added LSL2 stored procedures
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								LSL2/STPROC/CLEAN_INSP_ACTIONS.txt
									
									
									
									
									
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								LSL2/STPROC/CLEAN_INSP_ACTIONS.txt
									
									
									
									
									
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							| @ -0,0 +1,947 @@ | ||||
| Function CLEAN_INSP_Actions(Action, CalcColName, FSList, Handle, Name, FMC, Record, Status, OrigRecord, Param1, Param2, Param3, Param4, Param5, Param6, Param7, Param8, Param9, Param10) | ||||
| /*********************************************************************************************************************** | ||||
|  | ||||
|     This program is proprietary and is not to be used by or disclosed to others, nor is it to be copied without written | ||||
|     permission from Infineon. | ||||
|  | ||||
|     Name        :   CLEAN_INSP_Actions | ||||
|  | ||||
|     Description :   Handles calculated columns and MFS calls for the current table. | ||||
|  | ||||
|     Notes       :   This function uses @ID, @RECORD, and @DICT to make sure {ColumnName} references work correctly. | ||||
|                     If called from outside of a calculated column these will need to be set and restored. | ||||
|  | ||||
|     Parameters  : | ||||
|         Action          [in] -- Name of the action to be taken | ||||
|         CalcColName     [in] -- Name of the calculated column that needs to be processed. Normally this should only be | ||||
|                                 populated when the CalcField action is being used. | ||||
|         FSList          [in] -- The list of MFSs and the BFS name for the current file or volume. This is an @SVM | ||||
|                                 delimited array, with the current MFS name as the first value in the array, and the BFS | ||||
|                                 name as the last value. Normally set by a calling MFS. | ||||
|         Handle          [in] -- The file handle of the file or media map being accessed. Note, this does contain the | ||||
|                                 entire handle structure that the Basic+ Open statement would provide. Normally set by a | ||||
|                                 calling MFS. | ||||
|         Name            [in] -- The name (key) of the record or file being accessed. Normally set by a calling MFS. | ||||
|         FMC             [in] -- Various functions. Normally set by a calling MFS. | ||||
|         Record          [in] -- The entire record (for record-oriented functions) or a newly-created handle (for | ||||
|                                 "get handle" functions). Normally set by a calling MFS. | ||||
|         Status      [in/out] -- Indicator of the success or failure of an action. Normally set by the calling MFS but | ||||
|                                 for some actions can be set by the action handler to indicate failure. | ||||
|         OrigRecord      [in] -- Original content of the record being processed by the current action. This is | ||||
|                                 automatically being assigned by the WRITE_RECORD and DELETE_RECORD actions within | ||||
|                                 BASE_MFS. | ||||
|         Param1-10   [in/out] -- Additional request parameter holders | ||||
|         ActionFlow     [out] -- Used to control the action chain (see the ACTION_SETUP insert for more information.) | ||||
|                                 Can also be used to return a special value, such as the results of the CalcField | ||||
|                                 method. | ||||
|  | ||||
|     History     :   (Date, Initials, Notes) | ||||
|         07/28/10    dmb     Original programmer. | ||||
|         10/13/10    dmb     Fix logic to extract the file handle if file has an index | ||||
|         03/26/11    dmb     Add logic to save and restore @FILE.ERROR | ||||
|         01/03/17    dmb     Updated the ROTR compare logic to search for a recipe match. | ||||
|         04/09/18    dmb     Updated the ROTR compare logic to be limited to FWI stages. Also modified the default logic | ||||
|                             to be Failed unless proven otherwise. | ||||
|         04/19/18    djs     Update ROTR compare logic to support multiple spec recipes. | ||||
|         05/04/18    dmb     Update the special metrology log entry log to use the GetServer service rather than the | ||||
|                             @STATION global variable. | ||||
|         06/13/18    dmb     Replaced CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$ with CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$ when comparing | ||||
|                             against the Sum of Defects in the SurfScan recipe. - [IREPIOI-43] | ||||
|         09/24/18    djs     Adjusted the OConv call on the ScanDefect variable within the WRITE_RECORD_PRE action. | ||||
|         10/29/18    djs     Updated the WRITE_RECORD_PRE event to calculate the SOD average to only use wafers that | ||||
|                             are below the USL (SOD Max) as per ROTR Project requirements. Also updated the UCL request | ||||
|                             using QA_Services to include the scanned Tencor Recipe name in order to return the UCL | ||||
|                             associated with the particular recipe being processed at that time. | ||||
|         06/07/19    djs     Updated the WRITE_RECORD_PRE GoSub to support ROTR requirements for POST stage SurfScan | ||||
|                             rundata files. | ||||
|         08/12/20    djs     Added logging within the WRITE_RECORD_PRE GoSub to gather data for a bug within the  | ||||
|                             Metrology_Services('ImportMetrologyService') subroutine. Occasionally the DB server is | ||||
|                             getting an out of memory error when importing metrology files. | ||||
|  | ||||
| ***********************************************************************************************************************/ | ||||
|  | ||||
| #pragma precomp SRP_PreCompiler | ||||
|  | ||||
| $insert APP_INSERTS | ||||
| $insert FILE.SYSTEM.EQUATES | ||||
| $insert ACTION_SETUP | ||||
| $insert CLEAN_INSP_EQUATES | ||||
| $insert REACTOR_EQUATES | ||||
| $insert RDS_EQUATES | ||||
| $insert WM_OUT_EQUATES | ||||
| $insert WO_LOG_EQUATES | ||||
| $insert ROTR_EQUATES | ||||
| $insert WO_MAT_EQUATES | ||||
|  | ||||
| Equ Comma$ to ',' | ||||
|  | ||||
| Declare function    Error_Services, Database_Services, Environment_Services, QA_Services, RDS_Services, MemberOf | ||||
| Declare subroutine  Error_Services, Database_Services, Post_Metrology_Manual_Data_Entry_Log | ||||
| Declare subroutine  Qa_Services | ||||
|  | ||||
| If KeyID then GoSub Initialize_System_Variables | ||||
|  | ||||
| Begin Case | ||||
|      | ||||
|     Case Action _EQC 'CalculateColumn'      ;   GoSub CalculateColumn | ||||
|     Case Action _EQC 'READ_RECORD_PRE'      ;   GoSub READ_RECORD_PRE | ||||
|     Case Action _EQC 'READ_RECORD'          ;   GoSub READ_RECORD | ||||
|     Case Action _EQC 'READONLY_RECORD_PRE'  ;   GoSub READONLY_RECORD_PRE | ||||
|     Case Action _EQC 'READONLY_RECORD'      ;   GoSub READONLY_RECORD | ||||
|     Case Action _EQC 'WRITE_RECORD_PRE'     ;   GoSub WRITE_RECORD_PRE | ||||
|     Case Action _EQC 'WRITE_RECORD'         ;   GoSub WRITE_RECORD | ||||
|     Case Action _EQC 'DELETE_RECORD_PRE'    ;   GoSub DELETE_RECORD_PRE | ||||
|     Case Action _EQC 'DELETE_RECORD'        ;   GoSub DELETE_RECORD | ||||
|     Case Otherwise$                         ;   Status = 'Invalid Action' | ||||
|          | ||||
| End Case | ||||
|  | ||||
| If KeyID then GoSub Restore_System_Variables | ||||
|  | ||||
| If Assigned(ActionFlow) else ActionFlow = ACTION_CONTINUE$ | ||||
|  | ||||
| Return ActionFlow | ||||
|  | ||||
|  | ||||
| //////////////////////////////////////////////////////////////////////////////////////////////////////////////////////// | ||||
| // Calculated Columns  | ||||
| // | ||||
| // The typical structure of a calculated column will look like this: | ||||
| // | ||||
| // Declare function Database_Services | ||||
| // | ||||
