* Equates for RECIPE created on 03/26/01 10:03AM equ RECIPE_EPI_DOPANT$ to 1 equ RECIPE_EPI_TEMP$ to 2 equ RECIPE_REACTOR_TYPE$ to 3 equ RECIPE_EPI_DILUENT$ to 4 equ RECIPE_EPI_GASES$ to 5 equ RECIPE_EPI_GASES_UNIT$ to 6 equ RECIPE_DEP_TIME_MIN$ to 7 equ RECIPE_DEP_TIME_MAX$ to 8 equ RECIPE_DOPANT_FLOW_MIN$ to 9 equ RECIPE_DOPANT_FLOW_MAX$ to 10 equ RECIPE_ETCH_TIME$ to 11 equ RECIPE_BAKE_TIME_MAX$ to 12 equ RECIPE_H2_FLOW_MIN$ to 13 equ RECIPE_H2_FLOW_MAX$ to 14 equ RECIPE_DCS_FLOW_MIN$ to 15 equ RECIPE_NOTES$ to 16 equ RECIPE_RECIPE_NAME$ to 17 equ RECIPE_ENTRY_ID$ to 18 equ RECIPE_ENTRY_DATE$ to 19 equ RECIPE_EPI_GAS_RATE$ to 20 equ RECIPE_LAYER_INFO$ to 21 equ RECIPE_MOD_ID$ to 22 equ RECIPE_MOD_DATE$ to 23 equ RECIPE_DCS_FLOW_MAX$ to 24 equ RECIPE_AUX1_MIN$ to 25 equ RECIPE_AUX1_MAX$ to 26 equ RECIPE_AUX2_MIN$ to 27 equ RECIPE_AUX2_MAX$ to 28 equ RECIPE_F_OFFSET_MIN$ to 29 equ RECIPE_F_OFFSET_MAX$ to 30 equ RECIPE_S_OFFSET_MIN$ to 31 equ RECIPE_S_OFFSET_MAX$ to 32 equ RECIPE_R_OFFSET_MIN$ to 33 equ RECIPE_R_OFFSET_MAX$ to 34 equ RECIPE_BAKE_TIME_MIN$ to 35 equ RECIPE_DISK$ to 36 equ RECIPE_DILUENT_MIN$ to 37 equ RECIPE_DILUENT_MAX$ to 38 equ RECIPE_HCL_FLOW_MIN$ to 39 equ RECIPE_HCL_FLOW_MAX$ to 40 equ RECIPE_TCS_FLOW_MIN$ to 41 equ RECIPE_TCS_FLOW_MAX$ to 42 equ RECIPE_CAP_BURST$ to 43 equ RECIPE_CAP_BURST_GASES$ to 44 equ RECIPE_PROD_SPEC_IDS$ to 45 equ RECIPE_RMOD_FIELD$ to 46 equ RECIPE_RMOD_ID$ to 47 equ RECIPE_STATUS$ to 48 equ RECIPE_ENG_SIG$ to 49 equ RECIPE_ETCH1_MIN$ to 50 equ RECIPE_ETCH1_MAX$ to 51 equ RECIPE_ETCH2_MIN$ to 52 equ RECIPE_ETCH2_MAX$ to 53