540 lines
20 KiB
Plaintext
540 lines
20 KiB
Plaintext
COMPILE FUNCTION obj_GaN(Method,Parms)
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#pragma precomp SRP_PreCompiler
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/*
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GaN Reports
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7/26/2016 JCH Initial Coding
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Methods:
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GetStatus ;* Returns GaN processing overview status
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*/
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DECLARE SUBROUTINE Btree.Extract, Set_Status, Send_Dyn, Btree.Extract, v119, ErrMsg, Database_Services
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DECLARE FUNCTION obj_React_Run, Database_Services, SRP_Array, Gan_Services
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$INSERT POPUP_EQUATES
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$INSERT LOGICAL
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$INSERT WO_LOG_EQUATES
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$INSERT REACT_RUN_EQUATES
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$INSERT RUN_STAGE_EQUATES
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$INSERT RUN_STAGE_WFR_EQUATES
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$INSERT TOOL_EQUATES
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$INSERT TOOL_CLASS_EQUATES
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$INSERT TOOL_WFR_EQUATES
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$INSERT LOCATION_EQUATES
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$INSERT APP_INSERTS
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$INSERT WO_WFR_EQUATES
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$INSERT TOOL_ETCH_EQUATES
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EQU COL$STAGE TO 1
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EQU COL$RDS_NO TO 2
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EQU COL$GAN_RUN_ID TO 3
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EQU COL$EPI_PART_NO TO 4
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EQU COL$WAIT_TOOL_TYPE TO 5
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EQU COL$WAIT_WFR_QTY TO 6
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EQU COL$WAIT_HRS TO 7
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EQU COL$WAIT_WFR_ID TO 8
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EQU COL$TOOL_ID TO 9
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EQU COL$RUN_WFR TO 10
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EQU COL$RUN_HRS TO 11
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EQU COL$RUN_WFR_ID TO 12
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ErrTitle = 'Error in Stored Procedure "obj_GaN"'
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ErrorMsg = ''
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ErrCode = ''
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IF NOT(ASSIGNED(Method)) THEN ErrorMsg = 'Unassigned parameter "Method" passed to subroutine'
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IF NOT(ASSIGNED(Parms)) THEN Parms = ''
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IF ErrorMsg NE '' THEN
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Set_Status(-1,ErrTitle:@SVM:ErrorMsg)
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RETURN ''
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END
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Result = ''
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BEGIN CASE
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CASE Method = 'GetStatus' ; GOSUB GetStatus
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CASE Method = 'ToolWIP' ; GOSUB ToolWIP
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CASE Otherwise$ ; Null
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END CASE
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IF ErrorMsg NE '' THEN
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Set_Status(-1,ErrTitle:@SVM:ErrorMsg)
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RETURN ''
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END
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RETURN Result
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* * * * * * *
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GetStatus:
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* * * * * * *
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PopupLiteral = XLATE('SYSREPOSPOPUPS', @APPID<1>:'**':'GAN_WIP_STAGES',PDISPLAY$,'X')
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CONVERT @VM:@SVM TO @FM:@VM IN PopupLiteral
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OPEN 'DICT.REACT_RUN' TO DictReactRun ELSE
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ErrorMsg = 'Unable to open "DICT.REACT_RUN" for Btree.Extract'
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RETURN
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END
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OPEN 'DICT.RUN_STAGE' TO DictRunStage ELSE
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ErrorMsg = 'Unable to open "DICT.RUN_STAGE" for Btree.Extract'
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RETURN
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END
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OPEN 'DICT.RUN_STAGE_WFR' TO DictRunStageWfr ELSE