| // @ANS = Database_Services('CalculateColumn') | ||||
| //////////////////////////////////////////////////////////////////////////////////////////////////////////////////////// | ||||
|  | ||||
| CalculateColumn: | ||||
|     // Make sure the ActionFlow return variable is cleared in case nothing is calculated. | ||||
|     ActionFlow = '' | ||||
|      | ||||
|     Begin Case | ||||
|         Case CalcColName EQ 'INSP_REQ'             ; GoSub INSP_REQ | ||||
|         Case CalcColName EQ 'RDS_ROTR_ACTION'      ; GoSub RDS_ROTR_ACTION | ||||
|     End Case | ||||
|      | ||||
| return | ||||
|  | ||||
|  | ||||
| INSP_REQ: | ||||
|      | ||||
|     SkipInsp = Xlate('WO_MAT', {WO_MAT_KEY}, 'CONVERTED_MATERIAL', 'X') | ||||
|     If SkipInsp EQ '' then  | ||||
|         RDSNo        = {RDS_NO} | ||||
|         WONo         = {WO_NO} | ||||
|         WOQty        = Xlate('WO_LOG', WONo, 'QTY', 'X') | ||||
|         RunNo        = Xlate('RDS', RDSNo, 'RUN_ORDER_NUM', 'X') | ||||
|         InspInterval = {INSP_INTERVAL} | ||||
|         LastRun      = ( (RunNo * 25) EQ WOQty ) | ||||
|         InspReq      = ( (Mod((RunNo - 1), InspInterval) EQ 0) or LastRun ) | ||||
|         ActionFlow   = InspReq | ||||
|     end else | ||||
|         ActionFlow = False$ | ||||
|     end | ||||
|      | ||||
| return | ||||
|  | ||||
|  | ||||
| RDS_ROTR_ACTION: | ||||
|      | ||||
|      | ||||
|     ROTRAction      = {ROTR_ACTION} | ||||
|     If ROTRAction EQ 'F' then | ||||
|         // Before returning a Fail, check to see if there is an acceptance for the results. | ||||
|         AcceptedSignature   = {SIGN_ROTR_SIGNATURE} | ||||
|         AcceptedReason      = {SIGN_ROTR_REASON} | ||||
|         If (AcceptedSignature NE '') AND (AcceptedReason NE '') then ROTRAction = 'A' | ||||
|     end | ||||
|     ActionFlow  = ROTRAction | ||||
|      | ||||
| return | ||||
|  | ||||
|  | ||||
| // ----- MFS calls ----------------------------------------------------------------------------------------------------- | ||||
|  | ||||
| READ_RECORD_PRE: | ||||
|     // In order to stop a record from being read in this action these lines of code must be used: | ||||
|     // | ||||
|     //    OrigFileError   = 100 : @FM : KeyID | ||||
|     //    Status          = 0 | ||||
|     //    Record          = '' | ||||
|     //    ActionFlow      = ACTION_STOP$ | ||||
| return | ||||
|  | ||||
|  | ||||
| READ_RECORD: | ||||
|     // In order to stop a record from being read in this action these lines of code must be used: | ||||
|     // | ||||
|     //    OrigFileError   = 100 : @FM : KeyID | ||||
|     //    Status          = 0 | ||||
|     //    Record          = '' | ||||
| return | ||||
|  | ||||
|  | ||||
| READONLY_RECORD_PRE: | ||||
|     // In order to stop a record from being read in this action these lines of code must be used: | ||||
|     // | ||||
|     //    OrigFileError   = 100 : @FM : KeyID | ||||
|     //    Status          = 0 | ||||
|     //    Record          = '' | ||||
|     //    ActionFlow      = ACTION_STOP$ | ||||
| return | ||||
|  | ||||
| READONLY_RECORD: | ||||
|     // In order to stop a record from being read in this action these lines of code must be used: | ||||
|     // | ||||
|     //    OrigFileError   = 100 : @FM : KeyID | ||||
|     //    Status          = 0 | ||||
|     //    Record          = '' | ||||
| return | ||||
|  | ||||
|  | ||||
| WRITE_RECORD_PRE: | ||||
|      | ||||
|     OrigRecCopy = OrigRecord | ||||
|     RecCopy     = Record | ||||
|     Convert @VM to '' in OrigRecCopy | ||||
|     Convert @VM to '' in RecCopy | ||||
|     // LWII Specification limits | ||||
|      | ||||
|     OrigLWIISpecLPD     = Trim(OrigRecCopy<CLEAN_INSP_INSP_LPD$>) | ||||
|     OrigLWIISpecScr     = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCHES$>) | ||||
|     OrigLWIISpecScrLen  = Trim(OrigRecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>) | ||||
|     OrigLWIISpecPits    = Trim(OrigRecCopy<CLEAN_INSP_INSP_PITS$>) | ||||
|     OrigLWIISpecMounds  = Trim(OrigRecCopy<CLEAN_INSP_INSP_MOUNDS$>) | ||||
|     OrigLWIISpecStack   = Trim(OrigRecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>) | ||||
|     OrigLWIISpecSpikes  = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPIKES$>) | ||||
|     OrigLWIISpecSpots   = Trim(OrigRecCopy<CLEAN_INSP_INSP_SPOTS$>) | ||||
|     OrigLWIISpecBLDef   = Trim(OrigRecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>) | ||||
|     OrigLWIISpecFOV     = Trim(OrigRecCopy<CLEAN_INSP_INSP_FOV$>) | ||||
|     NewLWIISpecLPD      = Trim(RecCopy<CLEAN_INSP_INSP_LPD$>) | ||||
|     NewLWIISpecScr      = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCHES$>) | ||||
|     NewLWIISpecScrLen   = Trim(RecCopy<CLEAN_INSP_INSP_SCRATCH_LEN$>) | ||||
|     NewLWIISpecPits     = Trim(RecCopy<CLEAN_INSP_INSP_PITS$>) | ||||
|     NewLWIISpecMounds   = Trim(RecCopy<CLEAN_INSP_INSP_MOUNDS$>) | ||||
|     NewLWIISpecStack    = Trim(RecCopy<CLEAN_INSP_INSP_STACK_FAULTS$>) | ||||
|     NewLWIISpecSpikes   = Trim(RecCopy<CLEAN_INSP_INSP_SPIKES$>) | ||||
|     NewLWIISpecSpots    = Trim(RecCopy<CLEAN_INSP_INSP_SPOTS$>) | ||||
|     NewLWIISpecBLDef    = Trim(RecCopy<CLEAN_INSP_INSP_BL_DEFECTS$>) | ||||
|     NewLWIISpecFOV      = Trim(RecCopy<CLEAN_INSP_INSP_FOV$>) | ||||
|      | ||||
|     // LWII Signature | ||||
|     OrigLWIISig         = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG$>) | ||||
|     OrigLWIIDtm         = Trim(OrigRecCopy<CLEAN_INSP_INSP_SIG_DTM$>) | ||||
|     NewLWIISig          = Trim(RecCopy<CLEAN_INSP_INSP_SIG$>) | ||||
|     NewLWIIDtm          = Trim(RecCopy<CLEAN_INSP_INSP_SIG_DTM$>) | ||||
|      | ||||
|     // LWIS Specification Limits | ||||
|     OrigLWISRecipe      = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>) | ||||
|     OrigLWISSpecDef     = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>) | ||||
|     OrigLWISSpecHaze    = Trim(OrigRecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>) | ||||
|     NewLWISRecipe       = Trim(RecCopy<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$>) | ||||
|     NewLWISSpecDef      = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_DEFECTS$>) | ||||
|     NewLWISSpecHaze     = Trim(RecCopy<CLEAN_INSP_SPEC_SURF_HAZE$>) | ||||
|      | ||||
|     // LWIS Signature | ||||
|     OrigLWISSig         = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG$>) | ||||
|     OrigLWISDtm         = Trim(OrigRecCopy<CLEAN_INSP_SCAN_SIG_DTM$>) | ||||
|     NewLWISSig          = Trim(RecCopy<CLEAN_INSP_SCAN_SIG$>) | ||||
|     NewLWISDtm          = Trim(RecCopy<CLEAN_INSP_SCAN_SIG_DTM$>) | ||||
|     RDSKeyID            = RecCopy<CLEAN_INSP_RDS_NO$> | ||||
|      | ||||
|     // Check if run aborted and wafers were removed | ||||
|     WafersRemoved	= Trim(RecCopy<CLEAN_INSP_WAFERS_REMOVED$>) | ||||
|      | ||||
|     RDSNo               = RDSKeyID | ||||
|     FinalQA             = False$ | ||||
|     RDSRow              = Database_Services('ReadDataRow', 'RDS', RDSNo) | ||||
|     WorkOrderNo         = RDSRow<RDS_WO$> | ||||
|     WorkOrderRow        = Database_Services('ReadDataRow', 'WO_LOG', WorkOrderNo) | ||||
|     ReactType           = WorkOrderRow<WO_LOG_REACT_TYPE$> | ||||
|     // Check to see if the Final QA signature is in place. | ||||
|  | ||||
|     If ReactType EQ 'EPP' then | ||||
|         CassetteNos = RDSRow<RDS_OUT_CASS_NO$> | ||||
|         OutNCRNos   = RDSRow<RDS_OUT_NCR$> | ||||
|         For Each CassetteNo in CassetteNos using @VM setting vPos | ||||
|             OutNCRNo = OutNCRNos<0, vPos> | ||||
|             // Ignore NCRd wafers | ||||
|             If OutNCRNo EQ '' then | ||||
|                 WMOutKey = RDSRow<RDS_WO_STEP_KEY$> : '*' : CassetteNo | ||||
|                 WMOutRow = Database_Services('ReadDataRow', 'WM_OUT', WMOutKey) | ||||
|                 If WMOutRow<WM_OUT_SUP_VER_SIG$> NE '' then | ||||
|                     FinalQA = True$ | ||||
|                 end | ||||
|             end | ||||
|         Until FinalQA | ||||
|         Next CassetteNo | ||||
|     end else | ||||
|         If RDSRow<RDS_SUP_VER_SIG$> NE '' then | ||||
|             FinalQA = True$ | ||||
|         end | ||||
|     end | ||||
|  | ||||
