VBA Test Code

This commit is contained in:
2025-06-16 14:23:32 -07:00
parent 2d3f534a71
commit f48e277369
23 changed files with 7064 additions and 0 deletions

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1 1 1 0 0.10 0.21 0.019 0.10 4/24/2025 4:46:29 PM 1.15 1.18 1.12 0.0291 100 100 100 0 667227 0.013 0.019 0.006 0.006 2 3 0.006 1 667227 36 6IN_THIN ROTR 0.3 1 0 0.59 0.34 1.02 0 0.59 3 4 2 1 TENCOR1
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15 | 16 | 17 | 18 | 19 | 20 | 21 | 22 | 23 | 24 | 25 | 26 | 27 | 28 | 29 | 30 | 31 | 32 | 33 | 34 | 35 | 36 | 37 | 38 | 39 | 40 | 41 | 42 | 43 |
|---|---|---|---|-----|------|-------|-----|----------------------|------|------|------|--------|-----|-----|-----|----|--------|-------|-------|-------|-------|----|----|-------|----|----|--------|----|---------------|-----|----|----|------|------|------|----|------|----|----|----|----|---------|
| 1 | 1 | 1 | 0 | 0.1 | 0.21 | 0.019 | 0.1 | 4/24/2025 4:46:29 PM | 1.15 | 1.18 | 1.12 | 0.0291 | 100 | 100 | 100 | 0 | 667227 | 0.013 | 0.019 | 0.006 | 0.006 | 2 | 3 | 0.006 | 1 | | 667227 | 36 | 6IN_THIN ROTR | 0.3 | 1 | 0 | 0.59 | 0.34 | 1.02 | 0 | 0.59 | 3 | 4 | 2 | 1 | TENCOR1 |
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{
"Id": -1,
"AreaCountAvg": "1",
"AreaCountMax": "1",
"AreaCountMin": "1",
"AreaCountStdDev": "0",
"AreaTotalAvg": "0.10",
"AreaTotalMax": "0.21",
"AreaTotalMin": "0.019",
"AreaTotalStdDev": "0.10",
"Date": "4/24/2025 4:46:29 PM",
"HazeAverageAvg": "1.15",
"HazeAverageMax": "1.18",
"HazeAverageMin": "1.12",
"HazeAverageStdDev": "0.0291",
"HazeRegionAvg": "100",
"HazeRegionMax": "100",
"HazeRegionMin": "100",
"HazeRegionStdDev": "0",
"Layer": null,
"LotID": "667227",
"LPDCM2Avg": "0.013",
"LPDCM2Max": "0.019",
"LPDCM2Min": "0.006",
"LPDCM2StdDev": "0.006",
"LPDCountAvg": "2",
"LPDCountMax": "3",
"LPDCountMin": "1",
"LPDCountStdDev": "1",
"Operator": "",
"ParseErrorText": "ParseErrorText",
"PSN": "5142",
"RDS": "667227",
"Reactor": "36",
"Recipe": "6IN_THIN ROTR",
"ScratchCountAvg": "0.3",
"ScratchCountMax": "1",
"ScratchCountMin": "0",
"ScratchCountStdDev": "0.6",
"ScratchTotalAvg": "0.34",
"ScratchTotalMax": "1.02",
"ScratchTotalMin": "0",
"ScratchTotalStdDev": "0.59",
"SumOfDefectsAvg": "3",
"SumOfDefectsMax": "4",
"SumOfDefectsMin": "2",
"SumOfDefectsStdDev": "1",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374",
"Zone": null,
"CellName": "TENCOR1",
"Data": "*Data*",
"i": -1,
"Details": [
{
"Id": 0,
"AreaCount": "1",
"AreaTotal": "0.0716mm2",
"Bin1": "2",
"Bin2": "1",
"Bin3": "0",
"Bin4": "0",
"Bin5": "0",
"Bin6": "0",
"Bin7": null,
"Bin8": null,
"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
"Exclusion": "4mm",
"Gain": "4",
"HazeAverage": "1.16ppm",
"HazePeak": "25.5ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.019",
"LPDCount": "3",
"Laser": "488nm",
"Mean": "0.252",
"Recipe": "6IN_THIN ROTR",
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"Slot": "01",
"Sort": "PASS",
"StdDev": "0.043",
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"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-1",
"Data": "*Data*",
"i": -1
},
{
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"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
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"HazePeak": "25.0ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.013",
"LPDCount": "2",
