Common ResourceID and IsViewerFile
Enable process-data-standard-format for HgCV and Tencor
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@ -398,10 +398,10 @@ Service ImportMetrologyFiles(Machine)
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Begin Case
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Case Machine _EQC 'Tencor'
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SearchPattern = '*.txt';
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SearchPattern = '*.pdsf';
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DataPath = Environment_Services('GetApplicationRootPath') : '\Metrology\MET08DDUPSFS6420\Source\MET08DDUPSFS6420\'
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Case Machine _EQC 'HgCV'
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SearchPattern = '*.txt';
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SearchPattern = '*.pdsf';
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DataPath = Environment_Services('GetApplicationRootPath') : '\Metrology\MET08RESIHGCV\Source\MET08RESIHGCV\'
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Case Machine _EQC 'CDE'
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SearchPattern = '*.pdsf';
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@ -647,21 +647,42 @@ Service ImportMetrologyRunData(Machine, DataPath, FileName, RunData)
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// Scan the run data for machine specific information. Then call the relevant update service for the specific
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// machine.
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ResourceID = Field(FileName, ' ', 1, 1)
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IsViewerFile = Index(FileName, 'Viewer', 1)
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Begin Case
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Case Machine _EQC 'Stratus'
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Metrology_Services('ImportStratusData', RunData)
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PSN = RunData<9>
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Metrology_Services('ImportStratusData', RunData, ResourceID, PSN)
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MachineType@ = 'Stratus'
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Case Machine _EQC 'Biorad'
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Metrology_Services('ImportBioRadData', RunData, FileName)
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PSN = RunData<7>
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QualFile = ( (PSN EQ 'T-Low') or (PSN EQ 'T-Mid') or (PSN EQ 'T-High') or (PSN EQ 'T_LOW') or (PSN EQ 'T_MID') or (PSN EQ 'T_HIGH') )
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IF QualFile THEN
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Metrology_Services('ImportBioRadQualData', RunData, ResourceID, PSN)
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END ELSE
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Metrology_Services('ImportBioRadData', RunData, ResourceID, IsViewerFile, PSN, FileName)
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END
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MachineType@ = 'Bio-Rad'
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Case Machine _EQC 'CDE'
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Metrology_Services('ImportCDEData', RunData, FileName)
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PSN = RunData<8>
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QualFile = ( (PSN EQ 'RLOW_STD') or (PSN EQ 'RMID_STD') or (PSN EQ 'RHI_STD') or (PSN EQ 'THINSPC') )
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IF QualFile THEN
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Metrology_Services('ImportCDEQualData', RunData, ResourceID, PSN)
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END ELSE
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Metrology_Services('ImportCDEData', RunData, ResourceID, IsViewerFile, PSN)
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END
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MachineType@ = 'CDE'
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Case Machine _EQC 'HgCV'
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Metrology_Services('ImportHgCVData', RunData, FileName)
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PSN = RunData<5>
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QualFile = ( (PSN EQ 'Low') or (PSN EQ 'Mid') or (PSN EQ 'High') or (PSN EQ 'Thin') )
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IF QualFile THEN
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Metrology_Services('ImportHgCVQualData', RunData, ResourceID, PSN)
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END ELSE
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Metrology_Services('ImportHgCVData', RunData, ResourceID, IsViewerFile, PSN)
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END
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MachineType@ = 'HgProbe'
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Case Machine _EQC 'SP1'
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@ -692,7 +713,7 @@ Service ImportMetrologyRunData(Machine, DataPath, FileName, RunData)
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end service
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Service ImportStratusData(RunData)
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Service ImportStratusData(RunData, ResourceID, PSN)
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Machine = 'Stratus'
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ParseArray = ''
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@ -707,7 +728,6 @@ Service ImportStratusData(RunData)
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Recipe = RunData<6>
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Reactor = RunData<7>
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RDSNo = RunData<8> ; // If Non-EpiPro this will be an RDS Key, otherwise it will be a work order key.
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PSN = RunData<9>
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BatchID = RunData<10>
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Cassette = RunData<11>
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ThickAvg = RunData<12>
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@ -866,18 +886,9 @@ Service ImportStratusData(RunData)
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end service
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Service ImportBioRadData(RunData, FileName)
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Service ImportBioRadQualData(RunData, ResourceID, PSN)
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Machine = 'BioRad'
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IsProdTest = False$
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ParseArray = ''
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FieldPos = 13
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FieldPosIncrement = 2
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Offset = 1
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Decimals = 2
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PSN = RunData<7>
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QualFile = ( (PSN EQ 'T-Low') or (PSN EQ 'T-Mid') or (PSN EQ 'T-High') or (PSN EQ 'T_LOW') or (PSN EQ 'T_MID') or (PSN EQ 'T_HIGH') )
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If QualFile then
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ResourceID = Field(FileName, ' ', 1, 1)
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URL = "https://oi-metrology-viewer-prod.mes.infineon.com/api/InfinityQSV3/":ResourceID:"/header"
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TimeoutDuration = HTTPClient_Services('GetTimeoutDuration')
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If TimeoutDuration NE 30 then Httpclient_Services('SetTimeoutDuration', 30)
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@ -908,9 +919,20 @@ Service ImportBioRadData(RunData, FileName)
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end else
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Metrology_Services('LogResults', PSN, Machine, 'UID002', Service : ' : ' : 'Null response from IQS API.')
