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Added new metric to track for reactor maintenance. Fixed a bug in DecrementWfrMetrics service.

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Infineon\StieberD 2025-05-27 15:56:42 -07:00 committed by Stieber Daniel (CSC FI SPS MESLEO)
parent 481f083804
commit 6cfb6e521e
5 changed files with 941 additions and 218 deletions
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1000
LSL2/OIWIN/NDW_WAFER_COUNTS.json
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File diff suppressed because it is too large Load Diff

2
LSL2/OIWIN/REACT_SERVS.json
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@ -423,7 +423,7 @@
"<1,31>": "",
"<1,32>": "",
"<1,33>": "",
"<1,34>": "",
"<1,34>": "LSL2*IMAGE*ICO*INFINEON",
"<1,35>": "",
"<1,36>": "",
"<1,37>": {

116
LSL2/STPROC/NDW_WAFER_COUNTS_EVENTS.txt
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@ -3,25 +3,27 @@ Compile function NDW_WAFER_COUNTS_EVENTS(CtrlEntId, Event, @PARAMS)
#window NDW_WAFER_COUNTS
Declare function Reactor_Services, Database_Services, Get_Property, Error_Services, Environment_Services
Declare function SRP_Array, Logging_Services
Declare subroutine Set_Property, Logging_Services
Declare subroutine Set_Property, Logging_Services, PlaceDialog
$Insert EVENT_SETUP
$Insert APP_INSERTS
$Insert REACTOR_EQUATES
EQU DATA_ASM_REACT_ID$ to 1
EQU DATA_ASM_SUSC_CNT$ to 2
EQU DATA_ASM_SUSC_THK$ to 3
EQU DATA_ASM_TUBE_CNT$ to 4
EQU DATA_ASM_TUBE_THK$ to 5
EQU DATA_ASM_ARM_CNT$ to 6
EQU DATA_ASM_REACT_ID$ to 1
EQU DATA_ASM_SUSC_CNT$ to 2
EQU DATA_ASM_SUSC_THK$ to 3
EQU DATA_ASM_TUBE_CNT$ to 4
EQU DATA_ASM_TUBE_THK$ to 5
EQU DATA_ASM_ARM_CNT$ to 6
EQU DATA_ASM_EXHAUST_THK$ to 7
EQU DATA_HTR_REACT_ID$ to 1
EQU DATA_HTR_SUSC_CNT$ TO 2
EQU DATA_HTR_SUSC_THK$ TO 3
EQU DATA_HTR_TUBE_CNT$ TO 4
EQU DATA_HTR_TUBE_THK$ TO 5
EQU DATA_HTR_ARM_CNT$ TO 6
EQU DATA_HTR_REACT_ID$ to 1
EQU DATA_HTR_SUSC_CNT$ TO 2
EQU DATA_HTR_SUSC_THK$ TO 3
EQU DATA_HTR_TUBE_CNT$ TO 4
EQU DATA_HTR_TUBE_THK$ TO 5
EQU DATA_HTR_ARM_CNT$ TO 6
EQU DATA_HTR_EXHAUST_THK$ TO 7
EQU DATA_EPP_REACT_ID$ to 1
EQU DATA_EPP_SUSC_CNT$ TO 2
@ -30,6 +32,7 @@ EQU DATA_EPP_BELL_JAR_CNT$ TO 4
EQU DATA_EPP_BELL_JAR_THK$ TO 5
EQU DATA_EPP_LOWER_QUARTZ_CNT$ TO 6
EQU DATA_EPP_LOWER_QUARTZ_THK$ TO 7
EQU DATA_EPP_EXHAUST_THK$ TO 8
ASMDataTable = @Window : '.OLE_DATA_ASM'
HTRDataTable = @Window : '.OLE_DATA_HTR'
@ -49,11 +52,11 @@ If Event EQ 'OLE' then
Transfer Param1 to Event
Transfer Param2 to Param1
Transfer Param3 to Param2
* Transfer Param4 to Param3
* Transfer Param5 to Param4
* Transfer Param6 to Param5
* Transfer Param7 to Param6
* Transfer Param8 to Param7
Transfer Param4 to Param3
Transfer Param5 to Param4
Transfer Param6 to Param5
Transfer Param7 to Param6
Transfer Param8 to Param7
end
GoToEvent Event for CtrlEntId else
@ -67,17 +70,25 @@ Return EventFlow or 1