"Laser": "488nm",
"Mean": "1.32",
"Recipe": "6IN_THIN ROTR",
"ScratchCount": "0",
"ScratchTotal": "0mm",
"Slot": "15",
"Sort": "PASS",
"StdDev": "1.54",
"SumOfDefects": "3",
"Thresh": "0.200um",
"Thruput": "Normal",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-2",
"Data": "*Data*",
"i": -1
},
{
"Id": 0,
"AreaCount": "1",
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"Bin1": "0",
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"Bin6": "0",
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"Comments": "- High Thruput",
"Date": "4/24/2025 4:46:29 PM",
"Diameter": "150 mm",
"Exclusion": "4mm",
"Gain": "4",
"HazeAverage": "1.12ppm",
"HazePeak": "22.5ppm",
"HazeRegion": "100%",
"HazeRng": "500ppm",
"HeaderUniqueId": "TENCOR1_1T667227_202504241646295374",
"LPDCM2": "0.006",
"LPDCount": "1",
"Laser": "488nm",
"Mean": "0.307",
"Recipe": "6IN_THIN ROTR",
"ScratchCount": "0",
"ScratchTotal": "0mm",
"Slot": "25",
"Sort": "PASS",
"StdDev": "0.000",
"SumOfDefects": "2",
"Thresh": "0.200um",
"Thruput": "Normal",
"Title": null,
"UniqueId": "TENCOR1_1T667227_202504241646295374_Item-3",
"Data": "*Data*",
"i": -1
}
]
}

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HEADER_TAG HEADER_VALUE
FORMAT 2.00
NUMBER_PASSES 0001
HEADER_OFFSET H#######T
DATA_OFFSET D#######T
END_OFFSET E#######T
"Time" "A_LOGISTICS" "B_LOGISTICS" "Test" "Count" "Index" "MesEntity" "Date" "Employee" "Lot" "PSN" "Reactor" "Recipe" "Comments" "Diameter" "Exclusion" "Gain" "HeaderUniqueId" "Laser" "ParseErrorText" "RDS" "Slot" "UniqueId" "AreaCount" "AreaCountAvg" "AreaCountMax" "AreaCountMin" "AreaCountStdDev" "AreaTotal" "AreaTotalAvg" "AreaTotalMax" "AreaTotalMin" "AreaTotalStdDev" "Bin1" "Bin2" "Bin3" "Bin4" "Bin5" "Bin6" "Bin7" "Bin8" "HazeAverage" "HazeAverageAvg" "HazeAverageMax" "HazeAverageMin" "HazeAverageStdDev" "HazePeak" "HazeRegion" "HazeRegionAvg" "HazeRegionMax" "HazeRegionMin" "HazeRegionStdDev" "HazeRng" "LPDCM2" "LPDCM2Avg" "LPDCM2Max" "LPDCM2Min" "LPDCM2StdDev" "LPDCount" "LPDCountAvg" "LPDCountMax" "LPDCountMin" "LPDCountStdDev" "Mean" "ScratchCount" "ScratchCountAvg" "ScratchCountMax" "ScratchCountMin" "ScratchCountStdDev" "ScratchTotal" "ScratchTotalAvg" "ScratchTotalMax" "ScratchTotalMin" "ScratchTotalStdDev" "Sort" "StdDev" "SumOfDefects" "SumOfDefectsAvg" "SumOfDefectsMax" "SumOfDefectsMin" "SumOfDefectsStdDev" "Thresh" "Thruput"
0.00 1 2 7 3 0 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 01 UniqueId 1 1 1 1 0 0.0716mm2 0.10 0.21 0.019 0.10 2 1 0 0 0 0 1.16ppm 1.15 1.18 1.12 0.0291 25.5ppm 100% 100 100 100 0 500ppm 0.019 0.013 0.019 0.006 0.006 3 2 3 1 1 0.252 1 0.3 1 0 0.6 1.02mm 0.34 1.02 0 0.59 PASS 0.043 4 3 4 2 1 0.200um Normal
0.00 1 2 7 3 1 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 15 UniqueId 1 1 1 1 0 0.0195mm2 0.10 0.21 0.019 0.10 1 0 0 0 1 0 1.18ppm 1.15 1.18 1.12 0.0291 25.0ppm 100% 100 100 100 0 500ppm 0.013 0.013 0.019 0.006 0.006 2 2 3 1 1 1.32 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 1.54 3 3 4 2 1 0.200um Normal
0.00 1 2 7 3 2 TENCOR1 4/24/2025 4:46:29 PM 667227 5142 36 6IN_THIN ROTR - High Thruput 150 mm 4mm 4 HeaderUniqueId 488nm ParseErrorText 667227 25 UniqueId 1 1 1 1 0 0.213mm2 0.10 0.21 0.019 0.10 0 1 0 0 0 0 1.12ppm 1.15 1.18 1.12 0.0291 22.5ppm 100% 100 100 100 0 500ppm 0.006 0.013 0.019 0.006 0.006 1 2 3 1 1 0.307 0 0.3 1 0 0.6 0mm 0.34 1.02 0 0.59 PASS 0.000 2 3 4 2 1 0.200um Normal
