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added remaining LSL2 entities

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Infineon\StieberD
2024-03-25 15:12:53 -07:00
parent 15b25a611c
commit 81e4baccb1
4474 changed files with 99825 additions and 0 deletions
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33
LSL2/STPROCINS/TOOL_PARMS_EQUATES.txt Normal file
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compile insert TOOL_PARMS_EQUATES
/*----------------------------------------
Author : Table Create Insert Routine
Written : 08/31/2018
Description : Insert for Table TOOL_PARMS
----------------------------------------*/
Equ TOOL_PARMS.PSN$ To 0
Equ TOOL_PARMS.REACTOR$ To 0
Equ TOOL_PARMS.DATETIME$ To 0
Equ TOOL_PARMS.LS_ID$ To 1
Equ TOOL_PARMS.DOPANT$ To 2
Equ TOOL_PARMS.EPI_DILUENT$ To 3
Equ TOOL_PARMS.EPI_TIME$ To 4
Equ TOOL_PARMS.DILUENT_ADJ_PARAM$ To 5
Equ TOOL_PARMS.DOPANT_FLOW$ To 6
Equ TOOL_PARMS.HCL_FLOW$ To 7
Equ TOOL_PARMS.BAKE_TIME$ To 8
Equ TOOL_PARMS.EPI_H2_FLOW$ To 9
Equ TOOL_PARMS.TCS_FLOW$ To 10
Equ TOOL_PARMS.DCS_FLOW$ To 11
Equ TOOL_PARMS.AUX1$ To 12
Equ TOOL_PARMS.AUX2$ To 13
Equ TOOL_PARMS.F_OFFSET$ To 14
Equ TOOL_PARMS.S_OFFSET$ To 15
Equ TOOL_PARMS.R_OFFSET$ To 16
Equ TOOL_PARMS.ETCH1$ To 17
Equ TOOL_PARMS.ETCH2$ To 18
Equ TOOL_PARMS.OVERGROW_REQ$ To 19
Equ TOOL_PARMS.ENTRY_USERNAME$ To 20
Equ TOOL_PARMS.SUSC_ETCH$ To 21
Equ TOOL_PARMS.UNLOAD_TEMP$ To 22
Equ TOOL_PARMS.ETCH3$ To 23