1170 lines
55 KiB
Plaintext
1170 lines
55 KiB
Plaintext
Function PSN_Services(@Service, @Params)
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/***********************************************************************************************************************
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This program is proprietary and is not to be used by or disclosed to others, nor is it to be copied without written
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permission from SRP Computer Solutions, Inc.
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Name : PSN_Services
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Description : Handler program for all module related services.
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Notes : Service module to support environmental state issues. Environmental refers to the state of the
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operating system, which includes version, client vs. server, and path to critical systems.
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Parameters :
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Service [in] -- Name of the service being requested
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Param1-10 [in/out] -- Additional request parameter holders
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Response [out] -- Response to be sent back to the Controller (MCP) or requesting procedure
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Metadata :
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History : (Date, Initials, Notes)
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11/30/20 djs Original programmer.
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***********************************************************************************************************************/
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#pragma precomp SRP_PreCompiler
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$insert LOGICAL
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$insert SERVICE_SETUP
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$insert PROD_SPEC_EQUATES
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$insert PRS_STAGE_EQUATES
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$Insert WO_MAT_QA_EQUATES
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$Insert QA_MET_EQUATES
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$Insert RDS_TEST_EQUATES
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$Insert RDS_TEST_PROP_EQUATES
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$Insert PRS_LAYER_EQU
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Options SpecTypes = 'CLEAN', 'SURFSCAN', 'THICK', 'THICKA', 'RES', 'SRES', 'CRES', 'CONC'
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Declare function Database_Services, Psn_Services, obj_Prod_Spec, Error_Services, SRP_JSON, Cust_Epi_Part_Services
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Declare function Prod_Ver_Services, PRS_Stage_Services, SRP_Array
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Declare subroutine Database_Services, Psn_Services, Error_Services, SRP_JSON, Extract_Si_Keys
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GoToService else
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Error_Services('Add', Service : ' is not a valid service request within the ' : ServiceModule : ' services module.')
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end
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Return Response OR ''
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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// Service Parameter Options
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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Options BOOLEAN = True$, False$
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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// Services
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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//----------------------------------------------------------------------------------------------------------------------
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// InitializeCritParams
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//
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//----------------------------------------------------------------------------------------------------------------------
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Service InitializeCritParams(PSNo)
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PSRec = Database_Services('ReadDataRow', 'PROD_SPEC', PSNo)
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PSRec<PROD_SPEC_CRITICAL_WARP_MAX$> = 100
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PSRec<PROD_SPEC_CRITICAL_BOW_MIN$> = -40
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PSRec<PROD_SPEC_CRITICAL_BOW_MAX$> = 50
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Database_Services('WriteDataRow', 'PROD_SPEC', PSNo, PSRec, True$, False$, True$)
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end service
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Service GetRecipes(PSNo)
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ErrorMsg = ''
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Recipes = ''
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If PSNo NE '' then
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If RowExists('PROD_SPEC', PSNo) then
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PropKeys = ''
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Extract_Si_Keys('PRS_PROP', 'PS_NO', PSNo, PropKeys)
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Recipes = Xlate('PRS_PROP', PropKeys, 'MET_RECIPE', 'X')
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PRSStageKeys = ''
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Extract_Si_Keys('PRS_STAGE', 'PS_NO', PSNo, PRSStageKeys)
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Recipes<0, -1> = Xlate('PRS_STAGE', PRSStageKeys, 'MET_RECIPE', 'X')
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Recipes<0, -1> = Xlate('PRS_STAGE', PRSStageKeys, 'SURFSCAN_RECIPE', 'X')
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Recipes<0, -1> = @VM : Xlate('PRS_STAGE', PRSStageKeys, 'CLEAN_RECIPE', 'X')
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @VM)
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end else
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ErrorMsg = 'Error in ':Service:' service. PROD_SPEC record "':PSNo:'" does not exist.'
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end
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end else
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ErrorMsg = 'Error in ':Service:' service. Null PSNo passed into service.'
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end
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If ErrorMsg EQ '' then
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Response = Recipes
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end else
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Error_Services('Add', ErrorMsg)
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end
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end service
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Service GetAllMetrologyRecipes(PSNo, GetSurfscan, GetClean, GetRes, GetThick)
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Recipes = ''
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If GetSurfscan EQ '' then GetSurfscan = True$
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If GetClean EQ '' then GetClean = True$
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If GetRes EQ '' then GetRes = True$
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If GetThick EQ '' then GetThick = True$
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If GetSurfscan then Recipes := PSN_Services('GetSurfscanRecipes', PSNo) : @FM
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If GetClean then Recipes := PSN_Services('GetCleanRecipes', PSNo) :@FM
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If GetRes then Recipes := PSN_Services('GetResRecipes', PSNo) :@FM
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If GetThick then Recipes := PSN_Services('GetThicknessRecipes', PSNo)
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @FM)
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Response = Recipes
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end service
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Service GetSurfscanRecipes(PSNo)
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Recipes = ''
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If PSNo NE '' then
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If RowExists('PROD_SPEC', PSNo) then
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PropKeys = ''
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Extract_Si_Keys('PRS_PROP', 'PS_NO', PSNo, PropKeys)
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PRSStageKeys = ''
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Extract_Si_Keys('PRS_STAGE', 'PS_NO', PSNo, PRSStageKeys)
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for each PRSStageKey in PRSStageKeys using @VM setting pPos
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Stage = Xlate('PRS_STAGE', PRSStageKey, 'STAGE', 'X')
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TencorRecipes = Xlate('PRS_STAGE', PRSStageKey, 'SURFSCAN_RECIPE', 'X')
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for each Recipe in TencorRecipes using @VM
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ToolClass = 'TENCOR'
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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Next TencorRecipe
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Next PRSStageKey
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @FM)
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end
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end
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Response = Recipes
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end service
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Service GetCleanRecipes(PSNo)
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Recipes = ''
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If PSNo NE '' then
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If RowExists('PROD_SPEC', PSNo) then
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PropKeys = ''
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Extract_Si_Keys('PRS_PROP', 'PS_NO', PSNo, PropKeys)
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PRSStageKeys = ''
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Extract_Si_Keys('PRS_STAGE', 'PS_NO', PSNo, PRSStageKeys)
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for each PRSStageKey in PRSStageKeys using @VM setting pPos
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Stage = Xlate('PRS_STAGE', PRSStageKey, 'STAGE', 'X')
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CleanRecipes = Xlate('PRS_STAGE', PRSStageKey, 'CLEAN_RECIPE', 'X')
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for each Recipe in CleanRecipes using @VM
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ToolClass = 'CLEAN'
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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Next TencorRecipe
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Next PRSStageKey
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @FM)
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end
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end
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Response = Recipes
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end service
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Service GetThicknessRecipes(PSNo)
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ErrorMsg = ''
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Recipes = ''
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If PSNo NE '' then
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If RowExists('PROD_SPEC', PSNo) then
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//First get QA Recipes
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PropKeys = ''
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Extract_Si_Keys('PRS_PROP', 'PS_NO', PSNo, PropKeys)
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Recipes = ''
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PRSStageKeys = ''
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Extract_Si_Keys('PRS_STAGE', 'PS_NO', PSNo, PRSStageKeys)
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for each PRSStageKey in PRSStageKeys using @VM setting pPos
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Stage = Xlate('PRS_STAGE', PRSStageKey, 'STAGE', 'X')
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PRSStageRecipes = Xlate('PRS_STAGE', PRSStageKey, 'MET_RECIPE', 'X')
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for each PRSStageRecipe in PRSStageRecipes using @VM setting rPos
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PropType = Xlate('PRS_STAGE', PRSStageKey, 'MET_PROP', 'X')<1, rPos>
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If PropType EQ 'THICK' OR PropType EQ 'THICKA' then
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Recipe = PRSStageRecipe
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ToolClass = 'FTIR'
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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end
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Next PRSStageRecipe
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Next PRSStageKey
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//Next get Rathole recipes
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SpecEpiData = XLATE('PROD_SPEC', PSNo, 'SPEC_EPI', 'X')
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swap @VM with @FM in SpecEpiData
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swap '~' with @VM in SpecEpiData
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ThicknessData = SpecEpiData<13>
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ToolClass = ThicknessData<1, 1>
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Recipe = ThicknessData<1, 3>
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Stage = 'RDS_TEST'
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If ToolClass EQ 'FTIR' OR ToolClass EQ 'ADE' then
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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end
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// Remove any duplicate entries
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @FM)
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end else
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ErrorMsg = 'Error in ':Service:' service. PROD_SPEC record "':PSNo:'" does not exist.'
