diff --git a/LSL2/STPROC/METROLOGY_SERVICES.txt b/LSL2/STPROC/METROLOGY_SERVICES.txt index 27e5e7f..f99e9cb 100644 --- a/LSL2/STPROC/METROLOGY_SERVICES.txt +++ b/LSL2/STPROC/METROLOGY_SERVICES.txt @@ -254,6 +254,7 @@ Service GetStratus(Handle) Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Batch'); // BatchID Result<11> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Cassette'); // Cassette Result<12> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].GradeMean'); // ThickAvg + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); END ForOffset = (RecordIndex - 1) * FieldPositionIncrement; Result = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Slot'); // Position @@ -283,6 +284,7 @@ Service GetBioRad(Handle) Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Layer'); // RunDataLayer Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Zone'); // RunDataZone Result<11> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Wafer'); // DataSlotId + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); END ForOffset = (RecordIndex - 1) * FieldPositionIncrement; Result = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Position'); // Position @@ -310,6 +312,7 @@ Service GetCDE(Handle) Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].PSN'); // PSN Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Layer'); // RunDataLayer Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Zone'); // RunDataZo + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); END ForOffset = (RecordIndex - 1) * FieldPositionIncrement; Result = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].InferredPoint'); // Position @@ -338,6 +341,7 @@ Service GetHgCV(Handle) Result<5> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].PSN'); // PSN Result<8> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Wafer'); // LayerZonePair Result<11> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Date'); // Timestamp + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); END ForOffset = (RecordIndex - 1) * FieldPositionIncrement; Result = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Site'); // Position @@ -359,6 +363,7 @@ Service GetTencor(Handle) IF RecordIndex EQ 1 THEN Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Date'); // Timestamp Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].HazeAverageAvg'); // HazeAvg + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); Result<28> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].RDS'); // RDSKeyID Result<30> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].WaferRecipe'); // ScanRecipe Result<39> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].SumOfDefectsAvg'); // SoDAvg @@ -381,6 +386,7 @@ Service GetSP1(Handle) IF RecordIndex EQ 1 THEN Result<9> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Date'); // Timestamp Result<10> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].DcnHazeAvgMean'); // HazeAvg + Result<13> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].IndexOf'); Result<28> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].RDS'); // RDSKeyID Result<30> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].Session'); // ScanRecipe Result<3> = SRP_JSON(Handle, 'GETVALUE', 'Records[':RecordIndex:'].DcnLpdMean'); // SoDAvg