|     // If Final QA signature is in place, implement the control logic. | ||||
|     If FinalQA EQ True$ then | ||||
|          | ||||
|         // User is attempting to modify this row. Set the FS104 error and log the event. | ||||
|         Error_Services('Add', 'FS104:FQA has already been signed. CLEAN_INSP record cannot be updated!') | ||||
|         OrigFileError   = 104 : @FM : 'FQA has already been signed. CLEAN_INSP record cannot be updated!' | ||||
|         Status          = 0 | ||||
|         Record          = '' | ||||
|         ActionFlow      = ACTION_STOP$ | ||||
|          | ||||
|     end else     | ||||
|          | ||||
|         If ( (OrigLWIISpecLPD NE '') and (NewLWIISpecLPD EQ '') )       | | ||||
|         or ( (OrigLWIISpecScr NE '') and (NewLWIISpecScr EQ '') )       | | ||||
|         or ( (OrigLWIISpecScrLen NE '') and (NewLWIISpecScrLen EQ '') ) | | ||||
|         or ( (OrigLWIISpecPits NE '') and (NewLWIISpecPits EQ '') )     | | ||||
|         or ( (OrigLWIISpecMounds NE '') and (NewLWIISpecMounds EQ '') ) | | ||||
|         or ( (OrigLWIISpecStack NE '') and (NewLWIISpecStack EQ '') )   | | ||||
|         or ( (OrigLWIISpecSpikes NE '') and (NewLWIISpecSpikes EQ '') ) | | ||||
|         or ( (OrigLWIISpecSpots NE '') and (NewLWIISpecSpots EQ '') )   | | ||||
|         or ( (OrigLWIISpecBLDef NE '') and (NewLWIISpecBLDef EQ '') )   | | ||||
|         or ( (OrigLWIISpecFOV NE '') and (NewLWIISpecFOV EQ '') )       | | ||||
|         or ( (OrigLWIISig NE '') and (NewLWIISig EQ '') )               | | ||||
|         or ( (OrigLWIIDtm NE '') and (NewLWIIDtm EQ '') )               | | ||||
|         or ( (OrigLWISRecipe NE '') and (NewLWISRecipe EQ '') )         | | ||||
|         or ( (OrigLWISSpecDef NE '') and (NewLWISSpecDef EQ '') )       | | ||||
|         or ( (OrigLWISSpecHaze NE '') and (NewLWISSpecHaze EQ '') )     | | ||||
|         or ( (OrigLWISSig NE '') and (NewLWISSig EQ '') )               | | ||||
|         or ( (OrigLWISDtm NE '') and (NewLWISDtm EQ '') ) and Not(MemberOf(@User4, 'OI_ADMIN')) then | ||||
|              | ||||
|             // User is attempting to erase data that is prohibited from being erased Set the FS104 error and block the write. | ||||
|             Error_Services('Add', 'FS104:Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!') | ||||
|             OrigFileError   = 104 : @FM : 'Specification limits or signature data cannot be removed. Clean & Insp record cannot be updated!' | ||||
|             Status          = 0 | ||||
|             Record          = '' | ||||
|             ActionFlow      = ACTION_STOP$   | ||||
|              | ||||
|         end else | ||||
|              | ||||
|             Stage   = Record<CLEAN_INSP_STAGE$> | ||||
|             IsEpiPro = Rds_Services('IsEpiPro', RDSKeyID) | ||||
|             // This ROTR logic is only applicable to LWI clean & inspection rows. | ||||
|             CleanInspKeyID      = Name | ||||
|              | ||||
|             // Get the current signature required and signature entries. | ||||
|             SigRequired       = Record<CLEAN_INSP_SPEC_SURFSCAN_REQ$> | ||||
|             ScanSigs          = Record<CLEAN_INSP_SCAN_SIG$> | ||||
|             // Get the specifications | ||||
|             SpecRecipes       = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$> | ||||
|             SpecDefects       = Record<CLEAN_INSP_SPEC_SURF_DEFECTS$>     ; // USL - Spec SOD Max | ||||
|             SpecHazes         = Record<CLEAN_INSP_SPEC_SURF_HAZE$> | ||||
|             SpecQuantities    = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$>  | ||||
|             // Get the new scanned values | ||||
|             ScanRecipes       = Record<CLEAN_INSP_SCAN_RECIPE$> | ||||
|             ScanTools         = Record<CLEAN_INSP_SCAN_TOOL$> | ||||
|             ScanDefectsAvg    = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> | ||||
|             ScanDefects       = Record<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$> | ||||
|             ScanHazes         = Record<CLEAN_INSP_SCAN_HAZE_AVG_AVG$> | ||||
|             ScanMismatch      = Record<CLEAN_INSP_SCAN_RECIPE_MISMATCH$> | ||||
|             QtyMismatch       = Record<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$> | ||||
|             // Get scan results | ||||
|             ScanRecipeResults = Record<CLEAN_INSP_SCAN_RESULT$> | ||||
|             ScanRecipeReasons = Record<CLEAN_INSP_SCAN_RESULT_REASON$> | ||||
|              | ||||
|             // Get the original scanned values | ||||
|             SpecRecipesOrig    = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$> | ||||
|             ScanRecipesOrig    = OrigRecord<CLEAN_INSP_SCAN_RECIPE$> | ||||
|             ScanDefectsAvgOrig = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> | ||||
|             ScanDefectsOrig    = OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_MAX$> | ||||
|             ScanHazesOrig      = OrigRecord<CLEAN_INSP_SCAN_HAZE_AVG_AVG$> | ||||
|             ScanMismatchOrig   = OrigRecord<CLEAN_INSP_SCAN_RECIPE_MISMATCH$> | ||||
|             QtyMismatchOrig    = OrigRecord<CLEAN_INSP_SCAN_SAMPLE_QTY_MISMATCH$> | ||||
|             // Get the original signature required and signature entries. | ||||
|             SigRequiredOrig    = OrigRecord<CLEAN_INSP_SPEC_SURFSCAN_REQ$> | ||||
|             ScanSigsOrig       = OrigRecord<CLEAN_INSP_SCAN_SIG$> | ||||
|             // Get the individual SOD values per wafer. | ||||
|             SODPerWafer        = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$> | ||||
|             SODPerWaferOrig    = OrigRecord<CLEAN_INSP_SCAN_SOD_PER_WAFER$> | ||||
|             // Get the 100 failure scan flags, which is null by default and set/cleared by this MFS. | ||||
|             FailScanFlags      = Record<CLEAN_INSP_FAIL_SCAN_REQ$> | ||||
|             FailScanReq        = Sum(FailScanFlags) | ||||
|             If FailScanReq GT 0 then | ||||
|                 FailScanReq = True$ | ||||
|             end else | ||||
|                 FailScanReq = False$ | ||||
|             end | ||||
|              | ||||
|             CIReactor     = Xlate('CLEAN_INSP', CleanInspKeyID, 'REACT_NO', 'X') | ||||
|             ROTREnabled   = Xlate('REACTOR', CIReactor, 'ENABLE_ROTR', 'X') | ||||
|             ROTRFailLimit = Xlate('REACTOR', CIReactor, 'ROTR_FAIL_LIMIT', 'X') | ||||
|  | ||||
|             // Get ROTR Reactor values | ||||
|             ROTRReactorStatus       = Record<CLEAN_INSP_ROTR_REACTOR_STATUS$> | ||||
|             ROTRReactorStatusReason = Record<CLEAN_INSP_ROTR_REACTOR_STATUS_REASON$> | ||||
|              | ||||
|             FailedWafers = Record<CLEAN_INSP_FAILED_WAFERS$> | ||||
|              | ||||
|             If OrigRecord NE Record then | ||||
|                  | ||||
|                 // Backlog Req 731 - ROTR Post Supercede | ||||
|                 // Increase POST stage surfscan sample quantity specification to number of LWI stage failed wafers. | ||||
|                 If Stage EQ 'POST' then | ||||
|                     RDSNo    = Record<CLEAN_INSP_RDS_NO$> | ||||
|                     LWICIKey = Xlate('RDS', RDSNo, 'LWI_CI_NO', 'X') | ||||
|                     If LWICIKey NE '' then | ||||
|                         LWIFailedWafers = Xlate('CLEAN_INSP', LWICIKey, 'FAILED_WAFERS', 'X') | ||||
|                         If LWIFailedWafers NE '' then  | ||||
|                             NewPostSpecSampleQty = Sum(LWIFailedWafers) | ||||
|                             PostSpecRecipes      = Record<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$> | ||||
|                             NumRecipes           = DCount(PostSpecRecipes, @VM) | ||||
|                             If NumRecipes GT 0 then | ||||
|                                 For RecipeIndex = 1 to NumRecipes | ||||
|                                     CurrSpec = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> | ||||
|                                     If ( (CurrSpec EQ '') or (CurrSpec LT NewPostSpecSampleQty) ) then | ||||
|                                         Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> = NewPostSpecSampleQty | ||||
|                                     end | ||||
