open-insight/LSL2/APPROW/STAGE%003AFWIC.json
2024-03-25 15:12:53 -07:00

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JSON

{
"header": {
"version": 1,
"type": "record",
"approw-key": "FWIC"
},
"body": {
"record1": {
"<1>": "First Wafer Clean"
}
}
}