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end
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end else
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ErrorMsg = 'Error in ':Service:' service. Null PSNo passed into service.'
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end
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If ErrorMsg EQ '' then
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Response = Recipes
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end else
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Error_Services('Add', ErrorMsg)
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end
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end service
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Service GetResRecipes(PSNo)
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ErrorMsg = ''
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Recipes = ''
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If PSNo NE '' then
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If RowExists('PROD_SPEC', PSNo) then
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//First get QA Recipes
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PropKeys = ''
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Extract_Si_Keys('PRS_PROP', 'PS_NO', PSNo, PropKeys)
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Recipes = ''
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PRSStageKeys = ''
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Extract_Si_Keys('PRS_STAGE', 'PS_NO', PSNo, PRSStageKeys)
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for each PRSStageKey in PRSStageKeys using @VM setting pPos
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Stage = Xlate('PRS_STAGE', PRSStageKey, 'STAGE', 'X')
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PRSStageRecipes = Xlate('PRS_STAGE', PRSStageKey, 'MET_RECIPE', 'X')
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for each PRSStageRecipe in PRSStageRecipes using @VM setting rPos
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PropType = Xlate('PRS_STAGE', PRSStageKey, 'MET_PROP', 'X')<1, rPos>
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ToolClass = Xlate('PRS_STAGE', PRSStageKey, 'MET_TOOL_CLASS', 'X')<1, rPos>
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If PropType EQ 'RES' OR PropType EQ 'SRES' OR PropType EQ 'CRES' OR PropType EQ 'CONC' then
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Recipe = PRSStageRecipe
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ToolClass = ToolClass
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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end
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Next PRSStageRecipe
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Next PRSStageKey
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//Next get Rathole recipes
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Stage = 'RDS_TEST'
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SpecEpiData = XLATE('PROD_SPEC', PSNo, 'SPEC_EPI', 'X')
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swap @VM with @FM in SpecEpiData
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swap '~' with @VM in SpecEpiData
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ResData1 = SpecEpiData<19>
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If ResData1 NE '' then
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ToolClass = ResData1<1, 1>
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Recipe = ResData1<1, 3>
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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end
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ResData2 = SpecEpiData<14>
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If ResData2 NE '' then
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ToolClass = ResData2<1, 1>
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Recipe = ResData2<1, 3>
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Recipes<-1> = ToolClass : @VM : Recipe : @VM : Stage
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end
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// Remove any duplicate entries
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Recipes = SRP_Array('Clean', Recipes, 'TrimAndMakeUnique', @FM)
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end else
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ErrorMsg = 'Error in ':Service:' service. PROD_SPEC record "':PSNo:'" does not exist.'
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end
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end else
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ErrorMsg = 'Error in ':Service:' service. Null PSNo passed into service.'
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end
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If ErrorMsg EQ '' then
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Response = Recipes
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end else
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Error_Services('Add', ErrorMsg)
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end
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end service
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Service CheckPSNStages(PSNo, Stage)
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Begin Case
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Case Stage Eq 'PRE'
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CleansCheck = Psn_Services('CheckCleansParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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VisualCheck = Psn_Services('CheckVisualParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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Case Stage Eq 'LOAD'
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InstructionsCheck = Psn_Services('CheckInstructionParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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Case Stage Eq 'FWI'
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VisualCheck = Psn_Services('CheckVisualParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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Case Stage Eq 'LWI'
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VisualCheck = Psn_Services('CheckVisualParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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SurfaceCheck = Psn_Services('CheckSurfaceParms',PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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Case Stage Eq 'POST'
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CleansCheck = Psn_Services('CheckCleansParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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SurfaceCheck = Psn_Services('CheckSurfaceParms',PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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Case Stage Eq 'QA' OR 'UNLOAD'
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QAMetCheck = Psn_Services('CheckQAMetParms', PSNo, Stage)
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IF Error_Services('GetMessage') NE '' then
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Return
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end
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End Case
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GoSub CheckAdHoc
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Return
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end service
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Service CheckCleansParms(PSNo, Stage)
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Response = 1
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StageRecKey = PSNo: '*' : Stage
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StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
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IF StageRec<PRS_STAGE_CLEAN_SIG_REQ$> EQ 1 then
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IF StageRec<PRS_STAGE_CLEAN_TOOL$> EQ '' then
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FailReason = 'Clean Tool not selected for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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If StageRec<PRS_STAGE_CLEAN_RECIPE$> EQ '' then
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FailReason = 'Clean Recipe not selected for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end else
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IF Stage EQ 'PRE' OR Stage EQ 'POST' then
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FailReason = 'Cleans Signature Required for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end
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return
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end service
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Service CheckVisualParms(PSNo, Stage)
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Response = 1
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StageRecKey = PSNo: '*' : Stage
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StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
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If StageRec<PRS_STAGE_INSP_SIG_REQ$> EQ 1 then
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IF StageRec<PRS_STAGE_MICROSCOPE$> EQ 1 then