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ErrorMsg = 'Unable to open "DICT.RUN_STAGE_WFR" for Btree.Extract'
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RETURN
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END
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LineCnt = 0
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StageCnt = COUNT(PopupLiteral,@FM) + (PopupLiteral NE '')
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Header = 'Stage':@VM ;* Column headers for export
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Header := 'RDS No':@VM
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Header := 'Run ID':@VM
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Header := 'EPI Part No':@VM
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Header := 'Tool Class':@VM
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Header := 'Wait Cnt':@VM
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Header := 'Wait Hrs':@VM
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Header := 'Wait Wfr IDs':@VM
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Header := 'Priority':@VM
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Header := 'Tool ID':@VM
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Header := 'Run Cnt':@VM
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Header := 'Run Hrs':@VM
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Header := 'Run Wfr IDs':@VM
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Header := 'Run Priority'
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LineCnt += 1
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Result<LineCnt> = Header
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FOR S = 1 TO StageCnt
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Stage = PopupLiteral<S,1>
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StageDesc = PopupLiteral<S,2>
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CharFlag = PopupLiteral<S,3>
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ToolClasses = PopupLiteral<S,4>
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ToolIDs = ''
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For each ToolClass in ToolClasses using ','
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TempToolIDs = XLATE('TOOL_CLASS', ToolClass, TOOL_CLASS_TOOL$, 'X')
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ToolIDs = SRP_Array('Join', TempToolIDs, ToolIDs, 'OR', @VM)
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Next ToolClass
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StageRdsNos = ''
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StageWaitIDs = ''
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StageRunIDs = ''
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StageToolIDs = ''
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StageWaitTms = ''
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StageRunTms = ''
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StageWaitCnts = ''
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StageRunCnts = ''
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* Stages do not have a tool class have their queue ID hardcoded below
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BEGIN CASE
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Case Stage _EQC 'ETCH'
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QInEtchIDs = XLATE('LOCATION','GCH*Q_ETCH',LOCATION_ETCH_ID$,'X')
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ToolClass = 'G_REACT'
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Case Stage _EQC 'GROWTH'
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QInCassIDs = XLATE('LOCATION','GCH*Q_GROWTH',LOCATION_CASS_ID$,'X')
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ToolClass = 'G_REACT'
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Case Stage _EQC 'G_RATE'
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QInWfrIDs = XLATE('LOCATION','GCH*Q_RATE',LOCATION_WFR_ID$,'X')
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ToolClass = 'G_REACT'
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Case Stage _EQC 'WET_CLEAN'
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QInWfrIDs = Xlate('LOCATION','GCH*CLEAN_Q',LOCATION_WFR_ID$,'X')
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ToolClass = 'GCH*CLEAN_Q'
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Case Stage _EQC 'SPLIT'
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QInWfrIDs = XLATE('LOCATION','GCH*SPLIT_Q',LOCATION_WFR_ID$,'X')
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ToolClass = 'GCH*Q_SP'
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Case Stage _EQC 'DISP'
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QInWfrIDs = XLATE('LOCATION','GGR*Q_DISP',LOCATION_WFR_ID$,'X')
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ToolClass = 'GGR*Q_DISP'
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Case Stage _EQC 'G_PACK'
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QInWfrIDs = XLATE('LOCATION','GCH*Q_PACK',LOCATION_WFR_ID$,'X')
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ToolClass = 'GCH*Q_PACK'
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Case Stage _EQC 'RETAIN'
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QInWfrIDs = Xlate('LOCATION','GCH*Q_RETAIN',LOCATION_WFR_ID$,'X')
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ToolClass = 'GCH*Q_RETAIN'
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Case Otherwise$
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QInWfrIDs = XLATE('TOOL_CLASS',ToolClass,'QIN_WFR_ID','X')
