Compare commits

..

1 Commits

Author SHA1 Message Date
6f03b36075 Common ResourceID and IsViewerFile
Test data and vba
2025-05-27 15:42:15 -07:00
39 changed files with 8444 additions and 3355 deletions

1
.gitignore vendored
View File

@ -1,3 +1,4 @@
LSL2/STPROC/TEST_DANIEL*.txt
LSL2/STPROC/TEST_DAKOTA.txt
LSL2/STPROC/JONATHAN_SERVICES.txt
.vscode/**/*.png

234
.vscode/.txt vendored Normal file
View File

@ -0,0 +1,234 @@
// T:\met08resisrp2100\06_SourceCode\met08resisrp2100\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.Date // 001
// x.Employee // 002
// x.Recipe // 003
// x.Reactor // 004
// x.RDS // 005
// x.PSN // 006
// x.Layer // 007
// x.Zone // 008
// T:\met08anlysdifaast230\06_SourceCode\met08anlysdifaast230\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.PSN // 001
// x.Reactor // 002
// logistics.MesEntity // 003
// x.RDS // 004
// x.Recipe // 005
// x.Employee // 006
// x.SlotNumber // 007
// T:\met08thftirstratus\06_SourceCode\met08thftirstratus\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// "Stratus_" // 001
// x.Date // 002
// logistics.JobID // 003
// "FQA Thickness" // 004
// x.Employee // 005
// x.Recipe // 006
// x.Reactor // 007
// x.RDS // 008
// x.PSN // 009
// x.Lot // 010
// x.Cassette // 011
// x.MeanThickness // 012
// descriptions[i].Slot // 013
// descriptions[i].Mean // 014
// T:\met08thftirqs408m\06_SourceCode\met08thftirqs408m\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// Bio-Rad UniqueId // 001
// Date // 002
// ThicknessFourteenCriticalPointsAverage // 003
// Recipe // 004
// Reactor // 005
// RDS // 006
// PSN // 007
// Layer // 008
// Zone // 009
// Cassette // 010
// Wafer // 011
// RVThickness // 012
// Position // 013
// Thickness // 014
// T:\met08resimapcde\06_SourceCode\met08resimapcde\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.UniqueId // 001
// x.Run // 002
// x.Date // 003
// x.Lot // 004
// x.Recipe // 005
// x.Reactor // 006
// x.RDS // 007
// x.PSN // 008
// x.Layer // 009
// x.Zone // 010
// logistics.MesEntity // 011
// x.Employee // 012
// x.Engineer // 013
// x.DLRatio // 014
// x.Temp // 015
// x.AutoOptimizeGain // 016
// x.AutoProbeHeightSet // 017
// x.DataReject // 018
// x.FileName // 019
// x.Avg // 020
// x.StdDev // 021
// x.SemiRadial // 022
// description.Pt // 023
// description.R // 024
// description.T // 025
// description.Rs // 026
// description.Merit // 027
// T:\met08resihgcv\06_SourceCode\met08resihgcv\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.UniqueId // 001
// logistics.MesEntity // 002
// x.Reactor // 003
// x.RDS // 004
// x.PSN // 005
// x.Layer // 006
// x.Zone // 007
// x.Wafer // 008
// x.Lot // 009
// x.Plan // 010
// x.Date // 011
// x.WaferSize // 012
// x.Ccomp // 013
// x.Area // 014
// x.CondType // 015
// x.Model // 016
// x.StartVoltage // 017
// x.StopVoltage // 018
// x.RampRate // 019
// x.GLimit // 020
// x.SetupFile // 021
// x.SetupFile // 022
// x.Folder // 023
// x.Pattern // 024
// x.RhoMethod // 025
// x.NAvgMean // 026
// x.NAvgStdDev // 027
// x.NAvgRadialGradient // 028
// x.NslMean // 029
// x.NslStdDev // 030
// x.NslRadialGradient // 031
// x.VdMean // 032
// x.VdStdDev // 033
// x.VdRadialGradient // 034
// x.FlatZMean // 035
// x.FlatZStdDev // 036
// x.FlatZRadialGradient // 037
// x.RhoAvgMean // 038
// x.RhoAvgStdDev // 039
// x.RhoAvgRadialGradient // 040
// x.RhoslMean // 041
// x.RhoslStdDev // 042
// x.RhoslRadialGradient // 043
// x.PhaseMean // 044
// x.PhaseStdDev // 045
// x.PhaseRadialGradient // 046
// x.GradeMean // 047
// x.GradeStdDev // 048
// x.GradeRadialGradient // 049
// x.RsMean // 050
// x.RsStdDev // 051
// x.RsRadialGradient // 052
// description.Index // 053
// description.NAvg // 054
// description.Nsl // 055
// description.Vd // 056
// description.FlatZ // 057
// description.RhoAvg // 058
// description.Rhosl // 059
// description.Phase // 060
// description.Grade // 061
// T:\met08ddupsfs6420\06_SourceCode\met08ddupsfs6420\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.AreaCountAvg // 001 - AreaCountAvg
// x.AreaCountMax // 002 - AreaCountMax
// x.AreaCountMin // 003 - AreaCountMin
// x.AreaCountStdDev // 004 - AreaCountStdDev
// x.AreaTotalAvg // 005 - AreaTotalAvg
// x.AreaTotalMax // 006 - AreaTotalMax
// x.AreaTotalMin // 007 - AreaTotalMin
// x.AreaTotalStdDev // 008 - AreaTotalStdDev
// x.Date // 009 -
// x.HazeAverageAvg // 010 - Haze Average
// x.HazeAverageMax // 011 -
// x.HazeAverageMin // 012 -
// x.HazeAverageStdDev // 013 -
// x.HazeRegionAvg // 014 -
// x.HazeRegionMax // 015 -
// x.HazeRegionMin // 016 -
// x.HazeRegionStdDev // 017 -
// x.Lot // 018 -
// x.LPDCM2Avg // 019 -
// x.LPDCM2Max // 020 -
// x.LPDCM2Min // 021 -
// x.LPDCM2StdDev // 022 -
// x.LPDCountAvg // 023 -
// x.LPDCountMax // 024 -
// x.LPDCM2Min // 025 -
// x.LPDCountStdDev // 026 -
// x.Employee // 027 -
// x.RDS // 028 - Lot
// x.Reactor // 029 - Process
// x.Recipe // 030 - Part
// x.ScratchCountAvg // 031 - Scratch Count
// x.ScratchCountMax // 032 -
// x.ScratchCountMin // 033 -
// x.ScratchTotalStdDev // 034 -
// x.ScratchTotalAvg // 035 - Scratch Length
// x.ScratchTotalMax // 036 -
// x.ScratchTotalMin // 037 -
// x.ScratchTotalStdDev // 038 -
// x.SumOfDefectsAvg // 039 - Average Sum of Defects
// x.SumOfDefectsMax // 040 - Max Sum of Defects
// x.SumOfDefectsMin // 041 - Min Sum of Defects
// x.SumOfDefectsStdDev // 042 - SumOfDefectsStdDev
// logistics.MesEntity // 043 -
// T:\met08ddupsp1tbi\06_SourceCode\met08ddupsp1tbi\Adaptation\FileHandlers\OpenInsight\FileRead.cs
// x.DcnLpdMin // 001 -
// x.DcnLpdMax // 002 -
// x.DcnLpdMean // 003 - DCN LPD
// x.DcnAreaCountMin // 004 -
// x.DcnAreaCountMax // 005 -
// x.DcnAreaCountMean // 006 - DCN Area
// x.DcnAreaMin // 007 -
// x.DcnAreaMax // 008 -
// x.Date // 009 -
// x.DcnHazeAvgMean // 010 - Haze Average
// string.Empty // 011 -
// string.Empty // 012 -
// string.Empty // 013 -
// string.Empty // 014 -
// string.Empty // 015 -
// string.Empty // 016 -
// string.Empty // 017 -
// string.Empty // 018 -
// string.Empty // 019 -
// string.Empty // 020 -
// string.Empty // 021 -
// string.Empty // 022 -
// string.Empty // 023 -
// string.Empty // 024 -
// string.Empty // 025 -
// string.Empty // 026 -
// string.Empty // 027 -
// x.RDS // 028 - Lot
// x.Reactor // 029 - Process
// x.Recipe // 030 - Part
// x.DcnScrMean // 031 - Scratch Count
// string.Empty // 032 -
// string.Empty // 033 -
// string.Empty // 034 -
// x.DcnMicroScrMean // 035 - Scratch Length
// string.Empty // 036 -
// string.Empty // 037 -
// string.Empty // 038 -
// x.DcnAllMean // 039 - Average Sum of Defects
// x.DcnAllMax // 040 - Max Sum of defects
// x.DcnAllMin // 041 - Min Sum of Defects
// string.Empty // 042 -
// logistics.MesEntity // 043 -
// x.DcnAreaMean // 044 - DCN MM2

280
.vscode/.vba vendored Normal file
View File

@ -0,0 +1,280 @@
Service SetJsonFromProcessDataStandardFormat(DataPath, FileName)
OSREAD Text FROM DataPath:FileName THEN
Records = 0;
Sequence = -1;
HeaderId = -1;
SubgroupId = -1;
ColumnTitlesLine = 0;
FoundEndOfFile = False$;
json = '{ "Records": [':@FM;
SWAP '|' WITH @VM IN Text;
SWAP CRLF$ WITH @FM IN Text;
ColumnTitlesIndexCount = 0;
LineCount = DCOUNT(Text, @FM);
FOR LineLoopIndex = 1 TO LineCount
Line = Text<LineLoopIndex>;
IF FoundEndOfFile = True$ THEN
IF Line<1, 1> = 'END_OFFSET' THEN
ColumnTitlesLine = LineLoopIndex + 2;
END
IF ColumnTitlesLine GT 0 THEN
Row = '{';
SegmentsCount = DCOUNT(Line, @VM);
IF ColumnTitlesIndexCount EQ 0 THEN
FOR SegmentLoopIndex = 1 TO SegmentsCount
IF SegmentLoopIndex = ColumnTitlesLine THEN
ColumnTitlesIndexCount = SegmentsCount - 2;
END
NEXT SegmentLoopIndex
END
IF ColumnTitlesIndexCount GT 0 AND SegmentsCount = ColumnTitlesIndexCount THEN
FOR SegmentLoopIndex = 1 TO SegmentsCount
Value = SRP_String('Trim', Line<1,SegmentLoopIndex>, 'FB');
swap '"' with '\"' in Value;
swap '\' with '\\' in Value;
Column = Text<ColumnTitlesLine,SegmentLoopIndex + 1>;
IF Column[1,1] = '"' AND Column[-1,1] = '"' THEN
Column = Column[2,LEN(Column) - 2];
END
Row = Row:'"':Column:'":"':Value:'",';
NEXT SegmentLoopIndex
Row = SRP_String('Trim', Row, 'B', ','):'},':@FM;
json = json:Row;
Records = Records + 1;
END
END
END
IF Line = 'EOF' THEN
FoundEndOfFile = True$;
Line = Text<LineLoopIndex - 1>;
Convert Tab$ to @FM IN Line
SWAP '=' WITH @VM IN Line;
SWAP ';' WITH @FM IN Line;
IF Line<2, 1> = 'B_HeaderId' THEN
HeaderId = Line<2, 2>
END
IF Line<3, 1> = 'B_SubgroupId' THEN
SubgroupId = Line<3, 2>
END
IF Line<14, 1> = 'B_SEQUENCE' THEN
Sequence = Line<14, 2>
END
END
NEXT LineLoopIndex
IF ColumnTitlesLine GT 0 AND ColumnTitlesIndexCount GT 0 THEN
json = SRP_String('Trim', json, 'B', @FM);
json = SRP_String('Trim', json, 'B', ',');
json = json:@FM:']':@FM:',"Sequence":':Sequence:',"HeaderId":':HeaderId:',"SubgroupId":':SubgroupId:',"Count":':Records:'}';
SWAP @FM WITH CRLF$ IN json;
END
IF LEN(json) GT 0 THEN
set_status(0);
OSWRITE json to DataPath:FileName:'.json'
StatusCode = '';
If Get_Status(StatusCode) THEN
ErrorMessage = 'Error writing run data file to repository: StatusCode = ' : StatusCode;
Metrology_Services('LogResults', '', Machine, 'UID001', Service : ' : ' : ErrorMessage);
Set_Status(0);
END
END
END ELSE
json = '';
END
Response = json;
end service
Service GetStratus(Handle)
Result = ''; // Service ImportStratusData(
Offset = 1
FieldPosition = 13
FieldPositionIncrement = 2
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<2> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DateTime'); // Timestamp
Result<3> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']MesEntity'); // Tool
Result<4> = 'FQA Thickness'; // DataType
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Employee'); // Operator
Result<6> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Recipe'); // Recipe
Result<7> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // Reactor
Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSNo
Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']PSN'); // PSN
Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Batch'); // BatchID
Result<11> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Cassette'); // Cassette
Result<12> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']GradeMean'); // ThickAvg
END
ForOffset = (RecordIndex - 1) * FieldPositionIncrement;
Result<FieldPosition + ForOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Slot'); // Position
Result<FieldPosition + ForOffset + Offset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Mean'); // DataPoint
NEXT RecordIndex
Response = Result;
end service
Service GetBioRadEPPFQA(Handle)
Result = ''; // Service ImportBioRadEPPFQAData(
Offset = 1
FieldPosition = 13
FieldPositionIncrement = 1
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<2> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DateTime'); // Timestamp
Result<4> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Recipe'); // ScanRecipe
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // ReactorID
Result<6> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // WMOKeyID
Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Layer'); // RunDataLayer
END
ForOffset = (RecordIndex - 1) * FieldPositionIncrement;
Result<FieldPosition + ForOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Position'); // Position
Result<FieldPosition + ForOffset + Offset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Thickness'); // DataPoint
NEXT RecordIndex
Response = Result;
end service
Service GetBioRad(Handle)
Result = ''; // Service ImportBioRadData(
Offset = 1
FieldPosition = 13
FieldPositionIncrement = 2
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<2> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DateTime'); // TimeStamp
Result<4> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Recipe'); // ScanRecipe
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // ReactorID
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // ToolID
Result<6> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSKeyID
Result<7> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']PSN'); // PSN
Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Layer'); // RunDataLayer
Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Zone'); // RunDataZone
END
ForOffset = (RecordIndex - 1) * FieldPositionIncrement;
Result<FieldPosition + ForOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Position'); // Position
Result<FieldPosition + ForOffset + Offset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Thickness'); // DataPoint
NEXT RecordIndex
Response = Result;
end service
Service GetCDE(Handle)
Result = ''; // Service ImportCDEData(
Offset = 3
FieldPosition = 23
FieldPositionIncrement = 5
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<3> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Date'); // Timestamp
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RecipeName'); // ScanRecip
Result<6> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // ReactorID
Result<7> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSKeyID
Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']PSN'); // PSN
Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Layer'); // RunDataLayer
Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Zone'); // RunDataZo
END
ForOffset = (RecordIndex - 1) * FieldPositionIncrement;
Result<FieldPosition + ForOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']InferredPoint'); // Position
Result<FieldPosition + ForOffset + Offset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Data'); // DataPoint
Result<FieldPosition + ForOffset + FieldPositionIncrement - 1> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']MeritGOF'); // N/A
NEXT RecordIndex
Response = Result;
end service
Service GetHgCV(Handle)
Result = ''; // Service ImportHgCVData(
Offset = 5
PhaseOffset = 7
FieldPosition = 53
FieldPositionIncrement = 9
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<2> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']MesEntity'); // ToolID
Result<3> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Reactor'); // ReactorID
Result<4> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSKeyID
Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']PSN'); // PSN
Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Wafer'); // LayerZonePair
Result<11> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Date'); // Timestamp
END
ForOffset = (RecordIndex - 1) * FieldPositionIncrement;
Result<FieldPosition + ForOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Site'); // Position
Result<FieldPosition + ForOffset + Offset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RhoAvg'); // HgCVDataPoint
Result<FieldPosition + ForOffset + PhaseOffset> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Phase'); // PhaseDataPoint
Result<FieldPosition + ForOffset + FieldPositionIncrement - 1> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Grade'); // N/A
NEXT RecordIndex
Response = Result;
end service
Service GetTencor(Handle)
Result = ''; // Service ImportTencorData(
Result<1, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<1, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<1, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<1, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<1, 1>
IF RecordIndex = 1 THEN
Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Date'); // Timestamp
Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']HazeAverageAvg'); // HazeAvg
Result<28> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSKeyID
Result<30> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']WaferRecipe'); // ScanRecipe
Result<39> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']SumOfDefectsAvg'); // SoDAvg
Result<40> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']SumOfDefectsMax'); // SoDMax
Result<41> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']SumOfDefectsMin'); // SoDMin
Result<43> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']MesEntity'); // ScanTool
END
NEXT RecordIndex
Response = Result;
end service
Service GetSP1(Handle)
Result = ''; // Service ImportSP1Data(
Result<5, 1> = SRP_JSON(Handle, 'GETVALUE', 'Count');
Result<5, 2> = SRP_JSON(Handle, 'GETVALUE', 'Sequence');
Result<5, 3> = SRP_JSON(Handle, 'GETVALUE', 'HeaderId');
Result<5, 4> = SRP_JSON(Handle, 'GETVALUE', 'SubgroupId');
FOR RecordIndex = 1 TO Result<5, 1>
IF RecordIndex = 1 THEN
Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Date'); // Timestamp
Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnHazeAvgMean'); // HazeAvg
Result<28> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']RDS'); // RDSKeyID
Result<30> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']Session'); // ScanRecipe
IsMisfit = IndexC(Result<30>, 'MISFIT', 1)
IF IsMisfit THEN
Result<3> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMean'); // SoDAvg
Result<2> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMax'); // SoDMax
Result<1> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMin'); // SoDMin
END ELSE
Result<39> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMean'); // SoDAvg
Result<40> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMax'); // SoDMax
Result<41> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAllMin'); // SoDMin
END
Result<43> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']MesEntity'); // ScanTool
Result<44> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:']DcnAreaMean'); // DCNMM2
END
NEXT RecordIndex
Response = Result;
end service

View File

@ -0,0 +1,50 @@
0 0 0.000 1 12 4.320 0.064 1.176 4/24/2025 1:56:23 AM 0.622 666335 55 6IN_SLIP 0.000 NA 4.440 12 1 SP101 0.357
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 | 44 |
|---|---|---|---|----|------|-------|-------|----------------------|-------|----|----|----|----|----|----|----|----|----|----|----|----|----|----|----|----|----|--------|----|----------|----|----|----|----|----|----|----|----|------|----|----|----|-------|-------|
| 0 | 0 | 0 | 1 | 12 | 4.32 | 0.064 | 1.176 | 4/24/2025 1:56:23 AM | 0.622 | | | | | | | | | | | | | | | | | | 666335 | 55 | 6IN_SLIP | 0 | | | | NA | | | | 4.44 | 12 | 1 | | SP101 | 0.357 |
<1>:0
<2>:0
<3>:0
<4>:1
<5>:12
<6>:4.32
<7>:0.064
<8>:1.176
<9>:4/24/2025 1:56:23 AM
<10>:0.622
<11>:
<12>:
<13>:
<14>:
<15>:
<16>:
<17>:
<18>:
<19>:
<20>:
<21>:
<22>:
<23>:
<24>:
<25>:
<26>:
<27>:
<28>:666335
<29>:55
<30>:6IN_SLIP
<31>:0
<32>:
<33>:
<34>:
<35>:NA
<36>:
<37>:
<38>:
<39>:4.44
<40>:12
<41>:1
<42>:
<43>:SP101
<44>:0.357