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IF StageRec<PRS_STAGE_LPD$> EQ '' then
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FailReason = 'Frontside LPD limits must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side Scratch Count
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IF StageRec<PRS_STAGE_SCRATCHES$> EQ '' then
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FailReason = 'Frontside Scratch Count must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side Scratch Length
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IF StageRec<PRS_STAGE_SCRATCH_LEN$> EQ '' then
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FailReason = 'Frontside Scratch Length must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side Pits
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IF StageRec<PRS_STAGE_PITS$> EQ '' then
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FailReason = 'Frontside Pits count must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side Mounds
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IF StageRec<PRS_STAGE_MOUNDS$> EQ '' then
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FailReason = 'Frontside Mounds count must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side Spots
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IF StageRec<PRS_STAGE_SPOTS$> EQ '' then
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FailReason = 'Frontside Spots count must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side FOV
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IF StageRec<PRS_STAGE_FOV$> EQ '' then
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Response = 'Frontside FOV must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Front Side BL Defects
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IF StageRec<PRS_STAGE_BL_DEFECTS$> EQ '' then
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FailReason = 'Frontside BL Defects must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end else
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IF Stage EQ 'PRE' OR Stage EQ 'FWI' OR Stage EQ 'LWI' then
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FailReason = 'Microscope Inspection Required for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end
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IF StageRec<PRS_STAGE_BRIGHTLIGHT$> EQ 1 then
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//Back Side Scratches
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IF StageRec<PRS_STAGE_BSIDE_SCRATCHES$> EQ '' then
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FailReason = 'Backside Scratch Count must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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//Back Side Scratch Length
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IF StageRec<PRS_STAGE_BSIDE_SCRATCH_LEN$> EQ '' then
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FailReason = 'Backside Scratch Length must be set for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end else
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IF Stage EQ 'PRE' OR Stage EQ 'FWI' OR Stage EQ 'LWI' then
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FailReason = 'Brightlight Inspection Required for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end
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end else
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IF Stage EQ 'PRE' OR Stage EQ 'FWI' OR Stage EQ 'LWI' then
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FailReason = 'Visual Inspection Signature Required for ' : Stage : ' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end
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return
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end service
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Service CheckInstructionParms(PSNo, Stage)
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Response = 1
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StageRecKey = PSNo: '*' : Stage
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StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
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//Currently the only place where instruction would be required is the LOAD stage
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IF Stage EQ 'LOAD' then
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IF StageRec<PRS_STAGE_INST$> EQ '' then
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FailReason = 'Instructions Missing for ':Stage:' stage.'
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Error_Services('Add', FailReason)
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return
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end
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end
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Return
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end service
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Service CheckSurfaceParms(PSNo, Stage)
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FailReason = 1
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StageRecKey = PSNo: '*' : Stage
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StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
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IF StageRec<PRS_STAGE_SURFSCAN_SIG_REQ$> EQ 1 then
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SSRecipes = StageRec<PRS_STAGE_SURFSCAN_RECIPE$>
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IF SSRecipes NE '' then
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For RecipePos = 1 To DCOUNT(SSRecipes, @VM)
|
|
IF StageRec<PRS_STAGE_SURF_DEFECTS$, RecipePos> EQ '' then
|
|
FailReason = 'SurfScan Defect Count must be set for ':Stage:' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
//Surf Haze
|
|
IF StageRec<PRS_STAGE_SURF_HAZE$, RecipePos> EQ '' then
|
|
FailReason = 'SurfScan Haze must be set for ':Stage:' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
//Surf sample qty
|
|
IF StageRec<PRS_STAGE_SS_SAMP_QTY$, RecipePos> EQ '' then
|
|
FailReason = 'SurfScan Cassette Sample Size must be set for ':Stage:' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
Next RecipePos
|
|
|
|
end else
|
|
FailReason = 'No SurfScan Recipe has been set for ' : Stage : 'stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
|
|
end else
|
|
IF Stage EQ 'POST' OR Stage EQ 'LWI' then
|
|
FailReason = 'SurfScan signature must be set to "Required" for ' : Stage : 'stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
end service
|
|
|
|
|
|
Service CheckQAMetParms(PSNo, Stage)
|
|
|
|
FailReason = 1
|
|
StageRecKey = PSNo: '*' : Stage
|
|
StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
|
|
QAMetTests = StageRec<PRS_STAGE_MET_TEST$>
|
|
IF QAMetTests NE '' then
|
|
For MetTest = 1 to DCount(QAMetTests, @VM)
|
|
IF StageRec<PRS_STAGE_MET_TOOL_CLASS$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Tool class must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_RECIPE$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Tool Recipe must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_RECIPE_PATTERN$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Tool Recipe Pattern must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_MIN$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Minimum must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_MAX$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Maximum must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_SLOT$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology slot must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_WFR_QTY$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Wafer Quantity must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_INTERVAL$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Wafer Interval must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_START$,MetTest> EQ '' then
|
|
FailReason = 'QA Metrology Start must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
IF StageRec<PRS_STAGE_MET_PHASE_MIN$,MetTest> EQ '' AND StageRec<PRS_STAGE_MET_TEST$, MetTest> EQ 'CRES' then
|
|
FailReason = 'QA Metrology Phase min must be set for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
Next MetTest
|
|
end else
|
|
IF Stage EQ 'QA' OR Stage EQ 'UNLOAD' then
|
|
FailReason = 'No Metrology Tests exist for ' : Stage : ' stage.'
|
|
Error_Services('Add', FailReason)
|
|
return
|
|
end
|
|
end
|
|
return
|
|
|
|
end service
|
|
|
|
|
|
//----------------------------------------------------------------------------------------------------------------------
|
|
// UpdateQAMetrologyLimits
|
|
//
|
|
// Purpose: Update the specification limits for a particular QA metrology test.
|
|
//----------------------------------------------------------------------------------------------------------------------
|
|
Service UpdateQAMetrologyLimits(WOMatQAKey, QAMetStage, QAMetProfile, QAMetSlot)
|
|
|
|
TestFound = False$
|
|
ErrorMsg = ''
|
|
If ( (WOMatQAKey NE '') and (QAMetStage NE '') and (QAMetProfile NE '') and (QAMetSlot NE '') ) then
|
|
// Ensure QAMetProfile is prepended with a '1'.
|
|
If QAMetProfile[1, 1] NE 1 then QAMetProfile = 1:QAMetProfile
|
|
WOStepKey = Field(WOMatQAKey, '*', 1) : '*1'
|
|
PSNo = Xlate('WO_STEP', WOStepKey, 'PROD_SPEC_ID', 'X')
|
|
If PSNo NE '' then
|
|
PSRec = Database_Services('ReadDataRow', 'PROD_SPEC', PSNo)
|
|
If Error_Services('NoError') then
|
|
// Retrieve new QA metrology data from PSN.
