added remaining LSL2 entities

LSL2/STPROCINS/RECIPE_PARMS_EQU.txt

@@ -0,0 +1,43 @@
+COMPILE INSERT Recipe_Parms_Equ
+
+* Equates for obj_Recipe return data structure
+
+EQU RP_DEPOSIT_TIME_MIN$ TO 1
+EQU RP_DEPOSIT_TIME_MAX$ TO 2
+EQU RP_DILUENT_FLOW_MIN$ TO 3
+EQU RP_DILUENT_FLOW_MAX$ TO 4
+EQU RP_DOPANT_FLOW_MIN$  TO 5
+EQU RP_DOPANT_FLOW_MAX$  TO 6
+EQU RP_HCL_FLOW_MIN$     TO 7
+EQU RP_HCL_FLOW_MAX$     TO 8
+EQU RP_BAKE_TIME_MIN$    TO 9
+EQU RP_BAKE_TIME_MAX$    TO 10
+EQU RP_H2_FLOW_MIN$      TO 11
+EQU RP_H2_FLOW_MAX$      TO 12
+EQU RP_TCS_FLOW_MIN$     TO 13
+EQU RP_TCS_FLOW_MAX$     TO 14
+EQU RP_DCS_FLOW_MIN$     TO 15
+EQU RP_DCS_FLOW_MAX$     TO 16
+EQU RP_AUX1_FLOW_MIN$    TO 17
+EQU RP_AUX1_FLOW_MAX$    TO 18
+EQU RP_AUX2_FLOW_MIN$    TO 19
+EQU RP_AUX2_FLOW_MAX$    TO 20
+EQU RP_FOFFSET_MIN$      TO 21
+EQU RP_FOFFSET_MAX$      TO 22
+EQU RP_SOFFSET_MIN$      TO 23
+EQU RP_SOFFSET_MAX$      TO 24
+EQU RP_ROFFSET_MIN$      TO 25
+EQU RP_ROFFSET_MAX$      TO 26
+EQU RP_ETCH1_MIN$        TO 27
+EQU RP_ETCH1_MAX$        TO 28
+EQU RP_ETCH2_MIN$        TO 29
+EQU RP_ETCH2_MAX$        TO 30
+EQU RP_DOPANT$           TO 31
+EQU RP_EPI_DILUENT$      TO 32
+EQU RP_SUSC_ETCH_MIN$    TO 33
+EQU RP_SUSC_ETCH_MAX$    TO 34
+EQU RP_UL_TEMP_MIN$      TO 35
+EQU RP_UL_TEMP_MAX$      TO 36
+EQU RP_ETCH3_MIN$        TO 37
+EQU RP_ETCH3_MAX$        TO 38
+