeName
|
|
|
|
FinalROTRAction = 'P'
|
|
FinalROTRActionReason = ''
|
|
// Final disposition
|
|
// If no scan data or if any scan data has failed, then FinalROTRAction = F.
|
|
NumScanRecipes = DCount(ScanRecipes, @VM)
|
|
If NumScanRecipes EQ 0 then
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = 'Scan data is missing.'
|
|
end else
|
|
NumFailures = Count(ScanRecipeResults, 'F')
|
|
Begin Case
|
|
Case NumFailures EQ 0
|
|
// No failures so this is a pass.
|
|
FinalROTRAction = 'P'
|
|
FInalROTRActionReason = ''
|
|
Case NumFailures EQ 1
|
|
// Display the failure reason
|
|
Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then
|
|
FailureReason = ScanRecipeReasons<0, ScanRecipeIndex>
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = FailureReason
|
|
end
|
|
Case NumFailures GT 1
|
|
// Inform the user that multiple scans failed
|
|
FinalROTRAction = 'F'
|
|
FinalROTRActionReason = 'Multiple scans failed to meet criteria.'
|
|
End Case
|
|
end
|
|
ROTRAction = FinalROTRAction
|
|
ROTRActionReason = FinalROTRActionReason
|
|
|
|
Case Stage _EQC 'POST'
|
|
|
|
ROTRReactorStatus = 'P' ; // Assume pass until proven otherwise.
|
|
// Check each spec recipe. There must be at least one scan recorded for each spec recipe.
|
|
For Each SpecRecipeName in SpecRecipes using @VM setting SpecRecipeIndex
|
|
// Get UCL value from SPC for each spec recipe if they have not yet been retrieved.
|
|
UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex>
|
|
If (UCL EQ '') or (UCL EQ 0) then
|
|
// The UCL has not yet been retrieved from SPC or an error could have
|
|
// occurred when the last attempt to retrieve it, so try to get it now.
|
|
UCL = QA_Services('PostUCLRequest', RDSKey, SpecRecipeName)
|
|
If (UCL NE '') and (UCL NE 0) then
|
|
Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL
|
|
end else
|
|
ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS'
|
|
Error_Services('Add', ErrorMessage)
|
|
end
|
|
end
|
|
// Look for the last scan entry related to the current spec recipe.
|
|
RecipeFound = False$
|
|
For ScanRecipeIndex = NumScanRecipes To 1 Step -1
|
|
ScanRecipeName = ScanRecipes<0, ScanRecipeIndex>
|
|
RecipeFound = (ScanRecipeName EQ SpecRecipeName)
|
|
Until RecipeFound
|
|
Next ScanRecipeIndex
|
|
// If a scan was found, then analyze the scan data for spec requirements. If not found, this
|
|
// automatically fails.
|
|
If RecipeFound EQ True$ then
|
|
SpecDefect = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0')
|
|
SpecHaze = Oconv(SpecHazes<0, SpecRecipeIndex>, 'MD2')
|
|
ScanDefect = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0')
|
|
ScanHaze = Oconv(ScanHazes<0, ScanRecipeIndex>, 'MD3')
|
|
ScanSig = ScanSigs<0, ScanRecipeIndex>
|
|
FailureScan = False$
|
|
// RDS < UCL (SOD Spec Avg) Check
|
|
ScanSODPerWafer = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex>
|
|
WaferCount = 0
|
|
SODAvgSum = 0
|
|
SODAvg = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3')
|
|
NumFailedWafers = 0
|
|
For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex
|
|
If WaferSOD NE '' then
|
|
// We have SOD data for this wafer so check if it is < SOD Max
|
|
If WaferSOD LE SpecDefect then
|
|
WaferCount += 1
|
|
SODAvgSum += WaferSOD
|
|
end else
|
|
NumFailedWafers += 1
|
|
end
|
|
end
|
|
Next WaferSOD
|
|
Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers
|
|
If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then
|
|
// This is the first time we are recording the scanned SOD average value. Store this
|
|
// for determining reactor health. (ROTR Status)
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
end
|
|
If WaferCount GT 0 and SODAvgSum GT 0 then
|
|
SODAvg = SODAvgSum / WaferCount
|
|
// Update scanned SOD average to not include wafers exceeding SOD max
|
|
// Adjust value to conform to internal storage format
|
|
ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3')
|
|
Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg
|
|
end
|
|
Begin Case
|
|
Case (ScanDefect EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan data is missing.'