|
|
SpecQAMetData = obj_Prod_Spec('GetQAMet',PSNo:@RM:PSRec)
|
|
If SpecQAMetData NE '' then
|
|
WOMatQARec = Database_Services('ReadDataRow', 'WO_MAT_QA', WOMatQAKey)
|
|
If Error_Services('NoError') then
|
|
RecQAMetStages = WOMatQARec<WO_MAT_QA_STAGE$>
|
|
RecQAMetTests = WOMatQARec<WO_MAT_QA_PROFILE$>
|
|
RecQAMetSlots = WOMatQARec<WO_MAT_QA_SLOT$>
|
|
// Locate the desired stage, profile/test, and slot in the record.
|
|
RecPos = ''
|
|
For each RecQAMetStage in RecQAMetStages using @VM setting vPos
|
|
RecQAMetTest = RecQAMetTests<0, vPos>
|
|
RecQAMetSlot = RecQAMetSlots<0, vPos>
|
|
If ( (RecQAMetStage EQ QAMetStage) and (RecQAMetTest EQ QAMetProfile) and (RecQAMetSlot EQ QAMetSlot) ) then
|
|
// Found the position in the record
|
|
RecPos = vPos
|
|
end
|
|
Until RecPos
|
|
Next RecQAMetStage
|
|
|
|
If RecPos then
|
|
// Locate the desired stage, profile/test, and slot in the spec QAMetData structure.
|
|
SpecQAMetStages = SpecQAMetData<COL$QA_MET_STAGE>
|
|
SpecQAMetTests = SpecQAMetData<COL$QA_MET_TEST>
|
|
SpecQAMetSlots = SpecQAMetData<COL$QA_MET_SLOT>
|
|
|
|
For each SpecQAMetStage in SpecQAMetStages using @VM setting vPos
|
|
SpecQAMetTest = SpecQAMetTests<0, vPos>
|
|
SpecQAMetSlot = SpecQAMetSlots<0, vPos>
|
|
SpecQAMetProfile = 1:SpecQAMetTest
|
|
SpecPos = ''
|
|
If ( (SpecQAMetStage EQ QAMetStage) and (SpecQAMetProfile EQ QAMetProfile) and (SpecQAMetSlot EQ QAMetSlot) ) then
|
|
// Found the posotion in the spec QAMetData structure
|
|
SpecPos = vPos
|
|
end
|
|
Until SpecPos
|
|
Next SpecQAMetStage
|
|
|
|
If SpecPos then
|
|
// Update the limits and recipe
|
|
WOMatQARec<WO_MAT_QA_RECIPE$, RecPos> = SpecQAMetData<COL$QA_MET_RECIPE, SpecPos>
|
|
WOMatQARec<WO_MAT_QA_RECIPE_PATTERN$, RecPos> = SpecQAMetData<COL$QA_MET_RECIPE_PATTERN, SpecPos>
|
|
WOMatQARec<WO_MAT_QA_MIN$, RecPos> = SpecQAMetData<COL$QA_MET_MIN, SpecPos>
|
|
WOMatQARec<WO_MAT_QA_MAX$, RecPos> = SpecQAMetData<COL$QA_MET_MAX, SpecPos>
|
|
WOMatQARec<WO_MAT_QA_REACT_SCHED$, RecPos> = SpecQAMetData<COL$QA_MET_REACT_SCHED, SpecPos>
|
|
WOMatQARec<WO_MAT_QA_PHASE_MIN$, RecPos> = SpecQAMetData<COL$QA_MET_PHASE_MIN, SpecPos>
|
|
Database_Services('WriteDataRow', 'WO_MAT_QA', WOMatQAKey, WOMatQARec, True$, True$, True$)
|
|
If Error_Services('HasError') then ErrorMsg = Error_Services('GetMessage')
|
|
end else
|
|
ErrorMsg = 'Failed to find desired stage, test, and slot in spec QAMetData structure.'
|
|
end
|
|
end else
|
|
ErrorMsg = 'Failed to find desired stage, test, and slot in WO_MAT_QA record.'
|
|
end
|
|
end else
|
|
// Error reading WO_MAT_QA record
|
|
ErrorMsg = Error_Services('GetMessage')
|
|
end
|
|
end else
|
|
ErrorMsg = 'Error retrieving QAMetData from obj_Prod_Spec.'
|
|
end
|
|
end else
|
|
// Error reading PROD_SPEC record
|
|
ErrorMsg = Error_Services('GetMessage')
|
|
end
|
|
end else
|
|
ErrorMsg = 'Failed to find PSNo in WO_STEP record ':WOStepKey:'.'
|
|
end
|
|
end else
|
|
ErrorMsg = 'Null WOMatQAKey, QAMetStage, QAMetProfile, or QAMetSlot passed into service.'
|
|
end
|
|
|
|
If ErrorMsg EQ '' then
|
|
Response = True$
|
|
end else
|
|
Response = False$
|
|
Error_Services('Add', 'Error in ':Service:' service. ':ErrorMsg)
|
|
end
|
|
|
|
End Service
|
|
|
|
|
|
Service UpdateAllQAMetrologyLimits(WOMatQAKey)
|
|
|
|
ErrorMsg = ''
|
|
If WOMatQAKey NE '' then
|
|
WOMatQARec = Database_Services('ReadDataRow', 'WO_MAT_QA', WOMatQAKey)
|
|
RecStages = WOMatQARec<WO_MAT_QA_STAGE$>
|
|
RecProfiles = WOMatQARec<WO_MAT_QA_PROFILE$>
|
|
RecSlots = WOMatQARec<WO_MAT_QA_SLOT$>
|
|
For each RecStage in RecStages using @VM setting vPos
|
|
RecProfile = RecProfiles<0, vPos>
|
|
RecSlot = RecSlots<0, vPos>
|
|
PSN_Services('UpdateQAMetrologyLimits', WOMatQAKey, RecStage, RecProfile, RecSlot)
|
|
If Error_Services('HasError') then ErrorMsg = Error_Services('GetMessage')
|
|
Next RecStage
|
|
end else
|
|
ErrorMsg = 'Null WOMatQAKey passed into service.'
