Merged PR 17280: Add backside parameters for virgin wafers.
This commit is contained in:
Mitchem Dakota (CSC FI SPS MESLEO External)
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f4c1a42812
commit
ab55269f87
@ -22,6 +22,7 @@ $INSERT TOOL_CLASS_EQUATES
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$INSERT SECURITY_RIGHTS_EQU
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$INSERT RTI_STYLE_EQUATES
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$INSERT PROD_SPEC_EQUATES
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$Insert PRS_STAGE_DEFECT_DEFAULTS_EQUATES
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EQU CRLF$ TO \0D0A\
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@ -54,6 +55,11 @@ EQU COL$SPOTS TO 8
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EQU COL$FOV TO 9
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EQU COL$BL_DEFECTS TO 10
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EQU COL$BACK_SCRATCHES TO 1
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EQU COL$BACK_SCRATCH_LEN TO 2
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EQU COL$BACK_NODULES TO 3
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EQU COL$BACK_SPIKES TO 4
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EQU COL$MET_TEST TO 1
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EQU COL$MET_PROP TO 2
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@ -511,67 +517,29 @@ SurfscanDefaults:
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Stage = Get_Property(@WINDOW:'.STAGE','DEFPROP')
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IF Stage = 'FWI' OR Stage = 'LWI' THEN Stage = 'WFR'
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BEGIN CASE
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CASE Stage = 'PRE' AND EntID = @WINDOW:'.VIRGIN_DEFAULTS'
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Vals = ''
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Vals<COL$LPD> = '10'
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Vals<COL$SCRATCHES> = '1'
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Vals<COL$SCRATCH_LEN> = '1'
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Vals<COL$PITS> = '1'
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Vals<COL$MOUNDS> = '1'
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Vals<COL$STACK_FAULTS> = ''
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Vals<COL$SPIKES> = ''
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Vals<COL$SPOTS> = '1'
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Vals<COL$FOV> = '1'
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Vals<COL$BL_DEFECTS > = '1'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'PRE-VIRGIN', '', 'X')
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CheckVals = '0':@RM:'1'
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CASE Stage = 'PRE' AND EntID = @WINDOW:'.BL_DEFAULTS'
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Vals = ''
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Vals<COL$LPD> = '10'
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Vals<COL$SCRATCHES> = '1'
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Vals<COL$SCRATCH_LEN> = '1'
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Vals<COL$PITS> = '10'
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Vals<COL$MOUNDS> = '10'
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Vals<COL$STACK_FAULTS> = ''
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Vals<COL$SPIKES> = ''
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Vals<COL$SPOTS> = '5'
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Vals<COL$FOV> = '2'
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Vals<COL$BL_DEFECTS > = '10'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'PRE-BURIED', '', 'X')
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CheckVals = '1':@RM:'1'
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CASE Stage = 'WFR' AND EntID = @WINDOW:'.VIRGIN_DEFAULTS'
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Vals = ''
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Vals<COL$LPD> = '20'
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Vals<COL$SCRATCHES> = '1'
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Vals<COL$SCRATCH_LEN> = '1'
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Vals<COL$PITS> = '1'
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Vals<COL$MOUNDS> = '1'
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Vals<COL$STACK_FAULTS> = '10'
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Vals<COL$SPIKES> = '5'
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Vals<COL$SPOTS> = '1'
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Vals<COL$FOV> = '1'
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Vals<COL$BL_DEFECTS > = '1'
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CASE Stage = 'FWI' AND EntID = @WINDOW:'.VIRGIN_DEFAULTS'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'FWI-VIRGIN', '', 'X')
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CheckVals = '1':@RM:'1'
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CASE Stage = 'WFR' AND EntID = @WINDOW:'.BL_DEFAULTS'
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Vals = ''
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Vals<COL$LPD> = '20'
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Vals<COL$SCRATCHES> = '1'
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Vals<COL$SCRATCH_LEN> = '10'
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Vals<COL$PITS> = '20'
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Vals<COL$MOUNDS> = '20'
