compile insert SPC_LIMITS_EQU * equates for "CONFIG" "SPC_LIMITS" equ SRDParticleMin$ to 1 equ SRDParticleMax$ to 2 equ SRDParticleDate$ to 3 equ SC1ParticleMin$ to 4 equ SC1ParticleMax$ to 5 equ SC1ParticleDate$ to 6 equ HFParticleMin$ to 7 equ HFParticleMax$ to 8 equ HFParticleDate$ to 9 equ HFEtchRemMin$ to 10 equ HFEtchRemMax$ to 11 equ HFEtchRemDate$ to 12 equ WafEtchMin$ to 13 equ WafEtchMax$ to 14 equ WafEtchDate$ to 15 equ Eval4PPHMin$ to 16 equ Eval4PPHMax$ to 17 equ Eval4PPHDate$ to 18 equ Eval4PPHStdevMin$ to 19 equ Eval4PPHStdevMax$ to 20 equ Eval4PPHStdevDate$ to 21 equ EvalFTIRHMin$ to 22 equ EvalFTIRHMax$ to 23 equ EvalFTIRHDate$ to 24 equ EvalFTIRHStdevMin$ to 25 equ EvalFTIRHStdevMax$ to 26 equ EvalFTIRHStdevDate$ to 27 equ Eval4PPMMin$ to 28 equ Eval4PPMMax$ to 29 equ Eval4PPMDate$ to 30 equ Eval4PPMStdevMin$ to 31 equ Eval4PPMStdevMax$ to 32 equ Eval4PPMStdevDate$ to 33 equ EvalFTIRMMin$ to 34 equ EvalFTIRMMax$ to 35 equ EvalFTIRMDate$ to 36 equ EvalFTIRMStdevMin$ to 37 equ EvalFTIRMStdevMax$ to 38 equ EvalFTIRMStdevDate$ to 39 equ Eval4PPLMin$ to 40 equ Eval4PPLMax$ to 41 equ Eval4PPLDate$ to 42 equ Eval4PPLStdevMin$ to 43 equ Eval4PPLStdevMax$ to 44 equ Eval4PPLStdevDate$ to 45 equ EvalFTIRLMin$ to 46 equ EvalFTIRLMax$ to 47 equ EvalFTIRLDate$ to 48 equ EvalFTIRLStdevMin$ to 49 equ EvalFTIRLStdevMax$ to 50 equ EvalFTIRLStdevDate$ to 51 equ Eval4PPHWaferID$ to 52 equ Eval4PPMWaferID$ to 53 equ Eval4PPLWaferID$ to 54 equ Eval4PPHStdevWaferID$ to 55 equ Eval4PPMStdevWaferID$ to 56 equ Eval4PPLStdevWaferID$ to 57 equ EvalFTIRHWaferID$ to 58 equ EvalFTIRMWaferID$ to 59 equ EvalFTIRLWaferID$ to 60 equ EvalFTIRHStdevWaferID$ to 61 equ EvalFTIRMStdevWaferID$ to 62 equ EvalFTIRLStdevWaferID$ to 63 equ ReactPartMin$ to 64 equ ReactPartMax$ to 65 equ ReactPartDate$ to 66 equ ReactHazeMin$ to 67 equ ReactHazeMax$ to 68 equ ReactHazeDate$ to 69 equ HFEtchAkrionRemEtchMin$ to 70 equ HFEtchAkrionRemEtchMax$ to 71 equ HFEtchAkrionRemEtchDate$ to 72 equ HFParticleAkrionQualMin$ to 73 equ HFParticleAkrionQualMax$ to 74 equ HFParticleAkrionQualDate$ to 75 equ HFParticleAkrionHFLastMin$ to 76 equ HFParticleAkrionHFLastMax$ to 77 equ HFParticleAkrionHFLastDate$ to 78 equ HFEtchAkrionRemDiluteMin$ to 79 equ HFEtchAkrionRemDiluteMax$ to 80 equ HFEtchAkrionRemDiluteDate$ to 81 equ EvalADEHMin$ to 82 equ EvalADEHMax$ to 83 equ EvalADEHDate$ to 84 equ EvalADEHStdevMin$ to 85 equ EvalADEHStdevMax$ to 86 equ EvalADEHStdevDate$ to 87 equ EvalADEMMin$ to 88 equ EvalADEMMax$ to 89 equ EvalADEMDate$ to 90 equ EvalADEMStdevMin$ to 91 equ EvalADEMStdevMax$ to 92 equ EvalADEMStdevDate$ to 93 equ EvalADELMin$ to 94 equ EvalADELMax$ to 95 equ EvalADELDate$ to 96 equ EvalADELStdevMin$ to 97 equ EvalADELStdevMax$ to 98 equ EvalADELStdevDate$ to 99 equ EvalADEHWaferID$ to 100 equ EvalADEMWaferID$ to 101 equ EvalADELWaferID$ to 102 equ EvalADEHStdevWaferID$ to 103 equ EvalADEMStdevWaferID$ to 104 equ EvalADELStdevWaferID$ to 105