|
|
end
|
|
|
|
If ErrorMsg EQ '' then
|
|
Response = True$
|
|
end else
|
|
Response = False$
|
|
Error_Services('Add', 'Error in ':Service:' service. ':ErrorMsg)
|
|
end
|
|
|
|
end service
|
|
|
|
|
|
Service UpdateAllQAMetrologyRecord(WOMatQAKey, stageToUpdate)
|
|
|
|
ErrorMsg = ''
|
|
If WOMatQAKey NE '' then
|
|
WOMatQARec = Database_Services('ReadDataRow', 'WO_MAT_QA', WOMatQAKey)
|
|
WOStepKey = Field(WOMatQAKey, '*', 1) : '*1'
|
|
PSNo = Xlate('WO_STEP', WOStepKey, 'PROD_SPEC_ID', 'X')
|
|
PSRec = Database_Services('ReadDataRow', 'PROD_SPEC', PSNo)
|
|
CurrTestCount = DCOUNT(WOMatQARec<1>, @VM)
|
|
SpecQAMetData = obj_Prod_Spec('GetQAMet',PSNo:@RM:PSRec)
|
|
|
|
for each SpecTest in SpecQAMetData<1> using @VM setting vPos then
|
|
|
|
If (WOMatQARec<1,vPos> EQ 'QA' OR WOMatQARec<1,vPos> EQ '') then
|
|
WOMatQARec<1,vPos> = SpecQAMetData<1,vPos>
|
|
if SpecQAMetData<2,vPos> EQ 'ADE' then SpecQAMetData<2,vPos> = '1ADE'
|
|
if SpecQAMetData<2,vPos> EQ 'THICK_ONLY' then SpecQAMetData<2,vPos> = '1THICK_ONLY'
|
|
if SpecQAMetData<2,vPos> EQ 'CRES' then SpecQAMetData<2,vPos> = '1CRES'
|
|
WOMatQARec<2,vPos> = SpecQAMetData<2,vPos>
|
|
WOMatQARec<3,vPos> = SpecQAMetData<3,vPos>
|
|
WOMatQARec<4,vPos> = SpecQAMetData<4,vPos>
|
|
WOMatQARec<5,vPos> = SpecQAMetData<5,vPos>
|
|
WOMatQARec<6,vPos> = SpecQAMetData<6,vPos>
|
|
WOMatQARec<7,vPos> = SpecQAMetData<7,vPos>
|
|
WOMatQARec<8,vPos> = SpecQAMetData<8,vPos>
|
|
WOMatQARec<9,vPos> = SpecQAMetData<9,vPos>
|
|
WOMatQARec<16,vPos> = SpecQAMetData<14,vPos>
|
|
WOMatQARec<26,vPos> = 0
|
|
end
|
|
|
|
Next SpecTest
|
|
|
|
Database_Services('WriteDataRow', 'WO_MAT_QA', WOMatQAKey, WOMatQARec, True$, True$, True$)
|
|
end else
|
|
ErrorMsg = 'Null WOMatQAKey passed into service.'
|
|
end
|
|
|
|
If ErrorMsg EQ '' then
|
|
Response = True$
|
|
end else
|
|
Response = False$
|
|
Error_Services('Add', 'Error in ':Service:' service. ':ErrorMsg)
|
|
end
|
|
|
|
end service
|
|
|
|
|
|
Service UpdateRDSMetrologyLimits(RDSNo)
|
|
|
|
If RDSNo NE '' then
|
|
If RowExists('RDS', RDSNo) then
|
|
PSNo = Xlate('RDS', RDSNo, 'PROD_SPEC_ID', 'X')
|
|
If PSNo NE '' then
|
|
RDSTestKeys = Xlate('RDS', RDSNo, 'RDS_TEST_KEYS', 'X')
|
|
If RDSTestKeys NE '' then
|
|
For each RDSTestKey in RDSTestKeys using @VM setting vPos
|
|
// Code below adapted from obj_RDS_Test('Create')
|
|
RDSTestRec = Database_Services('ReadDataRow', 'RDS_TEST', RDSTestKey)
|
|
If Error_Services('NoError') then
|
|
LayerSet = RDSTestRec<RDS_TEST_LS_ID$>
|
|
Zone = RDSTestRec<RDS_TEST_ZONE$>
|
|
LayerSpecs = obj_Prod_Spec('GetLayerProp',PSNo:@RM:LayerSet:@RM:1) ;* Last parameter specifies no output conversion on return data
|
|
|
|
LayerSpecs = FIELD(LayerSpecs,@FM,2,99) ;* Returns with the layer set ID in the first field of each line
|
|
|
|
IF Not(Get_Status(errCode)) then
|
|
|
|
WaferSize = XLATE( 'PROD_SPEC', PSNo, 'SUB_WAFER_SIZE', 'X' )
|
|
SubOrientation = XLATE('PROD_SPEC',PSNo,'SUB_ORIENTATION','X')
|
|
ResUnits = LayerSpecs<PRS_LAYER_RES_UNITS$>
|
|
|
|
ReactorType = XLATE('PROD_SPEC',PSNo,PROD_SPEC_REACTOR_TYPE$,'X')
|
|
ThickFilmMet = XLATE('PROD_SPEC',PSNo,PROD_SPEC_THICKFILM_MET$,'X') ;* Added 1/16/2009 JCH
|
|
|
|
RDSTestRec<RDS_TEST_RDS_NO$> = RDSNo
|
|
RDSTestRec<RDS_TEST_LS_ID$> = LayerSet
|
|
RDSTestRec<RDS_TEST_ZONE$> = Zone
|
|
RDSTestRec<RDS_TEST_WAFER_SIZE$> = WaferSize
|
|
RDSTestRec<RDS_TEST_SUB_ORIENTATION$> = SubOrientation
|
|
|
|
RDSTestRec<RDS_TEST_SPEC_DOPANT$> = LayerSpecs<PRS_LAYER_DOPANT$>
|
|
RDSTestRec<RDS_TEST_SPEC_RECIPE$> = LayerSpecs<PRS_LAYER_RECIPE$>
|
|
RDSTestRec<RDS_TEST_SPEC_RECIPE_NAME$> = LayerSpecs<PRS_LAYER_RECIPE_NAME$>
|
|
|
|
RDSTestRec<RDS_TEST_SPEC_THICK_MIN$> = LayerSpecs<PRS_LAYER_THICK_MIN$>
|
|
RDSTestRec<RDS_TEST_SPEC_THICK_TARGET$> = LayerSpecs<PRS_LAYER_THICK_TARGET$>
|
|
RDSTestRec<RDS_TEST_SPEC_THICK_MAX$> = LayerSpecs<PRS_LAYER_THICK_MAX$>
|
|
RDSTestRec<RDS_TEST_SPEC_THICK_UNITS$> = LayerSpecs<PRS_LAYER_THICK_UNITS$>