//-----------------------------------------------------------------------------
Event WINDOW.CREATE(CreateParam)
GoSub SetupOLEControls
GoSub GetReactorMetrics
End Event
Event TABCONTROL_1.CLICK()
Page = Get_Property(@Window : '.TABCONTROL_1', 'VALUE')
Set_Property(@WINDOW,'VPOSITION', Page)
end event
Event PUB_REFRESH_DATA.CLICK()
GoSub GetReactorMetrics
end event
//-----------------------------------------------------------------------------
@ -85,6 +96,7 @@ end event
//-----------------------------------------------------------------------------
GetReactorMetrics:
ReactorRec = ''
ASMData = ''
HTRData = ''
@ -105,12 +117,13 @@ GetReactorMetrics:
for each Reactor in ASMList using @FM setting rPos
MetricData = Reactor_Services('GetWaferCntMetricsByReactorID', Reactor)
if Error_Services('NoError') then
ASMData<rPos, DATA_ASM_REACT_ID$> = MetricData<1, DATA_ASM_REACT_ID$>
ASMData<rPos, DATA_ASM_SUSC_CNT$> = MetricData<1, DATA_ASM_SUSC_CNT$>
ASMData<rPos, DATA_ASM_SUSC_THK$> = MetricData<1, DATA_ASM_SUSC_THK$>
ASMData<rPos, DATA_ASM_TUBE_CNT$> = MetricData<1, DATA_ASM_TUBE_CNT$>
ASMData<rPos, DATA_ASM_TUBE_THK$> = MetricData<1, DATA_ASM_TUBE_THK$>
ASMData<rPos, DATA_ASM_ARM_CNT$> = MetricData<1, DATA_ASM_ARM_CNT$>
ASMData<rPos, DATA_ASM_REACT_ID$> = MetricData<1, DATA_ASM_REACT_ID$>
ASMData<rPos, DATA_ASM_SUSC_CNT$> = MetricData<1, DATA_ASM_SUSC_CNT$>
ASMData<rPos, DATA_ASM_SUSC_THK$> = MetricData<1, DATA_ASM_SUSC_THK$>
ASMData<rPos, DATA_ASM_TUBE_CNT$> = MetricData<1, DATA_ASM_TUBE_CNT$>
ASMData<rPos, DATA_ASM_TUBE_THK$> = MetricData<1, DATA_ASM_TUBE_THK$>
ASMData<rPos, DATA_ASM_ARM_CNT$> = MetricData<1, DATA_ASM_ARM_CNT$>
ASMData<rPos, DATA_ASM_EXHAUST_THK$> = MetricData<1, DATA_ASM_EXHAUST_THK$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -123,12 +136,13 @@ GetReactorMetrics:
for each Reactor in HTRList using @FM setting rPos
MetricData = Reactor_Services('GetWaferCntMetricsByReactorID', Reactor)
if Error_Services('NoError') then
HTRData<rPos, DATA_HTR_REACT_ID$> = MetricData <1, DATA_HTR_REACT_ID$>
HTRData<rPos, DATA_HTR_SUSC_CNT$> = MetricData<1, DATA_HTR_SUSC_CNT$>
HTRData<rPos, DATA_HTR_SUSC_THK$> = MetricData<1, DATA_HTR_SUSC_THK$>
HTRData<rPos, DATA_HTR_TUBE_CNT$> = MetricData<1, DATA_HTR_TUBE_CNT$>
HTRData<rPos, DATA_HTR_TUBE_THK$> = MetricData<1, DATA_HTR_TUBE_THK$>
HTRData<rPos, DATA_HTR_ARM_CNT$> = MetricData<1, DATA_HTR_ARM_CNT$>
HTRData<rPos, DATA_HTR_REACT_ID$> = MetricData <1, DATA_HTR_REACT_ID$>
HTRData<rPos, DATA_HTR_SUSC_CNT$> = MetricData<1, DATA_HTR_SUSC_CNT$>
HTRData<rPos, DATA_HTR_SUSC_THK$> = MetricData<1, DATA_HTR_SUSC_THK$>
HTRData<rPos, DATA_HTR_TUBE_CNT$> = MetricData<1, DATA_HTR_TUBE_CNT$>
HTRData<rPos, DATA_HTR_TUBE_THK$> = MetricData<1, DATA_HTR_TUBE_THK$>
HTRData<rPos, DATA_HTR_ARM_CNT$> = MetricData<1, DATA_HTR_ARM_CNT$>
HTRData<rPos, DATA_HTR_EXHAUST_THK$> = MetricData<1, DATA_HTR_EXHAUST_THK$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -149,6 +163,7 @@ GetReactorMetrics:
