added remaining LSL2 entities
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52
LSL2/STPROCINS/QUOTE_OLD_SPEC_EQU.txt
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52
LSL2/STPROCINS/QUOTE_OLD_SPEC_EQU.txt
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compile insert QUOTE_OLD_SPEC_EQU
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* These are equates for the spec_substrate field in the quote table
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* so they are the @vm positions. This is used when defining spec information
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* for a particular quote
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equ QSSubOrientation$ to 1
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equ QSSubType$ to 2
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equ QSSubWafersize$ to 3
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equ QSSubResistivity$ to 4
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equ QSSubResUnits$ to 5
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equ QSSubDopant$ to 6
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equ QSSubPreClean$ to 7
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equ QSSubBl1Dopant$ to 8
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equ QSSubBl2Dopant$ to 9
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equ QSSubOxide$ to 10
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equ QSSubPostClean$ to 11
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equ QSSubResRadGrad$ to 12
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equ QSSubCarbon$ to 13
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equ QSSubDisDensity$ to 14
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equ QSSubInstructions$ to 15
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equ QSSubOtherSpecs$ to 16
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* now these are the equates for the spec_epi field in the quote table
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* so they are the @vm positions.
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equ QSEpiConcMinThick$ to 1 ;* could have @svm
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equ QSEpiConcMaxThick$ to 2 ;* could have @svm
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equ QSEpiConcUnits$ to 3
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equ QSEpiResMinThick$ to 4
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equ QSEpiResMaxThick$ to 5
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equ QSEpiResUnits$ to 6
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equ QSEpiMinThick$ to 7
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equ QSEpiMaxThick$ to 8
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equ QSEpiThickUnits$ to 9
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equ QSEpiDopant$ to 10
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equ QSEpiRecipe$ to 11
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equ QSEpiRecipeName$ to 12
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* it is these twelve values delimited by char(247) for each seperate
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* reactor layer then char(245) and then as follows as @vm
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equ QSOEpiThickMeasure$ to 1
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equ QSOEpiResMeasure$ to 2
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equ QSOEpiThickTol$ to 3 ;* from 3 - 13 can go
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equ QSOEpiThickWWTol$ to 4
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equ QSOEpiResTol$ to 5
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equ QSOEpiResWWTol$ to 6
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equ QSOEpiDopTrans$ to 7
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equ QSOEpiLpDef$ to 8
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equ QSOEpiSlip$ to 9
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equ QSOEpiStackFaults$ to 10
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equ QSOEpiStress$ to 11
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equ QSOEpiEdgeCrown$ to 12
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equ QSOEpiMContam$ to 13
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