|
|
RDSTestRec<RDS_TEST_SPEC_RES_MIN$> = LayerSpecs<PRS_LAYER_RES_MIN$>
|
|
RDSTestRec<RDS_TEST_SPEC_RES_TARGET$> = LayerSpecs<PRS_LAYER_RES_TARGET$>
|
|
RDSTestRec<RDS_TEST_SPEC_RES_MAX$> = LayerSpecs<PRS_LAYER_RES_MAX$>
|
|
RDSTestRec<RDS_TEST_SPEC_RES_UNITS$> = LayerSpecs<PRS_LAYER_RES_UNITS$>
|
|
RDSTestRec<RDS_TEST_SPEC_CON_MIN$> = LayerSpecs<PRS_LAYER_CONC_MIN$>
|
|
RDSTestRec<RDS_TEST_SPEC_CON_TARGET$> = LayerSpecs<PRS_LAYER_CONC_TARGET$>
|
|
RDSTestRec<RDS_TEST_SPEC_CON_MAX$> = LayerSpecs<PRS_LAYER_CONC_MAX$>
|
|
RDSTestRec<RDS_TEST_SPEC_CON_UNITS$> = LayerSpecs<PRS_LAYER_CONC_UNITS$>
|
|
RDSTestRec<RDS_TEST_SPEC_STRESS_MIN$> = LayerSpecs<PRS_LAYER_STRESS_MIN$>
|
|
RDSTestRec<RDS_TEST_SPEC_STRESS_MAX$> = LayerSpecs<PRS_LAYER_STRESS_MAX$>
|
|
RDSTestRec<RDS_TEST_SPEC_TRANS$> = LayerSpecs<PRS_LAYER_TRANS_SPEC$>
|
|
|
|
RDSTestRec<RDS_TEST_SPEC_CRES_MIN$> = LayerSpecs<PRS_LAYER_CRES_MIN$>
|
|
RDSTestRec<RDS_TEST_SPEC_CRES_TARGET$> = LayerSpecs<PRS_LAYER_CRES_TARGET$>
|
|
RDSTestRec<RDS_TEST_SPEC_CRES_MAX$> = LayerSpecs<PRS_LAYER_CRES_MAX$>
|
|
RDSTestRec<RDS_TEST_SPEC_CRES_UNITS$> = LayerSpecs<PRS_LAYER_CRES_UNITS$>
|
|
|
|
|
|
FOR A = 11 TO 19
|
|
RDSTestRec<A> = LayerSpecs<PRS_LAYER_THICK_MEASUREMENT$,A-10>
|
|
NEXT A
|
|
|
|
FOR A = 24 TO 32
|
|
RDSTestRec<A> = LayerSpecs<PRS_LAYER_RES_MEASUREMENT$,A-23>
|
|
NEXT A
|
|
|
|
FOR A = 37 TO 45
|
|
RDSTestRec<A> = LayerSpecs<PRS_LAYER_CONC_MEASUREMENT$,A-36>
|
|
NEXT A
|
|
|
|
FOR A = 50 to 58
|
|
RDSTestRec<A> = LayerSpecs<PRS_LAYER_STRESS_MEASUREMENT$,A-49>
|
|
NEXT A
|
|
|
|
FOR A = 121 TO 129
|
|
RDSTestRec<A> = LayerSpecs<PRS_LAYER_CRES_MEASUREMENT$,A-120>
|
|
NEXT A
|
|
|
|
RDSTestRec<RDS_TEST_SPEC_THICK_MPATTERN$> = LayerSpecs<PRS_LAYER_THICK_MEASUREMENT$,PRS_MPATTERN$>
|
|
RDSTestRec<RDS_TEST_SPEC_RES_MPATTERN$> = LayerSpecs<PRS_LAYER_RES_MEASUREMENT$,PRS_MPATTERN$>
|
|
RDSTestRec<RDS_TEST_SPEC_CON_MPATTERN$> = LayerSpecs<PRS_LAYER_CONC_MEASUREMENT$,PRS_MPATTERN$>
|
|
RDSTestRec<RDS_TEST_SPEC_STRESS_MPATTERN$> = LayerSpecs<PRS_LAYER_STRESS_MEASUREMENT$,PRS_MPATTERN$>
|
|
RDSTestRec<RDS_TEST_SPEC_CRES_MPATTERN$> = LayerSpecs<PRS_LAYER_CRES_MEASUREMENT$,PRS_MPATTERN$>
|
|
|
|
|
|
RDSTestRec<RDS_TEST_REACTOR_TYPE$> = ReactorType
|
|
|
|
IF ReactorType = 'P' OR ReactorType = 'EPP' OR ThickFilmMet = 1 THEN
|
|
|
|
SpecMap = XLATE('PROD_SPEC',PSNo,PROD_SPEC_TEST_POINT_MAP$,'X') ;* Added 4/8/2009 JCH new field in PROD_SPEC
|
|
|
|
IF SpecMap NE '' THEN
|
|
|
|
RDSTestRec<RDS_TEST_TEST_POINT_MAP$> = SpecMap
|
|
|
|
END ELSE
|
|
|
|
;* Added ThickFilmMet check - 1/16/2009 JCH
|
|
|
|
AllTargetThicks = XLATE('PROD_SPEC',PSNo,'THICK_TARGET_ALL','X')
|
|
TargetCnt = COUNT(AllTargetThicks,@VM) + (AllTargetThicks NE '')
|
|
|
|
BEGIN CASE
|
|
CASE TargetCnt = 2
|
|
CombinedThick = SUM(AllTargetThicks)
|
|
|
|
CASE TargetCnt = 1 OR TargetCnt = 3
|
|
CombinedThick = AllTargetThicks[-1,'B':@VM]
|
|
|
|
END CASE
|
|
|
|
IF OCONV(CombinedThick,'MD2') > '65.0' THEN
|
|
RDSTestRec<RDS_TEST_TEST_POINT_MAP$> = 'FTIR_T'
|
|
END ELSE
|
|
RDSTestRec<RDS_TEST_TEST_POINT_MAP$> = 'FTIR'
|
|
END
|
|
END
|
|
|
|
END ELSE
|
|
RDSTestRec<RDS_TEST_TEST_POINT_MAP$> = 'ASM17' ;* 17 Point linear test pattern until PROD_SPEC is updated support other types
|
|
END
|
|
|
|
Database_Services('WriteDataRow', 'RDS_TEST', RDSTestKey, RDSTestRec)
|
|
end else
|
|
Error_Services('Add', 'Error in ':Service:' service. Error calling obj_Prod_Spec("GetLayerProp")')
|
|
end
|
|
end
|
|
Next RDSTestKey
|
|
end else
|
|
Error_Services('Add', 'Error in ':Service:' serivce. No RDS_TEST records found for RDS record ':RDSNo:'.')
|
|
end
|
|
end else
|
|
Error_Services('Add', 'Error in ':Service:' serivce. Null PSNo returned for RDS record ':RDSNo:'.')
|
|
end
|
|
end else
|
|
Error_Services('Add', 'Error in ':Service:' serivce. RDS record ':RDSNo:' does not exist.')
|
|
end
|
|
end else
|
|
Error_Services('Add', 'Error in ':Service:' serivce. Null RDSNo passed in.')