|
|
Case (ScanDefect GT SpecDefect)
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan SoD out of bounds.'
|
|
Case (SigRequired EQ True$) AND (ScanSig EQ '')
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'SurfScan signature is missing.'
|
|
Case Otherwise$
|
|
// This scan data is within spec.
|
|
ROTRAction = 'P'
|
|
End Case
|
|
end else
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = 'Scan data for ' : SpecRecipeName : ' is missing.'
|
|
end
|
|
Until ROTRAction EQ 'P' or ROTRActionReason _EQC 'SurfScan signature is missing.'
|
|
Next SpecRecipeName
|
|
|
|
End Case
|
|
end else
|
|
// Sample quantity mismatch field set. Set ROTR to failed and inform user.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = QtyMismatch
|
|
end
|
|
end else
|
|
// Recipe mismatch field set. Set ROTR to failed and inform user.
|
|
ROTRAction = 'F'
|
|
ROTRActionReason = ScanMismatch:' does not match spec.'
|
|
end
|
|
If ROTRAction EQ 'P' then
|
|
// Clear any previously set failure reasons or failure scan flags.
|
|
ROTRActionReason = ''
|
|
NumScans = DCount(ScanRecipes, @VM)
|
|
For ScanIndex = 1 to NumScans
|
|
FailScanFlags<0, ScanIndex> = False$
|
|
Next ScanIndex
|
|
end
|
|
Record<CLEAN_INSP_ROTR_ACTION$> = ROTRAction
|
|
Record<CLEAN_INSP_ROTR_ACTION_REASON$> = ROTRActionReason
|
|
Record<CLEAN_INSP_FAIL_SCAN_REQ$> = FailScanFlags
|
|
Record<CLEAN_INSP_SCAN_RESULT$> = ScanRecipeResults
|
|
Record<CLEAN_INSP_SCAN_RESULT_REASON$> = ScanRecipeReasons
|
|
|
|
SaveRecord = Record
|
|
LogData<5> = 'Log trace 6'
|
|
Logging_Services('AppendLog', ObjLog, LogData, @RM, @FM, False$)
|
|
Server = Environment_Services('GetServer')
|
|
If (Server NE 'MESSA005') AND (Server NE 'MESSA01EC') then
|
|
// The metrology data was updated by an end user on a workstation. Add this information to a special log
|
|
// for Balan.
|
|
Post_Metrology_Manual_Data_Entry_Log(@USER4,'Tencor',Record<CLEAN_INSP_RDS_NO$>:' / ':CleanInspKeyID)
|
|
end
|
|
end
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
WRITE_RECORD:
|
|
|
|
If @USER4 EQ 'DANIEL_ST' then
|
|
debug
|
|
// Sync up Insp, Clean, and SurfScan signatures with WO_MAT signature profile
|
|
Stage = {STAGE}
|
|
|
|
WOMatKey = {WO_MAT_KEY}
|
|
WOMatRec = Database_Services('ReadDataRow', 'WO_MAT', WOMatKey)
|
|
WOMatSigProf = WOMatRec<WO_MAT_SIG_PROFILE$>
|
|
WOMatSigs = WOMatRec<WO_MAT_SIGNATURE$>
|
|
WOMatSigDTMs = WOMatRec<WO_MAT_SIG_DTM$>
|
|
|
|
OrigInspSig = OrigRecord<CLEAN_INSP_INSP_SIG$>
|
|
OrigInspSigDTM = OrigRecord<CLEAN_INSP_INSP_SIG_DTM$>
|
|
InspSig = Record<CLEAN_INSP_INSP_SIG$>
|
|
InspSigDTM = Record<CLEAN_INSP_INSP_SIG_DTM$>
|
|
|
|
OrigCleanSig = OrigRecord<CLEAN_INSP_CLEAN_SIG$>
|
|
OrigCleanSigDTM = OrigRecord<CLEAN_INSP_CLEAN_SIG_DTM$>
|
|
CleanSig = Record<CLEAN_INSP_CLEAN_SIG$>
