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Merged PR 30734: Removed QA Met Validation of Std Dev if no Std Dev Spec. Exists

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Removed QA Met Validation of Std Dev if no Std Dev Spec. Exists

Related work items: #352919
This commit is contained in:
Ouellette Jonathan (CSC FI SSM MAI MESLEO)
2025-11-12 21:52:21 +00:00
parent 77d2f5f6ab
commit 624c6ce4b6
2 changed files with 7 additions and 14 deletions
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10
LSL2/STPROC/COMM_QA_MET_RESULT.txt
View File

@ -352,7 +352,7 @@ Refresh:
end end
Set_Property(@WINDOW:'.MET_STD_RESULT', 'DEFPROP', StdDev) Set_Property(@WINDOW:'.MET_STD_RESULT', 'DEFPROP', StdDev)
If StdDev GT MetStdMax then If StdDev GT MetStdMax then
Backcolor = RED$ If MetStdMax NE '' then Backcolor = RED$ else Backcolor = GREY$
end else end else
Backcolor = GREEN$ Backcolor = GREEN$
end end
@ -483,7 +483,7 @@ Refresh:
end end
Set_Property(@WINDOW:'.MET_STD_RESULT', 'DEFPROP', StdDev) Set_Property(@WINDOW:'.MET_STD_RESULT', 'DEFPROP', StdDev)
If StdDev GT MetStdMax then If StdDev GT MetStdMax then
Backcolor = RED$ If MetStdMax NE '' then Backcolor = RED$ else Backcolor = GREY$
end else end else
Backcolor = GREEN$ Backcolor = GREEN$
end end
@ -751,8 +751,9 @@ ResultLF:
END END
IF (MetStdResult NE '') THEN IF (MetStdResult NE '') THEN
If (MetStdResult > MetStdMax) then If (MetStdResult > MetStdMax) then
Set_Property(@WINDOW:'.MET_STD_RESULT','BACKCOLOR',RED$) If MetStdMax NE '' then Set_Property(@WINDOW:'.MET_STD_RESULT','BACKCOLOR',RED$) else Set_Property(@WINDOW:'.MET_STD_RESULT','BACKCOLOR', GREY$)
end else end else
Set_Property(@WINDOW:'.MET_STD_RESULT','BACKCOLOR',GREEN$) Set_Property(@WINDOW:'.MET_STD_RESULT','BACKCOLOR',GREEN$)
END END
@ -1133,3 +1134,4 @@ PubSaveClick:
RETURN RETURN

11
LSL2/STPROC/SIGNATURE_SERVICES.txt
View File

@ -2505,16 +2505,6 @@ Service QAMetSigReady(RDSNo, QAStage=QA_STAGES, Slot=SLOTS, WOMatQAKey)
Case ( (MetResult LT MetMin) or (MetResult GT MetMax) ) Case ( (MetResult LT MetMin) or (MetResult GT MetMax) )
ErrorMessage = 'Error in ':Service:' service. Metrology result is out of spec for stage ':QAStage:' slot ':Slot:'.' ErrorMessage = 'Error in ':Service:' service. Metrology result is out of spec for stage ':QAStage:' slot ':Slot:'.'
End Case End Case
// Compare Std Dev Result to Std Dev Max
StdDevResult = WOMatQARec<WO_MAT_QA_STD_RESULT$, vPos>
StdDevMax = WOMatQARec<WO_MAT_QA_STD_MAX$, vPos>
Begin Case
Case StdDevResult EQ ''
// Std Dev data is not always supplied.
Null
Case StdDevResult GT StdDevMax
ErrorMessage = 'Error in ':Service:' service. StdDev exceeds spec for stage ':QAStage:'.'
End Case
If TestProp EQ 'THICK' then If TestProp EQ 'THICK' then
// Ensure makeup wafer thickness values are in spec and that at least one wafer // Ensure makeup wafer thickness values are in spec and that at least one wafer
@ -2933,3 +2923,4 @@ GetMostRecentSig:
return return