|                                 Next RecipeIndex | ||||
|                             end | ||||
|                         end | ||||
|                     end | ||||
|                 end | ||||
|                  | ||||
|                  | ||||
|                 // Reset ROTR update flag so that future ROTR requests will re-trigger this routine (via BASE_MFS). | ||||
|                 Record<CLEAN_INSP_ROTR_UPDATE_FLAG$> = False$  | ||||
|                 // Tencor data has been updated. Update the ROTR_ACTION data column in the CLEAN_INSP record. | ||||
|                 // Check if ScanMismatch field has been set by Metrology_Services. If so, then the user attempted to | ||||
|                 // load run data, which containted the wrong recipe name. (i.e. it did not match the spec recipe) | ||||
|                 If (ScanMismatch EQ '') then                       | ||||
|                     RDSKey                  = Record<CLEAN_INSP_RDS_NO$> | ||||
|                     NumScanRecipes          = DCount(ScanRecipes, @VM) | ||||
|                     ROTRAction              = '' | ||||
|                     ROTRActionReason        = '' | ||||
|                     Begin Case | ||||
|                         Case Stage _EQC 'LWI' | ||||
|                             If SpecRecipes NE '' then | ||||
|                                 ReactorBlocked          = False$ ;// Assume false until proven otherwise. | ||||
|                                 // ROTR Reactor/PSN Status Health Check - Uses parameters set within the ROTR Parameters form. | ||||
|                                 // We only need to run this once per CLEAN_INSP record. | ||||
|                                 ROTRStatus              = 'P'   ; // Assume pass until proven otherwise. | ||||
|                                 If ( (ROTREnabled EQ True$) and (ROTRReactorStatus EQ '') ) then | ||||
|                                     ROTRReactorStatus                    = 'W' | ||||
|                                     ROTRReactorStatusReason              = 'ROTR awaiting processing'   | ||||
|                                     // Set ROTR Reactor processing status so that the WRITE_RECORD_POST event will | ||||
|                                     // post an ROTR request to calculate the reactor ROTR health for this run. | ||||
|                                     QA_Services('PostROTRRequest', RDSKey)                                       | ||||
|                                 end | ||||
|                                 // Check each scan recipe. | ||||
|                                 For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex | ||||
|                                     Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then | ||||
|                                         // Get UCL value from SPC for each spec recipe if they have not yet been retrieved.    | ||||
|                                         UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> | ||||
|                                         If (UCL EQ '') or (UCL EQ 0) then | ||||
|                                             // The UCL has not yet been retrieved from SPC or an error could have | ||||
|                                             // occurred when the last attempt to retrieve it, so try to get it now. | ||||
|                                             UCL = QA_Services('PostUCLRequest', RDSKey, ScanRecipeName) | ||||
|                                             If (UCL NE '') and (UCL NE 0) then | ||||
|                                                 Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL | ||||
|                                             end else | ||||
|                                                 ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS' | ||||
|                                                 Error_Services('Add', ErrorMessage) | ||||
|                                             end | ||||
|                                         end                     | ||||
|                                         SpecDefect      = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0') | ||||
|                                         SpecHaze        = Oconv(SpecHazes<0, SpecRecipeIndex>,   'MD2') | ||||
|                                         SpecQty         = SpecQuantities<0, SpecRecipeIndex> | ||||
|                                         ScanDefect      = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0') | ||||
|                                         ScanHaze        = Oconv(ScanHazes<0, ScanRecipeIndex>,   'MD3') | ||||
|                                         ScanSig         = ScanSigs<0, ScanRecipeIndex> | ||||
|                                         FailureScan     = False$ | ||||
|                                         // RDS < UCL (SOD Spec Avg) Check | ||||
|                                         ScanSODPerWafer  = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex> | ||||
|                                         ScanSortPerWafer = Record<CLEAN_INSP_SCAN_SORT_PER_WAFER$, ScanRecipeIndex> | ||||
|                                         WaferCount       = 0 | ||||
|                                         SODAvgSum        = 0 | ||||
|                                         SODAvg           = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3') | ||||
|                                         NumFailedWafers  = 0 | ||||
|                                         For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex | ||||
|                                             WaferSort = ScanSortPerWafer<0, ScanRecipeIndex, WaferIndex> | ||||
|                                             If ( (WaferSOD NE '') or (WaferSort NE '') ) then | ||||
|                                                 // We have SOD data for this wafer so check if it is < SOD Max | ||||
|                                                 If ( (WaferSOD LE SpecDefect) and (WaferSort NE 'FAIL') ) then | ||||
|                                                     WaferCount                  += 1 | ||||
|                                                     SODAvgSum                   += WaferSOD | ||||
|                                                     FailedWafers<0, WaferIndex>  = False$ | ||||
|                                                 end else | ||||
|                                                     NumFailedWafers             += 1 | ||||
|                                                     FailedWafers<0, WaferIndex>  = True$ | ||||
|                                                 end | ||||
|                                             end | ||||
|                                         Next WaferSOD | ||||
|                                         Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers | ||||
|                                         If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then | ||||
|                                             // This is the first time we are recording the scanned SOD average value. Store this | ||||
|                                             // for determining reactor health. (ROTR Status) | ||||
|                                             Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3') | ||||
|                                         end | ||||
|                                         If WaferCount GT 0 and SODAvgSum GT 0 then | ||||
|                                             SODAvg = SODAvgSum / WaferCount | ||||
|                                             // Update scanned SOD average to not include wafers exceeding SOD max | ||||
|                                             // Adjust value to conform to internal storage format | ||||
|                                             ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3') | ||||
|                                             Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg | ||||
|                                         end | ||||
|                                         If (ROTREnabled EQ True$) then                         | ||||
|                                             // ROTR Sign-off Project                                        | ||||
