62 lines
2.1 KiB
JSON
62 lines
2.1 KiB
JSON
{
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"header": {
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"version": 1,
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"type": "record",
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"approw-key": "WAFER_COUNT_CONFIRMED"
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},
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"body": {
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"record1": {
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"<1>": "F",
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"<2>": "15",
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"<3>": "Wafer Count Confirmed",
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"<4>": "S",
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"<5>": "",
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"<6>": "",
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"<7>": "B",
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"<8>": "",
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"<9>": "L",
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"<10>": "3",
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"<11>": "(B)",
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"<12>": "BOOLEAN",
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"<13>": "FRANCOIS_R",
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"<14>": "Boolean flag to indicate that the operator confirmed the number of wafers in the cassette matches the number of wafers indicated in the scheduler.",
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"<15>": "",
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"<16>": "",
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"<17>": "",
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"<18>": "",
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"<19>": "",
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"<20>": "",
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"<21>": "",
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"<22>": "",
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"<23>": "",
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"<24>": "",
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"<25>": "",
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"<26>": "",
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"<27>": "",
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"<28>": "1",
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"<29>": "",
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"<30>": "",
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"<31>": "0",
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"<32>": "",
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"<33>": "",
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"<34>": "0",
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"<35>": "16:34:22 13 SEP 2018",
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"<36>": "",
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"<37>": "0",
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"<38>": "",
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"<39>": "",
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"<40>": "",
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"<41>": "",
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"<42>": "",
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"<43>": "",
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"<44>": "",
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"<45>": "",
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"<46>": "",
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"<47>": "",
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"<48>": "",
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"<49>": "",
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"<50>": "",
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}
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}
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} |