File diff suppressed because it is too large Load Diff

View File

@ -0,0 +1,87 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Grade" "HeaderUniqueId" "RDS" "Session" "Side" "SrcDest" "UniqueId" "WaferID" "DcnAllMax" "DcnAllMean" "DcnAllMin" "DcnAllStdDev" "DcnAreaCountMax" "DcnAreaCountMean" "DcnAreaCountMin" "DcnAreaCountStdDev" "DcnAreaMax" "DcnAreaMean" "DcnAreaMin" "DcnAreaStdDev" "DcnBin1Max" "DcnBin1Mean" "DcnBin1Min" "DcnBin1StdDev" "DcnBin2Max" "DcnBin2Mean" "DcnBin2Min" "DcnBin2StdDev" "DcnBin3Max" "DcnBin3Mean" "DcnBin3Min" "DcnBin3StdDev" "DcnBin4Max" "DcnBin4Mean" "DcnBin4Min" "DcnBin4StdDev" "DcnBin5Max" "DcnBin5Mean" "DcnBin5Min" "DcnBin5StdDev" "DcnBin6Max" "DcnBin6Mean" "DcnBin6Min" "DcnBin6StdDev" "DcnBin7Max" "DcnBin7Mean" "DcnBin7Min" "DcnBin7StdDev" "DcnBin8Max" "DcnBin8Mean" "DcnBin8Min" "DcnBin8StdDev" "DcnHazeAvgMax" "DcnHazeAvgMean" "DcnHazeAvgMin" "DcnHazeAvgStdDev" "DcnHazeMedianMax" "DcnHazeMedianMean" "DcnHazeMedianMin" "DcnHazeMedianStdDev" "DcnHazeStdDevMax" "DcnHazeStdDevMean" "DcnHazeStdDevMin" "DcnHazeStdDevStdDev" "DcnLpdESMax" "DcnLpdESMean" "DcnLpdESMin" "DcnLpdESStdDev" "DcnLpdMax" "DcnLpdMean" "DcnLpdMin" "DcnLpdNMax" "DcnLpdNMean" "DcnLpdNMin" "DcnLpdNStdDev" "DcnLpdStdDev" "DcnMicroScrMax" "DcnMicroScrMean" "DcnMicroScrMin" "DcnMicroScrStdDev" "DcnScrMax" "DcnScrMean" "DcnScrMin" "DcnScrStdDev" "DcnSlipMax" "DcnSlipMean" "DcnSlipMin" "DcnSlipStdDev" "DnnAllMax" "DnnAllMean" "DnnAllMin" "DnnAllStdDev" "DnnAreaCountMax" "DnnAreaCountMean" "DnnAreaCountMin" "DnnAreaCountStdDev" "DnnAreaMax" "DnnAreaMean" "DnnAreaMin" "DnnAreaStdDev" "DnnBin1Max" "DnnBin1Mean" "DnnBin1Min" "DnnBin1StdDev" "DnnBin2Max" "DnnBin2Mean" "DnnBin2Min" "DnnBin2StdDev" "DnnBin3Max" "DnnBin3Mean" "DnnBin3Min" "DnnBin3StdDev" "DnnBin4Max" "DnnBin4Mean" "DnnBin4Min" "DnnBin4StdDev" "DnnBin5Max" "DnnBin5Mean" "DnnBin5Min" "DnnBin5StdDev" "DnnBin6Max" "DnnBin6Mean" "DnnBin6Min" "DnnBin6StdDev" "DnnBin7Max" "DnnBin7Mean" "DnnBin7Min" "DnnBin7StdDev" "DnnBin8Max" "DnnBin8Mean" "DnnBin8Min" "DnnBin8StdDev" "DnnHazeAvgMax" "DnnHazeAvgMean" "DnnHazeAvgMin" "DnnHazeAvgStdDev" "DnnHazeMedianMax" "DnnHazeMedianMean" "DnnHazeMedianMin" "DnnHazeMedianStdDev" "DnnHazeStdDevMax" "DnnHazeStdDevMean" "DnnHazeStdDevMin" "DnnHazeStdDevStdDev" "DnnLpdESMax" "DnnLpdESMean" "DnnLpdESMin" "DnnLpdESStdDev" "DnnLpdMax" "DnnLpdMean" "DnnLpdMin" "DnnLpdNMax" "DnnLpdNMean" "DnnLpdNMin" "DnnLpdNStdDev" "DnnLpdStdDev" "DnnMicroScrMax" "DnnMicroScrMean" "DnnMicroScrMin" "DnnMicroScrStdDev" "DnnScrMax" "DnnScrMean" "DnnScrMin" "DnnScrStdDev" "DnnSlipMax" "DnnSlipMean" "DnnSlipMin" "DnnSlipStdDev" "DwnAllMax" "DwnAllMean" "DwnAllMin" "DwnAllStdDev" "DwnAreaCountMax" "DwnAreaCountMean" "DwnAreaCountMin" "DwnAreaCountStdDev" "DwnAreaMax" "DwnAreaMean" "DwnAreaMin" "DwnAreaStdDev" "DwnBin1Max" "DwnBin1Mean" "DwnBin1Min" "DwnBin1StdDev" "DwnBin2Max" "DwnBin2Mean" "DwnBin2Min" "DwnBin2StdDev" "DwnBin3Max" "DwnBin3Mean" "DwnBin3Min" "DwnBin3StdDev" "DwnBin4Max" "DwnBin4Mean" "DwnBin4Min" "DwnBin4StdDev" "DwnBin5Max" "DwnBin5Mean" "DwnBin5Min" "DwnBin5StdDev" "DwnBin6Max" "DwnBin6Mean" "DwnBin6Min" "DwnBin6StdDev" "DwnBin7Max" "DwnBin7Mean" "DwnBin7Min" "DwnBin7StdDev" "DwnBin8Max" "DwnBin8Mean" "DwnBin8Min" "DwnBin8StdDev" "DwnHazeAvgMax" "DwnHazeAvgMean" "DwnHazeAvgMin" "DwnHazeAvgStdDev" "DwnHazeMedianMax" "DwnHazeMedianMean" "DwnHazeMedianMin" "DwnHazeMedianStdDev" "DwnHazeStdDevMax" "DwnHazeStdDevMean" "DwnHazeStdDevMin" "DwnHazeStdDevStdDev" "DwnLpdESMax" "DwnLpdESMean" "DwnLpdESMin" "DwnLpdESStdDev" "DwnLpdMax" "DwnLpdMean" "DwnLpdMin" "DwnLpdNMax" "DwnLpdNMean" "DwnLpdNMin" "DwnLpdNStdDev" "DwnLpdStdDev" "DwnMicroScrMax" "DwnMicroScrMean" "DwnMicroScrMin" "DwnMicroScrStdDev" "DwnScrMax" "DwnScrMean" "DwnScrMin" "DwnScrStdDev" "DwnSlipMax" "DwnSlipMean" "DwnSlipMin" "DwnSlipStdDev" "DcnAll" "DcnArea" "DcnAreaCount" "DcnBin1" "DcnBin2" "DcnBin3" "DcnBin4" "DcnBin5" "DcnBin6" "DcnBin7" "DcnBin8" "DcnHazeAvg" "DcnHazeMedian" "DcnHazeStdDev" "DcnLpd" "DcnLpdES" "DcnLpdN" "DcnMicroScr" "DcnScr" "DcnSlip" "DnnAll" "DnnArea" "DnnAreaCount" "DnnBin1" "DnnBin2" "DnnBin3" "DnnBin4" "DnnBin5" "DnnBin6" "DnnBin7" "DnnBin8" "DnnHazeAvg" "DnnHazeMedian" "DnnHazeStdDev" "DnnLpd" "DnnLpdES" "DnnLpdN" "DnnMicroScr" "DnnScr" "DnnSlip" "DwnAll" "DwnArea" "DwnAreaCount" "DwnBin1" "DwnBin2" "DwnBin3" "DwnBin4" "DwnBin5" "DwnBin6" "DwnBin7" "DwnBin8" "DwnHazeAvg" "DwnHazeMedian" "DwnHazeStdDev" "DwnLpd" "DwnLpdES" "DwnLpdN" "DwnMicroScr" "DwnScr" "DwnSlip"
0.00 1 2 8 25 0 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/1-2/1 UniqueId 1 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.230 2 0 0 0 0 0 0 0 0 0.640 0.636 0.061 0 NA NA NA 0 0.000 0.155 4 0 0 0 0 0 0 0 0 0.448 0.443 0.028 0 NA NA NA NA NA 0.000 0 0 0 0 0 0 0 0 0 0.192 0.179 0.066 0 NA NA NA NA NA
0.00 1 2 8 25 1 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/2-2/2 UniqueId 2 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.064 2 0 0 0 0 0 0 0 0 0.644 0.636 0.058 0 NA NA NA 0 0.581 0.073 4 0 0 0 0 0 0 0 0 0.459 0.456 0.024 0 NA NA NA NA NA 0.000 0 0 0 0 0 0 0 0 0 0.185 0.169 0.062 0 NA NA NA NA NA
0.00 1 2 8 25 2 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/3-2/3 UniqueId 3 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.345 7 0 0 0 0 0 0 0 0 0.615 0.601 0.070 0 NA NA NA 0 0.000 0.284 9 0 0 0 0 0 0 0 0 0.449 0.447 0.017 0 NA NA NA NA NA 0.000 4 0 0 0 0 0 0 0 0 0.165 0.145 0.068 0 NA NA NA NA NA
0.00 1 2 8 25 3 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/4-2/4 UniqueId 4 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.284 4 0 0 0 0 0 0 0 0 0.631 0.625 0.065 0 NA NA NA 0 0.000 0.192 4 0 0 0 0 0 0 0 0 0.450 0.448 0.026 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.181 0.166 0.062 0 NA NA NA NA NA
0.00 1 2 8 25 4 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/5-2/5 UniqueId 5 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.298 2 0 0 0 0 0 0 0 0 0.624 0.612 0.065 0 NA NA NA 0 0.000 0.202 2 0 0 0 0 0 0 0 0 0.453 0.452 0.026 0 NA NA NA NA NA 0.028 2 0 0 0 0 0 0 0 0 0.170 0.153 0.061 0 NA NA NA NA NA
0.00 1 2 8 25 5 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/6-2/6 UniqueId 6 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.119 1 0 0 0 0 0 0 0 0 0.650 0.641 0.060 0 NA NA NA 0 0.000 0.083 1 0 0 0 0 0 0 0 0 0.468 0.467 0.027 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.182 0.166 0.066 0 NA NA NA NA NA
0.00 1 2 8 25 6 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/7-2/7 UniqueId 7 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.293 5 0 0 0 0 0 0 0 0 0.660 0.645 0.072 0 NA NA NA 0 0.000 0.222 5 0 0 0 0 0 0 0 0 0.477 0.476 0.018 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.182 0.164 0.072 0 NA NA NA NA NA
0.00 1 2 8 25 7 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/8-2/8 UniqueId 8 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.530 5 0 0 0 0 0 0 0 0 0.608 0.596 0.059 0 NA NA NA 0 0.000 0.309 7 0 0 0 0 0 0 0 0 0.442 0.437 0.030 0 NA NA NA NA NA 0.024 3 0 0 0 0 0 0 0 0 0.167 0.145 0.065 0 NA NA NA NA NA
0.00 1 2 8 25 8 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/9-2/9 UniqueId 9 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.138 3 0 0 0 0 0 0 0 0 0.607 0.598 0.086 0 NA NA NA 0 0.000 0.113 3 0 0 0 0 0 0 0 0 0.448 0.444 0.043 0 NA NA NA NA NA 0.000 0 0 0 0 0 0 0 0 0 0.160 0.147 0.065 0 NA NA NA NA NA
0.00 1 2 8 25 9 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/10-2/10 UniqueId 10 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.501 5 0 0 0 0 0 0 0 0 0.627 0.618 0.060 0 NA NA NA 0 0.000 0.347 5 0 0 0 0 0 0 0 0 0.459 0.453 0.027 0 NA NA NA NA NA 0.021 2 0 0 0 0 0 0 0 0 0.169 0.154 0.066 0 NA NA NA NA NA
0.00 1 2 8 25 10 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/11-2/11 UniqueId 11 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.498 7 0 0 0 0 0 0 0 0 0.611 0.604 0.057 0 NA NA NA 0 0.000 0.342 7 0 0 0 0 0 0 0 0 0.461 0.461 0.020 0 NA NA NA NA NA 0.022 3 0 0 0 0 0 0 0 0 0.151 0.137 0.061 0 NA NA NA NA NA
0.00 1 2 8 25 11 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/12-2/12 UniqueId 12 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.311 3 0 0 0 0 0 0 0 0 0.617 0.608 0.059 0 NA NA NA 0 0.000 0.197 3 0 0 0 0 0 0 0 0 0.448 0.444 0.022 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.169 0.156 0.062 0 NA NA NA NA NA
0.00 1 2 8 25 12 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/13-2/13 UniqueId 13 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.254 4 0 0 0 0 0 0 0 0 0.623 0.619 0.059 0 NA NA NA 0 0.000 0.191 4 0 0 0 0 0 0 0 0 0.461 0.458 0.023 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.162 0.153 0.057 0 NA NA NA NA NA
0.00 1 2 8 25 13 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/14-2/14 UniqueId 14 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.445 5 0 0 0 0 0 0 0 0 0.622 0.615 0.057 0 NA NA NA 0 0.000 0.316 5 0 0 0 0 0 0 0 0 0.444 0.440 0.025 0 NA NA NA NA NA 0.000 2 0 0 0 0 0 0 0 0 0.178 0.168 0.064 0 NA NA NA NA NA
0.00 1 2 8 25 14 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/15-2/15 UniqueId 15 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.285 2 0 0 0 0 0 0 0 0 0.609 0.602 0.058 0 NA NA NA 0 0.000 0.190 3 0 0 0 0 0 0 0 0 0.425 0.418 0.027 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.184 0.172 0.062 0 NA NA NA NA NA
0.00 1 2 8 25 15 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/16-2/16 UniqueId 16 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.845 6 0 0 0 0 0 0 0 0 0.604 0.604 0.057 0 NA NA NA 0 0.000 0.547 6 0 0 0 0 0 0 0 0 0.426 0.423 0.024 0 NA NA NA NA NA 0.026 3 0 0 0 0 0 0 0 0 0.178 0.170 0.063 0 NA NA NA NA NA
0.00 1 2 8 25 16 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/17-2/17 UniqueId 17 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.148 3 0 0 0 0 0 0 0 0 0.625 0.623 0.053 0 NA NA NA 0 0.000 0.111 3 0 0 0 0 0 0 0 0 0.432 0.430 0.022 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.193 0.188 0.060 0 NA NA NA NA NA
0.00 1 2 8 25 17 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/18-2/18 UniqueId 18 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.467 5 0 0 0 0 0 0 0 0 0.638 0.635 0.048 0 NA NA NA 0 0.000 0.308 5 0 0 0 0 0 0 0 0 0.439 0.436 0.021 0 NA NA NA NA NA 0.000 3 0 0 0 0 0 0 0 0 0.199 0.191 0.053 0 NA NA NA NA NA
0.00 1 2 8 25 18 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/19-2/19 UniqueId 19 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.282 6 0 0 0 0 0 0 0 0 0.624 0.622 0.050 0 NA NA NA 0 0.000 0.247 6 0 0 0 0 0 0 0 0 0.423 0.416 0.027 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.201 0.193 0.058 0 NA NA NA NA NA
0.00 1 2 8 25 19 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/20-2/20 UniqueId 20 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 1.176 12 0 0 0 0 0 0 0 0 0.619 0.617 0.054 0 NA NA NA 0 0.000 0.786 14 0 0 0 0 0 0 0 0 0.411 0.408 0.026 0 NA NA NA NA NA 0.000 3 0 0 0 0 0 0 0 0 0.208 0.198 0.061 0 NA NA NA NA NA
0.00 1 2 8 25 20 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/21-2/21 UniqueId 21 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.170 3 0 0 0 0 0 0 0 0 0.589 0.584 0.064 0 NA NA NA 0 0.000 0.135 3 0 0 0 0 0 0 0 0 0.416 0.416 0.023 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.173 0.165 0.067 0 NA NA NA NA NA
0.00 1 2 8 25 21 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/22-2/22 UniqueId 22 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.407 4 0 0 0 0 0 0 0 0 0.602 0.596 0.058 0 NA NA NA 0 0.000 0.269 4 0 0 0 0 0 0 0 0 0.422 0.418 0.027 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.181 0.167 0.066 0 NA NA NA NA NA
0.00 1 2 8 25 22 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/23-2/23 UniqueId 23 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.516 4 0 0 0 0 0 0 0 0 0.609 0.603 0.063 0 NA NA NA 0 0.000 0.319 4 0 0 0 0 0 0 0 0 0.415 0.413 0.024 0 NA NA NA NA NA 0.000 1 0 0 0 0 0 0 0 0 0.194 0.181 0.058 0 NA NA NA NA NA
0.00 1 2 8 25 23 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/24-2/24 UniqueId 24 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.180 4 0 0 0 0 0 0 0 0 0.614 0.606 0.067 0 NA NA NA 0 1.732 0.178 6 0 0 0 0 0 0 0 0 0.418 0.415 0.023 0 NA NA NA NA NA 0.000 2 0 0 0 0 0 0 0 0 0.196 0.179 0.060 0 NA NA NA NA NA
0.00 1 2 8 25 24 SP101 4/24/2025 1:56:23 AM 666335 5113 55 6IN_SLIP Grade1 HeaderUniqueId 666335 6IN_SLIP F 2/25-2/25 UniqueId 25 12 4.440 1 2.238 12 4.320 1 2.249 1.176 0.357 0.064 0.243 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.660 0.622 0.589 0.016 0.645 0.615 0.584 0.016 0.278 0.070 0.048 0.044 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA 0 0.000 0 0.000 1.732 0.093 0.000 0.361 14 4.840 1 2.577 14 4.840 1 2.577 0.786 0.250 0.073 0.154 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.477 0.440 0.411 0.019 0.476 0.437 0.408 0.019 0.187 0.032 0.017 0.033 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 4 1.560 0 1.083 4 1.560 0 1.083 0.042 0.007 0.000 0.012 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0 0.000 0.218 0.182 0.151 0.016 0.200 0.168 0.137 0.017 0.108 0.065 0.053 0.010 NA NA NA NA 0 0.000 0 NA NA NA NA 0.000 NA NA NA NA NA NA NA NA NA NA NA NA 0.152 4 0 0 0 0 0 0 0 0 0.633 0.622 0.278 0 NA NA NA 0 0.000 0.128 4 0 0 0 0 0 0 0 0 0.415 0.414 0.187 0 NA NA NA NA NA 0.042 1 0 0 0 0 0 0 0 0 0.218 0.200 0.108 0 NA NA NA NA NA
NUM_DATA_ROWS 000000025
NUM_DATA_COLUMNS 000000321
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 01:56:23
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_BASIC_TYPE=;A_INFO=6IN_SLIP_20250424_0127_2025-04-24_01;56;37;581.txt.csv;A_INFO2=25;A_JOBID=SP101;A_MES_ENTITY=SP101;A_MID=55-666335-5113;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638810565835457504;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_BASIC_TYPE=Left - High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666335;B_NULL_DATA=;B_PPID=6IN_SLIP;B_PROCESS_JOBID=55;B_PRODUCT=5113;B_SEQUENCE=638810565835457504;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000037963
DATA_OFFSET|000000128
END_OFFSET|000038659
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Lot|Session|DcnAllMin|DcnLpdMin|DcnLpdNMin|DcnLpdESMin|DcnMicroScrMin|DcnScrMin|DcnSlipMin|DcnAreaCountMin|DcnAreaMin|DcnHazeAvgMin|DcnHazeMedianMin|DcnHazeStdDevMin|DcnBin1Min|DcnBin2Min|DcnBin3Min|DcnBin4Min|DcnBin5Min|DcnBin6Min|DcnBin7Min|DcnBin8Min|DcnAllMax|DcnLpdMax|DcnLpdNMax|DcnLpdESMax|DcnMicroScrMax|DcnScrMax|DcnSlipMax|DcnAreaCountMax|DcnAreaMax|DcnHazeAvgMax|DcnHazeMedianMax|DcnHazeStdDevMax|DcnBin1Max|DcnBin2Max|DcnBin3Max|DcnBin4Max|DcnBin5Max|DcnBin6Max|DcnBin7Max|DcnBin8Max|DcnAllMean|DcnLpdMean|DcnLpdNMean|DcnLpdESMean|DcnMicroScrMean|DcnScrMean|DcnSlipMean|DcnAreaCountMean|DcnAreaMean|DcnHazeAvgMean|DcnHazeMedianMean|DcnHazeStdDevMean|DcnBin1Mean|DcnBin2Mean|DcnBin3Mean|DcnBin4Mean|DcnBin5Mean|DcnBin6Mean|DcnBin7Mean|DcnBin8Mean|DcnAllStdDev|DcnLpdStdDev|DcnLpdNStdDev|DcnLpdESStdDev|DcnMicroScrStdDev|DcnScrStdDev|DcnSlipStdDev|DcnAreaCountStdDev|DcnAreaStdDev|DcnHazeAvgStdDev|DcnHazeMedianStdDev|DcnHazeStdDevStdDev|DcnBin1StdDev|DcnBin2StdDev|DcnBin3StdDev|DcnBin4StdDev|DcnBin5StdDev|DcnBin6StdDev|DcnBin7StdDev|DcnBin8StdDev|DwnAllMin|DwnLpdMin|DwnLpdNMin|DwnLpdESMin|DwnMicroScrMin|DwnScrMin|DwnSlipMin|DwnAreaCountMin|DwnAreaMin|DwnHazeAvgMin|DwnHazeMedianMin|DwnHazeStdDevMin|DwnBin1Min|DwnBin2Min|DwnBin3Min|DwnBin4Min|DwnBin5Min|DwnBin6Min|DwnBin7Min|DwnBin8Min|DwnAllMax|DwnLpdMax|DwnLpdNMax|DwnLpdESMax|DwnMicroScrMax|DwnScrMax|DwnSlipMax|DwnAreaCountMax|DwnAreaMax|DwnHazeAvgMax|DwnHazeMedianMax|DwnHazeStdDevMax|DwnBin1Max|DwnBin2Max|DwnBin3Max|DwnBin4Max|DwnBin5Max|DwnBin6Max|DwnBin7Max|DwnBin8Max|DwnAllMean|DwnLpdMean|DwnLpdNMean|DwnLpdESMean|DwnMicroScrMean|DwnScrMean|DwnSlipMean|DwnAreaCountMean|DwnAreaMean|DwnHazeAvgMean|DwnHazeMedianMean|DwnHazeStdDevMean|DwnBin1Mean|DwnBin2Mean|DwnBin3Mean|DwnBin4Mean|DwnBin5Mean|DwnBin6Mean|DwnBin7Mean|DwnBin8Mean|DwnAllStdDev|DwnLpdStdDev|DwnLpdNStdDev|DwnLpdESStdDev|DwnMicroScrStdDev|DwnScrStdDev|DwnSlipStdDev|DwnAreaCountStdDev|DwnAreaStdDev|DwnHazeAvgStdDev|DwnHazeMedianStdDev|DwnHazeStdDevStdDev|DwnBin1StdDev|DwnBin2StdDev|DwnBin3StdDev|DwnBin4StdDev|DwnBin5StdDev|DwnBin6StdDev|DwnBin7StdDev|DwnBin8StdDev|DnnAllMin|DnnLpdMin|DnnLpdNMin|DnnLpdESMin|DnnMicroScrMin|DnnScrMin|DnnSlipMin|DnnAreaCountMin|DnnAreaMin|DnnHazeAvgMin|DnnHazeMedianMin|DnnHazeStdDevMin|DnnBin1Min|DnnBin2Min|DnnBin3Min|DnnBin4Min|DnnBin5Min|DnnBin6Min|DnnBin7Min|DnnBin8Min|DnnAllMax|DnnLpdMax|DnnLpdNMax|DnnLpdESMax|DnnMicroScrMax|DnnScrMax|DnnSlipMax|DnnAreaCountMax|DnnAreaMax|DnnHazeAvgMax|DnnHazeMedianMax|DnnHazeStdDevMax|DnnBin1Max|DnnBin2Max|DnnBin3Max|DnnBin4Max|DnnBin5Max|DnnBin6Max|DnnBin7Max|DnnBin8Max|DnnAllMean|DnnLpdMean|DnnLpdNMean|DnnLpdESMean|DnnMicroScrMean|DnnScrMean|DnnSlipMean|DnnAreaCountMean|DnnAreaMean|DnnHazeAvgMean|DnnHazeMedianMean|DnnHazeStdDevMean|DnnBin1Mean|DnnBin2Mean|DnnBin3Mean|DnnBin4Mean|DnnBin5Mean|DnnBin6Mean|DnnBin7Mean|DnnBin8Mean|DnnAllStdDev|DnnLpdStdDev|DnnLpdNStdDev|DnnLpdESStdDev|DnnMicroScrStdDev|DnnScrStdDev|DnnSlipStdDev|DnnAreaCountStdDev|DnnAreaStdDev|DnnHazeAvgStdDev|DnnHazeMedianStdDev|DnnHazeStdDevStdDev|DnnBin1StdDev|DnnBin2StdDev|DnnBin3StdDev|DnnBin4StdDev|DnnBin5StdDev|DnnBin6StdDev|DnnBin7StdDev|DnnBin8StdDev|Side|WaferID|Grade|SrcDest|DcnAll|DcnLpd|DcnLpdN|DcnLpdES|DcnMicroScr|DcnScr|DcnSlip|DcnAreaCount|DcnArea|DcnHazeAvg|DcnHazeMedian|DcnHazeStdDev|DcnBin1|DcnBin2|DcnBin3|DcnBin4|DcnBin5|DcnBin6|DcnBin7|DcnBin8|DwnAll|DwnLpd|DwnLpdN|DwnLpdES|DwnMicroScr|DwnScr|DwnSlip|DwnAreaCount|DwnArea|DwnHazeAvg|DwnHazeMedian|DwnHazeStdDev|DwnBin1|DwnBin2|DwnBin3|DwnBin4|DwnBin5|DwnBin6|DwnBin7|DwnBin8|DnnAll|DnnLpd|DnnLpdN|DnnLpdES|DnnMicroScr|DnnScr|DnnSlip|DnnAreaCount|DnnArea|DnnHazeAvg|DnnHazeMedian|DnnHazeStdDev|DnnBin1|DnnBin2|DnnBin3|DnnBin4|DnnBin5|DnnBin6|DnnBin7|DnnBin8|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Date|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|25|638810565835457504|SP101|0|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|1|Grade1|2/1-2/1||0|NA|NA|NA|0|0.000|2|0.230|0.640|0.636|0.061|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|0|0.000|0.192|0.179|0.066|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.155|0.448|0.443|0.028|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|1|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|2|Grade1|2/2-2/2||0|NA|NA|NA|0|0.581|2|0.064|0.644|0.636|0.058|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|0|0.000|0.185|0.169|0.062|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.073|0.459|0.456|0.024|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|2|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|3|Grade1|2/3-2/3||0|NA|NA|NA|0|0.000|7|0.345|0.615|0.601|0.070|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.000|0.165|0.145|0.068|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|9|0.284|0.449|0.447|0.017|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|3|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|4|Grade1|2/4-2/4||0|NA|NA|NA|0|0.000|4|0.284|0.631|0.625|0.065|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.181|0.166|0.062|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.192|0.450|0.448|0.026|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|4|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|5|Grade1|2/5-2/5||0|NA|NA|NA|0|0.000|2|0.298|0.624|0.612|0.065|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|2|0.028|0.170|0.153|0.061|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|2|0.202|0.453|0.452|0.026|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|5|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|6|Grade1|2/6-2/6||0|NA|NA|NA|0|0.000|1|0.119|0.650|0.641|0.060|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.182|0.166|0.066|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.083|0.468|0.467|0.027|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|6|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|7|Grade1|2/7-2/7||0|NA|NA|NA|0|0.000|5|0.293|0.660|0.645|0.072|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.182|0.164|0.072|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|5|0.222|0.477|0.476|0.018|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|7|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|8|Grade1|2/8-2/8||0|NA|NA|NA|0|0.000|5|0.530|0.608|0.596|0.059|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.024|0.167|0.145|0.065|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|7|0.309|0.442|0.437|0.030|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|8|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|9|Grade1|2/9-2/9||0|NA|NA|NA|0|0.000|3|0.138|0.607|0.598|0.086|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|0|0.000|0.160|0.147|0.065|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.113|0.448|0.444|0.043|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|9|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|10|Grade1|2/10-2/10||0|NA|NA|NA|0|0.000|5|0.501|0.627|0.618|0.060|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|2|0.021|0.169|0.154|0.066|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|5|0.347|0.459|0.453|0.027|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|10|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|11|Grade1|2/11-2/11||0|NA|NA|NA|0|0.000|7|0.498|0.611|0.604|0.057|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.022|0.151|0.137|0.061|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|7|0.342|0.461|0.461|0.020|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|11|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|12|Grade1|2/12-2/12||0|NA|NA|NA|0|0.000|3|0.311|0.617|0.608|0.059|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.169|0.156|0.062|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.197|0.448|0.444|0.022|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|12|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|13|Grade1|2/13-2/13||0|NA|NA|NA|0|0.000|4|0.254|0.623|0.619|0.059|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.162|0.153|0.057|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.191|0.461|0.458|0.023|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|13|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|14|Grade1|2/14-2/14||0|NA|NA|NA|0|0.000|5|0.445|0.622|0.615|0.057|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|2|0.000|0.178|0.168|0.064|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|5|0.316|0.444|0.440|0.025|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|14|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|15|Grade1|2/15-2/15||0|NA|NA|NA|0|0.000|2|0.285|0.609|0.602|0.058|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.184|0.172|0.062|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.190|0.425|0.418|0.027|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|15|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|16|Grade1|2/16-2/16||0|NA|NA|NA|0|0.000|6|0.845|0.604|0.604|0.057|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.026|0.178|0.170|0.063|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|6|0.547|0.426|0.423|0.024|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|16|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|17|Grade1|2/17-2/17||0|NA|NA|NA|0|0.000|3|0.148|0.625|0.623|0.053|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.193|0.188|0.060|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.111|0.432|0.430|0.022|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|17|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|18|Grade1|2/18-2/18||0|NA|NA|NA|0|0.000|5|0.467|0.638|0.635|0.048|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.000|0.199|0.191|0.053|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|5|0.308|0.439|0.436|0.021|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|18|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|19|Grade1|2/19-2/19||0|NA|NA|NA|0|0.000|6|0.282|0.624|0.622|0.050|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.201|0.193|0.058|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|6|0.247|0.423|0.416|0.027|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|19|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|20|Grade1|2/20-2/20||0|NA|NA|NA|0|0.000|12|1.176|0.619|0.617|0.054|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.000|0.208|0.198|0.061|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|14|0.786|0.411|0.408|0.026|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|20|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|21|Grade1|2/21-2/21||0|NA|NA|NA|0|0.000|3|0.170|0.589|0.584|0.064|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.173|0.165|0.067|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|3|0.135|0.416|0.416|0.023|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|21|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|22|Grade1|2/22-2/22||0|NA|NA|NA|0|0.000|4|0.407|0.602|0.596|0.058|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.181|0.167|0.066|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.269|0.422|0.418|0.027|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|22|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|23|Grade1|2/23-2/23||0|NA|NA|NA|0|0.000|4|0.516|0.609|0.603|0.063|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.000|0.194|0.181|0.058|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.319|0.415|0.413|0.024|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|23|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|24|Grade1|2/24-2/24||0|NA|NA|NA|0|1.732|4|0.180|0.614|0.606|0.067|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|2|0.000|0.196|0.179|0.060|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|6|0.178|0.418|0.415|0.023|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
0.00|1|2|25|638810565835457504|SP101|24|666335|6IN_SLIP|1|0|NA|NA|NA|0|0.000|1|0.064|0.589|0.584|0.048|0|0|0|0|0|0|0|0|12|0|NA|NA|NA|0|1.732|12|1.176|0.660|0.645|0.278|0|0|0|0|0|0|0|0|4.440|0.000|NA|NA|NA|0.000|0.093|4.320|0.357|0.622|0.615|0.070|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.238|0.000|NA|NA|NA|0.000|0.361|2.249|0.243|0.016|0.016|0.044|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0|0|NA|NA|NA|NA|NA|0|0.000|0.151|0.137|0.053|0|0|0|0|0|0|0|0|4|0|NA|NA|NA|NA|NA|4|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0|1.560|0.000|NA|NA|NA|NA|NA|1.560|0.007|0.182|0.168|0.065|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1.083|0.000|NA|NA|NA|NA|NA|1.083|0.012|0.016|0.017|0.010|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|1|0|NA|NA|NA|NA|NA|1|0.073|0.411|0.408|0.017|0|0|0|0|0|0|0|0|14|0|NA|NA|NA|NA|NA|14|0.786|0.477|0.476|0.187|0|0|0|0|0|0|0|0|4.840|0.000|NA|NA|NA|NA|NA|4.840|0.250|0.440|0.437|0.032|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|2.577|0.000|NA|NA|NA|NA|NA|2.577|0.154|0.019|0.019|0.033|0.000|0.000|0.000|0.000|0.000|0.000|0.000|0.000|F|25|Grade1|2/25-2/25||0|NA|NA|NA|0|0.000|4|0.152|0.633|0.622|0.278|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|1|0.042|0.218|0.200|0.108|0|0|0|0|0|0|0|0||0|NA|NA|NA|NA|NA|4|0.128|0.415|0.414|0.187|0|0|0|0|0|0|0|0|666335|5113|55|-|-||55-666335-5113|4/24/2025 1:56:23 AM|8
NUM_DATA_ROWS|000000025
NUM_DATA_COLUMNS|000000322
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 01:56:23
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=6IN_SLIP_20250424_0127_2025-04-24_01;56;37;581.txt.csv;A_INFO2=25;A_JOBID=SP101;A_MES_ENTITY=SP101;A_MID=55-666335-5113;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638810565835457504;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=Left - High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666335;B_NULL_DATA=;B_PPID=6IN_SLIP;B_PROCESS_JOBID=55;B_PRODUCT=5113;B_SEQUENCE=638810565835457504;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER

