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getting repo caught up

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Infineon\StieberD
2024-05-22 14:06:46 -07:00
parent a2cac41a8d
commit 6ea6969f4b
1656 changed files with 2057 additions and 158 deletions
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7
LSL2/STPROC/SVC_DOPANT.txt
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@ -138,13 +138,13 @@ Gas_Types:
// Dopant
Swap "1000 ppm Arsenic" with "AsH3_1000" in Val
Swap "Heavy Dope – Arsine 1000ppm (0.1%)" with "AsH3_1000" in Val
Swap "Heavy Dope – Arsine 1000ppm (0.1%)" with "AsH3_1000" in Val
Swap "1% Boron" with "B2H6_1%" in Val
Swap "Heavy Dope – Diborane 1%" with "B2H6_1%" in Val
Swap "Heavy Dope – Diborane 1%" with "B2H6_1%" in Val
Swap "Phosphorus" with "PH3_50" in Val
Swap "Phosphine 50 ppm" with "PH3_50" in Val
Swap "Boron/Germanium" with "GeH4_10%" in Val
Swap "Heavy Dope – Germane 10%" with "GeH4_10%" in Val
Swap "Heavy Dope – Germane 10%" with "GeH4_10%" in Val
// Source
Swap "Dichlorosilane" with "SiH2Cl2" in Val
Swap "Silane" with "SiH4" in Val
@ -157,3 +157,4 @@ Gas_Types:
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