added remaining LSL2 entities
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62
LSL2/APPROW/DICT.SCANS%003AWAFER_COUNT_CONFIRMED.json
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62
LSL2/APPROW/DICT.SCANS%003AWAFER_COUNT_CONFIRMED.json
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{
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"header": {
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"version": 1,
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"type": "record",
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"approw-key": "WAFER_COUNT_CONFIRMED"
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},
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"body": {
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"record1": {
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"<1>": "F",
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"<2>": "15",
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"<3>": "Wafer Count Confirmed",
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"<4>": "S",
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"<5>": "",
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"<6>": "",
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"<7>": "B",
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"<8>": "",
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"<9>": "L",
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"<10>": "3",
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"<11>": "(B)",
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"<12>": "BOOLEAN",
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"<13>": "FRANCOIS_R",
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"<14>": "Boolean flag to indicate that the operator confirmed the number of wafers in the cassette matches the number of wafers indicated in the scheduler.",
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"<15>": "",
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"<16>": "",
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"<17>": "",
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"<18>": "",
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"<19>": "",
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"<20>": "",
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"<21>": "",
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"<22>": "",
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"<23>": "",
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"<24>": "",
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"<25>": "",
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"<26>": "",
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"<27>": "",
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"<28>": "1",
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"<29>": "",
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"<30>": "",
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"<31>": "0",
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"<32>": "",
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"<33>": "",
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"<34>": "0",
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"<35>": "16:34:22 13 SEP 2018",
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"<36>": "",
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"<37>": "0",
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"<38>": "",
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"<39>": "",
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"<40>": "",
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"<41>": "",
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"<42>": "",
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"<43>": "",
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"<44>": "",
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"<45>": "",
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"<46>": "",
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"<47>": "",
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"<48>": "",
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"<49>": "",
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"<50>": "",
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"<51>": "\u0000\u0000\u0000\u0000\u0000\u001a\u0000\u001a\u0000\u0000\u0000ÀCÀ*‹\u000f\u0000cc\u001e@ÀC)¸\u0000\u0000\u0000\u0000\u0000K\u0000Q\u0000\u0000\u0000ÀCÀ*‹\u000f\u0000cc\u001e@ÀÃfQH!\u0000J?\u0000ÀCÀC€\u0001n@ÀÃdQH3\u0000J;\u0000ÀCÀC€\u0003n@ÀC)¸JG\u0000C€\u0007n@ÀC)¸\u0001B\u0003L#3\u0000\u0000\u0000\u0000\u00002\u00008\u0000\u0000\u0000ÀÃgQG%\u0000ÀCÀC€\u0003€\u0001,\u0007ã\u0003cQG%\u0000tÀ*§‹\u000f\u0000ccÀC\u001b@t\u0001B\u0003(B)"
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}
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}
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}
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