View File

@ -0,0 +1,49 @@
1 1 1 0 0.10 0.21 0.019 0.10 4/24/2025 4:46:29 PM 1.15 1.18 1.12 0.0291 100 100 100 0 667227 0.013 0.019 0.006 0.006 2 3 0.006 1 667227 36 6IN_THIN ROTR 0.3 1 0 0.59 0.34 1.02 0 0.59 3 4 2 1 TENCOR1
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 |
|---|---|---|---|-----|------|-------|-----|----------------------|------|------|------|--------|-----|-----|-----|----|--------|-------|-------|-------|-------|----|----|-------|----|----|--------|----|---------------|-----|----|----|------|------|------|----|------|----|----|----|----|---------|
| 1 | 1 | 1 | 0 | 0.1 | 0.21 | 0.019 | 0.1 | 4/24/2025 4:46:29 PM | 1.15 | 1.18 | 1.12 | 0.0291 | 100 | 100 | 100 | 0 | 667227 | 0.013 | 0.019 | 0.006 | 0.006 | 2 | 3 | 0.006 | 1 | | 667227 | 36 | 6IN_THIN ROTR | 0.3 | 1 | 0 | 0.59 | 0.34 | 1.02 | 0 | 0.59 | 3 | 4 | 2 | 1 | TENCOR1 |
<1>:1
<2>:1
<3>:1
<4>:0
<5>:0.1
<6>:0.21
<7>:0.019
<8>:0.1
<9>:4/24/2025 4:46:29 PM
<10>:1.15
<11>:1.18
<12>:1.12
<13>:0.0291
<14>:100
<15>:100
<16>:100
<17>:0
<18>:667227
<19>:0.013
<20>:0.019
<21>:0.006
<22>:0.006
<23>:2
<24>:3
<25>:0.006
<26>:1
<27>:
<28>:667227
<29>:36
<30>:6IN_THIN ROTR
<31>:0.3
<32>:1
<33>:0
<34>:0.59
<35>:0.34
<36>:1.02
<37>:0
<38>:0.59
<39>:3
<40>:4
<41>:2
<42>:1
<43>:TENCOR1