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END CASE
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* Collect data from places the wafers are stored in LOCATION (Queues), TOOL_WFR (On Tool
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* * * * * Wafer Queues (LOCATION table) * * * * *
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Begin Case
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Case Stage EQ 'GROWTH'
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RDSNos = Xlate('WO_MAT', QInCassIDs, 'RDS_NO', 'X')
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ElapTms = Xlate('WO_MAT', QInCassIDs, 'ELAP_TM', 'X')
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rCnt = DCount(RdSNos, @VM)
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FOR R = 1 TO rCnt
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RDSNo = RDSNos<1,R>
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ElapTm = ElapTms<1,R>
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LOCATE RDSNo IN StageRdsNos BY 'AR' USING @VM SETTING Pos ELSE
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StageWaitCnts = INSERT(StageWaitCnts,1,Pos,0,'') ;* No wafers yet (we are at the cassette level)
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StageRDSNos = INSERT(StageRDSNos,1,Pos,0,RDSNo)
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StageWaitIDs = INSERT(StageWaitIDs,1,Pos,0,'') ;* No wafer IDs yet (we are at the cassette level)
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,'') ;* Not on a tool this is the Queues
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,ElapTm)
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StageRunTms = INSERT(StageRunTms,1,Pos,0,'')
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END
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NEXT R
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Case Stage EQ 'ETCH'
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For each QInEtchID in QInEtchIDs using @VM
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ElapTm = Xlate('GAN_ETCH', QInEtchID, 'ELAP_HOURS', 'X')
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LOCATE QInEtchID IN StageRunIDs BY 'AR' USING @VM SETTING Pos THEN
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* StageRunCnts<1,Pos> = StageRunCnts<1,Pos> + 1
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* StageRunIDs = INSERT(StageRunIDs,1,Pos,-1,QInEtchID)
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* StageWaitCnts<1, Pos> = StageWaitCnts<1, Pos> + 1
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* StageWaitIDs = INSERT(StageWaitIDs, 1, Pos, -1, QInEtchID)
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,ElapTm)
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END ELSE
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StageWaitCnts = INSERT(StageWaitCnts,1,Pos,0,'')
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StageRDSNos = INSERT(StageRDSNos,1,Pos,0, ' ')
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StageWaitIDs = INSERT(StageWaitIDs,1,Pos,0, '')
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,'') ;* Not on a tool this is the Queues
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,ElapTm)
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StageRunTms = INSERT(StageRunTms,1,Pos,0,'')
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StageRunIDs = INSERT(StageRunIDs,1,Pos,-1,QInEtchID)
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END
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Next QInEtchID
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Case Otherwise$
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RDSNos = XLATE('WO_WFR',QInWfrIDs,'RDS_NO','X') ;* Wafers in the Queue
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ElapTms = XLATE('WO_WFR',QInWfrIDs,'ELAP_TM','X') ;* Times since last event
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rCnt = DCount(QInWfrIDs, @VM)
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FOR R = 1 TO rCnt
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RDSNo = RDSNos<1,R>
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ElapTm = ElapTms<1,R>
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QInWfrID = QInWfrIDs<1,R>
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If Stage _EQC 'DISP' then
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ReactRunRec = Database_Services('ReadDataRow', 'REACT_RUN', RDSNo)
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InWfrIDs = ReactRunRec<REACT_RUN_IN_WFR_ID$>
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NumWfrsInCass = DCount(InWfrIDs, @VM)
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NumDispWfrs = 0
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For each WOWfrID in InWfrIDs using @VM setting vPos
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ThisWOWfrRec = Database_Services('ReadDataRow', 'WO_WFR', WOWfrID)
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LocQs = ThisWOWfrRec<WO_WFR_INV_LOC$>
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Locate 'GGR*Q_DISP' in LocQs using @VM setting vPos then
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// Wafer has been dispositioned at some point
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NumDispWfrs += 1
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end
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Next WOWfrID
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If NumWfrsInCass NE NumDispWfrs then ElapTm = '0.0'