|
|
end
|
|
|
|
end service
|
|
|
|
|
|
Service ConvertRecordToJSON(KeyID, Record, ItemURL)
|
|
|
|
jsonRecord = ''
|
|
|
|
If KeyID NE '' then
|
|
|
|
If Record EQ '' then Record = Database_Services('ReadDataRow', 'PROD_SPEC', KeyID)
|
|
If Error_Services('NoError') then
|
|
@DICT = Database_Services('GetTableHandle', 'DICT.PROD_SPEC')
|
|
@ID = KeyID
|
|
@RECORD = Record
|
|
If SRP_JSON(objJSON, 'New', 'Object') then
|
|
|
|
If SRP_JSON(objProdSpec, 'New', 'Object') then
|
|
SRP_JSON(objProdSpec, 'SetValue', 'keyId', @ID)
|
|
SRP_JSON(objProdSpec, 'SetValue', 'specType', OConv({SPEC_TYPE}, '[SPEC_TYPE_CONV]'))
|
|
SRP_JSON(objProdSpec, 'SetValue', 'status', OConv({STATUS}, '[PROD_SPEC_STATUS_CONV]'))
|
|
SRP_JSON(objProdSpec, 'SetValue', 'minutesPerWafer', OConv({MINUTES_PER_WAFER}, 'MD3'))
|
|
SRP_JSON(objProdSpec, 'SetValue', 'proveInTime', OConv({PROVEIN_MIN}, 'MD3,'))
|
|
SRP_JSON(objProdSpec, 'SetValue', 'layerType', {LAYER_TYPE})
|
|
SRP_JSON(objProdSpec, 'SetValue', 'reactorType', OConv({REACTOR_TYPE}, '[REACT_TYPE_CONV,OPSREF]'))
|
|
SRP_JSON(objProdSpec, 'SetValue', 'susceptorType', {SUSCEPTOR_TYPE})
|
|
SRP_JSON(objProdSpec, 'SetValue', 'tubePressureType', {TUBE_PRESSURE_TYPE})
|
|
ProdVerNos = {PROD_VER_NO}
|
|
CustEpiKeys = {CEP_KEYS}
|
|
StageKeys = {STAGE}
|
|
QAMetStages = {QA_MET_STAGE}
|
|
QAMetTests = {QA_MET_TEST}
|
|
QAMetProps = {QA_MET_PROP}
|
|
QAMetPropDescs = {QA_MET_PROP_DESC}
|
|
QAMetToolClasses = {QA_MET_TOOL_CLASS}
|
|
QAMetRecipes = {QA_MET_RECIPE}
|
|
QAMetRecipePatterns = {QA_MET_RECIPE_PATTERN}
|
|
QAMetMins = {QA_MET_MIN}
|
|
QAMetMaxes = {QA_MET_MAX}
|
|
QAPhaseMins = {QA_MET_PHASE_MIN}
|
|
QAMetSlots = {QA_MET_SLOT}
|
|
QAMetWfrQtys = {QA_MET_WFR_QTY}
|
|
QAMetReactScheds = {QA_MET_REACT_SCHED}
|
|
QAMetIntervals = {QA_MET_INTERVAL}
|
|
QAMetStarts = {QA_MET_START}
|
|
QAMetSeqs = {QA_MET_SEQUENCE}
|
|
|
|
// Add recipe layer object array
|
|
If SRP_JSON(objLayerArray, 'New', 'Array') then
|
|
LayerNos = {LAYER_NO}
|
|
LayerIDs = {LS_ID}
|
|
LayerTypes = {LS_TYPE}
|
|
LayerRecipes = {LS_RECIPE}
|
|
LayerDopants = {LS_DOPANT}
|
|
LayerThickMins = OConv({LS_THICK_MIN}, '[MET_PROP_CONV,THICK]')
|
|
LayerThickTargets = OConv({LS_THICK_TARG}, '[MET_PROP_CONV,THICK]')
|
|
LayerThickMaxes = OConv({LS_THICK_MAX}, '[MET_PROP_CONV,THICK]')
|
|
LayerThickUnits = {LS_THICK_UNITS}
|
|
LayerThickAMins = OConv({LS_THICKA_MIN}, '[MET_PROP_CONV,THICKA]')
|
|
LayerThickATargets = OConv({LS_THICKA_TARG}, '[MET_PROP_CONV,THICKA]')
|
|
LayerThickAMaxes = OConv({LS_THICKA_MAX}, '[MET_PROP_CONV,THICKA]')
|
|
LayerThickAUnits = {LS_THICKA_UNITS}
|
|
LayerResMins = OConv({LS_RES_MIN}, '[MET_PROP_CONV,RES]')
|
|
LayerResTargets = OConv({LS_RES_TARG}, '[MET_PROP_CONV,RES]')
|
|
LayerResMaxes = OConv({LS_RES_MAX}, '[MET_PROP_CONV,RES]')
|
|
LayerResUnits = {LS_RES_UNITS}
|
|
LayerSResMins = OConv({LS_SRES_MIN}, '[MET_PROP_CONV,SRES]')
|
|
LayerSResTargets = OConv({LS_SRES_TARG}, '[MET_PROP_CONV,SRES]')
|
|
LayerSResMaxes = OConv({LS_SRES_MAX}, '[MET_PROP_CONV,SRES]')
|
|
LayerSResUnits = {LS_SRES_UNITS}
|
|
If LayerNos NE '' then
|
|
For each LayerNo in LayerNos using @VM setting vPos
|
|
If SRP_JSON(objLayer, 'New', 'Object') then
|
|
SRP_JSON(objLayer, 'SetValue', 'layerNo', layerNo)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerId', LayerIDs<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerType', LayerTypes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerRecipe', LayerRecipes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerDopant', LayerDopants<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickMin', LayerThickMins<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickTarget', LayerThickTargets<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickMax', LayerThickMaxes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickUnits', LayerThickUnits<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickAMin', LayerThickAMins<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickATarget', LayerThickATargets<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickAMaxes', LayerThickAMaxes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerThickAUnits', LayerThickAUnits<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerResMin', LayerResMins<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerResTarget', LayerResTargets<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerResMax', LayerResMaxes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerResUnits', LayerResUnits<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerSResMin', LayerSResMins<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerSResTarget', LayerSResTargets<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerSResMax', LayerSResMaxes<0, vPos>)
|
|