|                                             // We need to check if reactor recently underwent ROTR maintenance. If so, then | ||||
|                                             // we must also check if this RDS is one of the first two runs after maintenance. | ||||
|                                             // If this is the case, then the RDS must undergo a 100% scan.                    | ||||
|                                              | ||||
|                                             MaintScanReq = QA_Services('GetMaintenanceScanStatus', RDSKey) | ||||
|                                             FailScanReq  = (FailScanReq or MaintScanReq or WafersRemoved) | ||||
|                                             // Search for '100' in the recipe name to determine if this is a failure scan. | ||||
|                                             If (WafersRemoved) then | ||||
|                                                 FailureScan = Index(ScanRecipes, '25', 1) | ||||
|                                             end else | ||||
|                                                 FailureScan = (Index(ScanRecipes, '100', 1) or Index(ScanRecipes, '25', 1)) | ||||
|                                             end | ||||
|                                             If FailureScan GT 0 then FailureScan = True$ | ||||
|                                             If (FailScanReq EQ True$) and (FailureScan EQ True$) then | ||||
|                                                 // Fail scan was required and submitted, so turn off all fail scan required flags. | ||||
|                                                 FailScanReq = False$ | ||||
|                                                 NumScans = DCount(ScanRecipes, @VM) | ||||
|                                                 For ScanIndex = 1 to NumScans | ||||
|                                                     FailScanFlags<0, ScanIndex> = False$ | ||||
|                                                 Next ScanIndex | ||||
|                                                 WafersRemoved = False$ | ||||
|                                             end                             | ||||
|                                         end | ||||
|                                         Begin Case | ||||
|                                             Case WafersRemoved | ||||
|                                                 ROTRAction = 'F' | ||||
|                                                 ROTRActionReason = '100% scan required due to aborted run.' | ||||
|                                             Case (FailScanReq EQ True$) and (FailureScan EQ False$) and (ROTREnabled EQ True$) | ||||
|                                                 If (MaintScanReq EQ True$) then | ||||
|                                                     ROTRAction       = 'F' | ||||
|                                                     ROTRActionReason = '100% scan required due to ROTR maint.' | ||||
|                                                 end else | ||||
|                                                     // If ROTR maintenance flag not set, then wafer fail limit must have been met in | ||||
|                                                     // an earlier Tencor run. We must set it here again due to the design of this | ||||
|                                                     // MFS. | ||||
|                                                     ROTRAction       = 'F' | ||||
|                                                     ROTRActionReason = 'Wafer fail limit met - 100% scan required' | ||||
|                                                     FailScanReq      = True$ | ||||
|                                                     FailScanFlags<0, ScanRecipeIndex> = FailScanReq                                      | ||||
|                                                 end | ||||
|                                             Case (ROTRReactorStatus EQ 'W') and (ROTREnabled EQ True$) | ||||
|                                                 // Awaiting ROTR results. Request in queue. This MFS will be triggered | ||||
|                                                 // once the request is processed. | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = ROTRReactorStatusReason | ||||
|                                             Case (ROTRReactorStatus EQ 'F') and (ROTREnabled EQ True$) | ||||
|                                                 // Check this case first as to not miss blocking the reactor if necessary. | ||||
|                                                 // Block load signature on this reactor for future lots until overriden at Load button | ||||
|                                                 // signature click event by supervisor, lead, or engineer. | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = ROTRReactorStatusReason | ||||
|                                                 CIReactorRec = Database_Services('ReadDataRow', 'REACTOR', CIReactor) | ||||
|                                                 CIReactorRec<REACTOR_ROTR_STATUS$> = 'F' | ||||
|                                                 CIReactorRec<REACTOR_ROTR_STATUS_REASON$> = ROTRReactorStatusReason | ||||
|                                                 Database_Services('WriteDataRow','REACTOR',CIReactor,CIReactorRec, True$, False$, True$) | ||||
|                                                 ReactorBlocked = True$ | ||||
|                                             Case (ScanDefect EQ '') OR (ScanHaze EQ '') | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan data is missing.' | ||||
|                                             Case (SigRequired EQ True$) AND (ScanSig EQ '') | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan signature is missing.' | ||||
|                                             Case (ScanDefect GT SpecDefect) or (NumFailedWafers GE ROTRFailLimit) | ||||
|                                                 If (ROTREnabled EQ True$) then | ||||
|                                                     // If a Post Clean is required, then disregard the ROTRFailLimit per Tom Tillery. | ||||
|                                                     CleanReq        = False$ | ||||
|                                                     PSNo            = Xlate('CLEAN_INSP', CleanInspKeyID, 'PS_NO', 'X') | ||||
|                                                     PRSStages = Xlate('PROD_SPEC', PSNo, 'PRS_STAGE_KEY', 'X') | ||||
|                                                     If Index(PRSStages, 'POST', 1) then | ||||
|                                                         CleanReq = Xlate('PRS_STAGE', PSNo:'*POST', 'CLEAN_SIG_REQ', 'X')  | ||||
|                                                     end                                  | ||||
|                                                     If (NumFailedWafers LT ROTRFailLimit) or (CleanReq EQ True$) or (FailureScan EQ True$) then | ||||
|                                                         ROTRAction          = 'F' | ||||
|                                                         ROTRActionReason    = 'SurfScan data out of bounds.' | ||||
|                                                     end else | ||||
|                                                         ROTRAction          = 'F' | ||||
|                                                         ROTRActionReason    = 'Wafer fail limit met - 100% scan required' | ||||
|                                                         FailScanReq         = True$ | ||||
|                                                         FailScanFlags<0, ScanRecipeIndex> = FailScanReq | ||||
|                                                     end | ||||
|                                                 end else | ||||
|                                                     ROTRAction          = 'F' | ||||
|                                                     ROTRActionReason    = 'SurfScan data out of bounds.' | ||||
|                                                 end | ||||
|                                             Case (ScanHaze GT SpecHaze) | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan Haze out of bounds.' | ||||