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end
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LOCATE RDSNo IN StageRdsNos BY 'AR' USING @VM SETTING Pos THEN
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StageWaitCnts<1,Pos> = StageWaitCnts<1,Pos> + 1
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StageWaitIDs = INSERT(StageWaitIDs,1,Pos,-1,QInWfrID)
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END ELSE
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StageWaitCnts = INSERT(StageWaitCnts,1,Pos,0,1)
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StageRDSNos = INSERT(StageRDSNos,1,Pos,0,RDSNo)
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StageWaitIDs = INSERT(StageWaitIDs,1,Pos,0,QINWfrID)
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,'') ;* Not on a tool this is the Queues
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,ElapTm)
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StageRunTms = INSERT(StageRunTms,1,Pos,0,'')
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END
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NEXT R
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End Case
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* * * * * Tool Queues * * * * *
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tCnt = COUNT(ToolIDs,@VM) + (ToolIDs NE '')
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FOR T = 1 TO tCnt
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ToolID = ToolIDs<1,T>
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If Stage NE 'ETCH' then
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RunWfrIDs = XLATE('TOOL_WFR',ToolID,TOOL_WFR_WFR_ID$,'X')
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RDSNos = XLATE('WO_WFR',RunWfrIDs,'RDS_NO','X')
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ElapTms = XLATE('WO_WFR',RunWfrIDs,'ELAP_TM','X')
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rCnt = DCount(RDSNos, @VM)
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FOR R = 1 TO rCnt
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Skip = False$
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RDSNo = RDSNos<1,R>
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ElapTm = ElapTms<1,R>
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ToolWfrID = RunWfrIDs<1,R>
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If ( (Stage NE 'G_RDS') and (Stage NE 'GROWTH') and (Stage NE 'G_RATE') ) then
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WfrID = ToolWfrID
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Convert '*' to '.' in WfrID
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RunStageWfrRec = Database_Services('ReadDataRow', 'RUN_STAGE_WFR', RDSNo:'*':Stage:'*':WfrID)
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ToolClass = RunStageWfrRec<RUN_STAGE_WFR_SPEC_TOOL_CLASS$>
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StageStatus = RunStageWfrRec<RUN_STAGE_WFR_STATUS$>
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RunStageID = Gan_Services('GetStageID', '', '', ToolClass)
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If ( (RunStageID NE Stage) or (StageStatus NE 'START') ) then Skip = True$
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end
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If Skip EQ False$ then
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If RDSNo NE '' then
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LOCATE RDSNo IN StageRDSNos BY 'AR' USING @VM SETTING Pos THEN
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StageRunCnts<1,Pos> = StageRunCnts<1,Pos> + 1
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StageRunIDs = INSERT(StageRunIDs,1,Pos,-1,ToolWfrID)
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Locate ToolID in StageToolIDs using @VM setting tPos else
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StageToolIDs = INSERT(StageToolIDs,1,Pos,-1,ToolID)
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end
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Locate ElapTm in StageRunTms using @VM setting ePos else
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StageRunTms = INSERT(StageRunTms,1,Pos,0,ElapTm)
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end
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END ELSE
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StageRunCnts = INSERT(StageRunCnts,1,Pos,0,1)
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StageRDSNos = INSERT(StageRDSNos,1,Pos,0,RDSNo)
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StageRunIDs = INSERT(StageRunIDs,1,Pos,0,ToolWfrID)
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,ToolID)
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,'')
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StageRunTms = INSERT(StageRunTms,1,Pos,0,ElapTm)
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StageWaitIDs = INSERT(StageWaitIDs,1,Pos,0,'')
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StageWaitCnts = INSERT(StageWaitCnts,1,Pos,0,'')
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END
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end
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end
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NEXT R
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end else
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// Etch stage
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RunEtchIDs = XLATE('TOOL_ETCH', ToolID, TOOL_ETCH_ETCH_ID$, 'X')