NUM_DATA_ROWS 000000003
NUM_DATA_COLUMNS 000000083
DELIMITER ;
START_TIME_FORMAT MM/dd/yyyy HH:mm:ss
START_TIME 04/24/2025 16:46:29
LOGISTICS_COLUMN A_LOGISTICS
LOGISTICS_COLUMN B_LOGISTICS
LOGISTICS_1 A_HeaderId=524300;A_SubgroupId=1745538421;A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2 B_HeaderId=524300;B_SubgroupId=1745538421;B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
EOF
HEADER_TAG|HEADER_VALUE
FORMAT|2.00
NUMBER_PASSES|0001
HEADER_OFFSET|000002772
DATA_OFFSET|000000128
END_OFFSET|000003437
|Time|A_LOGISTICS|B_LOGISTICS|Count|Sequence|MesEntity|Index|Date|Recipe|Id|WaferId|LPDCount|LPDCM2|AreaCount|AreaTotal|ScratchCount|ScratchTotal|SumOfDefects|HazeRegion|HazeAverage|Grade|LPDCountMin|LPDCM2Min|AreaCountMin|AreaTotalMin|ScratchCountMin|ScratchTotalMin|SumOfDefectsMin|HazeRegionMin|HazeAverageMin|LPDCountMax|LPDCM2Max|AreaCountMax|AreaTotalMax|ScratchCountMax|ScratchTotalMax|SumOfDefectsMax|HazeRegionMax|HazeAverageMax|LPDCountAvg|LPDCM2Avg|AreaCountAvg|AreaTotalAvg|ScratchCountAvg|ScratchTotalAvg|SumOfDefectsAvg|HazeRegionAvg|HazeAverageAvg|LPDCountStdDev|LPDCM2StdDev|AreaCountStdDev|AreaTotalStdDev|ScratchCountStdDev|ScratchTotalStdDev|SumOfDefectsStdDev|HazeRegionStdDev|HazeAverageStdDev|WaferDate|Comments|Sort|WaferLPDCount|WaferLPDCM2|Bin1|Bin2|Bin3|Bin4|Bin5|Bin6|Bin7|Bin8|Mean|StdDev|WaferAreaCount|WaferAreaTotal|WaferScratchCount|WaferScratchTotal|WaferSumOfDefects|WaferHazeRegion|WaferHazeAverage|HazePeak|Laser|Gain|Diameter|Thresh|Exclusion|HazeRng|Thruput|WaferRecipe|RDS|PSN|Reactor|Layer|Zone|Employee|InferredLot|EventId|
|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|-|
0.00|1|2|3|638811099895374259|TENCOR1|0|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|01|3|0.019|1|0.072|1|1.02|4|100|1.16|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:34:51 AM|- High Thruput|PASS|3|0.019|2|1|0|0|0|0|||0.252|0.043|1|0.0716mm2|1|1.02mm|4|100%|1.16ppm|25.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|1|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|15|2|0.013|1|0.019|0|0|3|100|1.18|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:35:39 AM|- High Thruput|PASS|2|0.013|1|0|0|0|1|0|||1.32|1.54|1|0.0195mm2|0|0mm|3|100%|1.18ppm|25.0ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
0.00|1|2|3|638811099895374259|TENCOR1|2|4/24/2025 4:46:29 PM|6IN_THIN ROTR|667227|25|1|0.006|1|0.21|0|0|2|100|1.12|P|1|0.006|1|0.019|0|0|2|100|1.12|3|0.019|1|0.21|1|1.02|4|100|1.18|2|0.013|1|0.10|0.3|0.34|3|100|1.15|1|0.006|0|0.10|0.6|0.59|1|0|0.0291|Wed, Apr 23, 2025 08:36:22 AM|- High Thruput|PASS|1|0.006|0|1|0|0|0|0|||0.307|0.000|1|0.213mm2|0|0mm|2|100%|1.12ppm|22.5ppm|488nm|4|150 mm|0.200um|4mm|500ppm|Normal|6IN_THIN ROTR|667227|5142|36|-|-||667227|7
NUM_DATA_ROWS|000000003
NUM_DATA_COLUMNS|000000096
DELIMITER|;
START_TIME_FORMAT|MM/dd/yyyy HH:mm:ss
START_TIME|04/24/2025 16:46:29
LOGISTICS_COLUMN|A_LOGISTICS
LOGISTICS_COLUMN|B_LOGISTICS
LOGISTICS_1|A_BASIC_TYPE=;A_INFO=202504241646295374.pcl.csv;A_INFO2=3;A_JOBID=TENCOR1;A_MES_ENTITY=TENCOR1;A_MID=1T667227;A_NULL_DATA=;A_PPID=NO_PPID;A_PROCESS_JOBID=;A_PRODUCT=;A_SEQUENCE=638811099895374259;A_WAFER_ID=;A_WAFER_POS=;
LOGISTICS_2|B_BASIC_TYPE=- High Thruput;B_INFO=-;B_INFO2=;B_JOBID=;B_MES_ENTITY=;B_MID=667227;B_NULL_DATA=;B_PPID=6IN_THIN ROTR;B_PROCESS_JOBID=36;B_PRODUCT=5142;B_SEQUENCE=638811099895374259;B_WAFER_ID=-;B_WAFER_POS=-;
END_HEADER