|                                             Case Otherwise$ | ||||
|                                                 // This scan data is within spec.  | ||||
|                                                 ROTRAction       = 'P' | ||||
|                                                 ROTRActionReason = 'Passed' | ||||
|                                         End Case | ||||
|  | ||||
|                                         // Store this result for final disposition | ||||
|                                         ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction | ||||
|                                         ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason | ||||
|                                     end | ||||
|                                 Next ScanRecipeName | ||||
|                                  | ||||
|                                 FinalROTRAction       = 'P' | ||||
|                                 FinalROTRActionReason = '' | ||||
|                                 // Final disposition | ||||
|                                 // If no scan data or if any scan data has failed, then FinalROTRAction = F. | ||||
|                                 NumScanRecipes = DCount(ScanRecipes, @VM) | ||||
|                                 If NumScanRecipes EQ 0 then | ||||
|                                     FinalROTRAction       = 'F' | ||||
|                                     If WafersRemoved then | ||||
|                                         FinalROTRActionReason = '100% scan required due to aborted run.'  | ||||
|                                     end else | ||||
|                                         FinalROTRActionReason = 'Scan data is missing.' | ||||
|                                     end | ||||
|                                 end else | ||||
|                                     NumFailures = Count(ScanRecipeResults, 'F') | ||||
|                                     Begin Case | ||||
|                                         Case NumFailures EQ 0 | ||||
|                                             // No failures so this is a pass. | ||||
|                                             FinalROTRAction       = 'P' | ||||
|                                             FInalROTRActionReason = '' | ||||
|                                         Case NumFailures EQ 1 | ||||
|                                             // Display the failure reason | ||||
|                                             Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then | ||||
|                                                 FailureReason         = ScanRecipeReasons<0, ScanRecipeIndex> | ||||
|                                                 FinalROTRAction       = 'F' | ||||
|                                                 FinalROTRActionReason = FailureReason | ||||
|                                             end | ||||
|                                         Case NumFailures GT 1 | ||||
|                                             // Inform the user that multiple scans failed | ||||
|                                             FinalROTRAction       = 'F' | ||||
|                                             FinalROTRActionReason = 'Multiple scans failed to meet criteria.' | ||||
|                                     End Case | ||||
|                                 end | ||||
|                                 ROTRAction       = FinalROTRAction | ||||
|                                 ROTRActionReason = FinalROTRActionReason | ||||
|                             end | ||||
|                              | ||||
|                         Case Stage _EQC 'POST' | ||||
|                              | ||||
|                             If SpecRecipes NE '' then | ||||
|                                  | ||||
|                                 // Check each scan recipe. | ||||
|                                 For each ScanRecipeName in ScanRecipes using @VM setting ScanRecipeIndex | ||||
|                                     Locate ScanRecipeName in SpecRecipes using @VM setting SpecRecipeIndex then | ||||
|                                         // Get UCL value from SPC for each spec recipe if they have not yet been retrieved.    | ||||
|                                         UCL = Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> | ||||
|                                         If (UCL EQ '') or (UCL EQ 0) then | ||||
|                                             // The UCL has not yet been retrieved from SPC or an error could have | ||||
|                                             // occurred when the last attempt to retrieve it, so try to get it now. | ||||
|                                             UCL = QA_Services('PostUCLRequest', RDSKey, ScanRecipeName) | ||||
|                                             If (UCL NE '') and (UCL NE 0) then | ||||
|                                                 Record<CLEAN_INSP_SPEC_SUM_OF_DEF_AVG$, SpecRecipeIndex> = UCL | ||||
|                                             end else | ||||
|                                                 ErrorMessage = 'Error retrieving UCL value from QA_Services in CLEAN_INSP_ACTIONS' | ||||
|                                                 Error_Services('Add', ErrorMessage) | ||||
|                                             end | ||||
|                                         end | ||||
|                                         SpecSampleQty    = Record<CLEAN_INSP_SPEC_SS_SAMP_QTY$, SpecRecipeIndex> | ||||
|                                         SpecDefect       = Oconv(SpecDefects<0, SpecRecipeIndex>, 'MD0') | ||||
|                                         SpecHaze         = Oconv(SpecHazes<0, SpecRecipeIndex>,   'MD2') | ||||
|                                         SpecQty          = SpecQuantities<0, SpecRecipeIndex> | ||||
|                                         ScanDefect       = Oconv(ScanDefects<0, ScanRecipeIndex>, 'MD0') | ||||
|                                         ScanHaze         = Oconv(ScanHazes<0, ScanRecipeIndex>,   'MD3') | ||||
|                                         ScanSig          = ScanSigs<0, ScanRecipeIndex> | ||||
|                                         FailureScan      = False$ | ||||
|                                         // RDS < UCL (SOD Spec Avg) Check | ||||
|                                         ScanSODPerWafer  = Record<CLEAN_INSP_SCAN_SOD_PER_WAFER$, ScanRecipeIndex> | ||||
|                                         ScanSortPerWafer = Record<CLEAN_INSP_SCAN_SORT_PER_WAFER$, ScanRecipeIndex> | ||||
|                                         WaferCount       = 0 | ||||
|                                         SODAvgSum        = 0 | ||||
|                                         SODAvg           = OConv(ScanDefectsAvg<0, ScanRecipeIndex>, 'MD3') | ||||
|                                         NumFailedWafers  = 0 | ||||
|                                         For each WaferSOD in ScanSODPerWafer using @SVM setting WaferIndex | ||||
|                                             WaferSort = ScanSortPerWafer<0, ScanRecipeIndex, WaferIndex> | ||||
|                                             If ( (WaferSOD NE '') or (WaferSort NE '') ) then | ||||
|                                                 // We have SOD data for this wafer so check if it is < SOD Max | ||||
|                                                 If ( (WaferSOD LE SpecDefect) and (WaferSort NE 'FAIL') ) then | ||||
|                                                     WaferCount                  += 1 | ||||
|                                                     SODAvgSum                   += WaferSOD | ||||
|                                                     FailedWafers<0, WaferIndex>  = False$ | ||||
|                                                 end else | ||||
|                                                     NumFailedWafers             += 1 | ||||
|                                                     FailedWafers<0, WaferIndex>  = True$ | ||||
|                                                 end | ||||
|                                             end | ||||
|                                         Next WaferSOD | ||||
