{ "SentToMetrology": false, "SentToSPC": false, "Id": -1, "CellName": "SP101", "Date": "4/24/2025 1:56:23 AM", "LotID": "666335", "Operator": "", "PSN": "5113", "RDS": "666335", "Reactor": "55", "Recipe": "6IN_SLIP", "Session": "6IN_SLIP", "UniqueID": "SP101_55-666335-5113_202504240156235457", "DcnAllMax": "12", "DcnAllMean": "4.440", "DcnAllMin": "1", "DcnAllStDev": "2.238", "DcnAreaCntMax": "12", "DcnAreaCntMean": "4.320", "DcnAreaCntMin": "1", "DcnAreaCntStDev": "2.249", "DcnAreaMax": "1.176", "DcnAreaMean": "0.357", "DcnAreaMin": "0.064", "DcnAreaStDev": "0.243", "DcnBin1Max": "0", "DcnBin1Mean": "0.000", "DcnBin1Min": "0", "DcnBin1StDev": "0.000", "DcnBin2Max": "0", "DcnBin2Mean": "0.000", "DcnBin2Min": "0", "DcnBin2StDev": "0.000", "DcnBin3Max": "0", "DcnBin3Mean": "0.000", "DcnBin3Min": "0", "DcnBin3StDev": "0.000", "DcnBin4Max": "0", "DcnBin4Mean": "0.000", "DcnBin4Min": "0", "DcnBin4StDev": "0.000", "DcnBin5Max": "0", "DcnBin5Mean": "0.000", "DcnBin5Min": "0", "DcnBin5StDev": "0.000", "DcnBin6Max": "0", "DcnBin6Mean": "0.000", "DcnBin6Min": "0", "DcnBin6StDev": "0.000", "DcnBin7Max": "0", "DcnBin7Mean": "0.000", "DcnBin7Min": "0", "DcnBin7StDev": "0.000", "DcnBin8Max": "0", "DcnBin8Mean": "0.000", "DcnBin8Min": "0", "DcnBin8StDev": "0.000", "DcnHazeAvgMax": "0.660", "DcnHazeAvgMean": "0.622", "DcnHazeAvgMin": "0.589", "DcnHazeAvgStDev": "0.016", "DcnHazeMedMax": "0.645", "DcnHazeMedMean": "0.615", "DcnHazeMedMin": "0.584", "DcnHazeMedStDev": "0.016", "DcnHazeStDevMax": "0.278", "DcnHazeStDevMean": "0.070", "DcnHazeStDevMin": "0.048", "DcnHazeStDevStDev": "0.044", "DcnLpdESMax": "NA", "DcnLpdESMean": "NA", "DcnLpdESMin": "NA", "DcnLpdESStDev": "NA", "DcnLpdMax": "0", "DcnLpdMean": "0.000", "DcnLpdMin": "0", "DcnLpdNMax": "NA", "DcnLpdNMean": "NA", "DcnLpdNMin": "NA", "DcnLpdNStDev": "NA", "DcnLpdStDev": "0.000", "DcnMicroScrMax": "NA", "DcnMicroScrMean": "NA", "DcnMicroScrMin": "NA", "DcnMicroScrStDev": "NA", "DcnScrMax": "0", "DcnScrMean": "0.000", "DcnScrMin": "0", "DcnScrStDev": "0.000", "DcnSlipMax": "1.732", "DcnSlipMean": "0.093", "DcnSlipMin": "0.000", "DcnSlipStDev": "0.361", "DnnAllMax": "14", "DnnAllMean": "4.840", "DnnAllMin": "1", "DnnAllStDev": "2.577", "DnnAreaCntMax": "14", "DnnAreaCntMean": "4.840", "DnnAreaCntMin": "1", "DnnAreaCntStDev": "2.577", "DnnAreaMax": "0.786", "DnnAreaMean": "0.250", "DnnAreaMin": "0.073", "DnnAreaStDev": "0.154", "DnnBin1Max": "0", "DnnBin1Mean": "0.000", "DnnBin1Min": "0", "DnnBin1StDev": "0.000", "DnnBin2Max": "0", "DnnBin2Mean": "0.000", "DnnBin2Min": "0", "DnnBin2StDev": "0.000", "DnnBin3Max": "0", "DnnBin3Mean": "0.000", "DnnBin3Min": "0", "DnnBin3StDev": "0.000", "DnnBin4Max": "0", "DnnBin4Mean": "0.000", "DnnBin4Min": "0", "DnnBin4StDev": "0.000", "DnnBin5Max": "0", "DnnBin5Mean": "0.000", "DnnBin5Min": "0", "DnnBin5StDev": "0.000", "DnnBin6Max": "0", "DnnBin6Mean": "0.000", "DnnBin6Min": "0", "DnnBin6StDev": "0.000", "DnnBin7Max": "0", "DnnBin7Mean": "0.000", "DnnBin7Min": "0", "DnnBin7StDev": "0.000", "DnnBin8Max": "0", "DnnBin8Mean": "0.000", "DnnBin8Min": "0", "DnnBin8StDev": "0.000", "DnnHazeAvgMax": "0.477", "DnnHazeAvgMean": "0.440", "DnnHazeAvgMin": "0.411", "DnnHazeAvgStDev": "0.019", "DnnHazeMedMax": "0.476", "DnnHazeMedMean": "0.437", "DnnHazeMedMin": "0.408", "DnnHazeMedStDev": "0.019", "DnnHazeStDevMax": "0.187", "DnnHazeStDevMean": "0.032", "DnnHazeStDevMin": "0.017", "DnnHazeStDevStDev": "0.033", "DnnLpdESMax": "NA", "DnnLpdESMean": "NA", "DnnLpdESMin": "NA", "DnnLpdESStDev": "NA", "DnnLpdMax": "0", "DnnLpdMean": "0.000", "DnnLpdMin": "0", "DnnLpdNMax": "NA", "DnnLpdNMean": "NA", "DnnLpdNMin": "NA", "DnnLpdNStDev": "NA", "DnnLpdStDev": "0.000", "DnnMicroScrMax": "NA", "DnnMicroScrMean": "NA", "DnnMicroScrMin": "NA", "DnnMicroScrStDev": "NA", "DnnScrMax": "NA", "DnnScrMean": "NA", "DnnScrMin": "NA", "DnnScrStDev": "NA", "DnnSlipMax": "NA", "DnnSlipMean": "NA", "DnnSlipMin": "NA", "DnnSlipStDev": "NA", "DwnAllMax": "4", "DwnAllMean": "1.560", "DwnAllMin": "0", "DwnAllStDev": "1.083", "DwnAreaCntMax": "4", "DwnAreaCntMean": "1.560", "DwnAreaCntMin": "0", "DwnAreaCntStDev": "1.083", "DwnAreaMax": "0.042", "DwnAreaMean": "0.007", "DwnAreaMin": "0.000", "DwnAreaStDev": "0.012", "DwnBin1Max": "0", "DwnBin1Mean": "0.000", "DwnBin1Min": "0", "DwnBin1StDev": "0.000", "DwnBin2Max": "0", "DwnBin2Mean": "0.000", "DwnBin2Min": "0", "DwnBin2StDev": "0.000", "DwnBin3Max": "0", "DwnBin3Mean": "0.000", "DwnBin3Min": "0", "DwnBin3StDev": "0.000", "DwnBin4Max": "0", "DwnBin4Mean": "0.000", "DwnBin4Min": "0", "DwnBin4StDev": "0.000", "DwnBin5Max": "0", "DwnBin5Mean": "0.000", "DwnBin5Min": "0", "DwnBin5StDev": "0.000", "DwnBin6Max": "0", "DwnBin6Mean": "0.000", "DwnBin6Min": "0", "DwnBin6StDev": "0.000", "DwnBin7Max": "0", "DwnBin7Mean": "0.000", "DwnBin7Min": "0", "DwnBin7StDev": "0.000", "DwnBin8Max": "0", "DwnBin8Mean": "0.000", "DwnBin8Min": "0", "DwnBin8StDev": "0.000", "DwnHazeAvgMax": "0.218", "DwnHazeAvgMean": "0.182", "DwnHazeAvgMin": "0.151", "DwnHazeAvgStDev": "0.016", "DwnHazeMedMax": "0.200", "DwnHazeMedMean": "0.168", "DwnHazeMedMin": "0.137", "DwnHazeMedStDev": "0.017", "DwnHazeStDevMax": "0.108", "DwnHazeStDevMean": "0.065", "DwnHazeStDevMin": "0.053", "DwnHazeStDevStDev": "0.010", "DwnLpdESMax": "NA", "DwnLpdESMean": "NA", "DwnLpdESMin": "NA", "DwnLpdESStDev": "NA", "DwnLpdMax": "0", "DwnLpdMean": "0.000", "DwnLpdMin": "0", "DwnLpdNMax": "NA", "DwnLpdNMean": "NA", "DwnLpdNMin": "NA", "DwnLpdNStDev": "NA", "DwnLpdStDev": "0.000", "DwnMicroScrMax": "NA", "DwnMicroScrMean": "NA", "DwnMicroScrMin": "NA", "DwnMicroScrStDev": "NA", "DwnScrMax": "NA", "DwnScrMean": "NA", "DwnScrMin": "NA", "DwnScrStDev": "NA", "DwnSlipMax": "NA", "DwnSlipMean": "NA", "DwnSlipMin": "NA", "DwnSlipStDev": "NA", "Details": [ { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/1-2/1", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-1", "WaferID": "1", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.230", "DcnAreaCount": "2", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.640", "DcnHazeMedian": "0.636", "DcnHazeStdDev": "0.061", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.155", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.448", "DnnHazeMedian": "0.443", "DnnHazeStdDev": "0.028", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "0", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.192", "DwnHazeMedian": "0.179", "DwnHazeStdDev": "0.066", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/2-2/2", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-2", "WaferID": "2", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.064", "DcnAreaCount": "2", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.644", "DcnHazeMedian": "0.636", "DcnHazeStdDev": "0.058", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.581", "DnnAll": "", "DnnArea": "0.073", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.459", "DnnHazeMedian": "0.456", "DnnHazeStdDev": "0.024", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "0", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.185", "DwnHazeMedian": "0.169", "DwnHazeStdDev": "0.062", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/3-2/3", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-3", "WaferID": "3", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.345", "DcnAreaCount": "7", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.615", "DcnHazeMedian": "0.601", "DcnHazeStdDev": "0.070", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.284", "DnnAreaCount": "9", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.449", "DnnHazeMedian": "0.447", "DnnHazeStdDev": "0.017", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "4", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.165", "DwnHazeMedian": "0.145", "DwnHazeStdDev": "0.068", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/4-2/4", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-4", "WaferID": "4", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.284", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.631", "DcnHazeMedian": "0.625", "DcnHazeStdDev": "0.065", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.192", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.450", "DnnHazeMedian": "0.448", "DnnHazeStdDev": "0.026", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.181", "DwnHazeMedian": "0.166", "DwnHazeStdDev": "0.062", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/5-2/5", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-5", "WaferID": "5", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.298", "DcnAreaCount": "2", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.624", "DcnHazeMedian": "0.612", "DcnHazeStdDev": "0.065", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.202", "DnnAreaCount": "2", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.453", "DnnHazeMedian": "0.452", "DnnHazeStdDev": "0.026", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.028", "DwnAreaCount": "2", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.170", "DwnHazeMedian": "0.153", "DwnHazeStdDev": "0.061", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/6-2/6", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-6", "WaferID": "6", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.119", "DcnAreaCount": "1", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.650", "DcnHazeMedian": "0.641", "DcnHazeStdDev": "0.060", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.083", "DnnAreaCount": "1", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.468", "DnnHazeMedian": "0.467", "DnnHazeStdDev": "0.027", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.182", "DwnHazeMedian": "0.166", "DwnHazeStdDev": "0.066", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/7-2/7", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-7", "WaferID": "7", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.293", "DcnAreaCount": "5", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.660", "DcnHazeMedian": "0.645", "DcnHazeStdDev": "0.072", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.222", "DnnAreaCount": "5", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.477", "DnnHazeMedian": "0.476", "DnnHazeStdDev": "0.018", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.182", "DwnHazeMedian": "0.164", "DwnHazeStdDev": "0.072", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/8-2/8", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-8", "WaferID": "8", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.530", "DcnAreaCount": "5", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.608", "DcnHazeMedian": "0.596", "DcnHazeStdDev": "0.059", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.309", "DnnAreaCount": "7", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.442", "DnnHazeMedian": "0.437", "DnnHazeStdDev": "0.030", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.024", "DwnAreaCount": "3", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.167", "DwnHazeMedian": "0.145", "DwnHazeStdDev": "0.065", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/9-2/9", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-9", "WaferID": "9", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.138", "DcnAreaCount": "3", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.607", "DcnHazeMedian": "0.598", "DcnHazeStdDev": "0.086", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.113", "DnnAreaCount": "3", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.448", "DnnHazeMedian": "0.444", "DnnHazeStdDev": "0.043", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "0", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.160", "DwnHazeMedian": "0.147", "DwnHazeStdDev": "0.065", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/10-2/10", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-10", "WaferID": "10", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.501", "DcnAreaCount": "5", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.627", "DcnHazeMedian": "0.618", "DcnHazeStdDev": "0.060", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.347", "DnnAreaCount": "5", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.459", "DnnHazeMedian": "0.453", "DnnHazeStdDev": "0.027", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.021", "DwnAreaCount": "2", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.169", "DwnHazeMedian": "0.154", "DwnHazeStdDev": "0.066", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/11-2/11", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-11", "WaferID": "11", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.498", "DcnAreaCount": "7", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.611", "DcnHazeMedian": "0.604", "DcnHazeStdDev": "0.057", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.342", "DnnAreaCount": "7", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.461", "DnnHazeMedian": "0.461", "DnnHazeStdDev": "0.020", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.022", "DwnAreaCount": "3", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.151", "DwnHazeMedian": "0.137", "DwnHazeStdDev": "0.061", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/12-2/12", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-12", "WaferID": "12", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.311", "DcnAreaCount": "3", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.617", "DcnHazeMedian": "0.608", "DcnHazeStdDev": "0.059", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.197", "DnnAreaCount": "3", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.448", "DnnHazeMedian": "0.444", "DnnHazeStdDev": "0.022", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.169", "DwnHazeMedian": "0