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Merged PR 11670: Fixed min row limit issue causing cells to be colored incorrectly. Fixed shee...

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Fixed min row limit issue causing cells to be colored incorrectly. Fixed sheet rho units in rds test modules
This commit is contained in:
Stieber Daniel (CSC FI SPS MESLEO) 2025-02-27 00:22:27 +01:00
parent 7b0d78a2d3
commit 87d79edef8
6 changed files with 18 additions and 27 deletions
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2
LSL2/OIWIN/RDS_TEST.json
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@ -2316,7 +2316,7 @@
"<10,41,8>": "40", "<10,41,8>": "40",
"<10,41,9>": "113", "<10,41,9>": "113",
"<10,41,10>": "115", "<10,41,10>": "115",
"<10,41,11>": "0", "<10,41,11>": "17",
"<10,41,12>": "-2", "<10,41,12>": "-2",
"<10,41,13>": "-1", "<10,41,13>": "-1",
"<10,41,14>": "1" "<10,41,14>": "1"

11
LSL2/STPROC/COMM_RDS_TEST.txt
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@ -36,7 +36,7 @@ $INSERT SPC_QUEUE_EQUATES
EQU CRLF$ TO \0D0A\ EQU CRLF$ TO \0D0A\
EQU SHEETRHO_SPEC_UNITS$ TO 'ê/Ü' EQU SHEETRHO_SPEC_UNITS$ TO \EA2FDC\
EQU RES_SPEC_UNITS$ TO \EA2D636D\ EQU RES_SPEC_UNITS$ TO \EA2D636D\
EQU TAB$ TO CHAR(9) EQU TAB$ TO CHAR(9)
@ -446,6 +446,11 @@ IF WaferSize NE '' THEN
END CASE END CASE
Set_Property(@Window:'.TEST_POINTS', 'MINROWLIMIT', 17)
Set_Property(@Window:'.THICK_READINGS', 'MINROWLIMIT', 17)
Set_Property(@Window:'.SHEETRHO_READINGS', 'MINROWLIMIT', 17)
Set_Property(@Window:'.RES_READINGS', 'MINROWLIMIT', 17)
IF FirstValidLine > 1 THEN IF FirstValidLine > 1 THEN
FOR I = 1 TO (FirstValidLine - 1) FOR I = 1 TO (FirstValidLine - 1)
Send_Message(@WINDOW:'.TEST_POINTS','COLOR_BY_POS',1,I,GREY$) Send_Message(@WINDOW:'.TEST_POINTS','COLOR_BY_POS',1,I,GREY$)
@ -2372,7 +2377,3 @@ Set_Property(@WINDOW:'.SPC_DTM','DEFPROP',CurrDTM)
RETURN RETURN

2
LSL2/STPROC/MOVE_RDS_DICT.txt
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@ -14,7 +14,7 @@ $INSERT RECIPE_EQU
$INSERT RECIPE_LAYER_INFO_EQU $INSERT RECIPE_LAYER_INFO_EQU
EQU SHEETRHO_SPEC_UNITS$ TO 'ê/Ü' EQU SHEETRHO_SPEC_UNITS$ TO \EA2FDC\
EQU RES_SPEC_UNITS$ TO \EA2D636D\ EQU RES_SPEC_UNITS$ TO \EA2D636D\

2
LSL2/STPROC/OBJ_RDS2.txt
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@ -49,7 +49,7 @@ $INSERT LOGICAL
$INSERT PRS_LAYER_EQU ;* Used to return obj_Prod_Spec values $INSERT PRS_LAYER_EQU ;* Used to return obj_Prod_Spec values
EQU SHEETRHO_SPEC_UNITS$ TO 'ê/Ü' EQU SHEETRHO_SPEC_UNITS$ TO \EA2FDC\
EQU RES_SPEC_UNITS$ TO \EA2D636D\ EQU RES_SPEC_UNITS$ TO \EA2D636D\
* Equates used with LoadEpi and UnloadEpi (EpiPRO wafers) * Equates used with LoadEpi and UnloadEpi (EpiPRO wafers)

2
LSL2/STPROC/OBJ_RDS_TEST.txt
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@ -51,7 +51,7 @@ EQU UNIT$STRESS TO 'dyne/cm-2' ;* Dyne/Square Centimeter
EQU UNIT$BOW TO CHAR(230):'m' ;* Microns EQU UNIT$BOW TO CHAR(230):'m' ;* Microns
EQU UNIT$TRANS TO CHAR(230):'m' ;* Microns EQU UNIT$TRANS TO CHAR(230):'m' ;* Microns
EQU SHEETRHO_SPEC_UNITS$ TO 'ê/Ü' EQU SHEETRHO_SPEC_UNITS$ TO \EA2FDC\
EQU RES_SPEC_UNITS$ TO \EA2D636D\ EQU RES_SPEC_UNITS$ TO \EA2D636D\
EQU STAT_MAX$ TO 5 EQU STAT_MAX$ TO 5

24
LSL2/STPROC/QA_SERVICES.txt
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@ -1879,13 +1879,13 @@ Service PreEpiSignatureReady(RDSNo, Username, WaferQty, Reactor)
SchedReactors<0, -1> = SchedReactor SchedReactors<0, -1> = SchedReactor
Repeat Repeat
Locate Reactor in SchedReactors using @VM setting vPos else Locate Reactor in SchedReactors using @VM setting vPos else
Swap @VM with ',' in SchedReactors Swap @VM with ',' in SchedReactors
ErrorMessage = 'Assigned reactor, ':Reactor:', does not equal any scheduled reactor(s), ':SchedReactors:'.' ErrorMessage = 'Assigned reactor, ':Reactor:', does not equal any scheduled reactor(s), ':SchedReactors:'.'
Error_Services('Set', ErrorMessage) Error_Services('Set', ErrorMessage)
Response = False$ Response = False$
return return
end end
// Add check for supplement signatures // Add check for supplement signatures
UnacknowledgedSupp = Supplement_Services('UnacknowledgedSupplementCheck', 'RDS', RDSNo, 'VER') UnacknowledgedSupp = Supplement_Services('UnacknowledgedSupplementCheck', 'RDS', RDSNo, 'VER')
@ -3892,13 +3892,3 @@ ClearCursors:
return return