View File

@ -0,0 +1,176 @@
{
"Id": -1,
"AreaCountAvg": "1",
"AreaCountMax": "1",
"AreaCountMin": "1",
"AreaCountStdDev": "0",
"AreaTotalAvg": "0.10",
"AreaTotalMax": "0.21",
"AreaTotalMin": "0.019",
"AreaTotalStdDev": "0.10",
"Date": "4/24/2025 4:46:29 PM",
"HazeAverageAvg": "1.15",
"HazeAverageMax": "1.18",
"HazeAverageMin": "1.12",
"HazeAverageStdDev": "0.0291",
"HazeRegionAvg": "100",
"HazeRegionMax": "100",
"HazeRegionMin": "100",
"HazeRegionStdDev": "0",
"Layer": null,
"LotID": "667227",
"LPDCM2Avg": "0.013",
"LPDCM2Max": "0.019",
"LPDCM2Min": "0.006",
"LPDCM2StdDev": "0.006",
"LPDCountAvg": "2",
"LPDCountMax": "3",
"LPDCountMin": "1",
"LPDCountStdDev": "1",
"Operator": "",
"ParseErrorText": "ParseErrorText",
"PSN": "5142",
"RDS": "667227",
"Reactor": "36",
"Recipe": "6IN_THIN ROTR",
"ScratchCountAvg": "0.3",
"ScratchCountMax": "1",
"ScratchCountMin": "0",
"ScratchCountStdDev": "0.6",
"ScratchTotalAvg": "0.34",
"ScratchTotalMax": "1.02",
"ScratchTotalMin": "0",
"ScratchTotalStdDev": "0.59",
"SumOfDefectsAvg": "3",
"SumOfDefectsMax": "4",
"SumOfDefectsMin": "2",
"SumOfDefectsStdDev": "1",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374",
"Zone": null,
"CellName": "TENCOR1",
"Data": "*Data*",
"i": -1,
"Details": [
{
"Id": 0,
"AreaCount": "1",
"AreaTotal": "0.0716mm2",
"Bin1": "2",
"Bin2": "1",
"Bin3": "0",
"Bin4": "0",
"Bin5": "0",
"Bin6": "0",
"Bin7": null,
"Bin8": null,
"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
"Exclusion": "4mm",
"Gain": "4",
"HazeAverage": "1.16ppm",
"HazePeak": "25.5ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.019",
"LPDCount": "3",
"Laser": "488nm",
"Mean": "0.252",
"Recipe": "6IN_THIN ROTR",
"ScratchCount": "1",
"ScratchTotal": "1.02mm",
"Slot": "01",
"Sort": "PASS",
"StdDev": "0.043",
"SumOfDefects": "4",
"Thresh": "0.200um",
"Thruput": "Normal",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-1",
"Data": "*Data*",
"i": -1
},
{
"Id": 0,
"AreaCount": "1",
"AreaTotal": "0.0195mm2",
"Bin1": "1",
"Bin2": "0",
"Bin3": "0",
"Bin4": "0",
"Bin5": "1",
"Bin6": "0",
"Bin7": null,
"Bin8": null,
"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
"Exclusion": "4mm",
"Gain": "4",
"HazeAverage": "1.18ppm",
"HazePeak": "25.0ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.013",
"LPDCount": "2",
"Laser": "488nm",
"Mean": "1.32",
"Recipe": "6IN_THIN ROTR",
"ScratchCount": "0",
"ScratchTotal": "0mm",
"Slot": "15",
"Sort": "PASS",
"StdDev": "1.54",
"SumOfDefects": "3",
"Thresh": "0.200um",
"Thruput": "Normal",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-2",
"Data": "*Data*",
"i": -1
},
{
"Id": 0,
"AreaCount": "1",
"AreaTotal": "0.213mm2",
"Bin1": "0",
"Bin2": "1",
"Bin3": "0",
"Bin4": "0",
"Bin5": "0",
"Bin6": "0",
"Bin7": null,
"Bin8": null,
"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
"Exclusion": "4mm",
"Gain": "4",
"HazeAverage": "1.12ppm",
"HazePeak": "22.5ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.006",
"LPDCount": "1",
"Laser": "488nm",
"Mean": "0.307",
"Recipe": "6IN_THIN ROTR",
"ScratchCount": "0",
"ScratchTotal": "0mm",
"Slot": "25",
"Sort": "PASS",
"StdDev": "0.000",
"SumOfDefects": "2",
"Thresh": "0.200um",
"Thruput": "Normal",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-3",
"Data": "*Data*",
"i": -1
}
]
}

View File

@ -0,0 +1,43 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Comments" "Diameter" "Exclusion" "Gain" "HeaderUniqueId" "Laser" "ParseErrorText" "RDS" "Slot" "UniqueId" "AreaCount" "AreaCountAvg" "AreaCountMax" "AreaCountMin" "AreaCountStdDev" "AreaTotal" "AreaTotalAvg" "AreaTotalMax" "AreaTotalMin" "AreaTotalStdDev" "Bin1" "Bin2" "Bin3" "Bin4" "Bin5" "Bin6" "Bin7" "Bin8" "HazeAverage" "HazeAverageAvg" "HazeAverageMax" "HazeAverageMin" "HazeAverageStdDev" "HazePeak" "HazeRegion" "HazeRegionAvg" "HazeRegionMax" "HazeRegionMin" "HazeRegionStdDev" "HazeRng" "LPDCM2" "LPDCM2Avg" "LPDCM2Max" "LPDCM2Min" "LPDCM2StdDev" "LPDCount" "LPDCountAvg" "LPDCountMax" "LPDCountMin" "LPDCountStdDev" "Mean" "ScratchCount" "ScratchCountAvg" "ScratchCountMax" "ScratchCountMin" "ScratchCountStdDev" "ScratchTotal" "ScratchTotalAvg" "ScratchTotalMax" "ScratchTotalMin" "ScratchTotalStdDev" "Sort" "StdDev" "SumOfDefects" "SumOfDefectsAvg" "SumOfDefectsMax" "SumOfDefectsMin" "SumOfDefectsStdDev" "Thresh" "Thruput"
0.00 1 2 7 3 0 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 01 UniqueId 1 1 1 1 0 0.0716mm2 0.10 0.21 0.019 0.10 2 1 0 0 0 0 1.16ppm 1.15 1.18 1.12 0.0291 25.5ppm 100% 100 100 100 0 500ppm 0.019 0.013 0.019 0.006 0.006 3 2 3 1 1 0.252 1 0.3 1 0 0.6 1.02mm 0.34 1.02 0 0.59 PASS 0.043 4 3 4 2 1 0.200um Normal
0.00 1 2 7 3 1 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 15 UniqueId 1 1 1 1 0 0.0195mm2 0.10 0.21 0.019 0.10 1 0 0 0 1 0 1.18ppm 1.15 1.18 1.12 0.0291 25.0ppm 100% 100 100 100 0 500ppm 0.013 0.013 0.019 0.006 0.006 2 2 3 1 1 1.32 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 1.54 3 3 4 2 1 0.200um Normal
0.00 1 2 7 3 2 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 25 UniqueId 1 1 1 1 0 0.213mm2 0.10 0.21 0.019 0.10 0 1 0 0 0 0 1.12ppm 1.15 1.18 1.12 0.0291 22.5ppm 100% 100 100 100 0 500ppm 0.006 0.013 0.019 0.006 0.006 1 2 3 1 1 0.307 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 0.000 2 3 4 2 1 0.200um Normal
NUM_DATA_ROWS 000000003
NUM_DATA_COLUMNS 000000083
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 16:46:29
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=524300;A_SubgroupId=1745538421;A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=524300;B_SubgroupId=1745538421;B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000002772
DATA_OFFSET|000000128
END_OFFSET|000003437
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Date|Recipe|Id|WaferId|LPDCount|LPDCM2|AreaCount|AreaTotal|ScratchCount|ScratchTotal|SumOfDefects|HazeRegion|HazeAverage|Grade|LPDCountMin|LPDCM2Min|AreaCountMin|AreaTotalMin|ScratchCountMin|ScratchTotalMin|SumOfDefectsMin|HazeRegionMin|HazeAverageMin|LPDCountMax|LPDCM2Max|AreaCountMax|AreaTotalMax|ScratchCountMax|ScratchTotalMax|SumOfDefectsMax|HazeRegionMax|HazeAverageMax|LPDCountAvg|LPDCM2Avg|AreaCountAvg|AreaTotalAvg|ScratchCountAvg|ScratchTotalAvg|SumOfDefectsAvg|HazeRegionAvg|HazeAverageAvg|LPDCountStdDev|LPDCM2StdDev|AreaCountStdDev|AreaTotalStdDev|ScratchCountStdDev|ScratchTotalStdDev|SumOfDefectsStdDev|HazeRegionStdDev|HazeAverageStdDev|WaferDate|Comments|Sort|WaferLPDCount|WaferLPDCM2|Bin1|Bin2|Bin3|Bin4|Bin5|Bin6|Bin7|Bin8|Mean|StdDev|WaferAreaCount|WaferAreaTotal|WaferScratchCount|WaferScratchTotal|WaferSumOfDefects|WaferHazeRegion|WaferHazeAverage|HazePeak|Laser|Gain|Diameter|Thresh|Exclusion|HazeRng|Thruput|WaferRecipe|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|3|638811099895374259|TENCOR1|0|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|01|3|0.019|1|0.072|1|1.02|4|100|1.16|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:34:51 AM|- High Thruput|PASS|3|0.019|2|1|0|0|0|0|||0.252|0.043|1|0.0716mm2|1|1.02mm|4|100%|1.16ppm|25.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|1|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|15|2|0.013|1|0.019|0|0|3|100|1.18|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:35:39 AM|- High Thruput|PASS|2|0.013|1|0|0|0|1|0|||1.32|1.54|1|0.0195mm2|0|0mm|3|100%|1.18ppm|25.0ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|2|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|25|1|0.006|1|0.21|0|0|2|100|1.12|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:36:22 AM|- High Thruput|PASS|1|0.006|0|1|0|0|0|0|||0.307|0.000|1|0.213mm2|0|0mm|2|100%|1.12ppm|22.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
NUM_DATA_ROWS|000000003
NUM_DATA_COLUMNS|000000096
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 16:46:29
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER

View File

@ -0,0 +1,78 @@
UniqueId 666765 4/24/2025 5:14:32 PM Lot LSL8IN \ 10PT_5mm 57 666765 4626 1 - CDE5 Operator Engineer DLRatio 18.55 AutoOptimizeGain AutoProbeHeightSet 3.00 915.190 0.0069647 SemiRadial 1 95.00 270.000 913.9620971680 1.3236315 2 71.00 270.000 923.2605590820 1.2676778 3 47.00 270.000 921.4100952148 1.3205365 4 23.00 270.000 913.6674194336 1.2704575 5 0.00 0.000 908.1397705078 1.3234487 6 11.00 90.000 908.0071411133 1.2582344 7 35.00 90.000 916.3591918945 1.5512319 8 59.00 90.000 920.1303100586 1.7320848 9 83.00 90.000 921.3920288086 1.6781629 10 95.00 90.000 905.5722656250 1.7448909
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 | 54 | 55 | 56 | 57 | 58 | 59 | 60 | 61 | 62 | 63 | 64 | 65 | 66 | 67 | 68 | 69 | 70 | 71 | 72 |
|----------|--------|----------------------|-----|-------------------|----|--------|------|---|----|------|----------|----------|---------|-------|------------------|--------------------|------|----|---------|-----------|------------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|-------|---------|----------------|-----------|----|------|-------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|----|-------|--------|----------------|-----------|
| UniqueId | 666765 | 4/24/2025 5:14:32 PM | Lot | LSL8IN \ 10PT_5mm | 57 | 666765 | 4626 | 1 | - | CDE5 | Operator | Engineer | DLRatio | 18.55 | AutoOptimizeGain | AutoProbeHeightSet | 3.00 | | 915.190 | 0.0069647 | SemiRadial | 1 | 95.00 | 270.000 | 913.9620971680 | 1.3236315 | 2 | 71.00 | 270.000 | 923.2605590820 | 1.2676778 | 3 | 47.00 | 270.000 | 921.4100952148 | 1.3205365 | 4 | 23.00 | 270.000 | 913.6674194336 | 1.2704575 | 5 | 0.00 | 0.000 | 908.1397705078 | 1.3234487 | 6 | 11.00 | 90.000 | 908.0071411133 | 1.2582344 | 7 | 35.00 | 90.000 | 916.3591918945 | 1.5512319 | 8 | 59.00 | 90.000 | 920.1303100586 | 1.7320848 | 9 | 83.00 | 90.000 | 921.3920288086 | 1.6781629 | 10 | 95.00 | 90.000 | 905.5722656250 | 1.7448909 |
<1>:UniqueId
<2>:666765
<3>:4/24/2025 5:14:32 PM
<4>:Lot
<5>:LSL8IN \ 10PT_5mm
<6>:57
<7>:666765
<8>:4626
<9>:1
<10>:-
<11>:CDE5
<12>:Operator
<13>:Engineer
<14>:DLRatio
<15>:18.55
<16>:AutoOptimizeGain
<17>:AutoProbeHeightSet
<18>:3
<19>:
<20>:915.19
<21>:0.0069647
<22>:SemiRadial
<23>:1
<24>:95
<25>:270
<26>:913.9620972
<27>:1.3236315
<28>:2
<29>:71
<30>:270
<31>:923.2605591
<32>:1.2676778
<33>:3
<34>:47
<35>:270
<36>:921.4100952
<37>:1.3205365
<38>:4
<39>:23
<40>:270
<41>:913.6674194
<42>:1.2704575
<43>:5
<44>:0
<45>:0
<46>:908.1397705
<47>:1.3234487
<48>:6
<49>:11
<50>:90
<51>:908.0071411
<52>:1.2582344
<53>:7
<54>:35
<55>:90
<56>:916.3591919
<57>:1.5512319
<58>:8
<59>:59
<60>:90
<61>:920.1303101
<62>:1.7320848
<63>:9
<64>:83
<65>:90
<66>:921.3920288
<67>:1.6781629
<68>:10
<69>:95
<70>:90
<71>:905.5722656
<72>:1.7448909

View File

@ -0,0 +1,122 @@
{
"SentToMetrology": false,
"SentToSPC": false,
"AutoOptimizeGain": "AutoOptimizeGain",
"AutoProbeHeightSet": "AutoProbeHeightSet",
"Avg": "915.190",
"CellName": "CDE5",
"DLRatio": "DLRatio",
"DataReject": "3.00",
"Date": "4/24/2025 5:14:32 PM",
"Engineer": "Engineer",
"EquipId": "CDE5",
"FileName": "",
"FilePath": "",
"Id": -1,
"Layer": "1",
"LotId": "Lot",
"Op": "Operator",
"PSN": "4626",
"RDS": "666765",
"Reactor": "57",
"Recipe": "LSL8IN \\ 10PT_5mm",
"ResistivitySpec": "ResistivitySpec",
"Run": "666765",
"SemiRadial": "SemiRadial",
"StDev": "0.0069647",
"Temp": "18.55",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Zone": "-",
"Details": [
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3236315",
"Pt": "1",
"R": "95.00",
"Rs": "913.9620971680",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-1"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2676778",
"Pt": "2",
"R": "71.00",
"Rs": "923.2605590820",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-2"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3205365",
"Pt": "3",
"R": "47.00",
"Rs": "921.4100952148",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-3"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2704575",
"Pt": "4",
"R": "23.00",
"Rs": "913.6674194336",
"T": "270.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-4"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.3234487",
"Pt": "5",
"R": "0.00",
"Rs": "908.1397705078",
"T": "0.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-5"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.2582344",
"Pt": "6",
"R": "11.00",
"Rs": "908.0071411133",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-6"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.5512319",
"Pt": "7",
"R": "35.00",
"Rs": "916.3591918945",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-7"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.7320848",
"Pt": "8",
"R": "59.00",
"Rs": "920.1303100586",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-8"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.6781629",
"Pt": "9",
"R": "83.00",
"Rs": "921.3920288086",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-9"
},
{
"HeaderUniqueId": "CDE5_57-666765-4626.1_202504241714320000",
"Merit": "1.7448909",
"Pt": "10",
"R": "95.00",
"Rs": "905.5722656250",
"T": "90.000",
"UniqueId": "CDE5_57-666765-4626.1_202504241714320000_Item-10"
}
]
}

View File

@ -0,0 +1,57 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "AutoOptimizeGain" "AutoProbeHeightSet" "Avg" "DataReject" "DLRatio" "Merit" "Pt" "R" "ResistivitySpec" "Rs" "SemiRadial" "StdDev" "T" "Temp" "Engineer" "EquipId" "FileName" "HeaderUniqueId" "Id" "Layer" "RDS" "Run" "UniqueId" "Zone" "SheetRhoVariation"
0.00 1 2 24 10 0 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3236315 1 95.00 ResistivitySpec 913.9620971680 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 1 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2676778 2 71.00 ResistivitySpec 923.2605590820 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 2 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3205365 3 47.00 ResistivitySpec 921.4100952148 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 3 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2704575 4 23.00 ResistivitySpec 913.6674194336 SemiRadial 0.0069647 270.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 4 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.3234487 5 0.00 ResistivitySpec 908.1397705078 SemiRadial 0.0069647 0.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 5 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.2582344 6 11.00 ResistivitySpec 908.0071411133 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 6 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.5512319 7 35.00 ResistivitySpec 916.3591918945 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 7 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7320848 8 59.00 ResistivitySpec 920.1303100586 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 8 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.6781629 9 83.00 ResistivitySpec 921.3920288086 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
0.00 1 2 24 10 9 CDE5 4/24/2025 5:14:32 PM Operator Lot 4626 57 LSL8IN \ 10PT_5mm AutoOptimizeGain AutoProbeHeightSet 915.190 3.00 DLRatio 1.7448909 10 95.00 ResistivitySpec 905.5722656250 SemiRadial 0.0069647 90.000 18.55 Engineer ResMap5 HeaderUniqueId Id 1 666765 666765 UniqueId -
NUM_DATA_ROWS 000000010
NUM_DATA_COLUMNS 000000038
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 17:14:32
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=309148;A_SubgroupId=1745540084;A_BASIC_TYPE=;A_INFO=5424R116.RsM.csv;A_INFO2=10;A_JOBID=CDE5;A_MES_ENTITY=CDE5;A_MID=57-666765-4626.1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811116720000000;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=309148;B_SubgroupId=1745540084;B_BASIC_TYPE=-;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666765;B_NULL_DATA=;B_PPID=10PT_5mm;B_PROCESS_JOBID=57;B_PRODUCT=4626;B_SEQUENCE=638811116720000000;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000007317
DATA_OFFSET|000000128
END_OFFSET|000007957
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Title|TheFileName|Project|RecipeName|LotID|WfrID|Is_TF_DataFile|Directory|Time|Date|Temp|TCRPercent|NOrP|Avg|Dev|Min|Max|Operator|Equipment|Engineer|AreaOrDiamScan|WaferShape|BNBand|TemplateFile|XSize|YSize|CalibrationFactor|MsmtMode|DataType|DataUnit|NumProbePoints|SingleOrDualProbeConfig|NumberActPrbPts|Rsens|IdrvMx|VinGain|DataRejectSigma|MeritThreshold|PrbChgNumber|PrbName|WaferSize|EdgeEx|Xll|Yll|Xur|Yur|X|Y|CutCorners|DiamThScan|DiamStart|DiamEnd|DiamStep|FlatOrNotch|FollowMajorFlat|AutoOrManualLoad|RangeOrIndividual|PauseAfterEveryRun|AutoPrint|Plot|BulkSampleThk|Unit|RangeFrom|RangeTo|CassetteSlotSelected|R|Th|Data|Rs|RsA|RsB|NumberSample|PointX|PointY|Irng|Vrng|ChiSq|MeritGOF|DataIntegrity|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|InferredPoint|StandardDeviationPercentage|SheetRhoVariation|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|10|638811116720000000|CDE5|0|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|95.00|270.000|913.9620971680|913.9620971680|914.08798462|731.11854485|1184|-95.00|-0.00|3051|1102|1.4E+02|1.3236315|0|666765|4626|57|1|-||57-666765-4626.1|1|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|1|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|71.00|270.000|923.2605590820|923.2605590820|923.56932267|738.79669064|1184|-71.00|-0.00|3051|1057|1.3E+02|1.2676778|0|666765|4626|57|1|-||57-666765-4626.1|2|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|2|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|47.00|270.000|921.4100952148|921.4100952148|909.70358100|721.40113210|1184|-47.00|-0.00|3054|1046|1.2E+02|1.3205365|0|666765|4626|57|1|-||57-666765-4626.1|3|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|3|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|23.00|270.000|913.6674194336|913.6674194336|896.28473107|707.65557259|1184|-23.00|-0.00|3055|1042|1.2E+02|1.2704575|0|666765|4626|57|1|-||57-666765-4626.1|4|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|4|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|0.00|0.000|908.1397705078|908.1397705078|898.61367587|713.68271830|1184|0.00|0.00|3052|1033|1.0E+02|1.3234487|0|666765|4626|57|1|-||57-666765-4626.1|5|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|5|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|11.00|90.000|908.0071411133|908.0071411133|900.37349147|716.08698414|1184|11.00|0.00|3052|1027|1.2E+02|1.2582344|0|666765|4626|57|1|-||57-666765-4626.1|6|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|6|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|35.00|90.000|916.3591918945|916.3591918945|903.86156023|716.31006062|1184|35.00|0.00|3052|1020|8.3E+01|1.5512319|0|666765|4626|57|1|-||57-666765-4626.1|7|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|7|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|59.00|90.000|920.1303100586|920.1303100586|914.46298514|728.38862138|1184|59.00|0.00|3050|1047|7.1E+01|1.7320848|0|666765|4626|57|1|-||57-666765-4626.1|8|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|8|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|83.00|90.000|921.3920288086|921.3920288086|913.59693033|726.57794711|1184|83.00|0.00|3051|1029|7.6E+01|1.6781629|0|666765|4626|57|1|-||57-666765-4626.1|9|0.0069647||24
0.00|1|2|10|638811116720000000|CDE5|9|666765||LSL8IN|LSL8IN \ 10PT_5mm|MyCarrierID|WaferID|0||17:14|4/24/2025 5:14:32 PM|18.55|0.300|?|915.190|6.374|905.57|923.26|Operator|ResMap5|Engineer|TC|8|10PT_5mm.TPL|125.00|125.00|1.00000|0|Rs|Ohms/sq||10|2|10|99348.000|0.0000750007|0.01287|3.00|0.10|1|MyFavoriteProbe|200.00|10.00|-55.00|-55.00|55.00|55.00|5|5|89|0.00|-50.00|50.00|2.0000|N|Y|M|I|N|Y|N|500.000000|U|25|25|NNNNNNNNNNNNNNNNNNNNNNNNNN|95.00|90.000|905.5722656250|905.5722656250|917.53049853|739.99994302|1184|95.00|0.00|3052|1055|6.7E+01|1.7448909|0|666765|4626|57|1|-||57-666765-4626.1|10|0.0069647||24
NUM_DATA_ROWS|000000010
NUM_DATA_COLUMNS|000000097
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 17:14:32
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=5424R116.RsM.csv;A_INFO2=10;A_JOBID=CDE5;A_MES_ENTITY=CDE5;A_MID=57-666765-4626.1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811116720000000;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=-;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=666765;B_NULL_DATA=;B_PPID=10PT_5mm;B_PROCESS_JOBID=57;B_PRODUCT=4626;B_SEQUENCE=638811116720000000;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER