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Vals<COL$STACK_FAULTS> = '20'
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Vals<COL$SPIKES> = '5'
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Vals<COL$SPOTS> = '1'
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Vals<COL$FOV> = '1'
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Vals<COL$BL_DEFECTS > = '20'
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CASE Stage = 'FWI' AND EntID = @WINDOW:'.BL_DEFAULTS'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'FWI-BURIED', '', 'X')
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CheckVals = '1':@RM:'1'
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CASE Stage = 'LWI' AND EntID = @WINDOW:'.VIRGIN_DEFAULTS'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'LWI-VIRGIN', '', 'X')
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CheckVals = '1':@RM:'1'
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CASE Stage = 'LWI' AND EntID = @WINDOW:'.BL_DEFAULTS'
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DefValRec = Xlate('PRS_STAGE_DEFECT_DEFAULTS', 'LWI-BURIED', '', 'X')
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CheckVals = '1':@RM:'1'
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CASE 1
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@ -579,6 +547,23 @@ BEGIN CASE
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END CASE
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Vals = ''
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Vals<COL$LPD> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_LPD$>
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Vals<COL$SCRATCHES> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_SCRATCHES$>
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Vals<COL$SCRATCH_LEN> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_SCRATCH_LEN$>
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Vals<COL$PITS> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_PITS$>
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Vals<COL$MOUNDS> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_MOUNDS$>
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Vals<COL$STACK_FAULTS> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_STACK_FAULTS$>
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Vals<COL$SPIKES> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_SPIKES$>
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Vals<COL$SPOTS> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_SPOTS$>
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Vals<COL$FOV> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_FOV$>
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Vals<COL$BL_DEFECTS> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_FRONT_BL_DEFECTS$>
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BackVals = ''
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BackVals<COL$BACK_SCRATCHES> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_BACK_SCRATCHES$>
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BackVals<COL$BACK_SCRATCH_LEN> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_BACK_SCRATCH_LEN$>
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BackVals<COL$BACK_NODULES> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_BACK_NODULES$>
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BackVals<COL$BACK_SPIKES> = DefValRec<PRS_STAGE_DEFECT_DEFAULTS_BACK_SPIKES$>
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CurrVals = Get_Property(@WINDOW:'.VISUAL_PARMS','LIST')<1>
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CONVERT @VM TO '' IN CurrVals
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@ -608,6 +593,13 @@ IF Response THEN
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Set_Property(@WINDOW:'.VISUAL_PARMS','LIST',vpList)
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vpList = ''
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FOR I = 1 TO 4
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vpList<1,I> = BackVals<I>
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NEXT I
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Set_Property(@WINDOW:'.BSIDE_PARMS','LIST',vpList)
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END
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RETURN
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@ -1235,3 +1227,5 @@ return
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@ -244,8 +244,10 @@ Event WINDOW.CREATE(CreateParam)
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IF MemberOf(@USER4, 'SPEC_CHANGE') OR MemberOf(@USER4, 'OI_ADMIN') THEN
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Set_Property(@WINDOW:'.MENU.ENGINEERING.TOOL_CLASS_-_RECIPES__PATTERNS','VISIBLE',1)
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Set_Property(@WINDOW:'.MENU.ADM.TOOLS.PRS_STAGE_DEFAULTS','VISIBLE',1)
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END ELSE
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Set_Property(@WINDOW:'.MENU.ENGINEERING.TOOL_CLASS_-_RECIPES__PATTERNS','VISIBLE',0)
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Set_Property(@WINDOW:'.MENU.ADM.TOOLS.PRS_STAGE_DEFAULTS','VISIBLE',0)
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END
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Ctrls = @WINDOW:'.MENU.ADMIN.FABTIME_SUPPORT':@RM ; Props = 'ENABLED':@RM
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@ -850,3 +852,4 @@ FixFont:
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return
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