SRP_JSON(objLayer, 'SetValue', 'layerSResUnits', LayerSResUnits<0, vPos>)
|
|
SRP_JSON(objLayerArray, 'Add', objLayer)
|
|
SRP_JSON(objLayer, 'Release')
|
|
end
|
|
Next LayerNo
|
|
end
|
|
SRP_JSON(objProdSpec, 'Set', 'recipeLayers', objLayerArray)
|
|
SRP_JSON(objLayerArray, 'Release')
|
|
end
|
|
|
|
// Add Prod Ver object array
|
|
If ProdVerNos NE '' then
|
|
If SRP_JSON(objProdVerArray, 'New', 'Array') then
|
|
For each ProdVerNo in ProdVerNos using @VM
|
|
ProdVerJSON = Prod_Ver_Services('ConvertRecordToJSON', ProdVerNo)
|
|
If SRP_JSON(objProdVer, 'Parse', ProdVerJSON) EQ '' then
|
|
objTemp = SRP_JSON(objProdVer, 'Get', 'prodVer')
|
|
SRP_JSON(objProdVerArray, 'Add', objTemp)
|
|
SRP_JSON(objTemp, 'Release')
|
|
SRP_JSON(objProdVer, 'Release')
|
|
end
|
|
Next ProdVerNo
|
|
SRP_JSON(objProdSpec, 'Set', 'prodVers', objProdVerArray)
|
|
SRP_JSON(objProdVerArray, 'Release')
|
|
end
|
|
end
|
|
|
|
// Epi Part object array
|
|
EpiPartNo = {EPI_PART_NO}
|
|
If EpiPartNo NE '' then
|
|
If SRP_JSON(objEpiPart, 'New', 'Object') then
|
|
SRP_JSON(objEpiPart, 'SetValue', 'keyID', EpiPartNo)
|
|
WaferSize = Xlate('EPI_PART', EpiPartNo, 'SUB_WAFER_SIZE', 'X')
|
|
SRP_JSON(objEpiPart, 'SetValue', 'waferSize', WaferSize)
|
|
SRP_JSON(objProdSpec, 'Set', 'epiPart', objEpiPart)
|
|
SRP_JSON(objEpiPart, 'Release')
|
|
end
|
|
end
|
|
|
|
// Cust Epi Part object array
|
|
If CustEpiKeys NE '' then
|
|
If SRP_JSON(objCustEpiArray, 'New', 'Array') then
|
|
For each CustEpiKey in CustEpiKeys using @VM
|
|
CustEpiJSON = Cust_Epi_Part_Services('ConvertRecordToJSON', CustEpiKey)
|
|
If SRP_JSON(objCustEpi, 'Parse', CustEpiJSON) EQ '' then
|
|
objTemp = SRP_JSON(objCustEpi, 'Get', 'custEpiPart')
|
|
SRP_JSON(objCustEpiArray, 'Add', objTemp)
|
|
SRP_JSON(objTemp, 'Release')
|
|
SRP_JSON(objCustEpi, 'Release')
|
|
end
|
|
Next CustEpiKey
|
|
end
|
|
SRP_JSON(objProdSpec, 'Set', 'custEpiParts', objCustEpiArray)
|
|
SRP_JSON(objCustEpiArray, 'Release')
|
|
end
|
|
|
|
// Add PRS Stage (Run Stage) object array
|
|
If StageKeys NE '' then
|
|
If SRP_JSON(objStageArray, 'New', 'Array') then
|
|
For each StageKey in StageKeys using @VM
|
|
PRSKey = KeyID:'*':StageKey
|
|
PRSStageJSON = PRS_Stage_Services('ConvertRecordToJSON', PRSKey)
|
|
If SRP_JSON(objPRSStage, 'Parse', PRSStageJSON) EQ '' then
|
|
objTemp = SRP_JSON(objPRSStage, 'Get', 'prsStage')
|
|
SRP_JSON(objStageArray, 'Add', objTemp)
|
|
SRP_JSON(objTemp, 'Release')
|
|
SRP_JSON(objPRSStage, 'Release')
|
|
end
|
|
Next StageKey
|
|
end
|
|
SRP_JSON(objProdSpec, 'Set', 'prsStages', objStageArray)
|
|
SRP_JSON(objStageArray, 'Release')
|
|
end
|
|
|
|
SRP_JSON(objJSON, 'Set', 'prodSpec', objProdSpec)
|
|
SRP_JSON(objProdSpec, 'Release')
|
|
end
|
|
|
|
If itemURL NE '' then
|
|
// The itemURL was passed in so add HAL+JSON properties.
|
|
|
|
// Create the _links property and then all link objects needed for this resource.
|
|
If SRP_JSON(objLinks, 'New', 'Object') then
|
|
// Create a self link.
|
|
If SRP_JSON(objLink, 'New', 'Object') then
|
|
SRP_JSON(objLink, 'SetValue', 'href', ItemURL, 'String')
|
|
SRP_JSON(objLink, 'SetValue', 'title', 'Self', 'String')
|
|
SRP_JSON(objLinks, 'Set', 'self', objLink)
|
|
SRP_JSON(objLink, 'Release')
|
|
end
|
|
SRP_JSON(objJSON, 'Set', '_links', objLinks)
|
|
SRP_JSON(objLinks, 'Release')
|
|
end
|
|
|
|
// Create the _class property for this resource.
|
|
SRP_JSON(objJSON, 'SetValue', '_class', 'resource')
|
|
end
|
|
jsonRecord = SRP_JSON(objJSON, 'Stringify', 'Styled')
|
|
SRP_JSON(objJSON, 'Release')
|
|
end else
|
|
Error_Services('Add', 'Unable to create JSON representation in the ' : Service : ' service.')
|
|
end
|
|
end
|
|
end else
|
|
Error_Services('Add', 'KeyID argument was missing in the ' : Service : ' service.')
|
|
end
|
|
|
|
Response = jsonRecord
|
|
|
|
end service
|
|
|
|
|
|
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
|
|
// Internal GoSubs
|
|
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
|
|
|
|
* * * * * *
|
|
CheckAdHoc:
|
|
* * * * * *
|
|
StageRecKey = PSNo: '*' : Stage
|
|
StageRec = XLATE('PRS_STAGE', StageRecKey, '', 'X')
|
|
|
|
IF StageRec<PRS_STAGE_CLEAN_SIG_REQ$> EQ 1 then
|
|
GoSub CheckCleansParms
|
|
IF Error_Services('GetMessage') NE '' then
|
|
Return
|
|
end
|
|
end
|
|
IF StageRec<PRS_STAGE_INSP_SIG_REQ$> EQ 1 then
|
|
GoSub CheckVisualParms
|
|
IF Error_Services('GetMessage') NE '' then
|
|
Return
|
|
end
|
|
end
|
|
IF StageRec<PRS_STAGE_SURFSCAN_SIG_REQ$> EQ 1 then
|
|
GoSub CheckSurfaceParms
|
|
IF Error_Services('GetMessage') NE '' then
|
|
Return
|
|
end
|
|
end
|
|
QAMetTests = StageRec<PRS_STAGE_MET_TEST$>
|
|
IF QAMetTests<1,1> NE '' then
|
|
GoSub CheckQAMetParms
|
|
IF Error_Services('GetMessage') NE '' then
|
|
Return
|
|
end
|
|
end
|
|
|
|
return
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|