|                                         Record<CLEAN_INSP_NUM_FAILED_WAFERS$, ScanRecipeIndex> = NumFailedWafers | ||||
|                                         If (OrigRecord<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$, ScanRecipeIndex>) EQ '' then | ||||
|                                             // This is the first time we are recording the scanned SOD average value. Store this | ||||
|                                             // for determining reactor health. (ROTR Status) | ||||
|                                             Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG_FAIL$, ScanRecipeIndex> = IConv(SODAvg, 'MD3') | ||||
|                                         end | ||||
|                                         If WaferCount GT 0 and SODAvgSum GT 0 then | ||||
|                                             SODAvg = SODAvgSum / WaferCount | ||||
|                                             // Update scanned SOD average to not include wafers exceeding SOD max | ||||
|                                             // Adjust value to conform to internal storage format | ||||
|                                             ScanDefectsAvg<0, ScanRecipeIndex> = IConv(SODAvg, 'MD3') | ||||
|                                             Record<CLEAN_INSP_SCAN_SUM_OF_DEF_AVG$> = ScanDefectsAvg | ||||
|                                         end | ||||
|  | ||||
|                                         Begin Case | ||||
|                                             Case (ScanDefect EQ '') OR (ScanHaze EQ '') | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan data is missing.' | ||||
|                                             Case (SigRequired EQ True$) AND (ScanSig EQ '') | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan signature is missing.' | ||||
|                                             Case (ScanDefect GT SpecDefect) or (NumFailedWafers GE ROTRFailLimit) | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan data out of bounds.' | ||||
|                                             Case (ScanHaze GT SpecHaze) | ||||
|                                                 ROTRAction          = 'F' | ||||
|                                                 ROTRActionReason    = 'SurfScan Haze out of bounds.' | ||||
|                                             Case Otherwise$ | ||||
|                                                 // This scan data is within spec.  | ||||
|                                                 ROTRAction       = 'P' | ||||
|                                                 ROTRActionReason = 'Passed' | ||||
|                                         End Case | ||||
|  | ||||
|                                         // Store this result for final disposition | ||||
|                                         ScanRecipeResults<0, ScanRecipeIndex> = ROTRAction | ||||
|                                         ScanRecipeReasons<0, ScanRecipeIndex> = ROTRActionReason | ||||
|                                     end | ||||
|                                 Next ScanRecipeName | ||||
|                                  | ||||
|                                 FinalROTRAction       = 'P' | ||||
|                                 FinalROTRActionReason = '' | ||||
|                                 // Final disposition | ||||
|                                 // If no scan data or if any scan data has failed, then FinalROTRAction = F. | ||||
|                                 NumScanRecipes = DCount(ScanRecipes, @VM) | ||||
|                                 If NumScanRecipes EQ 0 then | ||||
|                                     FinalROTRAction       = 'F' | ||||
|                                     FinalROTRActionReason = 'Scan data is missing.' | ||||
|                                 end else | ||||
|                                      | ||||
|                                     TotalScanWfrCnt = Count(FailedWafers, '0') + Count(FailedWafers, '1') | ||||
|                                      | ||||
|                                     Begin Case | ||||
|                                         Case (SpecSampleQty EQ '') | ||||
|                                             QtyMismatch = 'Error determining sample qty spec' | ||||
|                                         Case (TotalScanWfrCnt LT SpecSampleQty) | ||||
|                                             QtyMismatch = 'Min sample quantity not met.' | ||||
|                                         Case Otherwise$ | ||||
|                                             QtyMismatch                 = '' | ||||
|                                             // Set flag to inform FQA that POST surfscan failure results should be used instead. | ||||
|                                             RDSRec                      = Database_Services('ReadDataRow', 'RDS', RDSNo) | ||||
|                                             RDSRec<RDS_POST_SUPERCEDE$> = True$ | ||||
|                                             Database_Services('WriteDataRow', 'RDS', RDSNo, RDSRec, True$, False$, True$) | ||||
|                                     End Case | ||||
|                                      | ||||
|                                     NumFailures = Count(ScanRecipeResults, 'F') | ||||
|                                     Begin Case | ||||
|                                         Case ( (QtyMismatch NE '') and Not(IsEpiPro) ) | ||||
|                                             FinalROTRAction       = 'F' | ||||
|                                             FInalROTRActionReason = QtyMismatch | ||||
|                                         Case NumFailures EQ 0 | ||||
|                                             // No failures so this is a pass. | ||||
|                                             FinalROTRAction       = 'P' | ||||
|                                             FInalROTRActionReason = '' | ||||
|                                         Case NumFailures EQ 1 | ||||
|                                             // Display the failure reason | ||||
|                                             Locate 'F' in ScanRecipeResults using @VM setting ScanRecipeIndex then | ||||
|                                                 FailureReason         = ScanRecipeReasons<0, ScanRecipeIndex> | ||||
|                                                 FinalROTRAction       = 'F' | ||||
|                                                 FinalROTRActionReason = FailureReason | ||||
|                                             end | ||||
|                                         Case NumFailures GT 1 | ||||
|                                             // Inform the user that multiple scans failed | ||||
|                                             FinalROTRAction       = 'F' | ||||
|                                             FinalROTRActionReason = 'Multiple scans failed to meet criteria.' | ||||
|                                     End Case | ||||
|                                 end | ||||
|                                 ROTRAction       = FinalROTRAction | ||||
|                                 ROTRActionReason = FinalROTRActionReason | ||||
|                             end | ||||
|                                  | ||||
|                         End Case | ||||
|                 end else | ||||
|                     // Recipe mismatch field set. Set ROTR to failed and inform user. | ||||
|                     ROTRAction          = 'F' | ||||
|                     ROTRActionReason    = ScanMismatch:' does not match spec.' | ||||
|                 end | ||||
|                 If ROTRAction EQ 'P' then | ||||
|                     // Clear any previously set failure reasons or failure scan flags. | ||||
|                     ROTRActionReason = '' | ||||
|                     NumScans = DCount(ScanRecipes, @VM) | ||||
|                     For ScanIndex = 1 to NumScans | ||||
|                         FailScanFlags<0, ScanIndex> = False$ | ||||
|                     Next ScanIndex | ||||
|                     Record<CLEAN_INSP_WAFERS_REMOVED$> = False$ | ||||
|                 end | ||||
|                 Record<CLEAN_INSP_ROTR_ACTION$>        = ROTRAction | ||||