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end
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end else
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end service
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Service ImportBioRadData(RunData, ResourceID, IsViewerFile, PSN, FileName)
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Machine = 'BioRad'
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IsProdTest = False$
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ParseArray = ''
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FieldPos = 13
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FieldPosIncrement = 2
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Offset = 1
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Decimals = 2
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// RDS Biorad metrology file
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IsViewerFile = Index(FileName, 'Viewer', 1)
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Timestamp = RunData<2>
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RDSKeyID = RunData<6>
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RunDataLayer = RunData<8>
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@ -1226,28 +1248,13 @@ Service ImportBioRadData(RunData, FileName)
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Metrology_Services('LogResults', RDSKeyID, Machine, 'UID001', Service : ' : ' : Error_Services('GetMessage'))
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end
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end
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end
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end service
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Service ImportCDEData(RunData, FileName)
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Service ImportCDEQualData(RunData, ResourceID, PSN)
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Machine = 'CDE'
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ParseArray = ''
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FieldPos = 23
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FieldPosIncrement = 5
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Offset = 3
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Decimals = 3
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Timestamp = RunData<3>
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RDSKeyID = RunData<7>
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RunDataLayer = RunData<9>
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RunDataZone = RunData<10>
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ReactorID = RunData<6>
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ScanRecipe = RunData<5>
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PSN = RunData<8>
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QualFile = ( (PSN EQ 'RLOW_STD') or (PSN EQ 'RMID_STD') or (PSN EQ 'RHI_STD') or (PSN EQ 'THINSPC') )
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If QualFile then
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ResourceID = Field(FileName, ' ', 1, 1)
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URL = "https://oi-metrology-viewer-prod.mes.infineon.com/api/InfinityQSV3/":ResourceID:"/header"
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TimeoutDuration = HTTPClient_Services('GetTimeoutDuration')
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@ -1276,9 +1283,24 @@ Service ImportCDEData(RunData, FileName)
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Metrology_Services('LogResults', PSN, Machine, 'UID002', Service : ' : ' : 'Null response from IQS API.')
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end
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end else
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end service
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Service ImportCDEData(RunData, ResourceID, IsViewerFile, PSN)
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Machine = 'CDE'
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ParseArray = ''
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FieldPos = 23
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FieldPosIncrement = 5
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Offset = 3
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Decimals = 3
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Timestamp = RunData<3>
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RDSKeyID = RunData<7>
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RunDataLayer = RunData<9>
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RunDataZone = RunData<10>
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ReactorID = RunData<6>
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ScanRecipe = RunData<5>
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// Regular metrology file
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IsViewerFile = Index(FileName, 'Viewer', 1)
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ToolClassID = '4PP'
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PatternNameIndex = RDS_TEST_SPEC_RES_MPATTERN$
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ToolClassIndex = RDS_TEST_SPEC_RES_MTOOL$
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@ -1473,27 +1495,13 @@ Service ImportCDEData(RunData, FileName)
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end else
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Metrology_Services('LogResults', RDSKeyID, Machine, 'UID001', Service : ' : ' : Error_Services('GetMessage'))
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end
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end
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end service
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Service ImportHgCVData(RunData, FileName)
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Service ImportHgCVQualData(RunData, ResourceID, PSN)
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Machine = 'HgCV' /* Resistivity */
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FieldPos = 53
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FieldPosIncrement = 9
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Offset = 5
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PhaseOffset = 7
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Decimals = 3
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Timestamp = RunData<11>
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RDSKeyID = RunData<4>
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LayerZonePair = RunData<8>
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ReactorID = RunData<3>
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PSN = RunData<5>
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QualFile = ( (PSN EQ 'Low') or (PSN EQ 'Mid') or (PSN EQ 'High') or (PSN EQ 'Thin') )
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If QualFile then
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ResourceID = Field(FileName, ' ', 1, 1)
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URL = "https://oi-metrology-viewer-prod.mes.infineon.com/api/InfinityQSV3/":ResourceID:"/header"
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TimeoutDuration = HTTPClient_Services('GetTimeoutDuration')
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If TimeoutDuration NE 30 then Httpclient_Services('SetTimeoutDuration', 30)
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@ -1520,9 +1528,23 @@ Service ImportHgCVData(RunData, FileName)
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end else
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Metrology_Services('LogResults', PSN, Machine, 'UID002', Service : ' : ' : 'Null response from IQS API.')
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end
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end else
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end service
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Service ImportHgCVData(RunData, ResourceID, IsViewerFile, PSN)
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Machine = 'HgCV' /* Resistivity */
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FieldPos = 53
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FieldPosIncrement = 9
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Offset = 5
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PhaseOffset = 7
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Decimals = 3
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Timestamp = RunData<11>
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RDSKeyID = RunData<4>
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LayerZonePair = RunData<8>
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ReactorID = RunData<3>
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// Regular metrology file
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IsViewerFile = Index(FileName, 'Viewer', 1)
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ToolClassID = 'HGCV'
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PatternNameIndex = RDS_TEST_SPEC_RES_MPATTERN$
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ToolClassIndex = RDS_TEST_SPEC_RES_MTOOL$
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@ -1816,7 +1838,6 @@ Service ImportHgCVData(RunData, FileName)
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end else
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Metrology_Services('LogResults', RDSKeyID, Machine, 'UID001', Service : ' : ' : Error_Services('GetMessage'))
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end
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end
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end service
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