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For each ToolEtchID in RunEtchIDs using @VM setting tPos
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GaNEtchKey = Field(ToolEtchID, '-', 2)
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ElapTm = XLATE('GAN_ETCH', GaNEtchKey, 'ELAP_HOURS', 'X')
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LocEvents = XLATE('GAN_ETCH', GaNEtchKey, 'LOC_EVENT', 'X')
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EtchStartStatus = LocEvents<1,2> EQ 'START'
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EtchStopStatus = LocEvents<1,3> EQ 'STOP'
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If (EtchStartStatus EQ True$) and (EtchStopStatus EQ False$) then
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LOCATE ToolEtchID IN StageRunIDs BY 'AR' USING @VM SETTING Pos THEN
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StageRunCnts<1,Pos> = StageRunCnts<1,Pos> + 1
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* StageRunIDs = INSERT(StageRunIDs,1,Pos,-1,ToolEtchID)
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,ToolID)
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StageRunTms = INSERT(StageRunTms,1,Pos,0,ElapTm)
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END ELSE
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StageRunCnts = INSERT(StageRunCnts,1,Pos,0,1)
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StageRDSNos = INSERT(StageRDSNos,1,Pos,0,' ')
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StageRunIDs = INSERT(StageRunIDs,1,Pos,0,ToolEtchID)
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StageToolIDs = INSERT(StageToolIDs,1,Pos,0,ToolID)
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StageWaitTms = INSERT(StageWaitTms,1,Pos,0,'')
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StageRunTms = INSERT(StageRunTms,1,Pos,0,ElapTm)
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END
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end
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Next ToolEtchID
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end
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NEXT T
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* Build the stage lines
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* * * * * Sort by DSND StageWaitTms
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SortArray = ''
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slCnt = DCount(StageRDSNos, @VM)
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FOR M = 1 TO slCnt
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SortLine = StageWaitTms<1,M>:@FM
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SortLine := StageRDSNos<1,M>:@FM
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SortLine := StageWaitIDs<1,M>:@FM
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SortLine := StageRunIDs<1,M>:@FM
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SortLine := StageToolIDs<1,M>:@FM
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SortLine := StageRunTms<1,M>:@FM
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SortLine := StageWaitCnts<1,M>:@FM
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SortLine := StageRunCnts<1,M>
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SortArray := SortLine:@RM
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NEXT M
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a = LEN(SortArray)
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V119('S','','D','R',SortArray,'')
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IF Get_Status(errCode) THEN
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ErrMsg(errCode)
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END
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StageWaitTms = ''
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StageRDSNos = ''
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StageWaitIDs = ''
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StargeRunWfrIDs = ''
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StageToolIDs = ''
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StageRunTms = ''
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StageWaitCnts = ''
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StageRunCnts = ''
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Line = 0
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LOOP
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SortLine = SortArray[1,@RM]
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SortArray[1,COL2()] = ''
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UNTIL SortLine = ''
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Line += 1
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StageWaitTms<1,Line> = SortLine<1>
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StageRDSNos<1,Line> = SortLine<2>
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StageWaitIDs<1,Line> = SortLine<3>
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StageRunIDs<1,Line> = SortLine<4>
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StageToolIDs<1,Line> = SortLine<5>
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StageRunTms<1,Line> = SortLine<6>
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StageWaitCnts<1,Line> = SortLine<7>
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StageRunCnts<1,Line> = SortLine<8>
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REPEAT
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If Stage EQ 'ETCH' then
