added remaining LSL2 entities
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25
LSL2/STPROCINS/RECIPE_LAYER_INFO_EQU.txt
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25
LSL2/STPROCINS/RECIPE_LAYER_INFO_EQU.txt
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compile insert RECIPE_LAYER_INFO_EQU
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* These are equates for the LAYER_INFO field in the RECIPE table
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* so they are the @vm positions. This is used when there are
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* same reactor layers.
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* each layer is delimited by char(248)
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* RecL stands for RECIPE Layer
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equ RecLEpiDopant$ to 1
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equ RecLEpiDepTimeMin$ to 2
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equ RecLEpiDepTimeMax$ to 3
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equ RecLEpiDiluent$ to 4
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equ RecLEpiDopantFlowMin$ to 5
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equ RecLEpiDopantFlowMax$ to 6
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equ RecLEpiFrontOffestMin$ to 7
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equ RecLEpiFrontOffestMax$ to 8
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equ RecLEpiSideOffestMin$ to 9
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equ RecLEpiSideOffestMax$ to 10
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equ RecLEpiRearOffestMin$ to 11
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equ RecLEpiRearOffestMax$ to 12
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equ RecLEpiH2FlowMin$ to 13
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equ RecLEpiH2FlowMax$ to 14
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equ RecLEpiTCSFlowMin$ to 15
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equ RecLEpiTCSFlowMax$ to 16
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