EPPData<rPos, DATA_EPP_BELL_JAR_THK$> = MetricData<1, DATA_EPP_BELL_JAR_THK$>
EPPData<rPos, DATA_EPP_LOWER_QUARTZ_CNT$> = MetricData<1, DATA_EPP_LOWER_QUARTZ_CNT$>
EPPData<rPos, DATA_EPP_LOWER_QUARTZ_THK$> = MetricData<1, DATA_EPP_LOWER_QUARTZ_THK$>
EPPData<rPos, DATA_EPP_EXHAUST_THK$> = MetricData<1, DATA_EPP_EXHAUST_THK$>
end else
ErrorMessage = Error_Services('GetMessage')
LogData = LoggingDTM : @FM : ErrorMessage
@ -159,36 +174,55 @@ GetReactorMetrics:
return
SetupOLEControls:
//Set Row Headers to invisible
// Set Row Headers to invisible
Set_Property(ASMDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
Set_Property(HTRDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
Set_Property(EPPDataTable, "OLE.HeaderColumn[1]", '':@FM:False$)
//Set Number of columns for each table
Set_Property(ASMDataTable, "OLE.Dimension", 6);*6 columns for ASM Data Table
Set_Property(HTRDataTable, "OLE.Dimension", 6);*6 columns for HTR Data Table
Set_Property(EPPDataTable, "OLE.Dimension", 7);*7 columns for EPP Data Table
// Set Number of columns for each table
Set_Property(ASMDataTable, "OLE.Dimension", 7);*6 columns for ASM Data Table
Set_Property(HTRDataTable, "OLE.Dimension", 7);*6 columns for HTR Data Table
Set_Property(EPPDataTable, "OLE.Dimension", 8);*7 columns for EPP Data Table
//Set size of columns
// Set size of all columns
ColSizeArray = ''
ColSizeArray<1> = 100
ColSizeArray<1> = 115
Set_Property(ASMDataTable, "OLE.DataColumn[All]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[All]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[All]", ColSizeArray)
// Shrink size of column 1
ColSizeArray<1> = 60
Set_Property(ASMDataTable, "OLE.DataColumn[1]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[1]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[1]", ColSizeArray)
// Set size of all columns
ColSizeArray = ''
ColSizeArray<1> = 125
Set_Property(EPPDataTable, "OLE.DataColumn[6]", ColSizeArray)
// Set autosize last column to true to fill out table width
ColSizeArray<1> = 125
ColSizeArray<4> = True$
Set_Property(ASMDataTable, "OLE.DataColumn[7]", ColSizeArray)
Set_Property(HTRDataTable, "OLE.DataColumn[7]", ColSizeArray)
Set_Property(EPPDataTable, "OLE.DataColumn[8]", ColSizeArray)
//Set ASM Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Wfr. Cnt.':@VM:'Susc. Thk':@VM:'Tube Wfr. Cnt.':@VM:'Tube Wfr. Thk':@VM:'Arm Wfr. Cnt.'
HeaderTitles = 'Reactor#':@VM:'Susc. Wfr. Cnt.':@VM:'Susc. Thk':@VM:'Tube Wfr. Cnt.':@VM:'Tube Wfr. Thk':@VM:'Arm Wfr. Cnt.':@VM:'Exhaust Chamber Thk.'
Set_Property(ASMDataTable, "OLE.TitleList", HeaderTitles)
//Set HTR Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Tube Run Cnt.':@VM:'Tube Thk':@VM:'Arm Wfr. Cnt.'
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Tube Run Cnt.':@VM:'Tube Thk':@VM:'Arm Wfr. Cnt.':@VM:'Exhaust Chamber Thk.'