View File

@ -0,0 +1,36 @@
Bio-Rad UniqueId 4/24/2025 6:11:07 PM 6inTHICK 40 667740 5159 1 1 667740 2.520 1 119.11 2 0.00 3 118.87 4 0.00 5 0.00 6 0.00 7 117.12 8 116.95 9 116.18
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 |
|------------------|----------------------|---|----------|----|--------|------|---|---|----|--------|------|----|--------|----|----|----|--------|----|----|----|----|----|----|----|--------|----|--------|----|--------|
| Bio-Rad UniqueId | 4/24/2025 6:11:07 PM | | 6inTHICK | 40 | 667740 | 5159 | 1 | 1 | | 667740 | 2.52 | 1 | 119.11 | 2 | 0 | 3 | 118.87 | 4 | 0 | 5 | 0 | 6 | 0 | 7 | 117.12 | 8 | 116.95 | 9 | 116.18 |
<1>:Bio-Rad UniqueId
<2>:4/24/2025 6:11:07 PM
<3>:
<4>:6inTHICK
<5>:40
<6>:667740
<7>:5159
<8>:1
<9>:1
<10>:
<11>:667740
<12>:2.52
<13>:1
<14>:119.11
<15>:2
<16>:0
<17>:3
<18>:118.87
<19>:4
<20>:0
<21>:5
<22>:0
<23>:6
<24>:0
<25>:7
<26>:117.12
<27>:8
<28>:116.95
<29>:9
<30>:116.18

View File

@ -0,0 +1,80 @@
{
"SentToMetrology": false,
"SentToSPC": false,
"Id": -1,
"Batch": "667740",
"Cassette": "",
"CellName": "BIORAD2",
"Date": "4/24/2025 6:11:07 PM",
"FilePath": "",
"Layer": "1",
"MeanThickness": "117.645",
"Op": "CL",
"PSN": "5159",
"PassFail": "FAIL",
"RDS": "667740",
"RVThickness": "2.520",
"Reactor": "40",
"Recipe": "6inTHICK",
"StdDev": "1.279",
"Title": "Bio-Rad QS400MEPI",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Wafer": "667740",
"Zone": "1",
"Details": [
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "1",
"Thickness": "119.11",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-1"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "2",
"Thickness": "0.00",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-2"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "3",
"Thickness": "118.87",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-3"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "4",
"Thickness": "0.00",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-4"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "5",
"Thickness": "0.00",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-5"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "6",
"Thickness": "0.00",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-6"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "7",
"Thickness": "117.12",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-7"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "8",
"Thickness": "116.95",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-8"
},
{
"HeaderUniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527",
"Position": "9",
"Thickness": "116.18",
"UniqueId": "BIORAD2_40-667740-5159.1-1_202504241811079527_Item-9"
}
]
}

View File

@ -0,0 +1,55 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Cassette" "HeaderUniqueId" "Layer" "PassFail" "Position" "RDS" "Title" "UniqueId" "Wafer" "Zone" "MeanThickness" "RVThickness" "StdDev" "Thickness" "Slot" "ThicknessFourteen3mmEdgeMean" "ThicknessFourteen3mmEdgePercent" "ThicknessFourteen5mmEdgeMean" "ThicknessFourteen5mmEdgePercent" "ThicknessFourteenCenterMean" "ThicknessFourteenCriticalPointsAverage" "ThicknessFourteenCriticalPointsStdDev" "ThicknessFourteenMeanFrom" "Thickness01" "Thickness02" "Thickness03" "Thickness04" "Thickness05" "Thickness06" "Thickness07" "Thickness08" "Thickness09" "Thickness10" "Thickness11" "Thickness12" "Thickness13" "Thickness14"
0.00 1 2 25 9 0 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 1 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 119.11 00 119.11
0.00 1 2 25 9 1 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 2 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
0.00 1 2 25 9 2 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 3 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 118.87 00 118.87
0.00 1 2 25 9 3 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 4 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
0.00 1 2 25 9 4 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 5 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
0.00 1 2 25 9 5 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 6 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 0.00 00 0.00
0.00 1 2 25 9 6 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 7 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 117.12 00 117.12
0.00 1 2 25 9 7 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 8 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 116.95 00 116.95
0.00 1 2 25 9 8 BIORAD2 4/24/2025 6:11:07 PM CL 667740 5159 40 6inTHICK HeaderUniqueId 1 FAIL 9 667740 Bio-Rad QS400MEPI UniqueId 667740 1 117.645 2.520 1.279 116.18 00 116.18
NUM_DATA_ROWS 000000009
NUM_DATA_COLUMNS 000000050
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 18:11:07
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=514141;A_SubgroupId=1745543491;A_BASIC_TYPE=;A_INFO=202504241811079527.TXT.csv;A_INFO2=9;A_JOBID=BIORAD2;A_MES_ENTITY=BIORAD2;A_MID=40-667740-5159.1-1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811150679527382;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=514141;B_SubgroupId=1745543491;B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667740;B_NULL_DATA=;B_PPID=6inTHICK;B_PROCESS_JOBID=40;B_PRODUCT=5159;B_SEQUENCE=638811150679527382;B_WAFER_ID=-;B_WAFER_POS=1;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000003202
DATA_OFFSET|000000128
END_OFFSET|000003871
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Title|Recipe|DateTime|Operator|Batch|Cassette|UsedLast|Wafer|Position|Thickness|WaferMeanThickness|StdDev|PassFail|Line|RadialVariationThickness|Slot|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Thickness 14 3mm Edge Mean|Thickness 14 3mm Edge % from R/2|Thickness 14 5mm Edge Mean|Thickness 14 5mm Edge % from R/2|Thickness 14 Center Mean|Thickness 14 Average|Thickness 14 Std Dev|Thickness 14 R 2/Mean|Thickness01|Thickness02|Thickness03|Thickness04|Thickness05|Thickness06|Thickness07|Thickness08|Thickness09|Thickness10|Thickness11|Thickness12|Thickness13|Thickness14|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|9|638811150679527382|BIORAD2|0|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|1|119.11|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||119.11||||||||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|1|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|2|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||0.00|||||||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|2|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|3|118.87|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||118.87||||||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|3|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|4|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||0.00|||||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|4|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|5|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||0.00||||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|5|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|6|0.00|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||||0.00|||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|6|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|7|117.12|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||||117.12||||||||25
0.00|1|2|9|638811150679527382|BIORAD2|7|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|8|116.95|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1||||||||||||||||116.95|||||||25
0.00|1|2|9|638811150679527382|BIORAD2|8|Bio-Rad QS400MEPI|6inTHICK|4/24/2025 6:11:07 PM|CL|BIORAD#2||True|667740|9|116.18|117.645|1.279|FAIL|Radial variation (computation B) PASS:|2.520|00|667740|5159|40|1|1||40-667740-5159.1-1|||||||||||||||||116.18||||||25
NUM_DATA_ROWS|000000009
NUM_DATA_COLUMNS|000000053
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 18:11:07
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504241811079527.TXT.csv;A_INFO2=9;A_JOBID=BIORAD2;A_MES_ENTITY=BIORAD2;A_MID=40-667740-5159.1-1;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811150679527382;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667740;B_NULL_DATA=;B_PPID=6inTHICK;B_PROCESS_JOBID=40;B_PRODUCT=5159;B_SEQUENCE=638811150679527382;B_WAFER_ID=-;B_WAFER_POS=1;
END_HEADER

View File

@ -0,0 +1,22 @@
Stratus_32-667283-5095_20250424074408371 4/24/2025 7:44:08 PM BIORAD5 FQA Thickness 6in_CENTERPOINT 32 667283 5095 _24_19_41 667283 6.971 1 6.963 25 6.980
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 |
|------------------------------------------|----------------------|---------|---------------|---|-----------------|----|--------|------|-----------|--------|-------|----|-------|----|------|
| Stratus_32-667283-5095_20250424074408371 | 4/24/2025 7:44:08 PM | BIORAD5 | FQA Thickness | | 6in_CENTERPOINT | 32 | 667283 | 5095 | _24_19_41 | 667283 | 6.971 | 1 | 6.963 | 25 | 6.98 |
<1>:Stratus_32-667283-5095_20250424074408371
<2>:4/24/2025 7:44:08 PM
<3>:BIORAD5
<4>:FQA Thickness
<5>:
<6>:6in_CENTERPOINT
<7>:32
<8>:667283
<9>:5095
<10>:_24_19_41
<11>:667283
<12>:6.971
<13>:1
<14>:6.963
<15>:25
<16>:6.98

View File

@ -0,0 +1,59 @@
{
"Id": -1,
"Batch": "_24_19_41",
"Cassette": "667283",
"CellName": "BIORAD5",
"Date": "4/24/2025 7:44:08 PM",
"FilePath": "",
"MeanThickness": "6.971",
"Operator": "",
"PSN": "5095",
"RDS": "667283",
"Reactor": "32",
"Recipe": "6in_CENTERPOINT",
"StdDev": "0.0115",
"Title": "_24_19_41",
"UniqueId": "BIORAD5_32-667283-5095_202504241944083711",
"Details": [
{
"HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711",
"Mean": "6.963",
"PassFail": "PASS",
"Position": "1",
"Recipe": "6in_CENTERPOINT",
"Slot": "1",
"StdDev": "0",
"UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-1",
"Thickness": "6.963",
"Wafer": "Wafer 1",
"Points": [
{
"HeaderUniqueId": "HeaderUniqueId",
"Position": "1",
"Thickness": "6.963",
"UniqueId": "UniqueId"
}
]
},
{
"HeaderUniqueId": "BIORAD5_32-667283-5095_202504241944083711",
"Mean": "6.980",
"PassFail": "PASS",
"Position": "25",
"Recipe": "6in_CENTERPOINT",
"Slot": "25",
"StdDev": "0",
"UniqueId": "BIORAD5_32-667283-5095_202504241944083711_Item-2",
"Thickness": "6.980",
"Wafer": "Wafer 25",
"Points": [
{
"HeaderUniqueId": "HeaderUniqueId",
"Position": "25",
"Thickness": "6.980",
"UniqueId": "UniqueId"
}
]
}
]
}

View File

@ -0,0 +1,41 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "MID" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Cassette" "GradeStdDev" "HeaderUniqueId" "Layer" "MeanThickness" "PassFail" "RDS" "Slot" "Title" "UniqueId" "Wafer" "Zone" "Mean" "Position" "StdDev" "Thickness" "ThicknessSlotOne" "ThicknessSlotTwentyFive" "DeltaThicknessSlotsOneAndTwentyFive" "PercentDeltaThicknessSlotsOneAndTwentyFive"
0.00 1 2 26 2 0 BIORAD5 667283 4/24/2025 7:44:08 PM _24_19_41 5095 32 6in_CENTERPOINT 667283 0.0115 HeaderUniqueId - 6.971 PASS 667283 1 _24_19_41 UniqueId Wafer 1 - 6.963 1 0 6.963 ThicknessSlotOne ThicknessSlotTwentyFive
0.00 1 2 26 2 1 BIORAD5 667283 4/24/2025 7:44:08 PM _24_19_41 5095 32 6in_CENTERPOINT 667283 0.0115 HeaderUniqueId - 6.971 PASS 667283 25 _24_19_41 UniqueId Wafer 25 - 6.980 25 0 6.980 ThicknessSlotOne ThicknessSlotTwentyFive
NUM_DATA_ROWS 000000002
NUM_DATA_COLUMNS 000000034
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 19:44:08
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=348729;A_SubgroupId=1745549064;A_BASIC_TYPE=;A_INFO=DataBiorad.txt-0.csv;A_INFO2=2;A_JOBID=BIORAD5;A_MES_ENTITY=BIORAD5;A_MID=32-667283-5095;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811206483711430;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=348729;B_SubgroupId=1745549064;B_BASIC_TYPE=Left - High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667283;B_NULL_DATA=;B_PPID=6in_CENTERPOINT;B_PROCESS_JOBID=32;B_PRODUCT=5095;B_SEQUENCE=638811206483711430;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000000838
DATA_OFFSET|000000128
END_OFFSET|000001510
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Batch|Cassette|DateTime|Destination|Mean|PassFail|Recipe|Reference|Site|Slot|Source|StdDev|Text|GradeMean|GradeStdDev|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Actual Delta Thick Pts 1 and 25|% Delta Thick Pts 1 and 25|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|2|638811206483711430|BIORAD5|0|_24_19_41|667283|4/24/2025 7:44:08 PM||6.963|PASS|6in_CENTERPOINT||6.963|1||0|Wafer 1|6.971|0.0115|667283|5095|32|-|-||_24_19_41|||26
0.00|1|2|2|638811206483711430|BIORAD5|1|_24_19_41|667283|4/24/2025 7:44:08 PM||6.980|PASS|6in_CENTERPOINT||6.980|25||0|Wafer 25|6.971|0.0115|667283|5095|32|-|-||_24_19_41|||26
NUM_DATA_ROWS|000000002
NUM_DATA_COLUMNS|000000032
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 19:44:08
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=DataBiorad.txt-0.csv;A_INFO2=2;A_JOBID=BIORAD5;A_MES_ENTITY=BIORAD5;A_MID=32-667283-5095;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811206483711430;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=Left - High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667283;B_NULL_DATA=;B_PPID=6in_CENTERPOINT;B_PROCESS_JOBID=32;B_PRODUCT=5095;B_SEQUENCE=638811206483711430;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER

View File

@ -0,0 +1,103 @@
UniqueId HGCV2 46 667776 5159 - - ZONE2 667776 5PT MES 4/25/2025 8:40:01 AM 150.00 1.02 2.130E-002 N PARALLEL -5.00 -20.00 2500 2000.00 6IN5PT 6IN5PT SSMDATA 6_5PT10M.PAT ASTM: F723 - 82 7.599e+013 2.352e+000 2.799e+000 7.634e+013 2.352e+000 2.766e+000 3.342e-001 4.365e+001 4.605e+001 1.713e+001 2.053e+000 2.563e+000 5.632e+001 2.315e+000 2.779e+000 5.607e+001 2.321e+000 2.746e+000 9.000e+001 -1.000e+000 0.000e+000 2.251e+000 2.931e+001 3.713e+001 -1.000e+000 -1.000e+000 0.000e+000 1 7.854E+013 7.882E+013 0.294 17.109 54.482 54.286 90.000 2.193 2 7.447E+013 7.472E+013 0.216 17.428 57.431 57.247 90.000 1.898 3 7.426E+013 7.458E+013 0.250 17.496 57.596 57.352 90.000 2.414 4 7.695E+013 7.733E+013 0.327 16.621 55.595 55.324 90.000 1.493 5 7.571E+013 7.623E+013 0.584 17.015 56.500 56.121 90.000 3.257
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 | 44 | 45 | 46 | 47 | 48 | 49 | 50 | 51 | 52 | 53 | 54 | 55 | 56 | 57 | 58 | 59 | 60 | 61 | 62 | 63 | 64 | 65 | 66 | 67 | 68 | 69 | 70 | 71 | 72 | 73 | 74 | 75 | 76 | 77 | 78 | 79 | 80 | 81 | 82 | 83 | 84 | 85 | 86 | 87 | 88 | 89 | 90 | 91 | 92 | 93 | 94 | 95 | 96 | 97 |
|----------|-------|----|--------|------|---|---|-------|--------|---------|----------------------|-----|------|----------|----|----------|----|-----|------|------|--------|--------|---------|--------------|-----------------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|----------|-----------|----------|----------|----------|----------|-----------|-----------|----------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|--------|--------|----|-------|----|----------|----------|-------|--------|------|--------|----|-------|
| UniqueId | HGCV2 | 46 | 667776 | 5159 | - | - | ZONE2 | 667776 | 5PT MES | 4/25/2025 8:40:01 AM | 150 | 1.02 | 2.13E-02 | N | PARALLEL | -5 | -20 | 2500 | 2000 | 6IN5PT | 6IN5PT | SSMDATA | 6_5PT10M.PAT | ASTM: F723 - 82 | 7.60E+13 | 2.35E+00 | 2.80E+00 | 7.63E+13 | 2.35E+00 | 2.77E+00 | 3.34E-01 | 4.37E+01 | 4.61E+01 | 1.71E+01 | 2.05E+00 | 2.56E+00 | 5.63E+01 | 2.32E+00 | 2.78E+00 | 5.61E+01 | 2.32E+00 | 2.75E+00 | 9.00E+01 | -1.00E+00 | 0.00E+00 | 2.25E+00 | 2.93E+01 | 3.71E+01 | -1.00E+00 | -1.00E+00 | 0.00E+00 | 1 | 7.85E+13 | 7.88E+13 | 0.294 | 17.109 | 54.482 | 54.286 | 90 | 2.193 | 2 | 7.45E+13 | 7.47E+13 | 0.216 | 17.428 | 57.431 | 57.247 | 90 | 1.898 | 3 | 7.43E+13 | 7.46E+13 | 0.25 | 17.496 | 57.596 | 57.352 | 90 | 2.414 | 4 | 7.70E+13 | 7.73E+13 | 0.327 | 16.621 | 55.595 | 55.324 | 90 | 1.493 | 5 | 7.57E+13 | 7.62E+13 | 0.584 | 17.015 | 56.5 | 56.121 | 90 | 3.257 |
<1>:UniqueId
<2>:HGCV2
<3>:46
<4>:667776
<5>:5159
<6>:-
<7>:-
<8>:ZONE2
<9>:667776
<10>:5PT MES
<11>:4/25/2025 8:40:01 AM
<12>:150
<13>:1.02
<14>:0.0213
<15>:N
<16>:PARALLEL
<17>:-5
<18>:-20
<19>:2500
<20>:2000
<21>:6IN5PT
<22>:6IN5PT
<23>:SSMDATA
<24>:6_5PT10M.PAT
<25>:ASTM: F723 - 82
<26>:7.599E+13
<27>:2.352
<28>:2.799
<29>:7.634E+13
<30>:2.352
<31>:2.766
<32>:0.3342
<33>:43.65
<34>:46.05
<35>:17.13
<36>:2.053
<37>:2.563
<38>:56.32
<39>:2.315
<40>:2.779
<41>:56.07
<42>:2.321
<43>:2.746
<44>:90
<45>:-1
<46>:0
<47>:2.251
<48>:29.31
<49>:37.13
<50>:-1
<51>:-1
<52>:0
<53>:1
<54>:7.854E+13
<55>:7.882E+13
<56>:0.294
<57>:17.109
<58>:54.482
<59>:54.286
<60>:90
<61>:2.193
<62>:2
<63>:7.447E+13
<64>:7.472E+13
<65>:0.216
<66>:17.428
<67>:57.431
<68>:57.247
<69>:90
<70>:1.898
<71>:3
<72>:7.426E+13
<73>:7.458E+13
<74>:0.25
<75>:17.496
<76>:57.596
<77>:57.352
<78>:90
<79>:2.414
<80>:4
<81>:7.695E+13
<82>:7.733E+13
<83>:0.327
<84>:16.621
<85>:55.595
<86>:55.324
<87>:90
<88>:1.493
<89>:5
<90>:7.571E+13
<91>:7.623E+13
<92>:0.584
<93>:17.015
<94>:56.5
<95>:56.121
<96>:90
<97>:3.257

View File

@ -0,0 +1,119 @@
{
"SentToMetrology": false,
"SentToSPC": false,
"Area": "2.130E-002",
"Ccomp": "1.02",
"CellName": "HGCV2",
"CondType": "N",
"Date": "4/25/2025 8:40:01 AM",
"FlatZMean": "1.713e\u002B001",
"FlatZRadialGradient": "2.563e\u002B000",
"FlatZStdDev": "2.053e\u002B000",
"Folder": "SSMDATA",
"GLimit": "2000.00",
"GradeMean": "2.251e\u002B000",
"GradeRadialGradient": "3.713e\u002B001",
"GradeStdDev": "2.931e\u002B001",
"Id": -1,
"Layer": "-",
"Lot": "667776",
"Model": "PARALLEL",
"NAvgMean": "7.599e\u002B013",
"NAvgRadialGradient": "2.799e\u002B000",
"NAvgStdDev": "2.352e\u002B000",
"NslMean": "7.634e\u002B013",
"NslRadialGradient": "2.766e\u002B000",
"NslStdDev": "2.352e\u002B000",
"Operator": "HGCV2",
"PSN": "5159",
"Pattern": "6_5PT10M.PAT",
"PhaseMean": "9.000e\u002B001",
"PhaseRadialGradient": "0.000e\u002B000",
"PhaseStdDev": "-1.000e\u002B000",
"Plan": "5PT MES",
"RDS": "667776",
"RampRate": "2500",
"Reactor": "46",
"RhoAvgMean": "5.632e\u002B001",
"RhoAvgRadialGradient": "2.779e\u002B000",
"RhoAvgStdDev": "2.315e\u002B000",
"RhoMethod": "ASTM: F723 - 82",
"RhoslMean": "5.607e\u002B001",
"RhoslRadialGradient": "2.746e\u002B000",
"RhoslStdDev": "2.321e\u002B000",
"RsMean": "-1.000e\u002B000",
"RsRadialGradient": "0.000e\u002B000",
"RsStdDev": "-1.000e\u002B000",
"SetupFile": "6IN5PT",
"StartVoltage": "-5.00",
"StopVoltage": "-20.00",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538",
"VdMean": "3.342e-001",
"VdRadialGradient": "4.605e\u002B001",
"VdStdDev": "4.365e\u002B001",
"Wafer": "ZONE2",
"WaferSize": "150.00",
"Zone": "-",
"Details": [
{
"FlatZ": "17.109",
"Grade": "2.193",
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
"NAvg": "7.854E\u002B013",
"Nsl": "7.882E\u002B013",
"Phase": "90.000",
"RhoAvg": "54.482",
"Rhosl": "54.286",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-1",
"Vd": "0.294"
},
{
"FlatZ": "17.428",
"Grade": "1.898",
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
"NAvg": "7.447E\u002B013",
"Nsl": "7.472E\u002B013",
"Phase": "90.000",
"RhoAvg": "57.431",
"Rhosl": "57.247",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-2",
"Vd": "0.216"
},
{
"FlatZ": "17.496",
"Grade": "2.414",
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
"NAvg": "7.426E\u002B013",
"Nsl": "7.458E\u002B013",
"Phase": "90.000",
"RhoAvg": "57.596",
"Rhosl": "57.352",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-3",
"Vd": "0.250"
},
{
"FlatZ": "16.621",
"Grade": "1.493",
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
"NAvg": "7.695E\u002B013",
"Nsl": "7.733E\u002B013",
"Phase": "90.000",
"RhoAvg": "55.595",
"Rhosl": "55.324",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-4",
"Vd": "0.327"
},
{
"FlatZ": "17.015",
"Grade": "3.257",
"HeaderUniqueId": "HGCV2_46-667776-5159_202504250840019538",
"NAvg": "7.571E\u002B013",
"Nsl": "7.623E\u002B013",
"Phase": "90.000",
"RhoAvg": "56.500",
"Rhosl": "56.121",
"UniqueId": "HGCV2_46-667776-5159_202504250840019538_Item-5",
"Vd": "0.584"
}
]
}

View File

@ -0,0 +1,47 @@
HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Area" "Folder" "HeaderUniqueId" "Id" "Layer" "Model" "Pattern" "Phase" "Plan" "RampRate" "RDS" "SetupFile" "StartVoltage" "StopVoltage" "UniqueId" "Wafer" "WaferSize" "Zone" "Ccomp" "CondType" "FlatZ" "FlatZMean" "FlatZRadialGradient" "FlatZStdDev" "GLimit" "Grade" "GradeMean" "GradeRadialGradient" "GradeStdDev" "NAvg" "NAvgMean" "NAvgRadialGradient" "NAvgStdDev" "Nsl" "NslMean" "NslRadialGradient" "NslStdDev" "PhaseMean" "PhaseRadialGradient" "PhaseStdDev" "RhoAvg" "RhoAvgMean" "RhoAvgRadialGradient" "RhoAvgStdDev" "RhoMethod" "Rhosl" "RhoslMean" "RhoslRadialGradient" "RhoslStdDev" "RsMean" "RsRadialGradient" "RsStdDev" "Vd" "VdMean" "VdRadialGradient" "VdStdDev" "Variation" "AreaDeltaFromLastRun" "Nine10mmEdgeMean" "Nine4mmEdgeMean" "NineCriticalPointsAverage" "NineCriticalPointsPhaseAngleAverage" "NineCriticalPointsStdDev" "NineEdgeMeanDelta" "NineMean" "NineResRangePercent" "RhoAvg01" "RhoAvg02" "RhoAvg03" "RhoAvg04" "RhoAvg05" "RhoAvg06" "RhoAvg07" "RhoAvg08" "RhoAvg09"
0.00 1 2 23 5 0 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.109 1.713e+001 2.563e+000 2.053e+000 2000.00 2.193 2.251e+000 3.713e+001 2.931e+001 7.854E+013 7.599e+013 2.799e+000 2.352e+000 7.882E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 54.482 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 54.286 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.294 3.342e-001 4.605e+001 4.365e+001 54.482
0.00 1 2 23 5 1 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.428 1.713e+001 2.563e+000 2.053e+000 2000.00 1.898 2.251e+000 3.713e+001 2.931e+001 7.447E+013 7.599e+013 2.799e+000 2.352e+000 7.472E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.431 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.247 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.216 3.342e-001 4.605e+001 4.365e+001 57.431
0.00 1 2 23 5 2 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.496 1.713e+001 2.563e+000 2.053e+000 2000.00 2.414 2.251e+000 3.713e+001 2.931e+001 7.426E+013 7.599e+013 2.799e+000 2.352e+000 7.458E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 57.596 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 57.352 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.250 3.342e-001 4.605e+001 4.365e+001 57.596
0.00 1 2 23 5 3 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 16.621 1.713e+001 2.563e+000 2.053e+000 2000.00 1.493 2.251e+000 3.713e+001 2.931e+001 7.695E+013 7.599e+013 2.799e+000 2.352e+000 7.733E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 55.595 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 55.324 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.327 3.342e-001 4.605e+001 4.365e+001 55.595
0.00 1 2 23 5 4 HGCV2 4/25/2025 8:40:01 AM 667776 5159 46 Recipe 2.130E-002 SSMDATA HeaderUniqueId Id - PARALLEL 6_5PT10M.PAT 90.000 5PT MES 2500 667776 6IN5PT -5.00 -20.00 UniqueId ZONE2 150.00 - 1.02 N 17.015 1.713e+001 2.563e+000 2.053e+000 2000.00 3.257 2.251e+000 3.713e+001 2.931e+001 7.571E+013 7.599e+013 2.799e+000 2.352e+000 7.623E+013 7.634e+013 2.766e+000 2.352e+000 9.000e+001 0.000e+000 -1.000e+000 56.500 5.632e+001 2.779e+000 2.315e+000 ASTM: F723 - 82 56.121 5.607e+001 2.746e+000 2.321e+000 -1.000e+000 0.000e+000 -1.000e+000 0.584 3.342e-001 4.605e+001 4.365e+001 56.500
NUM_DATA_ROWS 000000005
NUM_DATA_COLUMNS 000000088
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/25/2025 08:40:01
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=241989;A_SubgroupId=1745595622;A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=241989;B_SubgroupId=1745595622;B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000004856
DATA_OFFSET|000000128
END_OFFSET|000005521
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Operator|StartVoltage|Wafer|StopVoltage|Lot|RampRate|Plan|GLimit|Date|Time|SetupFile|WaferSize|Folder|Ccomp|Pattern|Area|CondType|RhoMethod|Model|MeanNAvg|MeanNsl|MeanVd|MeanFlatZ|MeanRhoAvg|MeanRhosl|MeanPhase|MeanGrade|MeanRs|StandardDeviationPercentageNAvg|StandardDeviationPercentageNsl|StandardDeviationPercentageVd|StandardDeviationPercentageFlatZ|StandardDeviationPercentageRhoAvg|StandardDeviationPercentageRhosl|StandardDeviationPercentagePhase|StandardDeviationPercentageGrade|StandardDeviationPercentageRs|RadialGradientNAvg|RadialGradientNsl|RadialGradientVd|RadialGradientFlatZ|RadialGradientRhoAvg|RadialGradientRhosl|RadialGradientPhase|RadialGradientGrade|RadialGradientRs|Site|X|Y|NAvg|RhoAvg|Nsl|Rhosl|Vd|Phase|FlatZ|Grade|XLeft|XRight|BottomY|TopY|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|Nine10mmEdgeMean|Nine4mmEdgeMean|NineCriticalPointsAverage|NineCriticalPointsPhaseAngleAverage|NineCriticalPointsStdDev|NineEdgeMeanDelta|NineMean|NineResRangePercent|AreaDeltaFromLastRun|Variation|Percentage HgCV 4PP Delta|RhoAvg01|RhoAvg02|RhoAvg03|RhoAvg04|RhoAvg05|RhoAvg06|RhoAvg07|RhoAvg08|RhoAvg09|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|5|638811672019538124|HGCV2|0|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|1|0.0|0.0|7.854E+013|54.482|7.882E+013|54.286|0.294|90.000|17.109|2.193|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||54.482|||||||||23
0.00|1|2|5|638811672019538124|HGCV2|1|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|2|56.3|32.5|7.447E+013|57.431|7.472E+013|57.247|0.216|90.000|17.428|1.898|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||57.431||||||||23
0.00|1|2|5|638811672019538124|HGCV2|2|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|3|-32.5|56.3|7.426E+013|57.596|7.458E+013|57.352|0.250|90.000|17.496|2.414|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||57.596|||||||23
0.00|1|2|5|638811672019538124|HGCV2|3|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|4|-56.3|-32.5|7.695E+013|55.595|7.733E+013|55.324|0.327|90.000|16.621|1.493|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159|||||||||||||||55.595||||||23
0.00|1|2|5|638811672019538124|HGCV2|4|PROBE 2|-5.00|ZONE2|-20.00|667776|2500|5PT MES|2000.00|4/25/2025 8:40:01 AM|11:57:16 AM|6IN5PT|150.00|SSMDATA|1.02|6_5PT10M.PAT|2.130E-002|N|ASTM: F723 - 82|PARALLEL|7.599e+013|7.634e+013|3.342e-001|1.713e+001|5.632e+001|5.607e+001|9.000e+001|2.251e+000|-1.000e+000|2.352e+000|2.352e+000|4.365e+001|2.053e+000|2.315e+000|2.321e+000|-1.000e+000|2.931e+001|-1.000e+000|2.799e+000|2.766e+000|4.605e+001|2.563e+000|2.779e+000|2.746e+000|0.000e+000|3.713e+001|0.000e+000|5|32.5|-56.3|7.571E+013|56.500|7.623E+013|56.121|0.584|90.000|17.015|3.257|9.00E+000|1.80E+001|13|14|667776|5159|46|-|-||46-667776-5159||||||||||||||||56.500|||||23
NUM_DATA_ROWS|000000005
NUM_DATA_COLUMNS|000000096
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/25/2025 08:40:01
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504250840019538.pcl.csv;A_INFO2=5;A_JOBID=HGCV2;A_MES_ENTITY=HGCV2;A_MID=46-667776-5159;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811672019538124;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- EpiPro 5000;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667776;B_NULL_DATA=;B_PPID=6_5PT10M.PAT;B_PROCESS_JOBID=46;B_PRODUCT=5159;B_SEQUENCE=638811672019538124;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER

3341
.vscode/METROLOGY_SERVICES.vba vendored Normal file

File diff suppressed because it is too large Load Diff

6
.vscode/settings.json vendored Normal file
View File

@ -0,0 +1,6 @@
{
"files.associations": {
"*.txt": "vba"
},
"cSpell.words": []
}

File diff suppressed because it is too large Load Diff

File diff suppressed because it is too large Load Diff

View File

@ -423,7 +423,7 @@
"<1,31>": "",
"<1,32>": "",
"<1,33>": "",
"<1,34>": "LSL2*IMAGE*ICO*INFINEON",
"<1,34>": "",
"<1,35>": "",
"<1,36>": "",
"<1,37>": {

View File

@ -40,7 +40,7 @@
"<8,2>": {
"<8,2,1>": "MET",
"<8,2,2>": "Metrology",
"<8,2,3>": "TODD_C, JEANNE_M, JFUENTE1, JUSTIN_H, JONATHON_S, MARROQUINBRA, TIFFANY_M"
"<8,2,3>": "TODD_C, JEANNE_M"
},
"<8,3>": {
"<8,3,1>": "MTC",

View File

@ -235,7 +235,7 @@ Service SendReminders()
IF CLType = 'E' THEN
Desc = CLRec<CALIB_LIST_EQ_DESC$>
SN = CLRec<CALIB_LIST_EQ_SN$>
Loc = CLRec<CALIB_LIST_EQ_LOC$>
Loc = CLRec<CALIB_LIST_EQ_LOC$
NewLine = Desc:' (S/N: ':SN:') located in the ':Loc:' is due for calibration on ':NextCalDt:CRLF$
END
IF CLType = 'S' THEN

