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removing HF-Strip step from Oxide Epi Parts per Mark Cousten

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Infineon\StieberD
2025-07-11 16:02:07 -07:00
parent 1d32ec4fbb
commit 5830705c7d
1 changed files with 1 additions and 19 deletions
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20
LSL2/STPROC/PRINT_CONTROL_PLAN.txt
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@ -725,25 +725,6 @@ FOR I = 1 TO StageCnt
InspFreq = StageRec<PRS_STAGE_INSP_INTERVAL$> InspFreq = StageRec<PRS_STAGE_INSP_INTERVAL$>
StageDesc = obj_Popup('CodeDesc','STAGE':@RM:Stage) StageDesc = obj_Popup('CodeDesc','STAGE':@RM:Stage)
IF Stage = 'PRE' THEN
IF EpiPartRec<EPI_PART_SUB_OXIDE$> = 1 THEN
StepNo += 1
colData<StepNo,STEP_STEP$> = StepNo
colData<StepNo,STEP_PSN$> = PSNo
colData<StepNo,STEP_PROCESS_NAME$> = 'HF Strip'
colData<StepNo,STEP_TOOL_TYPE$> = 'HF'
colData<StepNo,STEP_PRODUCT$> = 'SC-1'
colData<StepNo,STEP_RECIPE$> = '20min or Dewet'
colData<StepNo,STEP_SPEC_TOL$> = '-'
colData<StepNo,STEP_EVAL_MEAS$> = 'HF'
colData<StepNo,STEP_SIZE$> = '1 Cass'
colData<StepNo,STEP_FREQ$> = 'All'
colData<StepNo,STEP_CTRL_METHOD$> = 'WI'
colData<StepNo,STEP_REACT_PLAN$> = 'OCAP'
END ;* End of Check for SubOxide Flag
END ;* End of check for PRE stage
IF StageRec NE '' THEN IF StageRec NE '' THEN
IF StageRec<PRS_STAGE_CLEAN_TOOL$> NE '' THEN IF StageRec<PRS_STAGE_CLEAN_TOOL$> NE '' THEN
@ -1091,3 +1072,4 @@ RETURN