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* If @USER4 EQ 'DANIEL_ST' then debug
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* StageLineCnt = DCount(StageRunIDs,@VM) + DCount(StageWaitIDs,@VM) + DCount(StageRDSNos,@VM)
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StageLineCnt = Dcount(StageRunIDs, @VM) + DCount(StageWaitIDs,@VM)
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Line = Stage:@VM:@VM:@VM:@VM:@VM:@VM:@VM:@VM:@VM ;* Stage on a blank line for separator
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LineCnt += 1
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Result<LineCnt> = Line
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For N = 1 TO StageLineCnt
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EtchID = StageRunIDs<1,N>
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WaitIDs = StageWaitIDs<1,N>
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WaitWfrPri = ''
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RunWfrPri = ''
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Line = @VM ;* Place holder
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Line := @VM ;* RDSNo
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Line := EtchID:@VM ;* EtchID (from Etch manager)
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Line := @VM ;* EpiPartNo
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Line := @VM ;* Run Priority
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Line := StageWaitCnts<1,N>:@VM ;* Wait Wfr Cnts
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Line := StageWaitTms<1,N>:@VM ;* Wait Times
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Line := WaitIDs:@VM ;* Wafer ID
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Line := StageToolIDs<1,N>:@VM ;* Tool ID
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Line := @VM ;* Run Wfr Cnts
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Line := StageRunTms<1,N>:@VM ;* Run Times
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Line := @VM ;* Run Wfr IDs
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LineCnt += 1
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Result<LineCnt> = Line
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Next N
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end else
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StageLineCnt = COUNT(StageRDSNos,@VM) + (StageRDSNos NE '') ;* All the RDS Nos in this stage
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Line = Stage:@VM:@VM:@VM:@VM:@VM:@VM:@VM:@VM:@VM ;* Stage on a blank line for separator
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LineCnt += 1
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Result<LineCnt> = Line
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For N = 1 TO StageLineCnt
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RDSNo = StageRDSNos<1,N>
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RDSRec = XLATE('REACT_RUN',RDSNo,'','X')
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EpiPartNo = XLATE('WO_LOG',RDSRec<REACT_RUN_WO_NO$>,WO_LOG_EPI_PART_NO$,'X')
|
|
GanRunID = RDSRec<REACT_RUN_GAN_RUN_ID$>
|
|
RunPri = RDSRec<REACT_RUN_RUN_PRI$>
|
|
WaitWfrIDs = StageWaitIDs<1,N>
|
|
RunWfrIDs = StageRunIDs<1,N>
|
|
IF INDEX(WaitWfrIDs,@SVM,1) THEN WaitWfrIDs = 'Multi'
|
|
IF INDEX(RunWfrIDs,@SVM,1) THEN RunWfrIDs = 'Multi'
|
|
Line = @VM ;* Place holder
|
|
Line := RDSNo:@VM ;* RDSNo
|
|
Line := GanRunID:@VM ;* GanRunID
|
|
Line := EpiPartNo:@VM ;* EpiPartNo
|
|
Line := RunPri:@VM ;* Run Priority
|
|
Line := StageWaitCnts<1,N>:@VM ;* Wait Wfr Cnts
|
|
Line := StageWaitTms<1,N>:@VM ;* Wait Times
|
|
Line := WaitWfrIDs:@VM ;* Wafer I
|
|
Line := StageToolIDs<1,N>:@VM ;* Tool ID
|
|
Line := StageRunCnts<1,N>:@VM ;* Run Wfr Cnts
|
|
Line := StageRunTms<1,N>:@VM ;* Run Times
|
|
Line := RunWfrIDs:@VM ;* Run Wfr IDs
|
|
LineCnt += 1
|
|
Result<LineCnt> = Line
|
|
NEXT N
|
|
end
|
|
|
|
NEXT S
|
|
|
|
Database_Services('WriteDataRow', 'APP_INFO', 'GAN_WIP', Result, True$, False$, True$)
|
|
|
|
RETURN
|
|
|
|
|
|
* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * *
|
|
|
|
|
|
* * * * * * *
|
|
ToolWIP:
|
|
* * * * * * *
|
|
|
|
PopupLiteral = XLATE('SYSREPOSPOPUPS', @APPID<1>:'**':'GAN_WIP_STAGES',PDISPLAY$,'X')
|
|
|
|
CONVERT @VM:@SVM TO @FM:@VM IN PopupLiteral
|
|
|
|
OPEN 'DICT.REACT_RUN' TO DictReactRun ELSE
|
|
ErrorMsg = 'Unable to open "DICT.REACT_RUN" for Btree.Extract'
|
|
RETURN
|
|
END
|
|
|
|
OPEN 'DICT.RUN_STAGE' TO DictRunStage ELSE
|
|
ErrorMsg = 'Unable to open "DICT.RUN_STAGE" for Btree.Extract'
|
|
RETURN
|
|
END
|
|
|
|
OPEN 'DICT.RUN_STAGE_WFR' TO DictRunStageWfr ELSE
|
|
ErrorMsg = 'Unable to open "DICT.RUN_STAGE_WFR" for Btree.Extract'
|
|
RETURN
|
|
END
|
|
|
|
|
|
LineCnt = 0
|
|
StageCnt = COUNT(PopupLiteral,@FM) + (PopupLiteral NE '')
|
|
|
|
|
|
Header = 'Stage':@VM ;* Column headers for export
|
|
Header := 'Runs':@VM
|
|
Header := 'Tot Runs':@VM
|
|
Header := 'RDS No':@VM
|
|
Header := 'EPI Part No':@VM
|
|
Header := 'Run ID':@VM
|
|
Header := 'State':@VM
|
|
Header := 'Wfr Cnt':@VM
|
|
Header := 'Tool Type':@VM
|
|
Header := 'Tool ID'
|
|
|
|
LineCnt += 1
|
|
|
|
Result<LineCnt> = Header
|
|
|
|
|
|
FOR S = 1 TO StageCnt
|
|
|
|
Stage = PopupLiteral<S,1>
|
|
StageDesc = PopupLiteral<S,2>
|
|
CharFlag = PopupLiteral<S,3>
|
|
ToolClass = PopupLiteral<S,4>
|
|
|
|
QInWfrIDs = XLATE('TOOL_CLASS',ToolClass,'QIN_WFR_ID','X')
|
|
RDSNos = XLATE('WO_WFR',QInWfrIDs,'RDS_NO','X')
|
|
|
|
NEXT S
|
|
|
|
|
|
RETURN
|
|
|
|
|