Set_Property(HTRDataTable, "OLE.TitleList", HeaderTitles)
//Set EPP Table Col. Headers
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Bell Jar Run Cnt.':@VM:'Bell Jar Thk':@VM:'Lower Quartz Run Cnt.':@VM:'Lower Quartz thk.'
HeaderTitles = 'Reactor#':@VM:'Susc. Run Cnt.':@VM:'Susc. Thk':@VM:'Bell Jar Run Cnt.':@VM:'Bell Jar Thk':@VM:'Lower Quartz Run Cnt.':@VM:'Lower Quartz thk.':@VM:'Exhaust Chamber Thk.'
Set_Property(EPPDataTable, "OLE.TitleList", HeaderTitles)
return

40
LSL2/STPROC/REACTOR_SERVICES.txt
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@ -101,7 +101,7 @@ Return Response else ''
// Service Parameter Options
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
Options BOOLEAN = True$, False$
Options REACTORMETRIC = 'TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT'
Options REACTORMETRIC = 'TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT', 'EXHAUST_CHAMBER_THK'
////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
// Services
@ -136,6 +136,7 @@ Service IncrementWfrMetrics(RDSNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -150,6 +151,7 @@ Service IncrementWfrMetrics(RDSNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -161,6 +163,7 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt + 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + TargetThickness
Case ReactorType = 'HTR'
@ -176,6 +179,7 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
Case SusceptorSize = 8
// Round up
@ -192,6 +196,7 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -206,6 +211,7 @@ Service IncrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -229,6 +235,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 4> = ReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$>
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_ARMS_WFR_CNT$>
ResponseData<1, 7> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -236,6 +243,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 4> = 'TubeWaferCount'
ResponseData<2, 5> = 'TubeThickness'
ResponseData<2, 6> = 'ArmsWaferCount'
ResponseData<2, 7> = 'ExhuastChamberThickness'
Case ReactorType EQ 'HTR'
ResponseData<1, 1> = ReactorID
ResponseData<1, 2> = ReactorRec<REACTOR_SUSC_WFR_CNT$>
@ -243,6 +251,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 4> = ReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$>
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_ARMS_WFR_CNT$>
ResponseData<1, 7> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -250,6 +259,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 4> = 'TubeWaferCount'
ResponseData<2, 5> = 'TubeThickness'
ResponseData<2, 6> = 'ArmsWaferCount'
ResponseData<2, 7> = 'ExhuastChamberThickness'
Case ReactorType EQ 'EPP'
ResponseData<1, 1> = ReactorID
ResponseData<1, 2> = ReactorRec<REACTOR_SUSC_WFR_CNT$>
@ -258,6 +268,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<1, 5> = ReactorRec<REACTOR_TUBE_BELL_JAR_THK$>
ResponseData<1, 6> = ReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
ResponseData<1, 7> = ReactorRec<REACTOR_LOWER_QUARTZ_THK$>
ResponseData<1, 8> = ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
//These are the column titles to help us with API Responses
ResponseData<2, 1> = 'ReactorID'
ResponseData<2, 2> = 'SusceptorWaferCount'
@ -266,6 +277,7 @@ Service GetWaferCntMetricsByReactorID(ReactorID)
ResponseData<2, 5> = 'BellJarThickness'
ResponseData<2, 6> = 'LowerQuartzWaferCount'
ResponseData<2, 7> = 'LowerQuartzThickness'
ResponseData<2, 8> = 'ExhuastChamberThickness'
End Case
Response = ResponseData
end else
@ -307,6 +319,7 @@ Service DecrementWfrMetrics(RDSNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -321,6 +334,7 @@ Service DecrementWfrMetrics(RDSNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -332,6 +346,7 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - TargetThickness
Case ReactorType = 'HTR'
@ -342,11 +357,12 @@ Service DecrementWfrMetrics(RDSNo)
ThkAddition = (WaferCount / 5) * TargetThickness
NewReactorRec<REACTOR_TUBE_BELL_JAR_THK$> = CurrTubeBellJarThk - ThkAddition
NewReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$> = CurrTubeBellJarCnt - CntAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk + ThkAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk - ThkAddition
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - CntAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
Case SusceptorSize = 8
// Round up
@ -363,6 +379,7 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -377,6 +394,7 @@ Service DecrementWfrMetrics(RDSNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -410,6 +428,7 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -435,6 +454,7 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt + 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + TargetThickness
Case ReactorType = 'HTR'
@ -450,6 +470,7 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
Case SusceptorSize = 8
// Round up
@ -466,6 +487,7 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -480,6 +502,7 @@ Service IncrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk + ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr + WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt + WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk + ThkAddition
End Case
@ -513,6 +536,7 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
CurrSuscWfrCnt = OldReactorRec<REACTOR_SUSC_WFR_CNT$>
CurrLowerQuartzThk = OldReactorRec<REACTOR_LOWER_QUARTZ_THK$>
CurrLowerQuartzWfr = OldReactorRec<REACTOR_LOWER_QUARTZ_WFR$>
CurrExhaustThk = OldReactorRec<REACTOR_EXHAUST_CHAMBER_THK$>
// Arms are not used for EPP
If ReactorType NE 'EPP' then
@ -527,6 +551,7 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
If CurrSuscWfrCnt = '' then CurrSuscWfrCnt = 0
If CurrLowerQuartzThk = '' then CurrLowerQuartzThk = 0
If CurrLowerQuartzWfr = '' then CurrLowerQuartzWfr = 0
If CurrExhaustThk = '' then CurrExhaustThk = 0
Begin Case
@ -538,6 +563,7 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - 1
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - TargetThickness
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - 1
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - TargetThickness
Case ReactorType = 'HTR'
@ -548,11 +574,12 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
ThkAddition = (WaferCount / 5) * TargetThickness
NewReactorRec<REACTOR_TUBE_BELL_JAR_THK$> = CurrTubeBellJarThk - ThkAddition
NewReactorRec<REACTOR_TUBE_BELL_JAR_WFR_CNT$> = CurrTubeBellJarCnt - CntAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk + ThkAddition
NewReactorRec<REACTOR_SUSC_THK$> = CurrSuscThk - ThkAddition
NewReactorRec<REACTOR_SUSC_WFR_CNT$> = CurrSuscWfrCnt - CntAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
Case SusceptorSize = 8
// Round up
@ -569,6 +596,7 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - CntAddition
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -583,6 +611,7 @@ Service DecrementTestWfrMetrics(TargetThickness, WaferCount, ReactorNo)
NewReactorRec<REACTOR_LOWER_QUARTZ_THK$> = CurrLowerQuartzThk - ThkAddition
NewReactorRec<REACTOR_LOWER_QUARTZ_WFR$> = CurrLowerQuartzWfr - WaferCount
NewReactorRec<REACTOR_ARMS_WFR_CNT$> = CurrArmsWfrCnt - WaferCount
NewReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = CurrExhaustThk - ThkAddition
End Case
@ -596,7 +625,7 @@ end service
// ResetWfrMetric
//
// RDSNo. - [Required]
// MetricType - [Required]('TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT')
// MetricType - [Required]('TUBE_BELL_JAR_THK', 'TUBE_BELL_JAR_WFR_CNT', 'SUSC_THK', 'SUSC_WFR_CNT', 'LOWER_QUARTZ_THK', 'LOWER_QUARTZ_WFR', 'ARMS_WFR_CNT', EXHAUST_CHAMBER_THK)
//
// Reset a specified REACTOR metric to 0.
//
@ -628,6 +657,9 @@ Service ResetWfrMetric(ReactorNo, MetricType = REACTORMETRIC)
Case MetricType = 'ARMS_WFR_CNT'
ReactorRec<REACTOR_ARMS_WFR_CNT$> = 0
Case MetricType = 'EXHAUST_CHAMBER_THK'
ReactorRec<REACTOR_EXHAUST_CHAMBER_THK$> = 0
End Case
Database_Services('WriteDataRow', 'REACTOR', ReactorNo, ReactorRec, 1, 0, 0)

1
LSL2/STPROCINS/REACTOR_EQUATES.txt
View File

@ -83,4 +83,5 @@ Equ REACTOR_HGCV_CHECKLIST_ACTIVE$ To 71
Equ REACTOR_INTRUSIVE_MAINT_CHECKLIST_ACTIVE$ To 72
Equ REACTOR_ABORT_ALARM_CHECKLIST_ACTIVE$ To 73
Equ REACTOR_ABORT_ALARM_COMPLETE$ To 74
Equ REACTOR_EXHAUST_CHAMBER_THK$ To 75