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added remaining LSL2 entities

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Infineon\StieberD
2024-03-25 15:12:53 -07:00
parent 15b25a611c
commit 81e4baccb1
4474 changed files with 99825 additions and 0 deletions
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228
LSL2/POPUP/RUN_STEPS.json Normal file
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{
"header": {
"version": 1,
"type": "record"
},
"body": {
"record1": {
"<1>": "-1",
"<2>": "-1",
"<3>": "-1",
"<4>": "-1",
"<5>": "16777215",
"<6>": {
"<6,1>": {
"<6,1,1>": "Tahoma",
"<6,1,2>": "-11",
"<6,1,3>": "400",
"<6,1,4>": "0",
"<6,1,5>": "0",
"<6,1,6>": "5",
"<6,1,7>": "0",
"<6,1,8>": "39",
"<6,1,9>": "0",
"<6,1,10>": "0",
"<6,1,11>": "0",
"<6,1,12>": "0",
"<6,1,13>": "11",
"<6,1,14>": "2",
"<6,1,15>": "0",
"<6,1,16>": "21"
}
},
"<7>": "",
"<8>": {
"<8,1>": {
"<8,1,1>": "VER",
"<8,1,2>": "Verify",
"<8,1,3>": "ASM/HTR"
},
"<8,2>": {
"<8,2,1>": "PREC",
"<8,2,2>": "PreClean",
"<8,2,3>": "ASM/HTR"
},
"<8,3>": {
"<8,3,1>": "PREI",
"<8,3,2>": "PreInspection",
"<8,3,3>": "ASM/HTR"
},
"<8,4>": {
"<8,4,1>": "PRES",
"<8,4,2>": "PreSurfScan",
"<8,4,3>": "ASM/HTR"
},
"<8,5>": {
"<8,5,1>": "LOAD",
"<8,5,2>": "Reactor Load",
"<8,5,3>": "ASM/HTR"
},
"<8,6>": {
"<8,6,1>": "WFRC",
"<8,6,2>": "First/Last Clean",
"<8,6,3>": "ASM/HTR"
},
"<8,7>": {
"<8,7,1>": "WFRI",
"<8,7,2>": "First/Last Inspection",
"<8,7,3>": "ASM/HTR"
},
"<8,8>": {
"<8,8,1>": "WFRS",
"<8,8,2>": "First/Last SurfScan",
"<8,8,3>": "ASM/HTR"
},
"<8,9>": {
"<8,9,1>": "UNLOAD",
"<8,9,2>": "Reactor Unload",
"<8,9,3>": "ASM/HTR"
},
"<8,10>": {
"<8,10,1>": "PSTC",
"<8,10,2>": "PostClean",
"<8,10,3>": "ASM/HTR"
},
"<8,11>": {
"<8,11,1>": "PSTI",
"<8,11,2>": "Post Inspection",
"<8,11,3>": "ASM/HTR"
},
"<8,12>": {
"<8,12,1>": "PSTS",
"<8,12,2>": "Post SurfScan",
"<8,12,3>": "ASM/HTR"
},
"<8,13>": {
"<8,13,1>": "QA",
"<8,13,2>": "Final QA",
"<8,13,3>": "ASM/HTR"
},
"<8,14>": {
"<8,14,1>": "MI_VER",
"<8,14,2>": "Material In Verify",
"<8,14,3>": "EpiPRO"
},
"<8,15>": {
"<8,15,1>": "MI_PREC",
"<8,15,2>": "Material In PreClean",
"<8,15,3>": "EpiPRO"
},
"<8,16>": {
"<8,16,1>": "MI_PREI",
"<8,16,2>": "Material In PreInspection",
"<8,16,3>": "EpiPRO"
},
"<8,17>": {
"<8,17,1>": "MI_PRES",
"<8,17,2>": "Material In PreSurfScan",
"<8,17,3>": "EpiPRO"
},
"<8,18>": {
"<8,18,1>": "RN_LOAD",
"<8,18,2>": "Reactor Load",
"<8,18,3>": "EpiPRO"
},
"<8,19>": {
"<8,19,1>": "RN_UNLOAD",
"<8,19,2>": "Reactor Unload",
"<8,19,3>": "EpiPRO"
},
"<8,20>": {
"<8,20,1>": "RN_WFRC",
"<8,20,2>": "Reactor First/Last Clean",
"<8,20,3>": "EpiPRO"
},
"<8,21>": {
"<8,21,1>": "RN_WFRI",
"<8,21,2>": "Reactor First/Last Inspection",
"<8,21,3>": "EpiPRO"
},
"<8,22>": {
"<8,22,1>": "RN_WFRS",
"<8,22,2>": "Reactor First/Last SurfScan",
"<8,22,3>": "EpiPRO"
},
"<8,23>": {
"<8,23,1>": "MO_PSTC",
"<8,23,2>": "Material Out PostClean",
"<8,23,3>": "EpiPRO"
},
"<8,24>": {
"<8,24,1>": "MO_PSTI",
"<8,24,2>": "Material Out PostInspection",
"<8,24,3>": "EpiPRO"
},
"<8,25>": {
"<8,25,1>": "MO_PSTS",
"<8,25,2>": "Material Out PostSurfScan",
"<8,25,3>": "EpiPRO"
},
"<8,26>": {
"<8,26,1>": "MO_QA",
"<8,26,2>": "Material Out Final QA",
"<8,26,3>": "EpiPRO"
}
},
"<9>": {
"<9,1>": {
"<9,1,1>": "1",
"<9,1,2>": "10",
"<9,1,3>": "L",
"<9,1,4>": "C",
"<9,1,5>": "",
"<9,1,6>": "Run Step"
},
"<9,2>": {
"<9,2,1>": "2",
"<9,2,2>": "20",
"<9,2,3>": "L",
"<9,2,4>": "C",
"<9,2,5>": "",
"<9,2,6>": "Step Desc"
},
"<9,3>": {
"<9,3,1>": "3",
"<9,3,2>": "10",
"<9,3,3>": "L",
"<9,3,4>": "C",
"<9,3,5>": "",
"<9,3,6>": "React Type"
},
"<9,4>": {
"<9,4,1>": "",
"<9,4,2>": "",
"<9,4,3>": "",
"<9,4,4>": "",
"<9,4,5>": "",
"<9,4,6>": ""
}
},
"<10>": "L",
"<11>": "1",
"<12>": "Run Steps",
"<13>": "1",
"<14>": "F",
"<15>": "1",
"<16>": "1",
"<17>": "1",
"<18>": "1",
"<19>": "1",
"<20>": "1",
"<21>": "1",
"<22>": "0",
"<23>": "0",
"<24>": "0",
"<25>": "0",
"<26>": "",
"<27>": "",
"<28>": "",
"<29>": "0",
"<30>": "1",
"<31>": "0",
"<32>": "0",
"<33>": "1",
"<34>": "16777215",
"<35>": "16777215"
}
}
}