View File

@ -50,112 +50,109 @@ RETURN Result
* * * * * * *
Create:
* * * * * * *
obj_AppWindow('Create')
Set_Property(@WINDOW,'STATUSLINE',@WINDOW:'.STATUSLINE_FIX')
GOSUB Refresh
obj_AppWindow('Create')
Set_Property(@WINDOW,'STATUSLINE',@WINDOW:'.STATUSLINE_FIX')
GOSUB Refresh
RETURN
* * * * * * *
Refresh:
* * * * * * *
RETURN
* * * * * * *
ReactNoGF:
* * * * * * *
* Don't add a return here
* * * * * * *
LUReactor:
* * * * * * *
IF NOT(ASSIGNED(Parm1)) THEN FocusControl = '' ELSE FocusControl = Parm1
IF NOT(ASSIGNED(Parm2)) THEN FocusPos = '' ELSE FocusPos = Parm2
Set_Status(0)
TypeOver = ''
TypeOver<PSELECT$> = '2' ;* Multiple Select
TypeOver<PTYPE$> = 'E' ;* Return entire row
ReactData = Popup(@WINDOW,TypeOver,'REACTORS')
IF ReactData = '' THEN RETURN
Set_Property(@WINDOW:'.REACT_NO','LIST',ReactData)
LineCnt = COUNT(ReactData,@FM) + (ReactData NE '')
ColCnt = 7
FOR Line = 1 TO LineCnt
FOR Column = 2 TO ColCnt
stat = Send_Message(@WINDOW:'.REACT_NO','COLOR_BY_POS',Column,Line,GREEN$)
NEXT Column
NEXT Line
IF NOT(ASSIGNED(Parm1)) THEN FocusControl = '' ELSE FocusControl = Parm1
IF NOT(ASSIGNED(Parm2)) THEN FocusPos = '' ELSE FocusPos = Parm2
Set_Status(0)
TypeOver = ''
TypeOver<PSELECT$> = '2' ;* Multiple Select
TypeOver<PTYPE$> = 'E' ;* Return entire row
ReactData = Popup(@WINDOW,TypeOver,'REACTORS')
IF ReactData = '' THEN RETURN
Set_Property(@WINDOW:'.REACT_NO','LIST',ReactData)
LineCnt = COUNT(ReactData,@FM) + (ReactData NE '')
ColCnt = 7
FOR Line = 1 TO LineCnt
FOR Column = 2 TO ColCnt
stat = Send_Message(@WINDOW:'.REACT_NO','COLOR_BY_POS',Column,Line,GREEN$)
NEXT Column
NEXT Line
RETURN
* * * * * * *
Cancel:
* * * * * * *
End_Dialog(@WINDOW,'')
End_Dialog(@WINDOW,'')
RETURN
* * * * * * *
PostEntries:
* * * * * * *
ReactNos = Get_Property(@WINDOW:'.REACT_NO','ARRAY')<COL$REACT_NO>
Comment = Get_Property(@WINDOW:'.COMMENT','DEFPROP')
LOOP
TestChar = ReactNos[-1,1]
UNTIL TestChar NE @VM OR ReactNos = ''
ReactNos[-1,1] = ''
REPEAT
EventKeys = '' ;* Keys to return to the REACT_EVENT window for a browse of the newly created records
IF ReactNos NE '' AND Comment NE '' THEN
EventDTM = OCONV(Date(),'D4/'):' ':OCONV(Time(),'MTS') ;* Same DTM for all new records
EventType = 'PD' ;* Passdown
LoggedBy = @USER4
ReactNos = Get_Property(@WINDOW:'.REACT_NO','ARRAY')<COL$REACT_NO>
Comment = Get_Property(@WINDOW:'.COMMENT','DEFPROP')
ReactCnt = COUNT(ReactNos,@VM) + (ReactNos NE '')
LOOP
TestChar = ReactNos[-1,1]
UNTIL TestChar NE @VM OR ReactNos = ''
ReactNos[-1,1] = ''
REPEAT
EventKeys = '' ;* Keys to return to the REACT_EVENT window for a browse of the newly created records
IF ReactNos NE '' AND Comment NE '' THEN
FOR I = 1 TO ReactCnt
ReactNo = ReactNos<1,I>
CurrMode = XLATE('REACTOR',ReactNo,'CURR_MODE','X')
EventDTM = OCONV(Date(),'D4/'):' ':OCONV(Time(),'MTS') ;* Same DTM for all new records
EventType = 'PD' ;* Passdown
LoggedBy = @USER4
ReactCnt = COUNT(ReactNos,@VM) + (ReactNos NE '')
FOR I = 1 TO ReactCnt
ReactNo = ReactNos<1,I>
CurrMode = XLATE('REACTOR',ReactNo,'CURR_MODE','X')
obj_React_Event('Create',ReactNo:@RM:EventDTM:@RM:EventType:@RM:LoggedBy:@RM:Comment:@RM:@RM:CurrMode)
ErrCode = ''
If Get_Status(ErrCode) then
Msg(@Window, '', 'OK', '', 'Process Error':@FM:'Error posting entries. ':ErrCode)
end else
Set_Property(@Window:'.REACT_NO', 'LIST', '')
Set_Property(@Window:'.COMMENT', 'TEXT', '')
end
EventKeys<I> = ReactNo:'*':ICONV(EventDTM,'DT')
NEXT I
END else
Msg(@Window, '', 'OK', '', 'Process Error':@FM:'React No(s) and Comment must not be null!')
end
obj_React_Event('Create',ReactNo:@RM:EventDTM:@RM:EventType:@RM:LoggedBy:@RM:Comment:@RM:@RM:CurrMode)
EventKeys<I> = ReactNo:'*':ICONV(EventDTM,'DT')
NEXT I
END
End_Dialog(@WINDOW,EventKeys)
RETURN

File diff suppressed because it is too large Load Diff

View File

@ -3,27 +3,25 @@ Compile function NDW_WAFER_COUNTS_EVENTS(CtrlEntId, Event, @PARAMS)
#window NDW_WAFER_COUNTS
Declare function Reactor_Services, Database_Services, Get_Property, Error_Services, Environment_Services
Declare function SRP_Array, Logging_Services
Declare subroutine Set_Property, Logging_Services, PlaceDialog
Declare subroutine Set_Property, Logging_Services
$Insert EVENT_SETUP
$Insert APP_INSERTS
$Insert REACTOR_EQUATES
EQU DATA_ASM_REACT_ID$ to 1
EQU DATA_ASM_SUSC_CNT$ to 2
EQU DATA_ASM_SUSC_THK$ to 3
EQU DATA_ASM_TUBE_CNT$ to 4
EQU DATA_ASM_TUBE_THK$ to 5
EQU DATA_ASM_ARM_CNT$ to 6
EQU DATA_ASM_EXHAUST_THK$ to 7
EQU DATA_ASM_REACT_ID$ to 1
EQU DATA_ASM_SUSC_CNT$ to 2
EQU DATA_ASM_SUSC_THK$ to 3
EQU DATA_ASM_TUBE_CNT$ to 4
EQU DATA_ASM_TUBE_THK$ to 5
EQU DATA_ASM_ARM_CNT$ to 6
EQU DATA_HTR_REACT_ID$ to 1
EQU DATA_HTR_SUSC_CNT$ TO 2
EQU DATA_HTR_SUSC_THK$ TO 3
EQU DATA_HTR_TUBE_CNT$ TO 4
EQU DATA_HTR_TUBE_THK$ TO 5
EQU DATA_HTR_ARM_CNT$ TO 6
EQU DATA_HTR_EXHAUST_THK$ TO 7
EQU DATA_HTR_REACT_ID$ to 1
EQU DATA_HTR_SUSC_CNT$ TO 2
EQU DATA_HTR_SUSC_THK$ TO 3
EQU DATA_HTR_TUBE_CNT$ TO 4
EQU DATA_HTR_TUBE_THK$ TO 5
EQU DATA_HTR_ARM_CNT$ TO 6
EQU DATA_EPP_REACT_ID$ to 1
EQU DATA_EPP_SUSC_CNT$ TO 2
@ -32,7 +30,6 @@ EQU DATA_EPP_BELL_JAR_CNT$ TO 4
EQU DATA_EPP_BELL_JAR_THK$ TO 5
EQU DATA_EPP_LOWER_QUARTZ_CNT$ TO 6
EQU DATA_EPP_LOWER_QUARTZ_THK$ TO 7
EQU DATA_EPP_EXHAUST_THK$ TO 8
ASMDataTable = @Window : '.OLE_DATA_ASM'
HTRDataTable = @Window : '.OLE_DATA_HTR'
@ -52,11 +49,11 @@ If Event EQ 'OLE' then
Transfer Param1 to Event
Transfer Param2 to Param1
Transfer Param3 to Param2
Transfer Param4 to Param3
Transfer Param5 to Param4
Transfer Param6 to Param5
Transfer Param7 to Param6
Transfer Param8 to Param7
* Transfer Param4 to Param3
* Transfer Param5 to Param4
* Transfer Param6 to Param5
* Transfer Param7 to Param6
* Transfer Param8 to Param7
end
GoToEvent Event for CtrlEntId else
@ -70,25 +67,17 @@ Return EventFlow or 1
//-----------------------------------------------------------------------------
Event WINDOW.CREATE(CreateParam)
GoSub SetupOLEControls
GoSub GetReactorMetrics
End Event
Event TABCONTROL_1.CLICK()
Page = Get_Property(@Window : '.TABCONTROL_1', 'VALUE')
Set_Property(@WINDOW,'VPOSITION', Page)
end event
Event PUB_REFRESH_DATA.CLICK()
GoSub GetReactorMetrics
end event
//-----------------------------------------------------------------------------
@ -96,7 +85,6 @@ end event
//-----------------------------------------------------------------------------
GetReactorMetrics:
ReactorRec = ''
ASMData = ''
HTRData = ''
@ -117,13 +105,12 @@ GetReactorMetrics:
for each Reactor in ASMList using @FM setting rPos
MetricData = Reactor_Services('GetWaferCntMetricsByReactorID', Reactor)
if Error_Services('NoError') then
ASMData<rPos, DATA_ASM_REACT_ID$> = MetricData<1, DATA_ASM_REACT_ID$>
ASMData<rPos, DATA_ASM_SUSC_CNT$> = MetricData<1, DATA_ASM_SUSC_CNT$>
ASMData<rPos, DATA_ASM_SUSC_THK$> = MetricData<1, DATA_ASM_SUSC_THK$>
ASMData<rPos, DATA_ASM_TUBE_CNT$> = MetricData<1, DATA_ASM_TUBE_CNT$>
ASMData<rPos, DATA_ASM_TUBE_THK$> = MetricData<1, DATA_ASM_TUBE_THK$>
ASMData<rPos, DATA_ASM_ARM_CNT$> = MetricData<1, DATA_ASM_ARM_CNT$>
ASMData<rPos, DATA_ASM_EXHAUST_THK$> = MetricData<1, DATA_ASM_EXHAUST_THK$>
ASMData<rPos, DATA_ASM_REACT_ID$> = MetricData<1, DATA_ASM_REACT_ID$>
ASMData<rPos, DATA_ASM_SUSC_CNT$> = MetricData<1, DATA_ASM_SUSC_CNT$>
ASMData<rPos, DATA_ASM_SUSC_THK$> = MetricData<1, DATA_ASM_SUSC_THK$>
ASMData<rPos, DATA_ASM_TUBE_CNT$> = MetricData<1, DATA_ASM_TUBE_CNT$>
ASMData<rPos, DATA_ASM_TUBE_THK$> = MetricData<1, DATA_ASM_TUBE_THK$>
ASMData<rPos, DATA_ASM_ARM_CNT$> = MetricData<1, DATA_ASM_ARM_CNT$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -136,13 +123,12 @@ GetReactorMetrics:
for each Reactor in HTRList using @FM setting rPos
MetricData = Reactor_Services('GetWaferCntMetricsByReactorID', Reactor)
if Error_Services('NoError') then
HTRData<rPos, DATA_HTR_REACT_ID$> = MetricData <1, DATA_HTR_REACT_ID$>
HTRData<rPos, DATA_HTR_SUSC_CNT$> = MetricData<1, DATA_HTR_SUSC_CNT$>
HTRData<rPos, DATA_HTR_SUSC_THK$> = MetricData<1, DATA_HTR_SUSC_THK$>
HTRData<rPos, DATA_HTR_TUBE_CNT$> = MetricData<1, DATA_HTR_TUBE_CNT$>
HTRData<rPos, DATA_HTR_TUBE_THK$> = MetricData<1, DATA_HTR_TUBE_THK$>
HTRData<rPos, DATA_HTR_ARM_CNT$> = MetricData<1, DATA_HTR_ARM_CNT$>
HTRData<rPos, DATA_HTR_EXHAUST_THK$> = MetricData<1, DATA_HTR_EXHAUST_THK$>
HTRData<rPos, DATA_HTR_REACT_ID$> = MetricData <1, DATA_HTR_REACT_ID$>
HTRData<rPos, DATA_HTR_SUSC_CNT$> = MetricData<1, DATA_HTR_SUSC_CNT$>
HTRData<rPos, DATA_HTR_SUSC_THK$> = MetricData<1, DATA_HTR_SUSC_THK$>
HTRData<rPos, DATA_HTR_TUBE_CNT$> = MetricData<1, DATA_HTR_TUBE_CNT$>
HTRData<rPos, DATA_HTR_TUBE_THK$> = MetricData<1, DATA_HTR_TUBE_THK$>
HTRData<rPos, DATA_HTR_ARM_CNT$> = MetricData<1, DATA_HTR_ARM_CNT$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -163,7 +149,6 @@ GetReactorMetrics:
EPPData<rPos, DATA_EPP_BELL_JAR_THK$> = MetricData<1, DATA_EPP_BELL_JAR_THK$>
EPPData<rPos, DATA_EPP_LOWER_QUARTZ_CNT$> = MetricData<1, DATA_EPP_LOWER_QUARTZ_CNT$>
EPPData<rPos, DATA_EPP_LOWER_QUARTZ_THK$> = MetricData<1, DATA_EPP_LOWER_QUARTZ_THK$>
EPPData<rPos, DATA_EPP_EXHAUST_THK$> = MetricData<1, DATA_EPP_EXHAUST_THK$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -174,55 +159,36 @@ GetReactorMetrics:
return
SetupOLEControls:
// Set Row Headers to invisible
//Set Row Headers to invisible
Set_Property(ASMDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
Set_Property(HTRDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
Set_Property(EPPDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
// Set Number of columns for each table
Set_Property(ASMDataTable, "OLE.Dimension", 7);*6 columns for ASM Data Table
Set_Property(HTRDataTable, "OLE.Dimension", 7);*6 columns for HTR Data Table
Set_Property(EPPDataTable, "OLE.Dimension", 8);*7 columns for EPP Data Table
//Set Number of columns for each table
Set_Property(ASMDataTable, "OLE.Dimension", 6);*6 columns for ASM Data Table
Set_Property(HTRDataTable, "OLE.Dimension", 6);*6 columns for HTR Data Table
Set_Property(EPPDataTable, "OLE.Dimension", 7);*7 columns for EPP Data Table
// Set size of all columns
//Set size of columns
ColSizeArray = ''
ColSizeArray<1> = 115
ColSizeArray<1> = 100
Set_Property(ASMDataTable, "OLE.DataColumn[All]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[All]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[All]", ColSizeArray)
// Shrink size of column 1
ColSizeArray<1> = 60
Set_Property(ASMDataTable, "OLE.DataColumn[1]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[1]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[1]", ColSizeArray)
// Set size of all columns
ColSizeArray = ''
ColSizeArray<1> = 125
Set_Property(EPPDataTable, "OLE.DataColumn[6]", ColSizeArray)
// Set autosize last column to true to fill out table width
ColSizeArray<1> = 125
ColSizeArray<4> = True$
Set_Property(ASMDataTable, "OLE.DataColumn[7]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[7]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[8]", ColSizeArray)
//Set ASM Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Wfr. Cnt.':@VM:'Susc. Thk':@VM:'Tube Wfr. Cnt.':@VM:'Tube Wfr. Thk':@VM:'Arm Wfr. Cnt.':@VM:'Exhaust Chamber Thk.'
HeaderTitles = 'Reactor#':@VM:'Susc. Wfr. Cnt.':@VM:'Susc. Thk':@VM:'Tube Wfr. Cnt.':@VM:'Tube Wfr. Thk':@VM:'Arm Wfr. Cnt.'
Set_Property(ASMDataTable, "OLE.TitleList", HeaderTitles)
//Set HTR Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Tube Run Cnt.':@VM:'Tube Thk':@VM:'Arm Wfr. Cnt.':@VM:'Exhaust Chamber Thk.'
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Tube Run Cnt.':@VM:'Tube Thk':@VM:'Arm Wfr. Cnt.'
Set_Property(HTRDataTable, "OLE.TitleList", HeaderTitles)
//Set EPP Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Bell Jar Run Cnt.':@VM:'Bell Jar Thk':@VM:'Lower Quartz Run Cnt.':@VM:'Lower Quartz thk.':@VM:'Exhaust Chamber Thk.'
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Bell Jar Run Cnt.':@VM:'Bell Jar Thk':@VM:'Lower Quartz Run Cnt.':@VM:'Lower Quartz thk.'
Set_Property(EPPDataTable, "OLE.TitleList", HeaderTitles)
return

View File

@ -101,7 +101,7 @@ Return Response else ''
// Service Parameter Options
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
Options BOOLEAN = True$, False$
Options REACTORMETRIC = 'TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT', 'EXHAUST_CHAMBER_THK'
Options REACTORMETRIC = 'TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT'
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
// Services
@ -136,7 +136,6 @@ Service IncrementWfrMetrics(RDSNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -151,7 +150,6 @@ Service IncrementWfrMetrics(RDSNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -163,7 +161,6 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt + 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + TargetThickness
Case ReactorType = 'HTR'
@ -179,7 +176,6 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
Case SusceptorSize = 8
// Round up
@ -196,7 +192,6 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -211,7 +206,6 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -235,7 +229,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 4> = ReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$>
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_ARMS_WFR_CNT$>
ResponseData<1, 7> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -243,7 +236,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 4> = 'TubeWaferCount'
ResponseData<2, 5> = 'TubeThickness'
ResponseData<2, 6> = 'ArmsWaferCount'
ResponseData<2, 7> = 'ExhuastChamberThickness'
Case ReactorType EQ 'HTR'
ResponseData<1, 1> = ReactorID
ResponseData<1, 2> = ReactorRec<REACTOR_SUSC_WFR_CNT$>
@ -251,7 +243,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 4> = ReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$>
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_ARMS_WFR_CNT$>
ResponseData<1, 7> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -259,7 +250,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 4> = 'TubeWaferCount'
ResponseData<2, 5> = 'TubeThickness'
ResponseData<2, 6> = 'ArmsWaferCount'
ResponseData<2, 7> = 'ExhuastChamberThickness'
Case ReactorType EQ 'EPP'
ResponseData<1, 1> = ReactorID
ResponseData<1, 2> = ReactorRec<REACTOR_SUSC_WFR_CNT$>
@ -268,7 +258,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
ResponseData<1, 7> = ReactorRec<REACTOR_LOWER_QUARTZ_THK$>
ResponseData<1, 8> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -277,7 +266,6 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 5> = 'BellJarThickness'
ResponseData<2, 6> = 'LowerQuartzWaferCount'
ResponseData<2, 7> = 'LowerQuartzThickness'
ResponseData<2, 8> = 'ExhuastChamberThickness'
End Case
Response = ResponseData
end else
@ -319,7 +307,6 @@ Service DecrementWfrMetrics(RDSNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -334,7 +321,6 @@ Service DecrementWfrMetrics(RDSNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -346,7 +332,6 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - TargetThickness
Case ReactorType = 'HTR'
@ -357,12 +342,11 @@ Service DecrementWfrMetrics(RDSNo)
ThkAddition = (WaferCount / 5) * TargetThickness
NewReactorRec<REACTOR_TUBE_BELL_JAR_THK$> = CurrTubeBellJarThk - ThkAddition
NewReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$> = CurrTubeBellJarCnt - CntAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk - ThkAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk + ThkAddition
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - CntAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
Case SusceptorSize = 8
// Round up
@ -379,7 +363,6 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -394,7 +377,6 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -428,7 +410,6 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -454,7 +435,6 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt + 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + TargetThickness
Case ReactorType = 'HTR'
@ -470,7 +450,6 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
Case SusceptorSize = 8
// Round up
@ -487,7 +466,6 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -502,7 +480,6 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -536,7 +513,6 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -551,7 +527,6 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -563,7 +538,6 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - TargetThickness
Case ReactorType = 'HTR'
@ -574,12 +548,11 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
ThkAddition = (WaferCount / 5) * TargetThickness
NewReactorRec<REACTOR_TUBE_BELL_JAR_THK$> = CurrTubeBellJarThk - ThkAddition
NewReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$> = CurrTubeBellJarCnt - CntAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk - ThkAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk + ThkAddition
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - CntAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
Case SusceptorSize = 8
// Round up
@ -596,7 +569,6 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -611,7 +583,6 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -625,7 +596,7 @@ end service
// ResetWfrMetric
//
// RDSNo. - [Required]
// MetricType - [Required]('TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT', EXHAUST_CHAMBER_THK)
// MetricType - [Required]('TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT')
//
// Reset a specified REACTOR metric to 0.
//
@ -657,9 +628,6 @@ Service ResetWfrMetric(ReactorNo, MetricType = REACTORMETRIC)
Case MetricType = 'ARMS_WFR_CNT'
ReactorRec<REACTOR_ARMS_WFR_CNT$> = 0
Case MetricType = 'EXHAUST_CHAMBER_THK'
ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = 0
End Case
Database_Services('WriteDataRow', 'REACTOR', ReactorNo, ReactorRec, 1, 0, 0)