|
|
CleanSigDTM = Record<CLEAN_INSP_CLEAN_SIG_DTM$>
|
|
|
|
OrigScanSig = OrigRecord<CLEAN_INSP_SCAN_SIG$>
|
|
OrigScanSigDTM = OrigRecord<CLEAN_INSP_SCAN_SIG_DTM$>
|
|
ScanSig = Record<CLEAN_INSP_SCAN_SIG$>
|
|
ScanSigDTM = Record<CLEAN_INSP_SCAN_SIG_DTM$>
|
|
|
|
SigProfUpdate = False$
|
|
|
|
|
|
If ( (OrigInspSig NE InspSig) or (OrigInspSigDTM NE InspSigDTM) ) then
|
|
WOMatStage = '1':Stage:'I'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = InspSig
|
|
WOMatSigDTMs<0, vPos> = InspSigDTM
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If ( (OrigCleanSig NE CleanSig) or (OrigCleanSigDTM NE CleanSigDTM) ) then
|
|
WOMatStage = '1':Stage:'C'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = CleanSig
|
|
WOMatSigDTMs<0, vPos> = CleanSigDTM
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If ( (OrigScanSig NE ScanSig) or (OrigScanSigDTM NE ScanSigDTM) ) then
|
|
WOMatStage = '1':Stage:'S'
|
|
Locate WOMatStage in WOMatSigProf using @VM setting vPos then
|
|
WOMatSigs<0, vPos> = ScanSig
|
|
WOMatSigDTMs<0, vPos> = ScanSigDTM
|
|
SigProfUpdate = True$
|
|
end
|
|
end
|
|
|
|
If SigProfUpdate then
|
|
WOMatRec<WO_MAT_SIGNATURE$> = WOMatSigs
|
|
WOMatRec<WO_MAT_SIG_DTM$> = WOMatSigDTMs
|
|
Database_Services('WriteDataRow', 'WO_MAT', WOMatKey, WOMatRec, True$, False$, True$)
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
DELETE_RECORD_PRE:
|
|
return
|
|
|
|
DELETE_RECORD:
|
|
return
|
|
|
|
|
|
// ----- Internal Methods ----------------------------------------------------------------------------------------------
|
|
|
|
Initialize_System_Variables:
|
|
// Save these for restoration later
|
|
SaveDict = @DICT
|
|
SaveID = @ID
|
|
SaveRecord = @RECORD
|
|
OrigFileError = @FILE.ERROR
|
|
|
|
// Now make sure @DICT, ID, and @RECORD are populated
|
|
CurrentDictName = ''
|
|
If @DICT then
|
|
DictHandle = @DICT<1, 2>
|
|
Locate DictHandle in @TABLES(5) Using @FM Setting fPos then
|
|
CurrentDictName = Field(@TABLES(0), @FM, fPos, 1)
|
|
end
|
|
end
|
|
|
|
If CurrentDictName NE DictName then
|
|
Open DictName to @DICT else Status = 'Unable to initialize @DICT'
|
|
end
|
|
|
|
@ID = KeyID
|
|
If Record else
|
|
// Record might not have been passed in. Read the record from the database table just to make sure.
|
|
@FILE.ERROR = ''
|
|
Open TableName to hTable then
|
|
FullFSList = hTable[1, 'F' : @VM]
|
|
BFS = FullFSList[-1, 'B' : @SVM]
|
|
LastHandle = hTable[-1, 'B' : \0D\]
|
|
FileHandle = \0D\ : LastHandle[1, @VM]
|
|
|
|
Call @BFS(READO.RECORD, BFS, FileHandle, KeyID, FMC, Record, ReadOStatus)
|
|
end
|
|
end
|
|
@RECORD = Record
|
|
return
|
|
|
|
Restore_System_Variables:
|
|
Transfer SaveDict to @DICT
|
|
Transfer SaveID to @ID
|
|
Transfer SaveRecord to @RECORD
|
|
@FILE.ERROR = OrigFileError
|
|
return
|
|
|