.156", "DwnHazeStdDev": "0.062", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/13-2/13", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-13", "WaferID": "13", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.254", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.623", "DcnHazeMedian": "0.619", "DcnHazeStdDev": "0.059", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.191", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.461", "DnnHazeMedian": "0.458", "DnnHazeStdDev": "0.023", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.162", "DwnHazeMedian": "0.153", "DwnHazeStdDev": "0.057", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/14-2/14", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-14", "WaferID": "14", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.445", "DcnAreaCount": "5", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.622", "DcnHazeMedian": "0.615", "DcnHazeStdDev": "0.057", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.316", "DnnAreaCount": "5", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.444", "DnnHazeMedian": "0.440", "DnnHazeStdDev": "0.025", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "2", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.178", "DwnHazeMedian": "0.168", "DwnHazeStdDev": "0.064", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/15-2/15", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-15", "WaferID": "15", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.285", "DcnAreaCount": "2", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.609", "DcnHazeMedian": "0.602", "DcnHazeStdDev": "0.058", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.190", "DnnAreaCount": "3", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.425", "DnnHazeMedian": "0.418", "DnnHazeStdDev": "0.027", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.184", "DwnHazeMedian": "0.172", "DwnHazeStdDev": "0.062", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/16-2/16", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-16", "WaferID": "16", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.845", "DcnAreaCount": "6", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.604", "DcnHazeMedian": "0.604", "DcnHazeStdDev": "0.057", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.547", "DnnAreaCount": "6", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.426", "DnnHazeMedian": "0.423", "DnnHazeStdDev": "0.024", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.026", "DwnAreaCount": "3", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.178", "DwnHazeMedian": "0.170", "DwnHazeStdDev": "0.063", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/17-2/17", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-17", "WaferID": "17", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.148", "DcnAreaCount": "3", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.625", "DcnHazeMedian": "0.623", "DcnHazeStdDev": "0.053", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.111", "DnnAreaCount": "3", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.432", "DnnHazeMedian": "0.430", "DnnHazeStdDev": "0.022", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.193", "DwnHazeMedian": "0.188", "DwnHazeStdDev": "0.060", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/18-2/18", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-18", "WaferID": "18", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.467", "DcnAreaCount": "5", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.638", "DcnHazeMedian": "0.635", "DcnHazeStdDev": "0.048", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.308", "DnnAreaCount": "5", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.439", "DnnHazeMedian": "0.436", "DnnHazeStdDev": "0.021", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "3", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.199", "DwnHazeMedian": "0.191", "DwnHazeStdDev": "0.053", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/19-2/19", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-19", "WaferID": "19", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.282", "DcnAreaCount": "6", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.624", "DcnHazeMedian": "0.622", "DcnHazeStdDev": "0.050", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.247", "DnnAreaCount": "6", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.423", "DnnHazeMedian": "0.416", "DnnHazeStdDev": "0.027", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.201", "DwnHazeMedian": "0.193", "DwnHazeStdDev": "0.058", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/20-2/20", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-20", "WaferID": "20", "Data": "*Data*", "DcnAll": "", "DcnArea": "1.176", "DcnAreaCount": "12", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.619", "DcnHazeMedian": "0.617", "DcnHazeStdDev": "0.054", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.786", "DnnAreaCount": "14", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.411", "DnnHazeMedian": "0.408", "DnnHazeStdDev": "0.026", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "3", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.208", "DwnHazeMedian": "0.198", "DwnHazeStdDev": "0.061", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/21-2/21", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-21", "WaferID": "21", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.170", "DcnAreaCount": "3", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.589", "DcnHazeMedian": "0.584", "DcnHazeStdDev": "0.064", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.135", "DnnAreaCount": "3", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.416", "DnnHazeMedian": "0.416", "DnnHazeStdDev": "0.023", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.173", "DwnHazeMedian": "0.165", "DwnHazeStdDev": "0.067", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/22-2/22", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-22", "WaferID": "22", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.407", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.602", "DcnHazeMedian": "0.596", "DcnHazeStdDev": "0.058", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.269", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.422", "DnnHazeMedian": "0.418", "DnnHazeStdDev": "0.027", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.181", "DwnHazeMedian": "0.167", "DwnHazeStdDev": "0.066", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/23-2/23", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-23", "WaferID": "23", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.516", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.609", "DcnHazeMedian": "0.603", "DcnHazeStdDev": "0.063", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.319", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.415", "DnnHazeMedian": "0.413", "DnnHazeStdDev": "0.024", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.194", "DwnHazeMedian": "0.181", "DwnHazeStdDev": "0.058", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/24-2/24", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-24", "WaferID": "24", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.180", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.614", "DcnHazeMedian": "0.606", "DcnHazeStdDev": "0.067", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "1.732", "DnnAll": "", "DnnArea": "0.178", "DnnAreaCount": "6", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.418", "DnnHazeMedian": "0.415", "DnnHazeStdDev": "0.023", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.000", "DwnAreaCount": "2", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.196", "DwnHazeMedian": "0.179", "DwnHazeStdDev": "0.060", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" }, { "Grade": "Grade1", "HeaderUniqueID": "SP101_55-666335-5113_202504240156235457", "Side": "F", "SrcDest": "2/25-2/25", "UniqueID": "SP101_55-666335-5113_202504240156235457_Item-25", "WaferID": "25", "Data": "*Data*", "DcnAll": "", "DcnArea": "0.152", "DcnAreaCount": "4", "DcnBin1": "0", "DcnBin2": "0", "DcnBin3": "0", "DcnBin4": "0", "DcnBin5": "0", "DcnBin6": "0", "DcnBin7": "0", "DcnBin8": "0", "DcnHazeAvg": "0.633", "DcnHazeMedian": "0.622", "DcnHazeStdDev": "0.278", "DcnLpd": "0", "DcnLpdES": "NA", "DcnLpdN": "NA", "DcnMicroScr": "NA", "DcnScr": "0", "DcnSlip": "0.000", "DnnAll": "", "DnnArea": "0.128", "DnnAreaCount": "4", "DnnBin1": "0", "DnnBin2": "0", "DnnBin3": "0", "DnnBin4": "0", "DnnBin5": "0", "DnnBin6": "0", "DnnBin7": "0", "DnnBin8": "0", "DnnHazeAvg": "0.415", "DnnHazeMedian": "0.414", "DnnHazeStdDev": "0.187", "DnnLpd": "0", "DnnLpdES": "NA", "DnnLpdN": "NA", "DnnMicroScr": "NA", "DnnScr": "NA", "DnnSlip": "NA", "DwnAll": "", "DwnArea": "0.042", "DwnAreaCount": "1", "DwnBin1": "0", "DwnBin2": "0", "DwnBin3": "0", "DwnBin4": "0", "DwnBin5": "0", "DwnBin6": "0", "DwnBin7": "0", "DwnBin8": "0", "DwnHazeAvg": "0.218", "DwnHazeMedian": "0.200", "DwnHazeStdDev": "0.108", "DwnLpd": "0", "DwnLpdES": "NA", "DwnLpdN": "NA", "DwnMicroScr": "NA", "DwnScr": "NA", "DwnSlip": "NA" } ] }