View File

@ -140,7 +140,7 @@ WRITE_RECORD_PRE:
// Req'd parameter checks
ItemType = {RI_TYPE}
If ItemType EQ '' then ErrMsg := 'Item Type was not specified. '
* If ItemType EQ '' then ErrMsg := 'Item Type was not specified. '
If ErrMsg NE '' then
Error_Services('Add', 'Error Saving Reactor Item: ' : ErrMsg)

View File

@ -79,7 +79,6 @@ Service CreateReturnToFabRecord(CassId, UserId)
Recipients = XLATE('NOTIFICATION','SHIPPING',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_ENG',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_MANUF',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_GENERAL',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = UserId
SentFrom = 'OI_ADMIN'
Subject = 'Return To Fab Form Created'
@ -476,7 +475,6 @@ Service SetBinToBin(RTFId, MHUserId)
Recipients = XLATE('NOTIFICATION','SHIPPING',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_ENG',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_MANUF',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_GENERAL',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = RTFOrigUser
SentFrom = 'OI_ADMIN'
Subject = 'Return To Fab Form Updated'
@ -551,7 +549,6 @@ Service SetRTFCompleted(RTFId, CompleteUserId)
Recipients = XLATE('NOTIFICATION','SHIPPING',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_ENG',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_MANUF',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_GENERAL',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = RTFRecord<RETURN_TO_FAB_LOTS_REQUESTOR_USER_ID$>
SentFrom = 'OI_ADMIN'
Subject = 'Return To Fab Form Completed'
@ -626,7 +623,6 @@ Service SetEvalInfo(RTFId, EvalUserId, ResultId)
Recipients = XLATE('NOTIFICATION','SHIPPING',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_ENG',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_MANUF',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = XLATE('NOTIFICATION','RETURN_TO_FAB_GENERAL',NOTIFICATION_USER_ID$,'X')
Recipients<1, -1> = RTFRecord<RETURN_TO_FAB_LOTS_REQUESTOR_USER_ID$>
SentFrom = 'OI_ADMIN'
Subject = 'Return To Fab Form Updated'
@ -826,4 +822,3 @@ end service

View File

@ -16,8 +16,7 @@ Subroutine Service_Manager_Debugger_Intercept(Void)
Metadata :
History : (Date, Initials, Notes)
07/25/23 djs Original programmer.
06/04/25 djs Added LSL note creation (and email forwarding) to notify OI_ADMIN users when invoked.
07/25/23 djs Original programmer.
***********************************************************************************************************************/
@ -25,58 +24,24 @@ Subroutine Service_Manager_Debugger_Intercept(Void)
$insert APP_INSERTS
$insert RTI_DEBUG_COMMON
$insert ENVIRON_CONSTANTS
Declare function Environment_Services, Logging_Services, Environment_Services, GetCommandLine, Datetime
Declare subroutine Logging_Services, obj_Notes, Set_Env
Declare function Environment_Services, Logging_Services
Declare subroutine Logging_Services
Main:
// Log event in .\LogFiles\ServiceManager\<Date> OEngine Log.csv
LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\ServiceManager'
LogDate = Oconv(Date(), 'D4/')
LogTime = Oconv(Time(), 'MTS')
LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' OEngine Log.csv'
Headers = 'Stored Proc Status' : @FM : 'Stored Proc Status Code' : @FM : 'Current Program' : @FM
Headers := 'Call Depth' : @FM : 'Line No' : @FM : 'Call Stack'
objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, ',', Headers, '', False$, False$)
LogData = ''
LogData<1> = spStatus@
LogData<2> = spStatCode@
LogData<3> = curr_Program@
LogData<4> = callDepth@
LogData<5> = lineNo@
LogData<6> = callStack@
Logging_Services('AppendLog', objLog, LogData, @RM, @FM, '', '', '')
// Send an LSL message to FI admins to alert them. This is forward to their email address if configured in
// their LSL_USERS record.
CmdLine = GetCommandLine()
EngIndex = Index(CmdLine, '/S=', 1)
EngNo = CmdLine[EngIndex + 3, 'F ']
Server = Environment_Services('GetServer')
Recipients = ''
SentFrom = 'SYSTEM'
Subject = 'Service Manager Debugger Intercept Invoked'
Message = OConv(Datetime(), 'DT2/^H')
Message<2> = 'RevEngineHost (OEngine) ':EngNo:' encountered a runtime error on server ':Server
Message<3> = 'Stored Procedure Status: ':spStatus@
StatCodes = spStatCode@
Swap Char(0) with ',' in StatCodes
Swap Char(23) with '' in StatCodes
Message<4> = 'Stored Procedure Status Code: ':StatCodes
Message<5> = 'Current Program: ':curr_Program@
Message<6> = 'Call Depth: ':callDepth@
Message<7> = 'Line No: ':lineNo@
Message<8> = 'Call Stack: ':\0D0A\:callStack@
Swap @FM with \0D0A\ in Message
Swap @VM with ',' in Message
AttachWindow = ''
AttachKey = ''
SendToGroup = 'OI_SYSADMIN'
Parms = Recipients:@RM:SentFrom:@RM:Subject:@RM:Message:@RM:AttachWindow:@RM:AttachKey:@RM:SendToGroup
obj_Notes('Create',Parms)
LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\ServiceManager'
LogDate = Oconv(Date(), 'D4/')
LogTime = Oconv(Time(), 'MTS')
LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' OEngine Log.csv'
Headers = 'Stored Proc Status' : @FM : 'Stored Proc Status Code' : @FM : 'Current Program' : @FM : 'Call Depth' : @FM : 'Line No' : @FM : 'Call Stack'
objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, ',', Headers, '', False$, False$)
LogData = ''
LogData<1> = SPStatus@
LogData<2> = SPStatCode@
LogData<3> = Curr_Program@
LogData<4> = CallDepth@
LogData<5> = LineNo@
LogData<6> = CallStack@
Logging_Services('AppendLog', objLog, LogData, @RM, @FM, '', '', '')
Return

View File

@ -27,29 +27,19 @@ Function Service_Services(@Service, @Params)
#pragma precomp SRP_PreCompiler
$insert APP_INSERTS
$insert LOGICAL
$insert SERVICE_SETUP
$insert SERVICES_EQUATES
$insert RLIST_EQUATES
$insert SQL_REQUESTS_EQUATES
$Insert PROC_QUEUE_EQUATES
Equ Comma$ to ','
Common /ServiceServices/ Unused1@, Unused2@, Unused3@, Unused4@, Unused5@, Unused6@, Unused7@, Unused8@, Unused9@, Unused10@
Declare function Service_Services, Memory_Services, SRP_List, SRP_FastArray, SRP_Array, Database_Services, Datetime
Declare function GetTickCount, SRP_Decode, RTI_CreateGuid, UCase, Environment_services, Logging_Services
Declare Function GetTickCount, SRP_Decode, RTI_CREATEGUID
Declare subroutine Service_Services, Memory_Services, SRP_List, SRP_FastArray, RList, Set_Status, Database_Services
Declare Subroutine Yield, WinYield, Sleepery, Btree.Extract, Logging_Services, obj_Notes
LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\ProcQueue'
LogDate = Oconv(Date(), 'D4/')
LogTime = Oconv(Time(), 'MTS')
LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : ' Procedure Queue Log.csv'
Headers = 'Logging DTM' : @FM : 'Machine' : @FM : 'RequestKeyId' : @FM : 'Procedure' : @FM : 'Params' : @FM : 'Result' : @FM : 'Error Message'
objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$)
LoggingDTM = LogDate : ' ' : LogTime ; // Logging DTM
Declare Subroutine Yield, WinYield, Sleepery, Btree.Extract
GoToService else
Error_Services('Add', Service : ' is not a valid service request within the ' : ServiceModule : ' services module.')
@ -175,21 +165,18 @@ Service ProcessProcedureQueue()
ReadNext RequestKeyID else EOF = True$
Until EOF or Done
Lock hProcQueue, RequestKeyID then
Server = Environment_Services('GetServer')
Done = True$
Database_Services('GetKeyIDLock', 'PROC_QUEUE', RequestKeyId)
RequestRow = Database_Services('ReadDataRow', 'PROC_QUEUE', RequestKeyID)
If RequestRow NE '' then
Procedure = RequestRow<PROC_QUEUE.PROC_NAME$>
Procedure = UCase(Procedure)
Params = RequestRow<PROC_QUEUE.PARAMS$>
If Procedure NE '' then
Dim ProcParams(12)
Dim ProcParams(11)
For each Param in Params using @VM setting pPos
ProcParams(pPos) = Param
Next Param
NumArguments = DCount(Params, @VM)
Begin Case
Case NumArguments EQ 0 ; Call @Procedure()
Case NumArguments EQ 1 ; Call @Procedure(ProcParams(1))
@ -207,40 +194,17 @@ Service ProcessProcedureQueue()
Error_Services('Add', 'Error in ':Service:' service. More than 11 arguments are not currently supported.')
End Case
end
Swap @VM with ',' in Params
LogData = LoggingDTM
LogData<2> = Server
LogData<3> = RequestKeyId
LogData<4> = Procedure
LogData<5> = Params
ErrCode = ''
If ( Get_Status(ErrCode) or Error_Services('HasError') ) then
ErrorMessage = Error_Services('GetMessage')
Recipients = ''
SentFrom = 'SYSTEM'
Subject = 'Background Procedure Queue Error'
Message = OConv(Datetime(), 'DT2/^H')
Message<2> = 'Error on server ':Server
Message<3> = 'Stored Procedure: ':Procedure
StatCodes = 'Parameters: ':Params
Message<4> = 'Error_Services error message: ':ErrorMessage
Message<5> = 'Get_Status error code: ':ErrCode
Swap @FM with \0D0A\ in Message
AttachWindow = ''
AttachKey = ''
SendToGroup = 'OI_SYSADMIN'
Parms = Recipients:@RM:SentFrom:@RM:Subject:@RM:Message:@RM:AttachWindow:@RM:AttachKey:@RM:SendToGroup
obj_Notes('Create',Parms)
LogData<6> = 'Failed'
LogData<7> = 'Error_Services error message: ':ErrorMessage:' Get_Status error code: ':ErrCode
If Error_Services('NoError') then
Database_Services('DeleteDataRow', 'PROC_QUEUE', RequestKeyId, True$, False$) ; // This call will release the lock
end else
LogData<6> = 'Success'
RequestRow<PROC_QUEUE.LAST_ATTEMPT_DTM$> = DateTime()
RequestRow<PROC_QUEUE.ERROR$> = Error_Services('GetMessage')
Database_Services('WriteDataRow', 'PROC_QUEUE', RequestKeyID, RequestRow, True$, False$, False$) ; // This call will release the lock
end
Logging_Services('AppendLog', objLog, LogData, @RM, @FM)
end else
// Empty request, so delete it from the queue
Database_Services('DeleteDataRow', 'PROC_QUEUE', RequestKeyId, True$, False$) ; // This call will release the lock
end
Database_Services('DeleteDataRow', 'PROC_QUEUE', RequestKeyId, True$, False$) ; // This call should release the lock
Unlock hProcQueue, RequestKeyID else Null
end
Repeat
end
@ -294,3 +258,4 @@ return
/// Internal GoSubs
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////

View File

@ -1231,23 +1231,19 @@ Service SignVoidNonEpp(WOMatKey, Username)
Service_Services('PostProcedure', 'RDS_SERVICES', 'DetachRDSFromWO':@vm:RDSNo)
If Error_Services('NoError') then
LotEventParams = ''
LotEventParams<1,1> = 'CreateLotEvent' ; //Service Module
LotEventParams<1,2> = ''; //Legacy Lot Id, set below
LotEventParams<1,3> = DateTime(); //Datetime
LotEventParams<1,4> = 'VOID'; //Event Type
LotEventParams<1,5> = 'Lot voided by ' : Username; //Event Note
LotEventParams<1,6> = ''; //Equipment id
LotEventParams<1,7> = Username ;//User Id
LotEventParams<1,8> = True$; //IsLegacyLotId
LotEventParams<1,9> = ''; //Legacy Lot Type, set below
LotEventParams<1,1> = 'CreateLotEvent'
LotEventParams<1,4> = DateTime()
LotEventParams<1,5> = 'VOID'
LotEventParams<1,6> = 'Lot voided by ' : Username
LotEventParams<1,11> = Username
If RDSNo NE '' then
LotEventParams<1,2> = RDSNo
LotEventParams<1,9> = 'RDS'; //Legacy Lot Type
Service_Services('PostProcedure', 'LOT_EVENT_SERVICES', LotEventParams)
LotEventParams<1,3> = 'RDS'
Service_Services('PostProcedure', 'LOT_SERVICES', LotEventParams)
end else
LotEventParams<1,2> = WoMatKey
LotEventParams<1,9> = 'WO_MAT'
Service_Services('PostProcedure', 'LOT_EVENT_SERVICES', LotEventParams)
LotEventParams<1,3> = 'WO_MAT'
Service_Services('PostProcedure', 'LOT_SERVICES', LotEventParams)
end
If Error_Services('NoError') then
//Add inventory transaction
@ -1315,15 +1311,13 @@ Service SignVoidWMI(WMInKey, Username)
If Error_Services('NoError') then
LotEventParams = ''
LotEventParams<1,1> = 'CreateLotEvent'
LotEventParams<1,4> = DateTime()
LotEventParams<1,5> = 'VOID'
LotEventParams<1,6> = 'Lot voided by ' : Username
LotEventParams<1,11> = Username
LotEventParams<1,2> = WMInKey
LotEventParams<1,3> = DateTime()
LotEventParams<1,4> = 'VOID'
LotEventParams<1,5> = 'Lot voided by ' : Username
LotEventParams<1,6> = ''
LotEventParams<1,7> = Username
LotEventParams<1,8> = True$
LotEventParams<1,9> = 'WM_IN'
Service_Services('PostProcedure', 'LOT_EVENT_SERVICES', LotEventParams)
LotEventParams<1,3> = 'WM_IN'
Service_Services('PostProcedure', 'LOT_SERVICES', LotEventParams)
If Error_Services('NoError') then
//Check if WMO is also voided. If it is, remove it from the WO_MAT_KEY field in WO_LOG, and void the WO_MAT record
WMOKey = WMInKey; //the paired WMO key is the same as the WMIKey
@ -1392,15 +1386,13 @@ Service SignVoidWMO(WMOutKey, Username)
If Error_Services('NoError') then
LotEventParams = ''
LotEventParams<1,1> = 'CreateLotEvent'
LotEventParams<1,4> = DateTime()
LotEventParams<1,5> = 'VOID'
LotEventParams<1,6> = 'Lot voided by ' : Username
LotEventParams<1,11> = Username
LotEventParams<1,2> = WMOutKey
LotEventParams<1,3> = DateTime()
LotEventParams<1,4> = 'VOID'
LotEventParams<1,5> = 'Lot voided by ' : Username
LotEventParams<1,6> = ''
LotEventParams<1,7> = Username
LotEventParams<1,8> = True$
LotEventParams<1,9> = 'WM_OUT'
Service_Services('PostProcedure', 'LOT_EVENT_SERVICES', LotEventParams)
LotEventParams<1,3> = 'WM_OUT'
Service_Services('PostProcedure', 'LOT_SERVICES', LotEventParams)
If Error_Services('NoError') then
//Check if WMI is also voided. If it is, remove it from the WO_MAT_KEY field in WO_LOG, and void the WO_MAT record
WMIKey = WMOutKey; //the paired WMO key is the same as the WMIKey
@ -1566,4 +1558,3 @@ ClearCursors:
return

View File

@ -573,16 +573,15 @@ return
WRITE_RECORD:
WONo = Field(Name, '*', 1)
CassNo = Field(Name, '*', 2)
WOMatKeyID = Name
WONo = Field(Name, '*', 1)
CassNo = Field(Name, '*', 2)
WOMatKeyID = Name
If {REACTOR_TYPE} NE 'EPP' then
If {MAKEUP_BOX} then
CurrWaferCount = obj_WO_Mat('CurrWaferCnt', WOMatKeyID)
CurrStatus = {CURR_STATUS}
If ( (CurrWaferCount GT 0) and (CurrStatus NE 'VOID') ) then
CurrWaferCount = obj_WO_Mat('CurrWaferCnt', WOMatKeyID)
If CurrWaferCount GT 0 then
// Populate MAKEUP_WAFERS table
// Add/update cassette data to the MAKEUP_WAFERS table
If RowExists('MAKEUP_WAFERS', WOMatKeyID) then
@ -601,7 +600,7 @@ WRITE_RECORD:
MUWfrRec<MAKEUP_WAFERS.PROD_VER_NO$> = {PROD_VER_NO}
MUWfrRec<MAKEUP_WAFERS.CUST_PART_NO$> = {CUST_PART_NO}
MUWfrRec<MAKEUP_WAFERS.REACT_TYPE$> = {REACTOR_TYPE}
MUWfrRec<MAKEUP_WAFERS.CURR_STATUS_STATIC$> = CurrStatus
MUWfrRec<MAKEUP_WAFERS.CURR_STATUS_STATIC$> = {CURR_STATUS}
MUWfrRec<MAKEUP_WAFERS.WFR_QTY$> = CurrWaferCount
DateOut = Xlate('RDS', {RDS_NO}, 'DATE_OUT', 'X')
TimeOut = Xlate('RDS', {RDS_NO}, 'TIME_OUT', 'X') / 86400

View File

@ -83,5 +83,4 @@ Equ REACTOR_HGCV_CHECKLIST_ACTIVE$ To 71
Equ REACTOR_INTRUSIVE_MAINT_CHECKLIST_ACTIVE$ To 72
Equ REACTOR_ABORT_ALARM_CHECKLIST_ACTIVE$ To 73
Equ REACTOR_ABORT_ALARM_COMPLETE$ To 74
Equ REACTOR_EXHAUST_CHAMBER_THK$ To 75