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Set Reactor wafer size based on installed

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susceptor.

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Final changes and re-factor duplicate code.
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Infineon\Mitchem
2025-08-11 11:30:46 -07:00
committed by Stieber Daniel (CSC FI SPS MESLEO)
parent 2eff7c5a37
commit 8a5c1572e7
12 changed files with 21212 additions and 6042 deletions
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84
LSL2/STPROC/REACTOR_SERVICES.txt
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@ -677,12 +677,93 @@ Service ResetWfrMetric(ReactorNo, MetricType = REACTORMETRIC)
end service
//----------------------------------------------------------------------------------------------------------------------
// SetWaferSize
//
// Sets the Reactor's Wafer Size.
//----------------------------------------------------------------------------------------------------------------------
Service SetWaferSize(ReactNo, WaferSize)
ErrMsg = ''
If ReactNo EQ '' then
ErrMsg := 'ReactNo value is missing.'
end
If WaferSize EQ '' then
ErrMsg := 'WaferSize value is missing.'
end
If ErrMsg EQ '' then
If RowExists('REACTOR', ReactNo) then
WaferSizeOptions = Xlate('SYSREPOSPOPUPS', 'LSL2**WAFER_SIZES', 8, 'X')
Swap @VM with @FM in WaferSizeOptions
Swap @SVM with @VM in WaferSizeOptions
WaferSizeOptions = SRP_Array('Rotate', WaferSizeOptions)
WaferSizeOptions = WaferSizeOptions<2>
If Count(WaferSizeOptions, WaferSize) NE 0 then
ReactorRec = Database_Services('ReadDataRow', 'REACTOR', ReactNo)
ReactorRec<REACTOR_SUSC_POCKET_SIZE$> = WaferSize
Database_Services('WriteDataRow', 'REACTOR', ReactNo, ReactorRec, True$, False$, False$)
If Error_Services('HasError') then
ErrMsg := Error_Services('GetMessage')
end
end else
ErrMsg := 'Invalid Wafer Size.'
end
end else
ErrMsg := 'The chosen Reactor No. ': ReactNo: ' does not exist.'
end
end
If ErrMsg NE '' then
Error_Services('Add', ErrMsg)
end
end service
//----------------------------------------------------------------------------------------------------------------------
// SetPocketQty
//
// Sets the Reactor's Wafer Size.
//----------------------------------------------------------------------------------------------------------------------
Service SetPocketQty(ReactNo, PocketQty)
ErrMsg = ''
If ReactNo EQ '' then
ErrMsg := 'ReactNo value is missing.'
end
If PocketQty EQ '' then
ErrMsg := 'PocketQty value is missing.'
end
If ErrMsg EQ '' then
If RowExists('REACTOR', ReactNo) then
PocketQtyOptions = Xlate('SYSREPOSPOPUPS', 'LSL2**SUSCEPTOR_POCKETS', 8, 'X')
Swap @VM with @FM in PocketQtyOptions
Swap @SVM with @VM in PocketQtyOptions
PocketQtyOptions = SRP_Array('Rotate', PocketQtyOptions)
PocketQtyOptions = PocketQtyOptions<1>
If Count(PocketQtyOptions, PocketQty) NE 0 then
ReactorRec = Database_Services('ReadDataRow', 'REACTOR', ReactNo)
ReactorRec<REACTOR_SUSC_POCKET_QTY$> = PocketQty
Database_Services('WriteDataRow', 'REACTOR', ReactNo, ReactorRec, True$, False$, False$)
If Error_Services('HasError') then
ErrMsg := Error_Services('GetMessage')
end
end else
ErrMsg := 'Invalid Pocket Qty..'
end
end else
ErrMsg := 'The chosen Reactor No. ': ReactNo: ' does not exist.'
end
end
If ErrMsg NE '' then
Error_Services('Add', ErrMsg)
end
end service
//----------------------------------------------------------------------------------------------------------------------
// GetReactors
//
// Returns a JSON formatted array of reactor objects. Reactor number 0 will be ommitted. If the MatchType or MatchSize
// arguments are populated, the array will be filterd accordingly.
// arguments are populated, the array will be filtered accordingly.
//----------------------------------------------------------------------------------------------------------------------
Service GetReactors(MatchType, MatchSize)
@ -4431,3 +4512,4 @@ ClearCursors:
return