|                 Record<CLEAN_INSP_ROTR_ACTION_REASON$> = ROTRActionReason | ||||
|                 Record<CLEAN_INSP_FAIL_SCAN_REQ$>      = FailScanFlags | ||||
|                 Record<CLEAN_INSP_SCAN_RESULT$>        = ScanRecipeResults                       | ||||
|                 Record<CLEAN_INSP_SCAN_RESULT_REASON$> = ScanRecipeReasons | ||||
|                 Record<CLEAN_INSP_FAILED_WAFERS$>      = FailedWafers | ||||
|                  | ||||
|                 SaveRecord                             = Record | ||||
|                 Server                                 = Environment_Services('GetServer') | ||||
|                 If (Server NE 'MESSA005') AND (Server NE 'MESSA01EC') then | ||||
|                     // The metrology data was updated by an end user on a workstation. Add this information to a special log | ||||
|                     // for Balan. | ||||
|                     Post_Metrology_Manual_Data_Entry_Log(@USER4,'Tencor',Record<CLEAN_INSP_RDS_NO$>:' / ':CleanInspKeyID) | ||||
|                 end     | ||||
|             end          | ||||
|         end         | ||||
|     end | ||||
|      | ||||
| return | ||||
|  | ||||
| WRITE_RECORD: | ||||
|      | ||||
|     WONo      = Record<CLEAN_INSP_WO_NO$> | ||||
|     ReactType = Xlate('WO_LOG', WONo, 'REACT_TYPE', 'X') | ||||
|     EpiPro    = (ReactType EQ 'EPP') | ||||
|     GaN       = (ReactType EQ 'GAN') | ||||
|     NonEpiPro = ( (ReactType NE 'EPP') and (ReactType NE 'GAN') ) | ||||
|     Stage     = Record<CLEAN_INSP_STAGE$> | ||||
|  | ||||
|     If Stage EQ 'LWI' then | ||||
|         RDSNo     = Record<CLEAN_INSP_RDS_NO$> | ||||
|         PostCIKey = Xlate('RDS', RDSNo, 'POST_CI_NO', 'X') | ||||
|         If PostCIKey NE '' then | ||||
|             FailedWafers         = Record<CLEAN_INSP_FAILED_WAFERS$> | ||||
|             If FailedWafers NE '' then  | ||||
|                 NewPostSpecSampleQty = Sum(FailedWafers) | ||||
|                 PostCIRec            = Database_Services('ReadDataRow', 'CLEAN_INSP', PostCIKey) | ||||
|                 PostSpecRecipes      = PostCIRec<CLEAN_INSP_SPEC_SURFSCAN_RECIPE$> | ||||
|                 NumRecipes           = DCount(PostSpecRecipes, @VM) | ||||
|                 If NumRecipes GT 0 then | ||||
|                     For RecipeIndex = 1 to NumRecipes | ||||
|                         CurrSpec = PostCIRec<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> | ||||
|                         If ( (CurrSpec EQ '') or (CurrSpec LT NewPostSpecSampleQty) ) then | ||||
|                             PostCIRec<CLEAN_INSP_SPEC_SS_SAMP_QTY$, RecipeIndex> = NewPostSpecSampleQty | ||||
|                         end | ||||
|                     Next RecipeIndex | ||||
|                     Database_Services('WriteDataRow', 'CLEAN_INSP', PostCIKey, PostCIRec, True$, False$, True$) | ||||
|                 end | ||||
|             end | ||||
|         end | ||||
|     end | ||||
|      | ||||
|     If NonEpiPro then | ||||
|         // Sync up Insp, Clean, and SurfScan signatures with WO_MAT signature profile | ||||
|         Stage           = {STAGE} | ||||
|          | ||||
|         WOMatKey     = {WO_MAT_KEY} | ||||
|         // Update failed wafer list | ||||
|         QA_Services('UpdateFailedWafers', WOMatKey) | ||||
|         WOMatRec     = Database_Services('ReadDataRow', 'WO_MAT', WOMatKey) | ||||
|         WOMatSigProf = WOMatRec<WO_MAT_SIG_PROFILE$> | ||||
|         WOMatSigs    = WOMatRec<WO_MAT_SIGNATURE$> | ||||
|         WOMatSigDTMs = WOMatRec<WO_MAT_SIG_DTM$> | ||||
|          | ||||
|         OrigInspSig     = OrigRecord<CLEAN_INSP_INSP_SIG$> | ||||
|         OrigInspSigDTM  = OrigRecord<CLEAN_INSP_INSP_SIG_DTM$> | ||||
|         InspSig         = Record<CLEAN_INSP_INSP_SIG$> | ||||
|         InspSigDTM      = Record<CLEAN_INSP_INSP_SIG_DTM$> | ||||
|          | ||||
|         OrigCleanSig    = OrigRecord<CLEAN_INSP_CLEAN_SIG$> | ||||
|         OrigCleanSigDTM = OrigRecord<CLEAN_INSP_CLEAN_SIG_DTM$> | ||||
|         CleanSig        = Record<CLEAN_INSP_CLEAN_SIG$> | ||||
|         CleanSigDTM     = Record<CLEAN_INSP_CLEAN_SIG_DTM$> | ||||
|          | ||||
|         OrigScanSig     = OrigRecord<CLEAN_INSP_SCAN_SIG$> | ||||
|         OrigScanSigDTM  = OrigRecord<CLEAN_INSP_SCAN_SIG_DTM$> | ||||
|         ScanSig         = Record<CLEAN_INSP_SCAN_SIG$> | ||||
|         ScanSigDTM      = Record<CLEAN_INSP_SCAN_SIG_DTM$> | ||||
|          | ||||
|         SigProfUpdate   = False$ | ||||
|          | ||||
|          | ||||
|         If ( (OrigInspSig NE InspSig) or (OrigInspSigDTM NE InspSigDTM) ) then | ||||
|             WOMatStage = '1':Stage:'I' | ||||
|             Locate WOMatStage in WOMatSigProf using @VM setting vPos then | ||||
|                 WOMatSigs<0, vPos>    = InspSig | ||||
|                 WOMatSigDTMs<0, vPos> = InspSigDTM | ||||
|                 SigProfUpdate         = True$ | ||||
|             end | ||||
|         end | ||||
|          | ||||
|         If ( (OrigCleanSig NE CleanSig) or (OrigCleanSigDTM NE CleanSigDTM) ) then | ||||
|             WOMatStage = '1':Stage:'C' | ||||
|             Locate WOMatStage in WOMatSigProf using @VM setting vPos then | ||||
|                 WOMatSigs<0, vPos>    = CleanSig | ||||
|                 WOMatSigDTMs<0, vPos> = CleanSigDTM | ||||
|                 SigProfUpdate         = True$ | ||||
|             end | ||||
|         end | ||||
|          | ||||
|         If ( (OrigScanSig NE ScanSig) or (OrigScanSigDTM NE ScanSigDTM) ) then | ||||
|             WOMatStage = '1':Stage:'S' | ||||
|             Locate WOMatStage in WOMatSigProf using @VM setting vPos then | ||||
|                 WOMatSigs<0, vPos>    = ScanSig | ||||
|                 WOMatSigDTMs<0, vPos> = ScanSigDTM | ||||
|                 SigProfUpdate         = True$ | ||||
|             end | ||||
|         end | ||||
|  | ||||
|         If SigProfUpdate then | ||||
|             WOMatRec<WO_MAT_SIGNATURE$> = WOMatSigs | ||||
|             WOMatRec<WO_MAT_SIG_DTM$>   = WOMatSigDTMs | ||||
|             Database_Services('WriteDataRow', 'WO_MAT', WOMatKey, WOMatRec, True$, False$, True$) | ||||
|         end | ||||
|     end | ||||
|      | ||||
| return | ||||
|  | ||||
| DELETE_RECORD_PRE: | ||||
| return | ||||
|  | ||||
| DELETE_RECORD: | ||||
| return | ||||
|  | ||||
|  | ||||
| // ----- Internal Methods ---------------------------------------------------------------------------------------------- | ||||
|  | ||||
| Initialize_System_Variables: | ||||
|     // Save these for restoration later | ||||
|     SaveDict        = @DICT | ||||
|     SaveID          = @ID | ||||
|     SaveRecord      = @RECORD | ||||
|     OrigFileError   = @FILE.ERROR | ||||
|      | ||||
|     // Now make sure @DICT, ID, and @RECORD are populated | ||||
|     CurrentDictName = '' | ||||
|     If @DICT then | ||||
|         DictHandle = @DICT<1, 2> | ||||
|         Locate DictHandle in @TABLES(5) Using @FM Setting fPos then | ||||
|             CurrentDictName = Field(@TABLES(0), @FM, fPos, 1) | ||||
|         end | ||||
|     end | ||||
|      | ||||
|     If CurrentDictName NE DictName then | ||||
|         Open DictName to @DICT else Status = 'Unable to initialize @DICT' | ||||
|     end     | ||||
|      | ||||
|     @ID = KeyID | ||||
|     If Record else | ||||
|         // Record might not have been passed in. Read the record from the database table just to make sure. | ||||
|         @FILE.ERROR     = '' | ||||
|         Open TableName to hTable then | ||||
|             FullFSList  = hTable[1, 'F' : @VM] | ||||
|             BFS         = FullFSList[-1, 'B' : @SVM] | ||||
|             LastHandle  = hTable[-1, 'B' : \0D\] | ||||
|             FileHandle  = \0D\ : LastHandle[1, @VM] | ||||
|              | ||||
|             Call @BFS(READO.RECORD, BFS, FileHandle, KeyID, FMC, Record, ReadOStatus) | ||||
|         end | ||||
|     end | ||||
|     @RECORD = Record | ||||
| return | ||||
|  | ||||
| Restore_System_Variables: | ||||
|     Transfer SaveDict   to @DICT | ||||
|     Transfer SaveID     to @ID | ||||
|     Transfer SaveRecord to @RECORD | ||||
|     @FILE.ERROR = OrigFileError | ||||
| return | ||||
|  | ||||
		Reference in New Issue
	
	Block a user